CN108663539B - 物理量传感器、电子设备、便携式电子设备及移动体 - Google Patents

物理量传感器、电子设备、便携式电子设备及移动体 Download PDF

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Publication number
CN108663539B
CN108663539B CN201810213123.1A CN201810213123A CN108663539B CN 108663539 B CN108663539 B CN 108663539B CN 201810213123 A CN201810213123 A CN 201810213123A CN 108663539 B CN108663539 B CN 108663539B
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beam portion
physical quantity
quantity sensor
movable body
axis
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CN108663539A (zh
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田中悟
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Seiko Epson Corp
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Seiko Epson Corp
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0018—Structures acting upon the moving or flexible element for transforming energy into mechanical movement or vice versa, i.e. actuators, sensors, generators
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
    • G01D5/24—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/0802—Details
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/02—Sensors
    • B81B2201/0228—Inertial sensors
    • B81B2201/0235—Accelerometers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2203/00—Basic microelectromechanical structures
    • B81B2203/04—Electrodes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
    • G01P2015/0822—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass
    • G01P2015/0825—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass
    • G01P2015/0831—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass the mass being of the paddle type having the pivot axis between the longitudinal ends of the mass, e.g. see-saw configuration
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P2015/0862—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with particular means being integrated into a MEMS accelerometer structure for providing particular additional functionalities to those of a spring mass system
    • G01P2015/0871—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with particular means being integrated into a MEMS accelerometer structure for providing particular additional functionalities to those of a spring mass system using stopper structures for limiting the travel of the seismic mass

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Pressure Sensors (AREA)
  • Micromachines (AREA)
CN201810213123.1A 2017-03-27 2018-03-15 物理量传感器、电子设备、便携式电子设备及移动体 Active CN108663539B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2017061701A JP6911444B2 (ja) 2017-03-27 2017-03-27 物理量センサー、電子機器、および移動体
JP2017-061701 2017-03-27

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CN108663539A CN108663539A (zh) 2018-10-16
CN108663539B true CN108663539B (zh) 2021-12-21

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US (2) US10788510B2 (enExample)
EP (1) EP3382403B1 (enExample)
JP (1) JP6911444B2 (enExample)
CN (1) CN108663539B (enExample)

Families Citing this family (8)

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Publication number Priority date Publication date Assignee Title
JP6930396B2 (ja) 2017-11-28 2021-09-01 セイコーエプソン株式会社 物理量センサー、物理量センサーデバイス、複合センサーデバイス、慣性計測装置、携帯型電子機器および移動体
JP2020118609A (ja) * 2019-01-25 2020-08-06 セイコーエプソン株式会社 慣性センサー、電子機器および移動体
JP2021021676A (ja) * 2019-07-30 2021-02-18 セイコーエプソン株式会社 慣性センサー、電子機器および移動体
JP7383978B2 (ja) * 2019-10-23 2023-11-21 セイコーエプソン株式会社 物理量センサー、電子機器および移動体
JP7419866B2 (ja) * 2020-02-19 2024-01-23 セイコーエプソン株式会社 慣性センサー、電子機器、及び移動体
JP7631700B2 (ja) * 2020-07-31 2025-02-19 セイコーエプソン株式会社 慣性センサー及び慣性計測装置
JP7585712B2 (ja) 2020-10-28 2024-11-19 セイコーエプソン株式会社 物理量センサー、物理量センサーデバイス及び慣性計測装置
JP7694182B2 (ja) * 2021-06-17 2025-06-18 セイコーエプソン株式会社 慣性センサー及び慣性計測装置

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US6230567B1 (en) * 1999-08-03 2001-05-15 The Charles Stark Draper Laboratory, Inc. Low thermal strain flexure support for a micromechanical device
EP2175280A1 (en) * 2008-10-10 2010-04-14 Honeywell International Inc. Mounting system for torsional suspension of a mems device
CN102313820A (zh) * 2010-05-26 2012-01-11 精工爱普生株式会社 元件结构体、惯性传感器以及电子设备
JP2012181030A (ja) * 2011-02-28 2012-09-20 Asahi Kasei Electronics Co Ltd 静電容量型加速度センサ
CN103292830A (zh) * 2012-03-02 2013-09-11 精工爱普生株式会社 物理量传感器和电子设备
CN103713158A (zh) * 2012-10-02 2014-04-09 雅马哈株式会社 加速度传感器
CN103712612A (zh) * 2012-09-28 2014-04-09 意法半导体股份有限公司 加速度和角速度谐振检测集成结构及相关mems传感器设备
CN106290984A (zh) * 2015-06-23 2017-01-04 美国亚德诺半导体公司 具有偏侈补偿的z-轴加速度计
JP2017020886A (ja) * 2015-07-10 2017-01-26 セイコーエプソン株式会社 物理量センサー、物理量センサー装置、電子機器および移動体

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JPH10125935A (ja) * 1996-10-15 1998-05-15 Nippon Motorola Ltd 可動容量構造体の製造方法及び可動容量構造体
DE10000368A1 (de) 2000-01-07 2001-07-12 Bosch Gmbh Robert Mikromechanische Struktur, insbesondere für einen Beschleunigungssensor oder Drehratensensor, und entsprechendes Herstellungsverfahren
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US6935175B2 (en) 2003-11-20 2005-08-30 Honeywell International, Inc. Capacitive pick-off and electrostatic rebalance accelerometer having equalized gas damping
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JP2015072188A (ja) * 2013-10-03 2015-04-16 セイコーエプソン株式会社 物理量検出素子、および物理量検出装置、電子機器、移動体
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US6230567B1 (en) * 1999-08-03 2001-05-15 The Charles Stark Draper Laboratory, Inc. Low thermal strain flexure support for a micromechanical device
EP2175280A1 (en) * 2008-10-10 2010-04-14 Honeywell International Inc. Mounting system for torsional suspension of a mems device
CN102313820A (zh) * 2010-05-26 2012-01-11 精工爱普生株式会社 元件结构体、惯性传感器以及电子设备
JP2012181030A (ja) * 2011-02-28 2012-09-20 Asahi Kasei Electronics Co Ltd 静電容量型加速度センサ
CN103292830A (zh) * 2012-03-02 2013-09-11 精工爱普生株式会社 物理量传感器和电子设备
CN103712612A (zh) * 2012-09-28 2014-04-09 意法半导体股份有限公司 加速度和角速度谐振检测集成结构及相关mems传感器设备
CN103713158A (zh) * 2012-10-02 2014-04-09 雅马哈株式会社 加速度传感器
CN106290984A (zh) * 2015-06-23 2017-01-04 美国亚德诺半导体公司 具有偏侈补偿的z-轴加速度计
JP2017020886A (ja) * 2015-07-10 2017-01-26 セイコーエプソン株式会社 物理量センサー、物理量センサー装置、電子機器および移動体

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Publication number Publication date
US20200393489A1 (en) 2020-12-17
CN108663539A (zh) 2018-10-16
EP3382403A1 (en) 2018-10-03
US10788510B2 (en) 2020-09-29
EP3382403B1 (en) 2019-10-02
JP6911444B2 (ja) 2021-07-28
JP2018163120A (ja) 2018-10-18
US20180275163A1 (en) 2018-09-27
US11181546B2 (en) 2021-11-23

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