CN108801507B - 力检测装置及机器人 - Google Patents

力检测装置及机器人 Download PDF

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Publication number
CN108801507B
CN108801507B CN201810361516.7A CN201810361516A CN108801507B CN 108801507 B CN108801507 B CN 108801507B CN 201810361516 A CN201810361516 A CN 201810361516A CN 108801507 B CN108801507 B CN 108801507B
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CN
China
Prior art keywords
force
detection device
force detection
force sensor
voltage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN201810361516.7A
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English (en)
Chinese (zh)
Other versions
CN108801507A (zh
Inventor
山村光宏
神谷俊幸
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Original Assignee
Seiko Epson Corp
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Filing date
Publication date
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Publication of CN108801507A publication Critical patent/CN108801507A/zh
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Publication of CN108801507B publication Critical patent/CN108801507B/zh
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/16—Measuring force or stress, in general using properties of piezoelectric devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J13/00—Controls for manipulators
    • B25J13/08—Controls for manipulators by means of sensing devices, e.g. viewing or touching devices
    • B25J13/085—Force or torque sensors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J18/00—Arms
    • B25J18/02—Arms extensible
    • B25J18/04—Arms extensible rotatable
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J19/00—Accessories fitted to manipulators, e.g. for monitoring, for viewing; Safety devices combined with or specially adapted for use in connection with manipulators
    • B25J19/02—Sensing devices
    • B25J19/028—Piezoresistive or piezoelectric sensing devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/14—Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators
    • G01L1/142—Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators using capacitors
    • G01L1/144—Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators using capacitors with associated circuitry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L5/00—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes
    • G01L5/0061—Force sensors associated with industrial machines or actuators
    • G01L5/0076—Force sensors associated with manufacturing machines
    • G01L5/009—Force sensors associated with material gripping devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L5/00—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes
    • G01L5/16—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring several components of force
    • G01L5/167—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring several components of force using piezoelectric means

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Robotics (AREA)
  • Mechanical Engineering (AREA)
  • Human Computer Interaction (AREA)
  • Power Engineering (AREA)
  • Force Measurement Appropriate To Specific Purposes (AREA)
  • Manipulator (AREA)
CN201810361516.7A 2017-04-28 2018-04-20 力检测装置及机器人 Expired - Fee Related CN108801507B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2017-090242 2017-04-28
JP2017090242A JP6874513B2 (ja) 2017-04-28 2017-04-28 力検出装置およびロボット

Publications (2)

Publication Number Publication Date
CN108801507A CN108801507A (zh) 2018-11-13
CN108801507B true CN108801507B (zh) 2021-11-30

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ID=63915597

Family Applications (1)

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CN201810361516.7A Expired - Fee Related CN108801507B (zh) 2017-04-28 2018-04-20 力检测装置及机器人

Country Status (3)

Country Link
US (1) US10451495B2 (https=)
JP (1) JP6874513B2 (https=)
CN (1) CN108801507B (https=)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2018189385A (ja) * 2017-04-28 2018-11-29 セイコーエプソン株式会社 力検出装置およびロボット
TWI724709B (zh) 2019-12-25 2021-04-11 財團法人工業技術研究院 壓電感測電路及壓電感測系統
CN113029397B (zh) * 2019-12-25 2023-04-07 财团法人工业技术研究院 压电感测电路及压电感测系统
JP2021143934A (ja) 2020-03-12 2021-09-24 セイコーエプソン株式会社 チャージアンプ、力センサー及びロボット
CN117804646A (zh) * 2023-12-29 2024-04-02 弥富科技(浙江)股份有限公司 一种压力传感器及实现压力传感的方法

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2264417B1 (fr) * 2009-06-19 2012-09-05 Senseor Procédé de fabrication collective de capteurs de température et/ou de déformation sans calibrage par appariement de résonateurs
CN103674353A (zh) * 2013-12-20 2014-03-26 中南大学 利用pvdf薄膜压电特性的混凝土应力传感器
CN103994845A (zh) * 2013-02-19 2014-08-20 精工爱普生株式会社 力检测装置、机械手、以及移动体
CN104406728A (zh) * 2014-11-25 2015-03-11 北京理工大学 测量水下爆炸近场冲击波压力的锰铜压力传感器及装置
CN104596676A (zh) * 2013-10-31 2015-05-06 精工爱普生株式会社 力检测装置、机器人、电子部件输送装置及检查装置
CN104596675A (zh) * 2013-10-31 2015-05-06 精工爱普生株式会社 传感器元件、力检测装置、机器人、电子部件输送装置
CN104596678A (zh) * 2013-10-31 2015-05-06 精工爱普生株式会社 力检测装置、机器人、电子部件输送装置以及检查装置
CN105283743A (zh) * 2013-06-05 2016-01-27 日本写真印刷株式会社 压力检测装置及输入装置

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* Cited by examiner, † Cited by third party
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US4545041A (en) * 1982-10-27 1985-10-01 The United States Of America As Represented By The Secretary Of The Navy Shock-hardened hydrophone
JPS63148137A (ja) * 1986-12-10 1988-06-21 Nippon Denso Co Ltd 圧電型圧力検出装置
DE50114947D1 (de) * 2000-02-07 2009-08-06 Kistler Holding Ag Prüfgerät zur ermittlung der reib- und vorspannwerte von schraubenverbindungen
EP1537609A2 (en) * 2002-09-04 2005-06-08 Triad Sensors Inc. Interface electronics for piezoelectric devices
JP5936374B2 (ja) * 2011-02-15 2016-06-22 キヤノン株式会社 圧電振動型力センサ及びロボットハンド並びにロボットアーム
JP5742415B2 (ja) * 2011-04-14 2015-07-01 セイコーエプソン株式会社 センサーデバイス、力検出装置およびロボット
JP5880935B2 (ja) * 2011-12-20 2016-03-09 セイコーエプソン株式会社 センサーデバイス、センサーモジュール、ロボット、センサーデバイスの製造方法
JP5895615B2 (ja) * 2012-03-09 2016-03-30 セイコーエプソン株式会社 センサーモジュール、力検出装置及びロボット
JP6163900B2 (ja) 2013-06-13 2017-07-19 セイコーエプソン株式会社 力検出装置およびロボット
JP6217320B2 (ja) * 2013-10-31 2017-10-25 セイコーエプソン株式会社 センサー素子、力検出装置、ロボット、電子部品搬送装置、電子部品検査装置および部品加工装置

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2264417B1 (fr) * 2009-06-19 2012-09-05 Senseor Procédé de fabrication collective de capteurs de température et/ou de déformation sans calibrage par appariement de résonateurs
CN103994845A (zh) * 2013-02-19 2014-08-20 精工爱普生株式会社 力检测装置、机械手、以及移动体
CN105283743A (zh) * 2013-06-05 2016-01-27 日本写真印刷株式会社 压力检测装置及输入装置
CN104596676A (zh) * 2013-10-31 2015-05-06 精工爱普生株式会社 力检测装置、机器人、电子部件输送装置及检查装置
CN104596675A (zh) * 2013-10-31 2015-05-06 精工爱普生株式会社 传感器元件、力检测装置、机器人、电子部件输送装置
CN104596678A (zh) * 2013-10-31 2015-05-06 精工爱普生株式会社 力检测装置、机器人、电子部件输送装置以及检查装置
CN103674353A (zh) * 2013-12-20 2014-03-26 中南大学 利用pvdf薄膜压电特性的混凝土应力传感器
CN104406728A (zh) * 2014-11-25 2015-03-11 北京理工大学 测量水下爆炸近场冲击波压力的锰铜压力传感器及装置

Also Published As

Publication number Publication date
JP6874513B2 (ja) 2021-05-19
JP2018189430A (ja) 2018-11-29
US20180313704A1 (en) 2018-11-01
CN108801507A (zh) 2018-11-13
US10451495B2 (en) 2019-10-22

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Granted publication date: 20211130