JP6947726B2 - 反射型空間光変調器、光観察装置及び光照射装置 - Google Patents
反射型空間光変調器、光観察装置及び光照射装置 Download PDFInfo
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- JP6947726B2 JP6947726B2 JP2018522483A JP2018522483A JP6947726B2 JP 6947726 B2 JP6947726 B2 JP 6947726B2 JP 2018522483 A JP2018522483 A JP 2018522483A JP 2018522483 A JP2018522483 A JP 2018522483A JP 6947726 B2 JP6947726 B2 JP 6947726B2
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/03—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on ceramics or electro-optical crystals, e.g. exhibiting Pockels effect or Kerr effect
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B21/00—Microscopes
- G02B21/06—Means for illuminating specimens
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/03—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on ceramics or electro-optical crystals, e.g. exhibiting Pockels effect or Kerr effect
- G02F1/0305—Constructional arrangements
- G02F1/0316—Electrodes
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/03—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on ceramics or electro-optical crystals, e.g. exhibiting Pockels effect or Kerr effect
- G02F1/0327—Operation of the cell; Circuit arrangements
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/03—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on ceramics or electro-optical crystals, e.g. exhibiting Pockels effect or Kerr effect
- G02F1/035—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on ceramics or electro-optical crystals, e.g. exhibiting Pockels effect or Kerr effect in an optical waveguide structure
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- G—PHYSICS
- G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
- G09G—ARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
- G09G3/00—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes
- G09G3/20—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters
- G09G3/34—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters by control of light from an independent source
- G09G3/36—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters by control of light from an independent source using liquid crystals
- G09G3/3611—Control of matrices with row and column drivers
- G09G3/3648—Control of matrices with row and column drivers using an active matrix
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- Physics & Mathematics (AREA)
- Nonlinear Science (AREA)
- General Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Optics & Photonics (AREA)
- Crystallography & Structural Chemistry (AREA)
- Ceramic Engineering (AREA)
- Analytical Chemistry (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Theoretical Computer Science (AREA)
- Computer Hardware Design (AREA)
- Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
Description
図1は、一実施形態に係る光観察装置の構成を示すブロック図である。光観察装置1Aは、例えば、観察の対象物を撮像するための蛍光顕微鏡である。光観察装置1Aは、試料(対象物)Sの表面に入力光L1を照射し、それに伴って試料Sから出力される蛍光又は反射光等の検出光L3を撮像することで、試料Sの画像を取得する。
本実施形態に係る空間光変調器200では、電気光学結晶101が透明基板113に支持されている点で第1実施形態の空間光変調器100と相違している。以下、主として第1実施形態と相違する点について説明し、同一の要素や部材については同一の符号を付して詳しい説明を省略する。
Claims (8)
- 入力光を変調し、変調された変調光を出力する反射型空間光変調器であって、
前記入力光が入力される入力面と、前記入力面の反対側の面である裏面とを有し、比誘電率が1000以上であるペロブスカイト型の電気光学結晶と、
前記電気光学結晶の前記入力面に配置され、前記入力光を透過する第1電極を有する光入出力部と、
前記電気光学結晶の前記裏面に配置される複数の第2電極を有し、前記入力光を前記光入出力部に向けて反射する光反射部と、
前記光反射部における前記複数の第2電極のそれぞれに対応する複数の駆動電極を有し、前記複数の駆動電極のそれぞれに電気信号を入力して、前記第1電極と前記第2電極との間に電界を印加する駆動回路と、
前記複数の第2電極と前記複数の第2電極に対応する前記複数の駆動電極とが互いに電気的に接続されるように配置された複数のバンプを有する電極接続部と、を備え、
前記入力光は、前記電気光学結晶の3つの結晶軸のうち1つの結晶軸を回転中心として他の2つの結晶軸を0°及び90°以外の任意の角度だけ回転させた回転後の2つの軸のうちの一方の軸方向に平行又は垂直になるように前記入力面に垂直に入力される、反射型空間光変調器。 - 前記入力光が入力される第1の面と、前記第1の面の反対側の面である第2の面とを有する透明基板を更に備え、前記透明基板の前記第2の面と前記光入出力部の前記入力面とは互いに対向する、請求項1記載の反射型空間光変調器。
- 前記第1電極は、前記入力面の全面に形成されている、請求項1又は2に記載の反射型空間光変調器。
- 前記光反射部では、前記複数の第2電極によって前記入力光を反射する、請求項1〜3のいずれか一項に記載の反射型空間光変調器。
- 前記電気光学結晶は、KTa1-xNbxO3(0≦x≦1)結晶、K1-yLiyTa1-xNbxO3(0≦x≦1、0<y<1)結晶、又はPLZT結晶である、請求項1〜4のいずれか一項に記載の反射型空間光変調器。
- 前記電気光学結晶の温度を制御する温度制御素子をさらに備える、請求項1〜5のいずれか一項に記載の反射型空間光変調器。
- 前記入力光を出力する光源と、請求項1〜6のいずれか一項に記載の反射型空間光変調器と、前記反射型空間光変調器から出力された変調光を対象物に照射する光学系と、前記対象物から出力された光を検出する光検出器と、を有する、光観察装置。
- 前記入力光を出力する光源と、請求項1〜6のいずれか一項に記載の反射型空間光変調器と、前記反射型空間光変調器から出力された変調光を対象物に照射する光学系と、を有する、光照射装置。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
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JP2016112850 | 2016-06-06 | ||
JP2016112850 | 2016-06-06 | ||
PCT/JP2017/020869 WO2017213098A1 (ja) | 2016-06-06 | 2017-06-05 | 反射型空間光変調器、光観察装置及び光照射装置 |
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JPWO2017213098A1 JPWO2017213098A1 (ja) | 2019-04-04 |
JP6947726B2 true JP6947726B2 (ja) | 2021-10-13 |
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Country Status (5)
Country | Link |
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US (1) | US10983371B2 (ja) |
JP (1) | JP6947726B2 (ja) |
CN (1) | CN109313362B (ja) |
DE (1) | DE112017002834T5 (ja) |
WO (1) | WO2017213098A1 (ja) |
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2017
- 2017-06-05 WO PCT/JP2017/020869 patent/WO2017213098A1/ja active Application Filing
- 2017-06-05 DE DE112017002834.5T patent/DE112017002834T5/de active Pending
- 2017-06-05 CN CN201780034920.7A patent/CN109313362B/zh active Active
- 2017-06-05 US US16/307,527 patent/US10983371B2/en active Active
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DE112017002834T5 (de) | 2019-02-28 |
US10983371B2 (en) | 2021-04-20 |
WO2017213098A1 (ja) | 2017-12-14 |
US20190302488A1 (en) | 2019-10-03 |
CN109313362A (zh) | 2019-02-05 |
CN109313362B (zh) | 2022-01-07 |
JPWO2017213098A1 (ja) | 2019-04-04 |
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