JP6875660B2 - 含窒素環状化合物及びその製造方法 - Google Patents
含窒素環状化合物及びその製造方法 Download PDFInfo
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- JP6875660B2 JP6875660B2 JP2018557674A JP2018557674A JP6875660B2 JP 6875660 B2 JP6875660 B2 JP 6875660B2 JP 2018557674 A JP2018557674 A JP 2018557674A JP 2018557674 A JP2018557674 A JP 2018557674A JP 6875660 B2 JP6875660 B2 JP 6875660B2
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- -1 Nitrogen-containing cyclic compound Chemical class 0.000 title claims description 26
- 238000004519 manufacturing process Methods 0.000 title claims description 5
- 150000001875 compounds Chemical class 0.000 claims description 50
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 claims description 48
- 239000007864 aqueous solution Substances 0.000 claims description 16
- WSFSSNUMVMOOMR-UHFFFAOYSA-N Formaldehyde Chemical compound O=C WSFSSNUMVMOOMR-UHFFFAOYSA-N 0.000 claims description 12
- 239000003929 acidic solution Substances 0.000 claims description 6
- 239000003960 organic solvent Substances 0.000 claims description 6
- 239000007800 oxidant agent Substances 0.000 claims description 6
- 230000015572 biosynthetic process Effects 0.000 description 28
- 238000003786 synthesis reaction Methods 0.000 description 28
- 125000004184 methoxymethyl group Chemical group [H]C([H])([H])OC([H])([H])* 0.000 description 24
- 239000000203 mixture Substances 0.000 description 22
- 239000000243 solution Substances 0.000 description 19
- ARXJGSRGQADJSQ-UHFFFAOYSA-N 1-methoxypropan-2-ol Chemical compound COCC(C)O ARXJGSRGQADJSQ-UHFFFAOYSA-N 0.000 description 14
- 125000003055 glycidyl group Chemical group C(C1CO1)* 0.000 description 14
- 239000010408 film Substances 0.000 description 11
- 229920000642 polymer Polymers 0.000 description 11
- 239000002904 solvent Substances 0.000 description 11
- 239000007795 chemical reaction product Substances 0.000 description 10
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 9
- LYCAIKOWRPUZTN-UHFFFAOYSA-N ethylene glycol Natural products OCCO LYCAIKOWRPUZTN-UHFFFAOYSA-N 0.000 description 9
- 239000003431 cross linking reagent Substances 0.000 description 8
- 125000001046 glycoluril group Chemical group [H]C12N(*)C(=O)N(*)C1([H])N(*)C(=O)N2* 0.000 description 8
- 238000004128 high performance liquid chromatography Methods 0.000 description 8
- WGCNASOHLSPBMP-UHFFFAOYSA-N hydroxyacetaldehyde Natural products OCC=O WGCNASOHLSPBMP-UHFFFAOYSA-N 0.000 description 8
- NWUYHJFMYQTDRP-UHFFFAOYSA-N 1,2-bis(ethenyl)benzene;1-ethenyl-2-ethylbenzene;styrene Chemical compound C=CC1=CC=CC=C1.CCC1=CC=CC=C1C=C.C=CC1=CC=CC=C1C=C NWUYHJFMYQTDRP-UHFFFAOYSA-N 0.000 description 7
- 239000003957 anion exchange resin Substances 0.000 description 7
- 239000007788 liquid Substances 0.000 description 7
- 125000004433 nitrogen atom Chemical group N* 0.000 description 7
- YCLSOMLVSHPPFV-UHFFFAOYSA-N 3-(2-carboxyethyldisulfanyl)propanoic acid Chemical compound OC(=O)CCSSCCC(O)=O YCLSOMLVSHPPFV-UHFFFAOYSA-N 0.000 description 6
- HEDRZPFGACZZDS-UHFFFAOYSA-N Chloroform Chemical compound ClC(Cl)Cl HEDRZPFGACZZDS-UHFFFAOYSA-N 0.000 description 6
- IAZDPXIOMUYVGZ-WFGJKAKNSA-N Dimethyl sulfoxide Chemical compound [2H]C([2H])([2H])S(=O)C([2H])([2H])[2H] IAZDPXIOMUYVGZ-WFGJKAKNSA-N 0.000 description 6
- UIIMBOGNXHQVGW-UHFFFAOYSA-M Sodium bicarbonate Chemical compound [Na+].OC([O-])=O UIIMBOGNXHQVGW-UHFFFAOYSA-M 0.000 description 6
- 125000003178 carboxy group Chemical group [H]OC(*)=O 0.000 description 6
- 239000003729 cation exchange resin Substances 0.000 description 6
- 238000005227 gel permeation chromatography Methods 0.000 description 6
- 125000002887 hydroxy group Chemical group [H]O* 0.000 description 6
- 238000005259 measurement Methods 0.000 description 6
- 239000012044 organic layer Substances 0.000 description 6
- 239000000126 substance Substances 0.000 description 6
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 6
- 238000006243 chemical reaction Methods 0.000 description 5
- 230000000052 comparative effect Effects 0.000 description 5
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 4
- SECXISVLQFMRJM-UHFFFAOYSA-N N-Methylpyrrolidone Chemical compound CN1CCCC1=O SECXISVLQFMRJM-UHFFFAOYSA-N 0.000 description 4
- WYURNTSHIVDZCO-UHFFFAOYSA-N Tetrahydrofuran Chemical compound C1CCOC1 WYURNTSHIVDZCO-UHFFFAOYSA-N 0.000 description 4
- XSQUKJJJFZCRTK-UHFFFAOYSA-N Urea Chemical compound NC(N)=O XSQUKJJJFZCRTK-UHFFFAOYSA-N 0.000 description 4
- 125000004435 hydrogen atom Chemical group [H]* 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 239000007787 solid Substances 0.000 description 4
- 239000010409 thin film Substances 0.000 description 4
- WEVYAHXRMPXWCK-UHFFFAOYSA-N Acetonitrile Chemical compound CC#N WEVYAHXRMPXWCK-UHFFFAOYSA-N 0.000 description 3
- YMWUJEATGCHHMB-UHFFFAOYSA-N Dichloromethane Chemical compound ClCCl YMWUJEATGCHHMB-UHFFFAOYSA-N 0.000 description 3
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 3
- XEKOWRVHYACXOJ-UHFFFAOYSA-N Ethyl acetate Chemical compound CCOC(C)=O XEKOWRVHYACXOJ-UHFFFAOYSA-N 0.000 description 3
- KFZMGEQAYNKOFK-UHFFFAOYSA-N Isopropanol Chemical compound CC(C)O KFZMGEQAYNKOFK-UHFFFAOYSA-N 0.000 description 3
- ZMXDDKWLCZADIW-UHFFFAOYSA-N N,N-Dimethylformamide Chemical compound CN(C)C=O ZMXDDKWLCZADIW-UHFFFAOYSA-N 0.000 description 3
- 239000004698 Polyethylene Substances 0.000 description 3
- 239000004793 Polystyrene Substances 0.000 description 3
- KWYUFKZDYYNOTN-UHFFFAOYSA-M Potassium hydroxide Chemical compound [OH-].[K+] KWYUFKZDYYNOTN-UHFFFAOYSA-M 0.000 description 3
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 description 3
- 239000013078 crystal Substances 0.000 description 3
- 239000000706 filtrate Substances 0.000 description 3
- VLKZOEOYAKHREP-UHFFFAOYSA-N n-Hexane Chemical compound CCCCCC VLKZOEOYAKHREP-UHFFFAOYSA-N 0.000 description 3
- 229920000573 polyethylene Polymers 0.000 description 3
- 229920002223 polystyrene Polymers 0.000 description 3
- 239000011148 porous material Substances 0.000 description 3
- 238000000425 proton nuclear magnetic resonance spectrum Methods 0.000 description 3
- ZDYVRSLAEXCVBX-UHFFFAOYSA-N pyridinium p-toluenesulfonate Chemical compound C1=CC=[NH+]C=C1.CC1=CC=C(S([O-])(=O)=O)C=C1 ZDYVRSLAEXCVBX-UHFFFAOYSA-N 0.000 description 3
- 229910052710 silicon Inorganic materials 0.000 description 3
- 239000010703 silicon Substances 0.000 description 3
- 229910000030 sodium bicarbonate Inorganic materials 0.000 description 3
- 235000017557 sodium bicarbonate Nutrition 0.000 description 3
- 239000004094 surface-active agent Substances 0.000 description 3
- NHQDETIJWKXCTC-UHFFFAOYSA-N 3-chloroperbenzoic acid Chemical compound OOC(=O)C1=CC=CC(Cl)=C1 NHQDETIJWKXCTC-UHFFFAOYSA-N 0.000 description 2
- IAZDPXIOMUYVGZ-UHFFFAOYSA-N Dimethylsulphoxide Chemical compound CS(C)=O IAZDPXIOMUYVGZ-UHFFFAOYSA-N 0.000 description 2
- MHAJPDPJQMAIIY-UHFFFAOYSA-N Hydrogen peroxide Chemical compound OO MHAJPDPJQMAIIY-UHFFFAOYSA-N 0.000 description 2
- IMNFDUFMRHMDMM-UHFFFAOYSA-N N-Heptane Chemical compound CCCCCCC IMNFDUFMRHMDMM-UHFFFAOYSA-N 0.000 description 2
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 description 2
- KFSLWBXXFJQRDL-UHFFFAOYSA-N Peracetic acid Chemical compound CC(=O)OO KFSLWBXXFJQRDL-UHFFFAOYSA-N 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 2
- 238000004458 analytical method Methods 0.000 description 2
- 239000004202 carbamide Substances 0.000 description 2
- 239000003054 catalyst Substances 0.000 description 2
- 238000004132 cross linking Methods 0.000 description 2
- JHYNXXDQQHTCHJ-UHFFFAOYSA-M ethyl(triphenyl)phosphanium;bromide Chemical compound [Br-].C=1C=CC=CC=1[P+](C=1C=CC=CC=1)(CC)C1=CC=CC=C1 JHYNXXDQQHTCHJ-UHFFFAOYSA-M 0.000 description 2
- VPVSTMAPERLKKM-UHFFFAOYSA-N glycoluril Chemical compound N1C(=O)NC2NC(=O)NC21 VPVSTMAPERLKKM-UHFFFAOYSA-N 0.000 description 2
- LEQAOMBKQFMDFZ-UHFFFAOYSA-N glyoxal Chemical compound O=CC=O LEQAOMBKQFMDFZ-UHFFFAOYSA-N 0.000 description 2
- 238000005342 ion exchange Methods 0.000 description 2
- LULAYUGMBFYYEX-UHFFFAOYSA-N metachloroperbenzoic acid Natural products OC(=O)C1=CC=CC(Cl)=C1 LULAYUGMBFYYEX-UHFFFAOYSA-N 0.000 description 2
- BDAGIHXWWSANSR-UHFFFAOYSA-N methanoic acid Natural products OC=O BDAGIHXWWSANSR-UHFFFAOYSA-N 0.000 description 2
- SKTCDJAMAYNROS-UHFFFAOYSA-N methoxycyclopentane Chemical compound COC1CCCC1 SKTCDJAMAYNROS-UHFFFAOYSA-N 0.000 description 2
- 239000000178 monomer Substances 0.000 description 2
- 229910017604 nitric acid Inorganic materials 0.000 description 2
- 239000012299 nitrogen atmosphere Substances 0.000 description 2
- 125000000962 organic group Chemical group 0.000 description 2
- 150000004714 phosphonium salts Chemical group 0.000 description 2
- 239000000047 product Substances 0.000 description 2
- 239000002994 raw material Substances 0.000 description 2
- 239000011342 resin composition Substances 0.000 description 2
- GEHJYWRUCIMESM-UHFFFAOYSA-L sodium sulfite Chemical compound [Na+].[Na+].[O-]S([O-])=O GEHJYWRUCIMESM-UHFFFAOYSA-L 0.000 description 2
- 125000001424 substituent group Chemical group 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- VZGDMQKNWNREIO-UHFFFAOYSA-N tetrachloromethane Chemical compound ClC(Cl)(Cl)Cl VZGDMQKNWNREIO-UHFFFAOYSA-N 0.000 description 2
- YLQBMQCUIZJEEH-UHFFFAOYSA-N tetrahydrofuran Natural products C=1C=COC=1 YLQBMQCUIZJEEH-UHFFFAOYSA-N 0.000 description 2
- 239000002966 varnish Substances 0.000 description 2
- WSLDOOZREJYCGB-UHFFFAOYSA-N 1,2-Dichloroethane Chemical compound ClCCCl WSLDOOZREJYCGB-UHFFFAOYSA-N 0.000 description 1
- WFCOXVISFBRIKN-UHFFFAOYSA-N 1,3-bis(oxiran-2-ylmethyl)-1,3,5-triazinane-2,4,6-trione Chemical compound O=C1N(CC2OC2)C(=O)NC(=O)N1CC1CO1 WFCOXVISFBRIKN-UHFFFAOYSA-N 0.000 description 1
- OSWFIVFLDKOXQC-UHFFFAOYSA-N 4-(3-methoxyphenyl)aniline Chemical compound COC1=CC=CC(C=2C=CC(N)=CC=2)=C1 OSWFIVFLDKOXQC-UHFFFAOYSA-N 0.000 description 1
- 0 C*CC(CN(C(N(CC(COC(CCSSCCC(O*C)=O)=O)O)C(N1CC=C)=O)=O)C1=O)O Chemical compound C*CC(CN(C(N(CC(COC(CCSSCCC(O*C)=O)=O)O)C(N1CC=C)=O)=O)C1=O)O 0.000 description 1
- VJEARNVAJVCEFE-UHFFFAOYSA-N COCN(C(C(N1CC=C)N2COC)N(CC=C)C2=O)C1=O Chemical compound COCN(C(C(N1CC=C)N2COC)N(CC=C)C2=O)C1=O VJEARNVAJVCEFE-UHFFFAOYSA-N 0.000 description 1
- FXHOOIRPVKKKFG-UHFFFAOYSA-N N,N-Dimethylacetamide Chemical compound CN(C)C(C)=O FXHOOIRPVKKKFG-UHFFFAOYSA-N 0.000 description 1
- 239000012425 OXONE® Substances 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 150000001298 alcohols Chemical class 0.000 description 1
- 150000001338 aliphatic hydrocarbons Chemical class 0.000 description 1
- 150000001408 amides Chemical class 0.000 description 1
- VZTDIZULWFCMLS-UHFFFAOYSA-N ammonium formate Chemical compound [NH4+].[O-]C=O VZTDIZULWFCMLS-UHFFFAOYSA-N 0.000 description 1
- 125000004432 carbon atom Chemical group C* 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000003822 epoxy resin Substances 0.000 description 1
- 235000019253 formic acid Nutrition 0.000 description 1
- 229940015043 glyoxal Drugs 0.000 description 1
- 150000008282 halocarbons Chemical class 0.000 description 1
- LNEPOXFFQSENCJ-UHFFFAOYSA-N haloperidol Chemical compound C1CC(O)(C=2C=CC(Cl)=CC=2)CCN1CCCC(=O)C1=CC=C(F)C=C1 LNEPOXFFQSENCJ-UHFFFAOYSA-N 0.000 description 1
- 125000005842 heteroatom Chemical group 0.000 description 1
- 150000002391 heterocyclic compounds Chemical class 0.000 description 1
- 239000003456 ion exchange resin Substances 0.000 description 1
- 229920003303 ion-exchange polymer Polymers 0.000 description 1
- 239000010410 layer Substances 0.000 description 1
- 238000001459 lithography Methods 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
- 230000000379 polymerizing effect Effects 0.000 description 1
- OKBMCNHOEMXPTM-UHFFFAOYSA-M potassium peroxymonosulfate Chemical compound [K+].OOS([O-])(=O)=O OKBMCNHOEMXPTM-UHFFFAOYSA-M 0.000 description 1
- 238000002203 pretreatment Methods 0.000 description 1
- VPJDULFXCAQHRC-UHFFFAOYSA-N prop-2-enylurea Chemical compound NC(=O)NCC=C VPJDULFXCAQHRC-UHFFFAOYSA-N 0.000 description 1
- LLHKCFNBLRBOGN-UHFFFAOYSA-N propylene glycol methyl ether acetate Chemical compound COCC(C)OC(C)=O LLHKCFNBLRBOGN-UHFFFAOYSA-N 0.000 description 1
- 150000003376 silicon Chemical class 0.000 description 1
- 235000010265 sodium sulphite Nutrition 0.000 description 1
- 150000003462 sulfoxides Chemical class 0.000 description 1
- 229920001187 thermosetting polymer Polymers 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
- C07D—HETEROCYCLIC COMPOUNDS
- C07D487/00—Heterocyclic compounds containing nitrogen atoms as the only ring hetero atoms in the condensed system, not provided for by groups C07D451/00 - C07D477/00
- C07D487/02—Heterocyclic compounds containing nitrogen atoms as the only ring hetero atoms in the condensed system, not provided for by groups C07D451/00 - C07D477/00 in which the condensed system contains two hetero rings
- C07D487/04—Ortho-condensed systems
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
- C08G59/00—Polycondensates containing more than one epoxy group per molecule; Macromolecules obtained by polymerising compounds containing more than one epoxy group per molecule using curing agents or catalysts which react with the epoxy groups
- C08G59/02—Polycondensates containing more than one epoxy group per molecule
Landscapes
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Health & Medical Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Medicinal Chemistry (AREA)
- Polymers & Plastics (AREA)
- Epoxy Resins (AREA)
- Polyesters Or Polycarbonates (AREA)
- Nitrogen Condensed Heterocyclic Rings (AREA)
- Compositions Of Macromolecular Compounds (AREA)
Description
HPLCカラム:Inertsil[登録商標]ODS−3(ジーエルサイエンス(株))
カラム温度:40℃
溶媒:アセトニトリル/10mMギ酸アンモニウム水溶液=3/7(v/v)(0分〜10分),3/7(v/v)から7/3(v/v)へ組成比を変更(10分〜15分),7/3(v/v)(15分〜25分),7/3(v/v)から3/7(v/v)へ組成比を変更(25分〜30分),3/7(v/v)(30分〜35分)
流量:1.0mL/分
GPCカラム:KF−403HQ,KF−402HQ,KF−401HQ(昭和電工(株)製)
カラム温度:40℃
溶媒:テトラヒドロフラン(THF)
流量:0.5mL/分
標準試料:ポリスチレン(昭和電工(株)製)
(1,4−ジアリルグリコールウリルの合成)
7.63(s,2H),5.73(m,2H),5.19(dd,4H),5.18(s,2H),3.90(dd,2H),3.49(dd,2H)
(1,4−ジアリル−3,6−ジメチロールグリコールウリルの合成)
5.93(t,2H),5.76(m,2H),5.37(s,2H),5.17(dd,4H),4.63(m,4H),4.02(dd,2H),3.86(dd,2H)
(1,4−ジアリル−3,6−ジ(メトキシメチル)グリコールウリルの合成)
5.74(m,2H),5.35(s,2H),5.19(m,4H),4.61(dd,4H),4.09(dd,2H),3.76(dd,2H),3.17(s,6H)
(1,4−ジグリシジル−3,6−ジ(メトキシメチル)グリコールウリルの合成)
陰イオン交換樹脂(2.0kg)にプロピレングリコールモノメチルエーテル(2.0kg)を加え4時間撹拌後ろ過し、再度その陰イオン交換樹脂にプロピレングリコールモノメチルエーテル(2.0kg)を加え8時間撹拌後ろ過した。更に、前記陰イオン交換樹脂にプロピレングリコールモノメチルエーテル(2.0kg)を加え4時間撹拌後保管した。このプロピレングリコールモノメチルエーテルを加えて保管した陰イオン交換樹脂を、下記合成例で使用する直前にろ過した。
前記合成例4で得られた1,4−ジグリシジル−3,6−ジ(メトキシメチル)グリコールウリル2.01g、3,3’−ジチオジプロピオン酸(堺化学工業(株)、商品名:DTDPA)1.29g、及び触媒として第4級ホスホニウム塩であるトリフェニルモノエチルホスホニウムブロミド0.11gを、プロピレングリコールモノメチルエーテル13.60gに溶解させた後、105℃に加温し、窒素雰囲気下で24.5時間撹拌した。得られた反応生成物に、前記前処理を経た陰イオン交換樹脂(製品名:ダウエックス[登録商標]MONOSPHERE[登録商標]550A、ムロマチテクノス(株))2.86gと前記前処理を経た陽イオン交換樹脂(製品名:アンバーリスト[登録商標]15JWET、オルガノ(株))2.86gを加え、25℃乃至30℃で4時間撹拌後ろ過した。イオン交換処理後のワニス溶液のGPC分析を行ったところ、標準ポリスチレン換算にて重量平均分子量は6630であった。この反応生成物は、下記式(2A)で表される繰り返し単位構造を有する。
モノアリルジグリシジルイソシアヌル酸(四国化成工業(株)、商品名:MADGIC)2.0g、3,3’−ジチオジプロピオン酸(堺化学工業(株)、商品名:DTDPA)1.56g、及び触媒として第4級ホスホニウム塩であるトリフェニルモノエチルホスホニウムブロミド0.13gを、プロピレングリコールモノメチルエーテル14.82gに溶解させた後、105℃に加温し、窒素雰囲気下で24.5時間撹拌した。得られた反応生成物に、前記合成例5で用いた陰イオン交換樹脂3.22gと前記合成例5で用いた陽イオン交換樹脂3.22gを加え、25℃乃至30℃で4時間撹拌後ろ過した。イオン交換処理後のワニス溶液のGPC分析を行ったところ、標準ポリスチレン換算にて重量平均分子量は6165であった。この反応生成物は、下記式(4)で表される繰り返し単位構造を有する。
前記合成例5で得られた反応生成物0.364gを含む溶液1.838gに、プロピレングリコールモノメチルエーテル8.158g、パラトルエンスルホン酸ピリジニウム0.013g、及び界面活性剤(DIC(株)、商品名:R−40−LM)0.004gを加え、溶液とした。その溶液を、孔径0.45μmのポリエチレン製ミクロフィルターを用いてろ過して、膜形成用組成物を調製した。
前記合成例6で得られた反応生成物0.364gを含む溶液1.898gに、プロピレングリコールモノメチルエーテル8.087g、パラトルエンスルホン酸ピリジニウム0.013g、及び界面活性剤(DIC(株)、商品名:R−40−LM)0.004gを加え、溶液とした。その溶液を、孔径0.45μmのポリエチレン製ミクロフィルターを用いてろ過して、膜形成用組成物を調製した。
前記合成例6で得られた反応生成物0.283gを含む溶液1.475gに、プロピレングリコールモノメチルエーテル8.424g、パラトルエンスルホン酸ピリジニウム0.010g、架橋剤としてテトラメトキシメチルグリコールウリル(日本サイテックインダストリーズ(株)、商品名:POWDERLINK[登録商標]1174)0.085g、及び界面活性剤(DIC(株)、商品名:R−40−LM)0.003gを加え、溶液とした。その溶液を、孔径0.45μmのポリエチレン製ミクロフィルターを用いてろ過して、膜形成用組成物を調製した。
本明細書に記載の実施例1並びに比較例1及び比較例2で調製された膜形成用組成物を、それぞれスピンコーターによりシリコンウエハー上に塗布した。このシリコンウエハーをホットプレート上に配置し、215℃で1分間ベークし、該シリコンウエハー上に薄膜を成膜した(膜厚約100nm)。そして、形成されたこれらの薄膜を溶剤(プロピレングリコールモノメチルエーテル/プロピレングリコールモノメチルエーテルアセタート=7/3)に1分間浸漬させた(ストリッピング)後、スピナーにより前記溶剤を除去した。前記薄膜を乾燥させるため、ホットプレート上、100℃で30秒間ベークした後、該薄膜の膜厚を測定し、下記表1に示す結果を得た。
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