JP6878071B2 - 半導体集積回路及び半導体集積回路の診断方法 - Google Patents

半導体集積回路及び半導体集積回路の診断方法 Download PDF

Info

Publication number
JP6878071B2
JP6878071B2 JP2017054930A JP2017054930A JP6878071B2 JP 6878071 B2 JP6878071 B2 JP 6878071B2 JP 2017054930 A JP2017054930 A JP 2017054930A JP 2017054930 A JP2017054930 A JP 2017054930A JP 6878071 B2 JP6878071 B2 JP 6878071B2
Authority
JP
Japan
Prior art keywords
scan
value
flop
retention flip
data string
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2017054930A
Other languages
English (en)
Japanese (ja)
Other versions
JP2018155707A5 (enExample
JP2018155707A (ja
Inventor
智之 前川
智之 前川
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Toshiba Electronic Devices and Storage Corp
Original Assignee
Toshiba Corp
Toshiba Electronic Devices and Storage Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Toshiba Electronic Devices and Storage Corp filed Critical Toshiba Corp
Priority to JP2017054930A priority Critical patent/JP6878071B2/ja
Priority to CN201710710254.6A priority patent/CN108627757A/zh
Priority to EP17188108.9A priority patent/EP3379275A1/en
Priority to US15/691,121 priority patent/US10401430B2/en
Publication of JP2018155707A publication Critical patent/JP2018155707A/ja
Publication of JP2018155707A5 publication Critical patent/JP2018155707A5/ja
Application granted granted Critical
Publication of JP6878071B2 publication Critical patent/JP6878071B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851Testing of integrated circuits [IC]
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28Testing of electronic circuits, e.g. by signal tracer
    • G01R31/317Testing of digital circuits
    • G01R31/3181Functional testing
    • G01R31/3185Reconfiguring for testing, e.g. LSSD, partitioning
    • G01R31/318533Reconfiguring for testing, e.g. LSSD, partitioning using scanning techniques, e.g. LSSD, Boundary Scan, JTAG
    • G01R31/318544Scanning methods, algorithms and patterns
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28Testing of electronic circuits, e.g. by signal tracer
    • G01R31/317Testing of digital circuits
    • G01R31/3181Functional testing
    • G01R31/3185Reconfiguring for testing, e.g. LSSD, partitioning
    • G01R31/318533Reconfiguring for testing, e.g. LSSD, partitioning using scanning techniques, e.g. LSSD, Boundary Scan, JTAG
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28Testing of electronic circuits, e.g. by signal tracer
    • G01R31/317Testing of digital circuits
    • G01R31/31724Test controller, e.g. BIST state machine
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28Testing of electronic circuits, e.g. by signal tracer
    • G01R31/317Testing of digital circuits
    • G01R31/3181Functional testing
    • G01R31/3185Reconfiguring for testing, e.g. LSSD, partitioning
    • G01R31/318533Reconfiguring for testing, e.g. LSSD, partitioning using scanning techniques, e.g. LSSD, Boundary Scan, JTAG
    • G01R31/318536Scan chain arrangements, e.g. connections, test bus, analog signals
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28Testing of electronic circuits, e.g. by signal tracer
    • G01R31/317Testing of digital circuits
    • G01R31/3181Functional testing
    • G01R31/3185Reconfiguring for testing, e.g. LSSD, partitioning
    • G01R31/318533Reconfiguring for testing, e.g. LSSD, partitioning using scanning techniques, e.g. LSSD, Boundary Scan, JTAG
    • G01R31/318566Comparators; Diagnosing the device under test
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28Testing of electronic circuits, e.g. by signal tracer
    • G01R31/317Testing of digital circuits
    • G01R31/3181Functional testing
    • G01R31/3185Reconfiguring for testing, e.g. LSSD, partitioning
    • G01R31/318533Reconfiguring for testing, e.g. LSSD, partitioning using scanning techniques, e.g. LSSD, Boundary Scan, JTAG
    • G01R31/318575Power distribution; Power saving
    • GPHYSICS
    • G06COMPUTING OR CALCULATING; COUNTING
    • G06FELECTRIC DIGITAL DATA PROCESSING
    • G06F11/00Error detection; Error correction; Monitoring
    • G06F11/22Detection or location of defective computer hardware by testing during standby operation or during idle time, e.g. start-up testing
    • G06F11/26Functional testing
    • G06F11/267Reconfiguring circuits for testing, e.g. LSSD, partitioning

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Theoretical Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Power Engineering (AREA)
  • Quality & Reliability (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Tests Of Electronic Circuits (AREA)
  • Semiconductor Integrated Circuits (AREA)
JP2017054930A 2017-03-21 2017-03-21 半導体集積回路及び半導体集積回路の診断方法 Active JP6878071B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2017054930A JP6878071B2 (ja) 2017-03-21 2017-03-21 半導体集積回路及び半導体集積回路の診断方法
CN201710710254.6A CN108627757A (zh) 2017-03-21 2017-08-18 半导体集成电路以及半导体集成电路的诊断方法
EP17188108.9A EP3379275A1 (en) 2017-03-21 2017-08-28 Semiconductor integrated circuit and semiconductor integrated circuit diagnosis method
US15/691,121 US10401430B2 (en) 2017-03-21 2017-08-30 Semiconductor integrated circuit and semiconductor integrated circuit diagnosis method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2017054930A JP6878071B2 (ja) 2017-03-21 2017-03-21 半導体集積回路及び半導体集積回路の診断方法

Publications (3)

Publication Number Publication Date
JP2018155707A JP2018155707A (ja) 2018-10-04
JP2018155707A5 JP2018155707A5 (enExample) 2019-04-18
JP6878071B2 true JP6878071B2 (ja) 2021-05-26

Family

ID=59745218

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2017054930A Active JP6878071B2 (ja) 2017-03-21 2017-03-21 半導体集積回路及び半導体集積回路の診断方法

Country Status (4)

Country Link
US (1) US10401430B2 (enExample)
EP (1) EP3379275A1 (enExample)
JP (1) JP6878071B2 (enExample)
CN (1) CN108627757A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11740287B2 (en) 2021-09-10 2023-08-29 Kioxia Corporation Semiconductor device and semiconductor device examination method

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE112020000469T5 (de) 2019-01-22 2021-10-07 Advantest Corporation Automatisierte testeinrichtung, die ein auf-chip-system-teststeuergerät verwendet
US11802807B2 (en) * 2019-09-25 2023-10-31 Dell Products L.P. Leak detection apparatus for an information handling system
EP4361650A4 (en) * 2021-07-30 2024-09-18 Huawei Technologies Co., Ltd. METHOD FOR DESIGNING A TEST CIRCUIT AND ELECTRONIC DEVICE
JPWO2023228812A1 (enExample) * 2022-05-26 2023-11-30
JP2024138860A (ja) 2023-03-27 2024-10-09 株式会社東芝 半導体集積回路及び半導体集積回路のテスト方法
CN118364781B (zh) * 2024-06-20 2024-08-16 中国人民解放军国防科技大学 集成电路测试模式下的时钟诊断修复方法、装置和设备

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6691268B1 (en) * 2000-06-30 2004-02-10 Oak Technology, Inc. Method and apparatus for swapping state data with scan cells
JP4228061B2 (ja) * 2000-12-07 2009-02-25 富士通マイクロエレクトロニクス株式会社 集積回路の試験装置および試験方法
US20030188241A1 (en) * 2002-03-29 2003-10-02 International Business Machines Corporation CMOS low leakage power-down data retention mechanism
JP2004093351A (ja) 2002-08-30 2004-03-25 Matsushita Electric Ind Co Ltd 組み込み自己検査回路
JP2004325124A (ja) 2003-04-22 2004-11-18 Matsushita Electric Ind Co Ltd 半導体装置
JP2006349548A (ja) 2005-06-17 2006-12-28 Matsushita Electric Ind Co Ltd 組み込み自己検査回路
US7596737B2 (en) * 2006-11-10 2009-09-29 Taiwan Semiconductor Manufacturing Co., Ltd. System and method for testing state retention circuits
US8271226B2 (en) * 2008-06-26 2012-09-18 Cadence Design Systems, Inc. Testing state retention logic in low power systems
US8296703B1 (en) * 2008-12-19 2012-10-23 Cadence Design Systems, Inc. Fault modeling for state retention logic
JP2010282411A (ja) 2009-06-04 2010-12-16 Renesas Electronics Corp 半導体集積回路、半導体集積回路の内部状態退避回復方法
KR102112367B1 (ko) 2013-02-12 2020-05-18 가부시키가이샤 한도오따이 에네루기 켄큐쇼 반도체 장치
JP2014185981A (ja) * 2013-03-25 2014-10-02 Toshiba Corp 半導体集積回路および半導体集積回路の自己テスト方法
US8841952B1 (en) * 2013-05-27 2014-09-23 Freescale Semiconductor, Inc. Data retention flip-flop
CN105575438B (zh) * 2014-10-16 2020-11-06 恩智浦美国有限公司 用于测试存储器的方法及装置
KR102325388B1 (ko) * 2015-06-04 2021-11-11 삼성전자주식회사 데이터 복원을 안정적으로 제어하는 파워 게이팅 제어 회로

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11740287B2 (en) 2021-09-10 2023-08-29 Kioxia Corporation Semiconductor device and semiconductor device examination method

Also Published As

Publication number Publication date
EP3379275A1 (en) 2018-09-26
US10401430B2 (en) 2019-09-03
JP2018155707A (ja) 2018-10-04
US20180275198A1 (en) 2018-09-27
CN108627757A (zh) 2018-10-09

Similar Documents

Publication Publication Date Title
JP6878071B2 (ja) 半導体集積回路及び半導体集積回路の診断方法
US7644333B2 (en) Restartable logic BIST controller
US7653854B2 (en) Semiconductor integrated circuit having a (BIST) built-in self test circuit for fault diagnosing operation of a memory
US8145964B2 (en) Scan test circuit and scan test control method
KR101127786B1 (ko) 반도체 집적 회로 및 그 내부 상태를 세이브 및 복원하는 방법
US8458540B2 (en) Integrated circuit and diagnosis circuit
JP5254093B2 (ja) 電源制御可能領域を有する半導体集積回路
JP4751216B2 (ja) 半導体集積回路及びその設計装置
JP2014185981A (ja) 半導体集積回路および半導体集積回路の自己テスト方法
US20090240996A1 (en) Semiconductor integrated circuit device
JP4966974B2 (ja) Icテスト方法及びその装置
US7673205B2 (en) Semiconductor IC and testing method thereof
JP7334531B2 (ja) 半導体回路装置
JP5179861B2 (ja) 半導体装置
JP2019191064A (ja) 半導体装置
JP4693526B2 (ja) 半導体集積回路、および、半導体集積回路のテスト方法
JP2007205933A (ja) 半導体集積回路
JP4610919B2 (ja) 半導体集積回路装置
US10354742B2 (en) Scan compression architecture for highly compressed designs and associated methods
JP5734485B2 (ja) 電源制御可能領域を有する半導体集積回路
US12436192B2 (en) Semiconductor integrated circuit and test method for semiconductor integrated circuit
JP5503048B2 (ja) 電源制御可能領域を有する半導体集積回路
JP2001174515A (ja) 自己診断型論理集積回路の診断方法及び自己診断型論理集積回路
JP2008102785A (ja) スキャンテスト回路
JP2005222692A (ja) 半導体メモリの検査装置

Legal Events

Date Code Title Description
A711 Notification of change in applicant

Free format text: JAPANESE INTERMEDIATE CODE: A712

Effective date: 20170922

A711 Notification of change in applicant

Free format text: JAPANESE INTERMEDIATE CODE: A711

Effective date: 20170925

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20190306

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20190306

RD01 Notification of change of attorney

Free format text: JAPANESE INTERMEDIATE CODE: A7421

Effective date: 20191007

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20200124

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20200204

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20200406

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20200804

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20201005

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20210406

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20210428

R150 Certificate of patent or registration of utility model

Ref document number: 6878071

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150