JP6874513B2 - 力検出装置およびロボット - Google Patents

力検出装置およびロボット Download PDF

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Publication number
JP6874513B2
JP6874513B2 JP2017090242A JP2017090242A JP6874513B2 JP 6874513 B2 JP6874513 B2 JP 6874513B2 JP 2017090242 A JP2017090242 A JP 2017090242A JP 2017090242 A JP2017090242 A JP 2017090242A JP 6874513 B2 JP6874513 B2 JP 6874513B2
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Japan
Prior art keywords
force
voltage
force sensor
circuit
base portion
Prior art date
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Expired - Fee Related
Application number
JP2017090242A
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English (en)
Japanese (ja)
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JP2018189430A (ja
JP2018189430A5 (https=
Inventor
山村　光宏
光宏 山村
神谷　俊幸
俊幸 神谷
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Original Assignee
Seiko Epson Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp
Priority to JP2017090242A priority Critical patent/JP6874513B2/ja
Priority to CN201810361516.7A priority patent/CN108801507B/zh
Priority to US15/964,621 priority patent/US10451495B2/en
Publication of JP2018189430A publication Critical patent/JP2018189430A/ja
Publication of JP2018189430A5 publication Critical patent/JP2018189430A5/ja
Application granted granted Critical
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Expired - Fee Related legal-status Critical Current
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J13/00—Controls for manipulators
    • B25J13/08—Controls for manipulators by means of sensing devices, e.g. viewing or touching devices
    • B25J13/085—Force or torque sensors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J18/00—Arms
    • B25J18/02—Arms extensible
    • B25J18/04—Arms extensible rotatable
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J19/00—Accessories fitted to manipulators, e.g. for monitoring, for viewing; Safety devices combined with or specially adapted for use in connection with manipulators
    • B25J19/02—Sensing devices
    • B25J19/028—Piezoresistive or piezoelectric sensing devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/14—Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators
    • G01L1/142—Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators using capacitors
    • G01L1/144—Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators using capacitors with associated circuitry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/16—Measuring force or stress, in general using properties of piezoelectric devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L5/00—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes
    • G01L5/0061—Force sensors associated with industrial machines or actuators
    • G01L5/0076—Force sensors associated with manufacturing machines
    • G01L5/009—Force sensors associated with material gripping devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L5/00—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes
    • G01L5/16—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring several components of force
    • G01L5/167—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring several components of force using piezoelectric means

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Robotics (AREA)
  • Mechanical Engineering (AREA)
  • Human Computer Interaction (AREA)
  • Power Engineering (AREA)
  • Force Measurement Appropriate To Specific Purposes (AREA)
  • Manipulator (AREA)
JP2017090242A 2017-04-28 2017-04-28 力検出装置およびロボット Expired - Fee Related JP6874513B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2017090242A JP6874513B2 (ja) 2017-04-28 2017-04-28 力検出装置およびロボット
CN201810361516.7A CN108801507B (zh) 2017-04-28 2018-04-20 力检测装置及机器人
US15/964,621 US10451495B2 (en) 2017-04-28 2018-04-27 Force detection device and robot having a voltage generating circuit

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2017090242A JP6874513B2 (ja) 2017-04-28 2017-04-28 力検出装置およびロボット

Publications (3)

Publication Number Publication Date
JP2018189430A JP2018189430A (ja) 2018-11-29
JP2018189430A5 JP2018189430A5 (https=) 2020-05-14
JP6874513B2 true JP6874513B2 (ja) 2021-05-19

Family

ID=63915597

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2017090242A Expired - Fee Related JP6874513B2 (ja) 2017-04-28 2017-04-28 力検出装置およびロボット

Country Status (3)

Country Link
US (1) US10451495B2 (https=)
JP (1) JP6874513B2 (https=)
CN (1) CN108801507B (https=)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2018189385A (ja) * 2017-04-28 2018-11-29 セイコーエプソン株式会社 力検出装置およびロボット
TWI724709B (zh) 2019-12-25 2021-04-11 財團法人工業技術研究院 壓電感測電路及壓電感測系統
CN113029397B (zh) * 2019-12-25 2023-04-07 财团法人工业技术研究院 压电感测电路及压电感测系统
JP2021143934A (ja) 2020-03-12 2021-09-24 セイコーエプソン株式会社 チャージアンプ、力センサー及びロボット
CN117804646A (zh) * 2023-12-29 2024-04-02 弥富科技(浙江)股份有限公司 一种压力传感器及实现压力传感的方法

Family Cites Families (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4545041A (en) * 1982-10-27 1985-10-01 The United States Of America As Represented By The Secretary Of The Navy Shock-hardened hydrophone
JPS63148137A (ja) * 1986-12-10 1988-06-21 Nippon Denso Co Ltd 圧電型圧力検出装置
DE50114947D1 (de) * 2000-02-07 2009-08-06 Kistler Holding Ag Prüfgerät zur ermittlung der reib- und vorspannwerte von schraubenverbindungen
EP1537609A2 (en) * 2002-09-04 2005-06-08 Triad Sensors Inc. Interface electronics for piezoelectric devices
FR2947050B1 (fr) * 2009-06-19 2011-07-15 Senseor Procede de fabrication collective de capteurs de temperature et/ou de deformation sans calibrage par appariement de resonateurs sur des criteres de frequence de resonance et de capacite statique
JP5936374B2 (ja) * 2011-02-15 2016-06-22 キヤノン株式会社 圧電振動型力センサ及びロボットハンド並びにロボットアーム
JP5742415B2 (ja) * 2011-04-14 2015-07-01 セイコーエプソン株式会社 センサーデバイス、力検出装置およびロボット
JP5880935B2 (ja) * 2011-12-20 2016-03-09 セイコーエプソン株式会社 センサーデバイス、センサーモジュール、ロボット、センサーデバイスの製造方法
JP5895615B2 (ja) * 2012-03-09 2016-03-30 セイコーエプソン株式会社 センサーモジュール、力検出装置及びロボット
CN103994845B (zh) * 2013-02-19 2019-09-10 精工爱普生株式会社 力检测装置、机械手、以及移动体
KR101636223B1 (ko) * 2013-06-05 2016-07-04 니혼샤신 인사츠 가부시키가이샤 압력 검출 장치 및 입력 장치
JP6163900B2 (ja) 2013-06-13 2017-07-19 セイコーエプソン株式会社 力検出装置およびロボット
CN104596676B (zh) * 2013-10-31 2019-03-26 精工爱普生株式会社 力检测装置、机器人、电子部件输送装置及检查装置
CN104596678A (zh) * 2013-10-31 2015-05-06 精工爱普生株式会社 力检测装置、机器人、电子部件输送装置以及检查装置
CN104596675B (zh) * 2013-10-31 2019-05-14 精工爱普生株式会社 传感器元件、力检测装置、机器人、电子部件输送装置
JP6217320B2 (ja) * 2013-10-31 2017-10-25 セイコーエプソン株式会社 センサー素子、力検出装置、ロボット、電子部品搬送装置、電子部品検査装置および部品加工装置
CN103674353B (zh) * 2013-12-20 2015-07-15 中南大学 利用pvdf薄膜压电特性的混凝土应力传感器
CN104406728A (zh) * 2014-11-25 2015-03-11 北京理工大学 测量水下爆炸近场冲击波压力的锰铜压力传感器及装置

Also Published As

Publication number Publication date
JP2018189430A (ja) 2018-11-29
CN108801507B (zh) 2021-11-30
US20180313704A1 (en) 2018-11-01
CN108801507A (zh) 2018-11-13
US10451495B2 (en) 2019-10-22

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