JP6866131B2 - 光学装置、それを備えた露光装置、および物品の製造方法 - Google Patents

光学装置、それを備えた露光装置、および物品の製造方法 Download PDF

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Publication number
JP6866131B2
JP6866131B2 JP2016231794A JP2016231794A JP6866131B2 JP 6866131 B2 JP6866131 B2 JP 6866131B2 JP 2016231794 A JP2016231794 A JP 2016231794A JP 2016231794 A JP2016231794 A JP 2016231794A JP 6866131 B2 JP6866131 B2 JP 6866131B2
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Japan
Prior art keywords
heat transfer
optical device
coil
mirror
transfer unit
Prior art date
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JP2016231794A
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English (en)
Japanese (ja)
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JP2017134389A (ja
JP2017134389A5 (enExample
Inventor
朋史 西川原
朋史 西川原
一貴 木村
一貴 木村
裕紀 矢田
裕紀 矢田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
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Canon Inc
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Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to KR1020170008962A priority Critical patent/KR102138113B1/ko
Priority to TW106102442A priority patent/TWI682247B/zh
Priority to CN201710059375.9A priority patent/CN107015341B/zh
Publication of JP2017134389A publication Critical patent/JP2017134389A/ja
Publication of JP2017134389A5 publication Critical patent/JP2017134389A5/ja
Application granted granted Critical
Publication of JP6866131B2 publication Critical patent/JP6866131B2/ja
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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/0025—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 for optical correction, e.g. distorsion, aberration
    • G02B27/0068—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 for optical correction, e.g. distorsion, aberration having means for controlling the degree of correction, e.g. using phase modulators, movable elements
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/18—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors
    • G02B7/182—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors
    • G02B7/1822—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors comprising means for aligning the optical axis
    • G02B7/1827—Motorised alignment
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/18—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors
    • G02B7/182—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors
    • G02B7/192—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors with means for minimising internal mirror stresses not in use
    • G02B7/195—Fluid-cooled mirrors

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Optical Elements Other Than Lenses (AREA)
  • Mounting And Adjusting Of Optical Elements (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
JP2016231794A 2016-01-27 2016-11-29 光学装置、それを備えた露光装置、および物品の製造方法 Active JP6866131B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
KR1020170008962A KR102138113B1 (ko) 2016-01-27 2017-01-19 광학 디바이스, 노광 장치 및 물품의 제조 방법
TW106102442A TWI682247B (zh) 2016-01-27 2017-01-23 光學裝置、投影光學系統、曝光設備及物品製造方法
CN201710059375.9A CN107015341B (zh) 2016-01-27 2017-01-24 光学设备、投影光学系统、曝光装置及物品制造方法

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2016013620 2016-01-27
JP2016013620 2016-01-27

Publications (3)

Publication Number Publication Date
JP2017134389A JP2017134389A (ja) 2017-08-03
JP2017134389A5 JP2017134389A5 (enExample) 2019-12-26
JP6866131B2 true JP6866131B2 (ja) 2021-04-28

Family

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Family Applications (1)

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JP2016231794A Active JP6866131B2 (ja) 2016-01-27 2016-11-29 光学装置、それを備えた露光装置、および物品の製造方法

Country Status (3)

Country Link
JP (1) JP6866131B2 (enExample)
KR (1) KR102138113B1 (enExample)
TW (1) TWI682247B (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7016661B2 (ja) 2017-10-06 2022-02-07 キヤノン株式会社 露光装置および物品の製造方法
DE102020214800A1 (de) * 2020-11-25 2022-05-25 Carl Zeiss Smt Gmbh Feldfacettensystem und lithographieanlage

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0453072A (ja) * 1990-06-19 1992-02-20 Hitachi Ltd ロータリー型ヘッド位置決め装置
JP2756551B2 (ja) * 1992-10-20 1998-05-25 住友重機械工業株式会社 伝導冷却型超電導磁石装置
JP4817702B2 (ja) * 2005-04-14 2011-11-16 キヤノン株式会社 光学装置及びそれを備えた露光装置
JP2007316132A (ja) * 2006-05-23 2007-12-06 Canon Inc 反射装置
JP2015050353A (ja) * 2013-09-02 2015-03-16 キヤノン株式会社 光学装置、投影光学系、露光装置、並びに物品の製造方法
JP2015065246A (ja) * 2013-09-24 2015-04-09 キヤノン株式会社 光学装置、光学系、露光装置及び物品の製造方法
JP6371576B2 (ja) * 2014-05-02 2018-08-08 キヤノン株式会社 光学装置、投影光学系、露光装置、および物品の製造方法

Also Published As

Publication number Publication date
TW201802607A (zh) 2018-01-16
KR102138113B1 (ko) 2020-07-27
JP2017134389A (ja) 2017-08-03
KR20170089767A (ko) 2017-08-04
TWI682247B (zh) 2020-01-11

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