JP6849676B2 - 反射型空間光変調器、光観察装置及び光照射装置 - Google Patents
反射型空間光変調器、光観察装置及び光照射装置 Download PDFInfo
- Publication number
- JP6849676B2 JP6849676B2 JP2018522485A JP2018522485A JP6849676B2 JP 6849676 B2 JP6849676 B2 JP 6849676B2 JP 2018522485 A JP2018522485 A JP 2018522485A JP 2018522485 A JP2018522485 A JP 2018522485A JP 6849676 B2 JP6849676 B2 JP 6849676B2
- Authority
- JP
- Japan
- Prior art keywords
- light
- input
- electro
- optical
- light modulator
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 239000013078 crystal Substances 0.000 claims description 101
- 230000003287 optical effect Effects 0.000 claims description 44
- 239000000758 substrate Substances 0.000 claims description 39
- 239000012790 adhesive layer Substances 0.000 claims description 37
- 230000005684 electric field Effects 0.000 claims description 15
- 239000003989 dielectric material Substances 0.000 claims description 11
- 239000000463 material Substances 0.000 claims description 8
- 239000000853 adhesive Substances 0.000 claims description 6
- 230000001070 adhesive effect Effects 0.000 claims description 6
- 239000000843 powder Substances 0.000 claims description 3
- 239000010410 layer Substances 0.000 description 12
- 238000001514 detection method Methods 0.000 description 11
- 229910052751 metal Inorganic materials 0.000 description 9
- 239000002184 metal Substances 0.000 description 9
- 238000010586 diagram Methods 0.000 description 5
- 230000006870 function Effects 0.000 description 3
- 239000002245 particle Substances 0.000 description 3
- 230000010287 polarization Effects 0.000 description 3
- 230000005374 Kerr effect Effects 0.000 description 2
- 230000005697 Pockels effect Effects 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 230000001427 coherent effect Effects 0.000 description 2
- 238000000151 deposition Methods 0.000 description 2
- 230000005686 electrostatic field Effects 0.000 description 2
- 229920006332 epoxy adhesive Polymers 0.000 description 2
- 230000005284 excitation Effects 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 230000001902 propagating effect Effects 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 239000004593 Epoxy Substances 0.000 description 1
- 229910005805 NiNb Inorganic materials 0.000 description 1
- 238000000149 argon plasma sintering Methods 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 239000011162 core material Substances 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 239000003822 epoxy resin Substances 0.000 description 1
- 239000007850 fluorescent dye Substances 0.000 description 1
- 102000034287 fluorescent proteins Human genes 0.000 description 1
- 108091006047 fluorescent proteins Proteins 0.000 description 1
- 239000003365 glass fiber Substances 0.000 description 1
- 238000005286 illumination Methods 0.000 description 1
- 238000003384 imaging method Methods 0.000 description 1
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 description 1
- 230000006698 induction Effects 0.000 description 1
- 230000005693 optoelectronics Effects 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
- 210000001747 pupil Anatomy 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 230000000087 stabilizing effect Effects 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/03—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on ceramics or electro-optical crystals, e.g. exhibiting Pockels effect or Kerr effect
- G02F1/0305—Constructional arrangements
- G02F1/0311—Structural association of optical elements, e.g. lenses, polarizers, phase plates, with the crystal
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B21/00—Microscopes
- G02B21/0004—Microscopes specially adapted for specific applications
- G02B21/002—Scanning microscopes
- G02B21/0024—Confocal scanning microscopes (CSOMs) or confocal "macroscopes"; Accessories which are not restricted to use with CSOMs, e.g. sample holders
- G02B21/0032—Optical details of illumination, e.g. light-sources, pinholes, beam splitters, slits, fibers
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B21/00—Microscopes
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/03—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on ceramics or electro-optical crystals, e.g. exhibiting Pockels effect or Kerr effect
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/03—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on ceramics or electro-optical crystals, e.g. exhibiting Pockels effect or Kerr effect
- G02F1/0305—Constructional arrangements
- G02F1/0316—Electrodes
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/03—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on ceramics or electro-optical crystals, e.g. exhibiting Pockels effect or Kerr effect
- G02F1/035—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on ceramics or electro-optical crystals, e.g. exhibiting Pockels effect or Kerr effect in an optical waveguide structure
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/29—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the position or the direction of light beams, i.e. deflection
- G02F1/292—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the position or the direction of light beams, i.e. deflection by controlled diffraction or phased-array beam steering
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
- H04N23/00—Cameras or camera modules comprising electronic image sensors; Control thereof
- H04N23/45—Cameras or camera modules comprising electronic image sensors; Control thereof for generating image signals from two or more image sensors being of different type or operating in different modes, e.g. with a CMOS sensor for moving images in combination with a charge-coupled device [CCD] for still images
Description
図1は、一実施形態に係る光観察装置の構成を示すブロック図である。光観察装置1Aは、例えば、観察の対象物を撮像するための蛍光顕微鏡である。光観察装置1Aは、試料(対象物)Sの表面に入力光L1を照射し、それに伴って試料Sから出力される蛍光又は反射光等の検出光L3を撮像することで、試料Sの画像を取得する。
Rs<R ・・・(3)
本実施形態に係る空間光変調器200では、透明基板104による電気光学結晶101の支持の構成が第1実施形態の空間光変調器100と相違している。以下、主として第1実施形態と相違する点について説明し、同一の要素や部材については同一の符号を付して詳しい説明を省略する。
本実施形態に係る空間光変調器300は、光反射部307が補助電極(第3電極)309aを有する点で第2実施形態の空間光変調器200と相違している。以下、主として第2実施形態と相違する点について説明し、同一の要素や部材については同一の符号を付して詳しい説明を省略する。
Claims (11)
- 入力光を変調し、変調された変調光を出力する反射型空間光変調器であって、
前記入力光が入力される入力面と、前記入力面に対向する裏面とを有し、比誘電率が1000以上であるペロブスカイト型の電気光学結晶と、
前記電気光学結晶の前記入力面に配置され、前記入力光を透過する第1電極を有する光入出力部と、
複数の第2電極を含む画素電極部、及び、前記画素電極部を前記裏面に固定する接着層を含み、前記電気光学結晶の前記裏面に配置され、前記入力光を前記光入出力部に向けて反射する光反射部と、
前記第1電極と前記複数の第2電極との間に電界を印加する駆動回路と、を備え、
前記接着層は、非導電性の接着材料の硬化物と、前記硬化物中に含有される粉体からなる誘電体材料とを有している、反射型空間光変調器。 - 前記光入出力部は、前記入力光が入力される第1の面と、前記第1の面の反対側の面である第2の面を有する透明基板を更に備え、前記第1電極は、前記透明基板の前記第2の面に配置される、請求項1記載の反射型空間光変調器。
- 前記第1電極は、前記入力面の全面に形成されている、請求項1〜3のいずれか一項に記載の反射型空間光変調器。
- 前記光反射部は、前記複数の第2電極に対向するように、前記電気光学結晶の前記裏面に配置された複数の第3電極を更に含む、請求項1〜4のいずれか一項に記載の反射型空間光変調器。
- 前記光反射部では、前記複数の第3電極によって前記入力光を反射する、請求項5に記載の反射型空間光変調器。
- 前記光反射部では、前記複数の第2電極によって前記入力光を反射する、請求項1〜5のいずれか一項に記載の反射型空間光変調器。
- 前記電気光学結晶は、KTa1-xNbxO3(0≦x≦1、KTN)結晶、K1-yLiyTa1-xNbxO3(0≦x≦1、0<y<1、KLTN)結晶、又はPLZT結晶である、請求項1〜7のいずれか一項に記載の反射型空間光変調器。
- 前記電気光学結晶の温度を制御する温度制御素子をさらに備える、請求項1〜8のいずれか一項に記載の反射型空間光変調器。
- 前記入力光を出力する光源と、請求項1〜9のいずれか一項に記載の反射型空間光変調器と、前記反射型空間光変調器から出力された変調光を対象物に照射する光学系と、前記対象物から出力された光を検出する光検出器と、を有する、光観察装置。
- 前記入力光を出力する光源と、請求項1〜9のいずれか一項に記載の反射型空間光変調器と、前記反射型空間光変調器から出力された変調光を対象物に照射する光学系と、を有する、光照射装置。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2016112854 | 2016-06-06 | ||
JP2016112854 | 2016-06-06 | ||
PCT/JP2017/020871 WO2017213100A1 (ja) | 2016-06-06 | 2017-06-05 | 反射型空間光変調器、光観察装置及び光照射装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPWO2017213100A1 JPWO2017213100A1 (ja) | 2019-04-04 |
JP6849676B2 true JP6849676B2 (ja) | 2021-03-24 |
Family
ID=60577832
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2018522485A Active JP6849676B2 (ja) | 2016-06-06 | 2017-06-05 | 反射型空間光変調器、光観察装置及び光照射装置 |
Country Status (5)
Country | Link |
---|---|
US (1) | US11156816B2 (ja) |
JP (1) | JP6849676B2 (ja) |
CN (1) | CN109313363B (ja) |
DE (1) | DE112017002833T5 (ja) |
WO (1) | WO2017213100A1 (ja) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN114077013A (zh) * | 2020-08-21 | 2022-02-22 | 华为技术有限公司 | 空间光调制器和波长选择开关 |
Family Cites Families (39)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3938878A (en) * | 1970-01-09 | 1976-02-17 | U.S. Philips Corporation | Light modulator |
JPS533841A (en) | 1976-07-01 | 1978-01-13 | Sumitomo Electric Ind Ltd | Manufacture of image input element |
US4793697A (en) | 1986-08-04 | 1988-12-27 | Motorola, Inc. | PLZT shutter with minimized space charge degradation |
FR2665270B1 (fr) | 1990-07-27 | 1994-05-13 | Etat Francais Cnet | Dispositif modulateur spatial de lumiere et systeme d'holographie conoscopique a grande dynamique comportant un tel dispositif modulateur. |
US5221989A (en) | 1991-11-13 | 1993-06-22 | Northrop Corporation | Longitudinal plzt spatial light modulator |
US5651855A (en) | 1992-07-28 | 1997-07-29 | Micron Technology, Inc. | Method of making self aligned contacts to silicon substrates during the manufacture of integrated circuits |
US5488504A (en) | 1993-08-20 | 1996-01-30 | Martin Marietta Corp. | Hybridized asymmetric fabry-perot quantum well light modulator |
US5497258A (en) | 1994-05-27 | 1996-03-05 | The Regents Of The University Of Colorado | Spatial light modulator including a VLSI chip and using solder for horizontal and vertical component positioning |
US6211991B1 (en) * | 1998-06-16 | 2001-04-03 | Photon Dynamics, Inc. | Modulator manufacturing process and device |
US6525867B1 (en) * | 1999-07-07 | 2003-02-25 | Lots Technology, Inc. | Fast response micro-modulator arrays |
JP3829548B2 (ja) | 1999-09-24 | 2006-10-04 | ソニー株式会社 | 機能性材料および機能素子 |
US6819463B2 (en) | 2002-05-10 | 2004-11-16 | Corporation For National Research Initiatives | Electro-optic phase-only spatial light modulator |
US7016094B2 (en) * | 2004-01-12 | 2006-03-21 | Sharp Laboratories Of America, Inc. | Nonvolatile solid state electro-optic modulator |
JP4176722B2 (ja) | 2004-01-20 | 2008-11-05 | シャープ株式会社 | 表示素子および表示装置 |
JP2006011523A (ja) * | 2004-06-22 | 2006-01-12 | Three M Innovative Properties Co | タッチパネルセンサー |
JP2006065037A (ja) | 2004-08-27 | 2006-03-09 | Nippon Telegr & Teleph Corp <Ntt> | ゲートスイッチおよび空間光スイッチ |
US7562694B2 (en) | 2004-10-01 | 2009-07-21 | Magneco/Metrel, Inc. | Refractory casting method |
US7750434B2 (en) | 2005-01-31 | 2010-07-06 | Sanyo Electric Co., Ltd. | Circuit substrate structure and circuit apparatus |
US7374962B2 (en) | 2005-09-29 | 2008-05-20 | Miradia Inc. | Method of fabricating reflective spatial light modulator having high contrast ratio |
JP2009158956A (ja) | 2007-12-05 | 2009-07-16 | Rohm Co Ltd | 半導体装置及び半導体装置の製造方法 |
CN101281301A (zh) | 2008-05-22 | 2008-10-08 | 上海交通大学 | 基于双面金属反射型偏振无关晶体电光调制器 |
JP2010019630A (ja) * | 2008-07-09 | 2010-01-28 | Tokyo Institute Of Technology | 顕微分光装置 |
JP5240296B2 (ja) * | 2008-12-18 | 2013-07-17 | 日本電気株式会社 | 光スイッチ |
KR20100077717A (ko) | 2008-12-29 | 2010-07-08 | 삼성전자주식회사 | 지그재그 에러를 보정할 수 있는 광주사 장치, 이를 채용한화상 형성 장치 및 광주사 장치의 지그재그 에러 보정방법 |
JP2010224003A (ja) | 2009-03-19 | 2010-10-07 | Sunx Ltd | 光偏向装置及び電気光学素子ユニット |
JP2010238856A (ja) | 2009-03-31 | 2010-10-21 | Tdk Corp | 圧電体素子及びジャイロセンサ |
KR101675111B1 (ko) | 2010-01-08 | 2016-11-11 | 삼성전자주식회사 | 광 이미지 셔터 및 그 제조 방법 |
CN102096206B (zh) | 2010-12-31 | 2012-11-07 | 中国科学院上海硅酸盐研究所 | 电光可变光衰减器 |
JP5839897B2 (ja) | 2011-09-02 | 2016-01-06 | オリンパス株式会社 | 非線形光学顕微鏡 |
JP2014089340A (ja) | 2012-10-30 | 2014-05-15 | Fdk Corp | 電気光学素子、および電気光学素子の製造方法 |
JP2014089341A (ja) | 2012-10-30 | 2014-05-15 | Fdk Corp | 電気光学素子、および電気光学素子の製造方法 |
JP2014202786A (ja) | 2013-04-01 | 2014-10-27 | 日本電信電話株式会社 | 可変焦点レンズ |
JP2014219495A (ja) * | 2013-05-07 | 2014-11-20 | Fdk株式会社 | 空間光変調器 |
CN103605217A (zh) | 2013-11-29 | 2014-02-26 | 哈尔滨工业大学 | 利用电控二次电光效应实现入射光偏转的光开关方法 |
JP6206922B2 (ja) | 2014-02-21 | 2017-10-04 | 日本電信電話株式会社 | 電気光学素子 |
FR3027414B1 (fr) | 2014-10-15 | 2017-11-10 | Photline Tech | Modulateur de phase electrooptique et procede de modulation |
JP2018507388A (ja) | 2014-12-09 | 2018-03-15 | ビーエーエスエフ ソシエタス・ヨーロピアBasf Se | 光学検出器 |
DE112017008247T5 (de) * | 2017-12-05 | 2020-09-17 | Hamamatsu Photonics K.K. | Reflektierender räumlicher Lichtmodulator, optische Beobachtungsvorrichtung und Lichtbestrahlungsvorrichtung |
CN111448508B (zh) * | 2017-12-05 | 2023-06-09 | 浜松光子学株式会社 | 反射型空间光调制器、光观察装置及光照射装置 |
-
2017
- 2017-06-05 DE DE112017002833.7T patent/DE112017002833T5/de active Pending
- 2017-06-05 CN CN201780034927.9A patent/CN109313363B/zh active Active
- 2017-06-05 JP JP2018522485A patent/JP6849676B2/ja active Active
- 2017-06-05 WO PCT/JP2017/020871 patent/WO2017213100A1/ja active Application Filing
- 2017-06-05 US US16/307,511 patent/US11156816B2/en active Active
Also Published As
Publication number | Publication date |
---|---|
WO2017213100A1 (ja) | 2017-12-14 |
CN109313363A (zh) | 2019-02-05 |
DE112017002833T5 (de) | 2019-02-21 |
CN109313363B (zh) | 2021-12-28 |
US11156816B2 (en) | 2021-10-26 |
JPWO2017213100A1 (ja) | 2019-04-04 |
US20190196164A1 (en) | 2019-06-27 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP6998395B2 (ja) | 反射型空間光変調器、光観察装置及び光照射装置 | |
JP7018564B2 (ja) | 光スキャンデバイス、光受信デバイス、および光検出システム | |
JP6998396B2 (ja) | 反射型空間光変調器、光観察装置及び光照射装置 | |
JPWO2018061515A1 (ja) | 光スキャンデバイス、光受信デバイス、および光検出システム | |
WO2019130721A1 (ja) | 光デバイス | |
Davis et al. | Analog, non-mechanical beam-steerer with 80 degree field of regard | |
JP6849676B2 (ja) | 反射型空間光変調器、光観察装置及び光照射装置 | |
US20230161075A1 (en) | Manipulating electromagnetic radiation | |
JP6942701B2 (ja) | 光変調器、光観察装置及び光照射装置 | |
JP7229937B2 (ja) | 光変調器、光観察装置及び光照射装置 | |
JP6947726B2 (ja) | 反射型空間光変調器、光観察装置及び光照射装置 | |
US20170248830A1 (en) | Two-dimensional beam steering device | |
JPH11271816A (ja) | レーザ光制御装置及び方法 | |
JPWO2020170596A1 (ja) | 光デバイス |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20200212 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20200929 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20201130 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20210302 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20210304 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 6849676 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |