JP6853065B2 - プラズマおよび蒸気処理の組み合わせを用いたal2o3の原子層エッチング - Google Patents
プラズマおよび蒸気処理の組み合わせを用いたal2o3の原子層エッチング Download PDFInfo
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- JP6853065B2 JP6853065B2 JP2017035708A JP2017035708A JP6853065B2 JP 6853065 B2 JP6853065 B2 JP 6853065B2 JP 2017035708 A JP2017035708 A JP 2017035708A JP 2017035708 A JP2017035708 A JP 2017035708A JP 6853065 B2 JP6853065 B2 JP 6853065B2
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- H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
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Description
本発明は、以下の適用例としても実現可能である。
<適用例1>
基板上で原子層エッチング(ALE)を実施するための方法であって、
(a)前記基板の表面上で、前記基板表面の少なくとも1つの単分子層を改質層に変換するように構成された表面改質動作を実施することと、
(b)前記基板表面上で、前記基板表面から前記改質層を除去するように構成された除去動作を実施することであって、前記改質層を除去することは、前記改質層を揮発させるように構成された配位子交換反応を介して起こることと、
(c)前記除去動作に続いて、前記基板表面上で、前記基板表面からの前記除去動作によって生成された残留物を除去するように構成されたプラズマ処理を実施することであって、前記残留物は、前記プラズマ処理によって揮発されることと、
(d)前記基板表面から所定の厚さがエッチングされるまで、動作(a)から(c)を繰り返すことと
を備える、方法。
<適用例2>
適用例1に記載の方法であって、
前記表面改質動作を実施することは、前記基板表面をフッ素含有プラズマに曝露することを含み、前記フッ素含有プラズマへの前記曝露は、前記基板表面の前記少なくとも1つの単分子層をフッ素種に変換するように構成される、方法。
<適用例3>
適用例2に記載の方法であって、
前記基板表面は、金属、金属酸化物、金属窒化物、金属リン化物、金属硫化物、または金属ヒ化物を含み、
前記フッ素含有プラズマへの前記曝露は、金属フッ化物を形成する、方法。
<適用例4>
適用例2に記載の方法であって、
前記基板表面を前記フッ素含有プラズマに曝露することは、フッ素含有ガスを前記基板が配置されているチャンバ内に導入し、プラズマを点弧することを含む、方法。
<適用例5>
適用例4に記載の方法であって、
前記フッ素含有プラズマへの前記曝露は、約15秒より短い期間に、約10mTorrから500mTorrのチャンバ圧力で実施される、方法。
<適用例6>
適用例2に記載の方法であって、
前記除去動作を実施することは、前記基板表面をスズ(II)アセチルアセトネート(Sn(acac) 2 )蒸気に曝露することを含み、前記Sn(acac) 2 蒸気への前記曝露は、acac配位子を前記改質層のフッ素原子と交換するように構成される、方法。
<適用例7>
適用例6に記載の方法であって、
前記基板表面を前記Sn(acac) 2 に曝露することは、前記Sn(acac) 2 を前記基板が配置されているチャンバ内に蒸気として導入することを含む、方法。
<適用例8>
適用例7に記載の方法であって、
前記Sn(acac) 2 への前記曝露は、約1秒から30秒の期間に実施される、方法。
<適用例9>
適用例6に記載の方法であって、
前記プラズマ処理を実施することは、前記基板表面を水素プラズマに曝露することを含み、前記水素プラズマへの前記曝露は、前記基板表面上で、スズ、フッ化スズ、または酸化スズの残留物を揮発させるように構成される、方法。
<適用例10>
適用例9に記載の方法であって、
前記基板表面を前記水素プラズマに曝露することは、水素ガスを前記基板が配置されているチャンバ内に導入し、プラズマを点弧することを含む、方法。
<適用例11>
適用例10に記載の方法であって、
前記水素プラズマへの前記曝露は、約1秒から30秒の期間に実施される、方法。
<適用例12>
適用例1に記載の方法であって、
動作(a)は、第1のチャンバで実施され、
動作(b)は、第2のチャンバで実施される、方法。
<適用例13>
適用例12に記載の方法であって、
動作(d)は、前記第1のチャンバで実施される、方法。
<適用例14>
適用例12に記載の方法であって、
動作(d)は、第3のチャンバで実施される、方法。
<適用例15>
基板上で原子層エッチング(ALE)を実施するための方法であって、
(a)前記基板の表面上で、前記基板表面の少なくとも1つの単分子層を改質層に変換するように構成された表面改質動作を実施することと、
(b)前記基板表面上で、前記基板表面から前記改質層を除去するように構成された除去動作を実施することであって、前記改質層を除去することは、前記改質層を揮発させるように構成される配位子交換反応を介して起こることと、
(c)所定回数のサイクルの間、動作(a)および(b)を繰り返すことと、
(d)動作(c)に続いて、前記基板表面上で、前記基板表面からの前記除去動作によって生成された残留物を除去するように構成されたプラズマ処理を実施することであって、前記残留物は、前記プラズマ処理によって揮発されることと、
(e)前記基板表面から所定の厚さがエッチングされるまで、動作(a)から(d)を繰り返すことと
を備える、方法。
<適用例16>
適用例15に記載の方法であって、
前記表面改質動作を実施することは、前記基板表面をフッ素含有プラズマに曝露することを含み、前記フッ素含有プラズマへの前記曝露は、前記基板表面の前記少なくとも1つの単分子層をフッ素種に変換するように構成され、
前記除去動作を実施することは、前記基板表面をスズ(II)アセチルアセトネート(Sn(acac) 2 )蒸気に曝露することを含み、前記Sn(acac) 2 蒸気への前記曝露は、acac配位子を前記改質層のフッ素原子と交換するように構成され、
前記プラズマ処理を実施することは、前記基板表面を水素プラズマに曝露することを含み、前記水素プラズマへの前記曝露は、前記基板表面上で、スズ、フッ化スズ、または酸化スズの残留物を揮発させるように構成される、方法。
<適用例17>
適用例16に記載の方法であって、
前記基板表面は、金属、金属酸化物、金属窒化物、金属リン化物、金属硫化物、または金属ヒ化物を含み、
前記フッ素含有プラズマへの前記曝露は、金属フッ化物を形成する、方法。
<適用例18>
適用例16に記載の方法であって、
前記フッ素含有プラズマへの前記曝露は、約15秒より短い期間に、約10mTorrから500mTorrのチャンバ圧力で実施され、
前記Sn(acac) 2 への前記曝露は、約1秒から30秒の期間に実施され、
前記水素プラズマへの前記曝露は、約1秒から30秒の期間に実施される、方法。
Claims (20)
- 基板上で原子層エッチング(ALE)を実施するための方法であって、
(a)前記基板の表面上で、前記基板表面の少なくとも1つの単分子層を改質層に変換するように構成された表面改質動作を実施することと、
(b)前記基板表面上で、前記基板表面から前記改質層を除去するように構成された除去動作を実施することであって、前記改質層を除去することは、金属錯体と前記改質層の変換種との間で配位子交換反応が起こるように前記基板表面を前記金属錯体に曝露することを含むことと、
(c)前記除去動作に続いて、前記基板表面上で、前記基板表面の前記金属錯体への前記曝露から形成された残留物を除去するように構成されたプラズマ処理を実施することであって、前記残留物は、前記プラズマ処理によって揮発されることと、
(d)前記基板表面から所定の厚さがエッチングされるまで、動作(a)から(c)を繰り返すことと
を備える、方法。 - 請求項1に記載の方法であって、
前記基板表面は、金属、金属酸化物、金属窒化物、金属リン化物、金属硫化物、または金属ヒ化物を含む、方法。 - 請求項1に記載の方法であって、
前記表面改質動作を実施することは、前記基板表面をハロゲン含有プラズマに曝露することを含み、前記ハロゲン含有プラズマへの前記曝露は、前記基板表面の前記少なくとも1つの単分子層をハロゲン種に変換するように構成される、方法。 - 請求項3に記載の方法であって、
前記基板表面を前記ハロゲン含有プラズマに曝露することは、ハロゲン含有ガスを前記基板が配置されているチャンバ内に導入し、プラズマを点弧することを含む、方法。 - 請求項3に記載の方法であって、
前記基板表面を前記ハロゲン含有プラズマに曝露することは、前記ハロゲン含有プラズマを遠隔プラズマ源から受け取ることを含む、方法。 - 請求項1に記載の方法であって、
前記除去動作を実施することは、前記基板表面をスズ(II)アセチルアセトネート(Sn(acac)2)蒸気に曝露することを含み、前記Sn(acac)2蒸気への前記曝露は、acac配位子を前記改質層の原子と交換するように構成される、方法。 - 請求項1に記載の方法であって、
前記プラズマ処理を実施することは、前記基板表面を水素プラズマに曝露することを含む、方法。 - 請求項7に記載の方法であって、
前記基板表面を前記水素プラズマに曝露することは、水素ガスを前記基板が配置されているチャンバ内に導入し、プラズマを点弧することを含む、方法。 - 請求項7に記載の方法であって、
前記基板表面を前記水素プラズマに曝露することは、前記水素プラズマを遠隔プラズマ源から受け取ることを含む、方法。 - 請求項1に記載の方法であって、
動作(a)は、第1のチャンバで実施され、
動作(b)は、第2のチャンバで実施される、方法。 - 基板上で原子層エッチング(ALE)を実施するための方法であって、
(a)前記基板の表面上で、前記基板表面の少なくとも1つの単分子層を改質層に変換するように構成された表面改質動作を実施することと、
(b)前記基板表面上で、前記基板表面から前記改質層を除去するように構成された除去動作を実施することであって、前記改質層を除去することは、金属錯体と前記改質層の変換種との間で配位子交換反応が起こるように前記基板表面を前記金属錯体に曝露することを含むことと、
(c)所定回数のサイクルの間、動作(a)および(b)を繰り返すことと、
(d)動作(c)に続いて、前記基板表面上で、前記基板表面の前記金属錯体への前記曝露から形成された残留物を除去するように構成されたプラズマ処理を実施することであって、前記残留物は、前記プラズマ処理によって揮発されることと、
(e)前記基板表面から所定の厚さがエッチングされるまで、動作(a)から(d)を繰り返すことと
を備える、方法。 - 請求項11に記載の方法であって、
前記基板表面は、金属、金属酸化物、金属窒化物、金属リン化物、金属硫化物、または金属ヒ化物を含む、方法。 - 請求項11に記載の方法であって、
前記表面改質動作を実施することは、前記基板表面をハロゲン含有プラズマに曝露することを含み、前記ハロゲン含有プラズマへの前記曝露は、前記基板表面の前記少なくとも1つの単分子層をハロゲン種に変換するように構成される、方法。 - 請求項13に記載の方法であって、
前記基板表面を前記ハロゲン含有プラズマに曝露することは、ハロゲン含有ガスを前記基板が配置されているチャンバ内に導入し、プラズマを点弧することを含む、方法。 - 請求項13に記載の方法であって、
前記基板表面を前記ハロゲン含有プラズマに曝露することは、前記ハロゲン含有プラズマを遠隔プラズマ源から受け取ることを含む、方法。 - 請求項11に記載の方法であって、
前記除去動作を実施することは、前記基板表面をスズ(II)アセチルアセトネート(Sn(acac)2)蒸気に曝露することを含み、前記Sn(acac)2蒸気への前記曝露は、acac配位子を前記改質層の原子と交換するように構成される、方法。 - 請求項11に記載の方法であって、
前記プラズマ処理を実施することは、前記基板表面を水素プラズマに曝露することを含む、方法。 - 請求項17に記載の方法であって、
前記基板表面を前記水素プラズマに曝露することは、水素ガスを前記基板が配置されているチャンバ内に導入し、プラズマを点弧することを含む、方法。 - 請求項17に記載の方法であって、
前記基板表面を前記水素プラズマに曝露することは、前記水素プラズマを遠隔プラズマ源から受け取ることを含む、方法。 - 請求項11に記載の方法であって、
動作(a)は、第1のチャンバで実施され、
動作(b)は、第2のチャンバで実施される、方法。
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JP2022185118A (ja) * | 2017-02-27 | 2022-12-13 | ラム リサーチ コーポレーション | 原子層エッチングにおける方向性の制御 |
JP7423723B2 (ja) | 2017-02-27 | 2024-01-29 | ラム リサーチ コーポレーション | 原子層エッチングにおける方向性の制御 |
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TW201738954A (zh) | 2017-11-01 |
US10256108B2 (en) | 2019-04-09 |
KR20170102429A (ko) | 2017-09-11 |
US10784118B2 (en) | 2020-09-22 |
CN107146755A (zh) | 2017-09-08 |
US20170256416A1 (en) | 2017-09-07 |
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TWI750151B (zh) | 2021-12-21 |
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