JP6858640B2 - ScAlMgO4基板及び窒化物半導体装置 - Google Patents
ScAlMgO4基板及び窒化物半導体装置 Download PDFInfo
- Publication number
- JP6858640B2 JP6858640B2 JP2017102862A JP2017102862A JP6858640B2 JP 6858640 B2 JP6858640 B2 JP 6858640B2 JP 2017102862 A JP2017102862 A JP 2017102862A JP 2017102862 A JP2017102862 A JP 2017102862A JP 6858640 B2 JP6858640 B2 JP 6858640B2
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- angle
- nitride semiconductor
- group iii
- scalmgo
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 239000000758 substrate Substances 0.000 title claims description 142
- 150000004767 nitrides Chemical class 0.000 title claims description 87
- 239000004065 semiconductor Substances 0.000 title claims description 87
- 239000013078 crystal Substances 0.000 claims description 42
- 230000003287 optical effect Effects 0.000 claims description 8
- 238000000034 method Methods 0.000 description 13
- 229910052594 sapphire Inorganic materials 0.000 description 12
- 239000010980 sapphire Substances 0.000 description 12
- 238000004519 manufacturing process Methods 0.000 description 9
- 239000002994 raw material Substances 0.000 description 9
- 238000003776 cleavage reaction Methods 0.000 description 8
- 238000010586 diagram Methods 0.000 description 8
- 230000007017 scission Effects 0.000 description 8
- 229910052782 aluminium Inorganic materials 0.000 description 7
- 229910052733 gallium Inorganic materials 0.000 description 7
- 229910052738 indium Inorganic materials 0.000 description 7
- 239000011777 magnesium Substances 0.000 description 7
- 238000000879 optical micrograph Methods 0.000 description 7
- 230000015572 biosynthetic process Effects 0.000 description 6
- 238000002488 metal-organic chemical vapour deposition Methods 0.000 description 6
- 238000003825 pressing Methods 0.000 description 6
- JMASRVWKEDWRBT-UHFFFAOYSA-N Gallium nitride Chemical compound [Ga]#N JMASRVWKEDWRBT-UHFFFAOYSA-N 0.000 description 5
- 239000006061 abrasive grain Substances 0.000 description 5
- 238000005498 polishing Methods 0.000 description 5
- VTLYFUHAOXGGBS-UHFFFAOYSA-N Fe3+ Chemical compound [Fe+3] VTLYFUHAOXGGBS-UHFFFAOYSA-N 0.000 description 4
- 229910052793 cadmium Inorganic materials 0.000 description 4
- 229910052802 copper Inorganic materials 0.000 description 4
- 230000007547 defect Effects 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 229910052742 iron Inorganic materials 0.000 description 4
- 229910052747 lanthanoid Inorganic materials 0.000 description 4
- 150000002602 lanthanoids Chemical class 0.000 description 4
- 229910052749 magnesium Inorganic materials 0.000 description 4
- 229910052748 manganese Inorganic materials 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 229910052727 yttrium Inorganic materials 0.000 description 4
- 238000004630 atomic force microscopy Methods 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 230000000737 periodic effect Effects 0.000 description 3
- 230000003746 surface roughness Effects 0.000 description 3
- 238000003786 synthesis reaction Methods 0.000 description 3
- 229910052725 zinc Inorganic materials 0.000 description 3
- 229910002704 AlGaN Inorganic materials 0.000 description 2
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- MHYQBXJRURFKIN-UHFFFAOYSA-N C1(C=CC=C1)[Mg] Chemical compound C1(C=CC=C1)[Mg] MHYQBXJRURFKIN-UHFFFAOYSA-N 0.000 description 2
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 description 2
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 2
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 125000004429 atom Chemical group 0.000 description 2
- 238000004140 cleaning Methods 0.000 description 2
- 238000009792 diffusion process Methods 0.000 description 2
- 239000002019 doping agent Substances 0.000 description 2
- 238000000227 grinding Methods 0.000 description 2
- 125000005842 heteroatom Chemical group 0.000 description 2
- 238000002248 hydride vapour-phase epitaxy Methods 0.000 description 2
- 239000001257 hydrogen Substances 0.000 description 2
- 229910052739 hydrogen Inorganic materials 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 2
- 239000000155 melt Substances 0.000 description 2
- 238000002360 preparation method Methods 0.000 description 2
- 229910052706 scandium Inorganic materials 0.000 description 2
- 239000002002 slurry Substances 0.000 description 2
- JLTRXTDYQLMHGR-UHFFFAOYSA-N trimethylaluminium Chemical compound C[Al](C)C JLTRXTDYQLMHGR-UHFFFAOYSA-N 0.000 description 2
- XCZXGTMEAKBVPV-UHFFFAOYSA-N trimethylgallium Chemical compound C[Ga](C)C XCZXGTMEAKBVPV-UHFFFAOYSA-N 0.000 description 2
- IBEFSUTVZWZJEL-UHFFFAOYSA-N trimethylindium Chemical compound C[In](C)C IBEFSUTVZWZJEL-UHFFFAOYSA-N 0.000 description 2
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 229910004205 SiNX Inorganic materials 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 229910021529 ammonia Inorganic materials 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 239000012159 carrier gas Substances 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 239000008119 colloidal silica Substances 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 239000013256 coordination polymer Substances 0.000 description 1
- 229910003460 diamond Inorganic materials 0.000 description 1
- 239000010432 diamond Substances 0.000 description 1
- -1 for example Substances 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- YBMRDBCBODYGJE-UHFFFAOYSA-N germanium oxide Inorganic materials O=[Ge]=O YBMRDBCBODYGJE-UHFFFAOYSA-N 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 230000006698 induction Effects 0.000 description 1
- 230000001939 inductive effect Effects 0.000 description 1
- 229910052741 iridium Inorganic materials 0.000 description 1
- GKOZUEZYRPOHIO-UHFFFAOYSA-N iridium atom Chemical compound [Ir] GKOZUEZYRPOHIO-UHFFFAOYSA-N 0.000 description 1
- 238000004020 luminiscence type Methods 0.000 description 1
- 230000000873 masking effect Effects 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 239000004745 nonwoven fabric Substances 0.000 description 1
- 230000006911 nucleation Effects 0.000 description 1
- 238000010899 nucleation Methods 0.000 description 1
- PVADDRMAFCOOPC-UHFFFAOYSA-N oxogermanium Chemical compound [Ge]=O PVADDRMAFCOOPC-UHFFFAOYSA-N 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 150000003839 salts Chemical group 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 239000007858 starting material Substances 0.000 description 1
- 229910052716 thallium Inorganic materials 0.000 description 1
- BKVIYDNLLOSFOA-UHFFFAOYSA-N thallium Chemical compound [Tl] BKVIYDNLLOSFOA-UHFFFAOYSA-N 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/005—Processes
- H01L33/0062—Processes for devices with an active region comprising only III-V compounds
- H01L33/0066—Processes for devices with an active region comprising only III-V compounds with a substrate not being a III-V compound
- H01L33/007—Processes for devices with an active region comprising only III-V compounds with a substrate not being a III-V compound comprising nitride compounds
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/02—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
- H01L33/16—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies with a particular crystal structure or orientation, e.g. polycrystalline, amorphous or porous
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
- C30B15/36—Single-crystal growth by pulling from a melt, e.g. Czochralski method characterised by the seed, e.g. its crystallographic orientation
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B25/00—Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour-deposition growth
- C30B25/02—Epitaxial-layer growth
- C30B25/18—Epitaxial-layer growth characterised by the substrate
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B25/00—Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour-deposition growth
- C30B25/02—Epitaxial-layer growth
- C30B25/18—Epitaxial-layer growth characterised by the substrate
- C30B25/183—Epitaxial-layer growth characterised by the substrate being provided with a buffer layer, e.g. a lattice matching layer
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B25/00—Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour-deposition growth
- C30B25/02—Epitaxial-layer growth
- C30B25/18—Epitaxial-layer growth characterised by the substrate
- C30B25/186—Epitaxial-layer growth characterised by the substrate being specially pre-treated by, e.g. chemical or physical means
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/10—Inorganic compounds or compositions
- C30B29/16—Oxides
- C30B29/22—Complex oxides
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/10—Inorganic compounds or compositions
- C30B29/40—AIIIBV compounds wherein A is B, Al, Ga, In or Tl and B is N, P, As, Sb or Bi
- C30B29/403—AIII-nitrides
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/10—Inorganic compounds or compositions
- C30B29/40—AIIIBV compounds wherein A is B, Al, Ga, In or Tl and B is N, P, As, Sb or Bi
- C30B29/403—AIII-nitrides
- C30B29/406—Gallium nitride
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02367—Substrates
- H01L21/0237—Materials
- H01L21/0242—Crystalline insulating materials
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02367—Substrates
- H01L21/02433—Crystal orientation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02436—Intermediate layers between substrates and deposited layers
- H01L21/02439—Materials
- H01L21/02455—Group 13/15 materials
- H01L21/02458—Nitrides
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02518—Deposited layers
- H01L21/02521—Materials
- H01L21/02538—Group 13/15 materials
- H01L21/0254—Nitrides
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02612—Formation types
- H01L21/02617—Deposition types
- H01L21/0262—Reduction or decomposition of gaseous compounds, e.g. CVD
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/12—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
- H01L29/20—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed including, apart from doping materials or other impurities, only AIIIBV compounds
- H01L29/2003—Nitride compounds
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/20—Structure or shape of the semiconductor body to guide the optical wave ; Confining structures perpendicular to the optical axis, e.g. index or gain guiding, stripe geometry, broad area lasers, gain tailoring, transverse or lateral reflectors, special cladding structures, MQW barrier reflection layers
- H01S5/22—Structure or shape of the semiconductor body to guide the optical wave ; Confining structures perpendicular to the optical axis, e.g. index or gain guiding, stripe geometry, broad area lasers, gain tailoring, transverse or lateral reflectors, special cladding structures, MQW barrier reflection layers having a ridge or stripe structure
- H01S5/2205—Structure or shape of the semiconductor body to guide the optical wave ; Confining structures perpendicular to the optical axis, e.g. index or gain guiding, stripe geometry, broad area lasers, gain tailoring, transverse or lateral reflectors, special cladding structures, MQW barrier reflection layers having a ridge or stripe structure comprising special burying or current confinement layers
- H01S5/2214—Structure or shape of the semiconductor body to guide the optical wave ; Confining structures perpendicular to the optical axis, e.g. index or gain guiding, stripe geometry, broad area lasers, gain tailoring, transverse or lateral reflectors, special cladding structures, MQW barrier reflection layers having a ridge or stripe structure comprising special burying or current confinement layers based on oxides or nitrides
- H01S5/2216—Structure or shape of the semiconductor body to guide the optical wave ; Confining structures perpendicular to the optical axis, e.g. index or gain guiding, stripe geometry, broad area lasers, gain tailoring, transverse or lateral reflectors, special cladding structures, MQW barrier reflection layers having a ridge or stripe structure comprising special burying or current confinement layers based on oxides or nitrides nitrides
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Organic Chemistry (AREA)
- Power Engineering (AREA)
- Metallurgy (AREA)
- Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Manufacturing & Machinery (AREA)
- General Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Inorganic Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Geometry (AREA)
- Electromagnetism (AREA)
- Optics & Photonics (AREA)
- Ceramic Engineering (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Led Devices (AREA)
- Chemical Vapour Deposition (AREA)
Description
本開示のRAMO4基板は、一般式RAMO4で表される単結晶体(一般式において、Rは、Sc、In、Y、およびランタノイド系元素(原子番号67−71)からなる群から選択される一つまたは複数の三価の元素を表し、Aは、Fe(III)、Ga、およびAlからなる群から選択される一つまたは複数の三価の元素を表し、Mは、Mg、Mn、Fe(II)、Co、Cu、Zn、およびCdからなる群から選択される一つまたは複数の二価の元素を表す)からなる基板であり、その主面は、C面からM軸方向[1−100]および/またはA軸方向[11−20]に対して傾いたオフ角を有する。本開示では主面が種々のオフ角を有するRAMO4基板を形成し、その主面上にIII族窒化物半導体をエピタキシャル成長させて、当該III族窒化物半導体層の性能を評価することで、RAMO4基板に対して適切なオフ角、およびオフ方向を見出した。本開示のオフ角、およびオフ方向を有するRAMO4基板は、高品質なIII族窒化物半導体用ヘテロ基板として非常に有用である。以下、RAMO4基板の代表例であるScMgAlO4基板を例に説明するが、本開示のRAMO4基板は、これに限定されない。
ScMgAlO4の結晶構造を図1に示す。ScMgAlO4の結晶は六方晶であるMgAlO2層とロックソルト構造であるScO層が[0001]方向(C軸方向)に積層された構造を取っている。一般的な劈開にて形成される(0001)面(C面)はMgAlO2層からなる。ScMgAlO4の結晶において、[0001]方向の結晶格子(c)は25.160Åであり、オフ角を形成することで出現するステップ高さは25.160÷3=8.387Åとなる。このステップ高さはIII族窒化物であるGaN基板に出現するステップ高さ(2.593Å)や、サファイア基板(C面)に出現するステップ高さ(2.165Å)と比較して大きな値である。そして、ステップ高さは、形成されるステップの(0001)面に平行な長さ(テラス幅)にも影響する。図2に示すようにScMgAlO4結晶では、GaN基板やサファイア基板と同一オフ角度としても、これらに比べて長いテラス幅を持つ表面形状となる。
次に、実施の形態2のScAlMgO4基板について説明する。本実施の形態のScAlMgO4基板は、主面がC面(0001)面から、M面(1−100)に対して略平行方向にオフ角b(θb)を有し、オフ角aを有さない、すなわち、主面がC面(0001)からA軸方向[11−20]に対してθb°傾いたオフ角bを有する。このようなオフ角bを有するScAlMgO4基板の作製方法は、前述の実施の形態1のとScAlMgO4基板の作製方法と同様である。ただし、上述のオフ角形成工程において、オフ方向およびオフ角を調整する。
次に実施の形態3のScAlMgO4基板について説明する。本実施の形態のScAlMgO4基板は、主面がC面(0001面)からM軸方向対してθa°、A軸方向に対してθb°傾いている。つまり、オフ角aおよびオフ角bの合成オフ角を備えている。このようなオフ角aおよびオフ角bを有するScAlMgO4基板の作製方法は、前述の実施の形態1と同様である。ただし、上述のオフ角形成工程において、オフ方向およびオフ角を調整する。
上述の実施の形態1〜3では、それぞれ厚さ2μmのGaN膜を形成して、ScAlMgO4基板の性能を検証したが、ScAlMgO4基板の主面上に形成するIII族窒化物半導体層の厚さは1μm以上であれば、III族窒化物半導体層の表面が平坦化することから同様の効果を得ることが出来る。また、ScAlMgO4基板の主面上には、HVPE法などを用いて0.1mm以上のGaN厚膜を形成することも可能である。
上述のRAMO4基板を用いたIII族窒化物半導体装置について説明する。III族窒化物半導体装置は、例えば図11に示すようなIII族窒化物半導体LEDデバイスとすることができる。ただし、III族窒化物半導体装置は、LEDデバイスに限定されず、LD等の半導体デバイス、高周波、高出力用途の電子デバイス等とすることができる。
102 バッファ層
103 III族窒化物半導体層(アンドープGaN層)
104 n−III族窒化物半導体層(n−GaN層)
105 InGaN活性層
106 p−III族窒化物半導体層(p−GaN層)
107 p−コンタクト層
108 n電極
109 p電極
Claims (6)
- ScAlMgO4で表される単結晶体からなるScAlMgO 4 基板であって、
前記ScAlMgO4基板の主面が、C面からM軸方向に対してθa°傾いたオフ角aと、C面からA軸方向に対してθb°傾いたオフ角bとを有しており、
0.2°≦|θa|≦0.6°を満たし、かつ0.1°≦|θb|≦0.4°を満たす、ScAlMgO4基板。 - θb≠0.4である、請求項1に記載のScAlMgO4基板。
- 前記主面上にIII族窒化物半導体が配される、請求項1または2に記載のScAlMgO4基板。
- 前記III族窒化物半導体がGaNである、請求項3に記載のScAlMgO4基板。
- 請求項1〜4のいずれか一項に記載のScAlMgO4基板と、
前記ScAlMgO4基板上に配されたIII族窒化物半導体素子と、を備える、
III族窒化物半導体装置。 - 前記III族窒化物半導体素子は光デバイスまたは電子デバイスである、請求項5に記載のIII族窒化物半導体装置。
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2017102862A JP6858640B2 (ja) | 2017-05-24 | 2017-05-24 | ScAlMgO4基板及び窒化物半導体装置 |
CN201810467353.0A CN108963042B (zh) | 2017-05-24 | 2018-05-16 | Ramo4基板及氮化物半导体装置 |
US15/984,801 US10411154B2 (en) | 2017-05-24 | 2018-05-21 | RAMO4 substrate and nitride semiconductor apparatus |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2017102862A JP6858640B2 (ja) | 2017-05-24 | 2017-05-24 | ScAlMgO4基板及び窒化物半導体装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2018197179A JP2018197179A (ja) | 2018-12-13 |
JP6858640B2 true JP6858640B2 (ja) | 2021-04-14 |
Family
ID=64401476
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2017102862A Active JP6858640B2 (ja) | 2017-05-24 | 2017-05-24 | ScAlMgO4基板及び窒化物半導体装置 |
Country Status (3)
Country | Link |
---|---|
US (1) | US10411154B2 (ja) |
JP (1) | JP6858640B2 (ja) |
CN (1) | CN108963042B (ja) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP7182262B2 (ja) * | 2018-12-10 | 2022-12-02 | パナソニックIpマネジメント株式会社 | Ramo4基板およびその製造方法、ならびにiii族窒化物半導体 |
WO2023214590A1 (ja) * | 2022-05-06 | 2023-11-09 | 株式会社福田結晶技術研究所 | 高品質・低コストGaN自立基板の製造方法 |
Family Cites Families (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3669848B2 (ja) * | 1998-09-16 | 2005-07-13 | 日亜化学工業株式会社 | 窒化物半導体レーザ素子 |
JP4131293B2 (ja) | 2004-04-02 | 2008-08-13 | 日亜化学工業株式会社 | 窒化物半導体レーザ素子及び窒化物半導体素子 |
JP2009029688A (ja) * | 2007-06-28 | 2009-02-12 | Rohm Co Ltd | ZnO系基板及びZnO系基板の処理方法 |
JP2009043920A (ja) * | 2007-08-08 | 2009-02-26 | Rohm Co Ltd | p型MgZnO系薄膜及び半導体発光素子 |
TW200933754A (en) * | 2007-08-27 | 2009-08-01 | Rohm Co Ltd | Zno-based thin film and semiconductor element |
JP5392885B2 (ja) * | 2007-11-22 | 2014-01-22 | ローム株式会社 | ZnO系半導体素子 |
JP2009179534A (ja) * | 2008-01-31 | 2009-08-13 | Rohm Co Ltd | ZnO系基板及びZnO系基板の処理方法 |
US20130200391A1 (en) * | 2010-09-28 | 2013-08-08 | North Carolina State University | Gallium nitride based structures with embedded voids and methods for their fabrication |
KR20130140048A (ko) * | 2010-11-02 | 2013-12-23 | 코닌클리케 필립스 엔.브이. | 향상된 추출 효율을 가진 발광 디바이스 |
JP6514915B2 (ja) | 2014-02-28 | 2019-05-15 | 国立大学法人東北大学 | 単結晶基板の製造方法およびレーザ素子の製造方法 |
CN106460228B (zh) * | 2014-03-03 | 2019-04-26 | 国立大学法人大阪大学 | Iii族氮化物结晶的制造方法及iii族氮化物结晶制造装置 |
CN107230662B (zh) * | 2016-03-25 | 2019-04-09 | 松下知识产权经营株式会社 | Ramo4基板 |
-
2017
- 2017-05-24 JP JP2017102862A patent/JP6858640B2/ja active Active
-
2018
- 2018-05-16 CN CN201810467353.0A patent/CN108963042B/zh active Active
- 2018-05-21 US US15/984,801 patent/US10411154B2/en active Active
Also Published As
Publication number | Publication date |
---|---|
CN108963042A (zh) | 2018-12-07 |
JP2018197179A (ja) | 2018-12-13 |
CN108963042B (zh) | 2022-07-26 |
US20180342644A1 (en) | 2018-11-29 |
US10411154B2 (en) | 2019-09-10 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
TWI490918B (zh) | 半極性氮化(鋁,銦,鎵,硼)之改良成長方法 | |
US9343525B2 (en) | Aluminum nitride substrate and group-III nitride laminate | |
US7687293B2 (en) | Method for enhancing growth of semipolar (Al,In,Ga,B)N via metalorganic chemical vapor deposition | |
JP5638198B2 (ja) | ミスカット基板上のレーザダイオード配向 | |
TWI404122B (zh) | 增進半-極性(Al,In,Ga,B)N藉由金屬有機化學氣相沈積生長之方法 | |
JP2011119761A (ja) | Iii−v族窒化物系半導体基板 | |
JP5665463B2 (ja) | Iii族窒化物半導体素子製造用基板およびiii族窒化物半導体自立基板またはiii族窒化物半導体素子の製造方法 | |
JP2002255694A (ja) | 半導体用基板とその製造方法 | |
JP6242941B2 (ja) | Iii族窒化物半導体及びその製造方法 | |
JP4525309B2 (ja) | Iii−v族窒化物系半導体基板の評価方法 | |
JP2011042542A (ja) | Iii族窒化物基板の製造方法およびiii族窒化物基板 | |
JP6858640B2 (ja) | ScAlMgO4基板及び窒化物半導体装置 | |
KR100841269B1 (ko) | Ⅲ족 질화물 반도체 다층구조물 | |
JP3934320B2 (ja) | GaN系半導体素子とその製造方法 | |
JP5129186B2 (ja) | Iii族窒化物半導体層の製造方法 | |
JP5015480B2 (ja) | 半導体単結晶基板の製造方法 | |
JPWO2012128378A1 (ja) | 第13族金属窒化物の製造方法およびこれに用いる種結晶基板 | |
JP2005263609A (ja) | Iii−v族窒化物系半導体基板及びその製造ロット、並びにiii−v族窒化物系半導体デバイス及びその製造方法 | |
JP4993627B2 (ja) | Iii族窒化物半導体層の製造方法 | |
JP5304715B2 (ja) | Iii−v族窒化物系半導体基板 | |
JP4420128B2 (ja) | Iii−v族窒化物系半導体デバイス及びその製造方法 | |
JP2018100213A (ja) | Iii族窒化物半導体基板、及び、iii族窒化物半導体基板の製造方法 | |
JPH11219904A (ja) | 化合物半導体基板、その製造方法および化合物半導体発光素子 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20190626 |
|
RD02 | Notification of acceptance of power of attorney |
Free format text: JAPANESE INTERMEDIATE CODE: A7422 Effective date: 20190718 |
|
RD04 | Notification of resignation of power of attorney |
Free format text: JAPANESE INTERMEDIATE CODE: A7424 Effective date: 20191121 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20200324 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20200325 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20200514 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20201027 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20201118 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20210316 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20210324 |
|
R151 | Written notification of patent or utility model registration |
Ref document number: 6858640 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R151 |