JP6848151B2 - Separation device and separation method - Google Patents

Description

The present invention relates to a separation device and a separation method.

Conventionally, a separation device for widening the mutual distance between a plurality of adherends attached to an adhesive sheet has been known (see, for example, Patent Document 1).

Japanese Unexamined Patent Publication No. 2014-232843

However, in the conventional separation device as described in Patent Document 1, the dicing tape S (adhesive sheet) to which the wafer W (adhesive body) is attached is attached to a frame-shaped member such as the frame F and pulled. Since the transfer to the means 26 (separation holding means) is performed, when such a frame-shaped member disappears, the end portion of the adhesive sheet hangs down or sways to secure the end portion of the adhesive sheet. Inconvenience occurs that it cannot be delivered to the separation holding means.

An object of the present invention is to provide a separation device and a separation method capable of reliably holding an end portion of an adhesive sheet by a separation holding means.

The present invention has adopted the configuration described in the claims.

According to the present invention, a predetermined tension is applied to the outer edge portion of the adhesive sheet including the end portion held by the separation holding means, and the integrated object is delivered to the separation holding means, so that the end portion of the adhesive sheet hangs down. The end portion of the adhesive sheet can be reliably held by the separation holding means without shaking.

(A) is a plan view of the separation device according to the embodiment of the present invention. (B) and (C) are side views of (A) and are operational explanatory views thereof. (A) and (B) are explanatory views of other examples of the present invention.

Hereinafter, embodiments of the present invention will be described with reference to the drawings.
The X-axis, Y-axis, and Z-axis in the present embodiment are orthogonal to each other, the X-axis and the Y-axis are axes in a predetermined plane, and the Z-axis is an axis orthogonal to the predetermined plane. To do. Further, in the present embodiment, when viewed from the direction of the arrow BD parallel to the Y axis as a reference, and when the direction is shown without giving a reference figure, "up" is "down" in the direction of the arrow on the Z axis. Is the opposite direction, "left" is the direction of the arrow on the X-axis, "right" is the opposite direction, "front" is the direction of the arrow on the Y-axis, and "rear" is the opposite direction.

The separation device 10 of the present invention has a plurality of separation holding means 20 for holding the end AE1 of the adhesive sheet AS in the integral WK in which a plurality of adherend CPs are attached to one surface AS1 of the adhesive sheet AS. The separation means 20 holding the end AE1 of the adhesive sheet AS is relatively moved to apply tension to the adhesive sheet AS to widen the mutual distance between the adherends CP, and the integrated WK is held. It is provided with a delivery means 40 for delivering the integrated WK to a plurality of separation holding means 20, an imaging means such as a camera or a projector, and a detection means 50 such as various sensors such as an optical sensor and an ultrasonic sensor. ing. In the one-piece WK of the present embodiment, a plurality of adherend CPs are attached to the central portion of the adhesive sheet AS having a square view in a plan view.

The separation holding means 20 includes a lower holding member 21 supported by the separating means 30, a rotating motor 22 as a drive device supported by the lower holding member 21, and an upper holding member 23 supported by the output shaft 22A thereof. And have.

The separating means 30 includes a linear motor 31 as a drive device, and a holding arm 32 supported by the slider 31A and supporting the lower holding member 21 on the upper surface side.

The delivery means 40 relatively moves a plurality of delivery holding means 41 holding another end AE2 of the adhesive sheet AS in the one-piece WK and a delivery holding means 41 holding another end AE2 of the adhesive sheet AS. A tension applying means 42 for applying a predetermined tension to the outer edge of the adhesive sheet AS including the end portion AE1 held by the separating holding means 20, and a transport means for transporting the integrated WK held by the delivery holding means 41. It has 43 and.
The delivery holding means 41 includes four suction pads 41A that can be sucked and held by a pressure reducing means (not shown) such as a pressure reducing pump or a vacuum ejector, and a support arm 41B that supports each suction pad 41A.
The tension applying means 42 includes four XY tables 42A as drive devices equipped with sliders 42B that can move in two axial directions in the X-axis direction and the Y-axis direction, and a support arm 41B is supported by each slider 42B. ing.
The transport means 43 includes an articulated robot 43A as a drive device composed of a plurality of arms, and a base frame 43C supported by the tip arm 43B, which is a working portion thereof, and supports four XY tables 42A. There is. The articulated robot 43A may be a so-called 6-axis robot or the like that can displace the robot supported by the tip arm 43B at any position and any angle within the working range. An illustrated articulated robot 111 and the like can be exemplified.

The operation of the separation device 10 described above will be described.
First, the user of the separation device 10 (hereinafter, simply referred to as "user") operates the separation device 10 in which each member stands by at the initial position shown by the solid line in FIGS. 1A and 1B. A signal for starting automatic operation is input via an operating means (not shown) such as a panel or a personal computer. Then, the delivery means 40 drives the articulated robot 43A to bring the suction pad 41A into contact with another end AE2 of the adhesive sheet AS of the integral WK supplied to a predetermined integral supply position (not shown). A depressurizing means (not shown) is driven to start adsorbing and holding the adhesive sheet AS. Next, the delivery means 40 drives the articulated robot 43A, and as shown by the solid line in FIG. 1B, the integrated object WK sucked and held by the suction pad 41A is conveyed above each separation holding means 20, and then. The XY table 42A is driven to move the suction pad 41A in the diagonal direction of the adhesive sheet AS with a predetermined torque, and a predetermined tension is applied to the outer edge of the adhesive sheet AS including the end AE1 held by the separation holding means 20. To do.

At this time, the detection means 50 drives the camera or the like to detect the adherend CP, and the delivery means 40 drives the articulated robot 43A, and the adherend is based on the detection result of the detection means 50. While positioning the CP, as shown by the alternate long and short dash line in FIG. 1B, the end portion AE1 of the adhesive sheet AS in a state where a predetermined tension is applied to the outer edge portion is placed on the lower holding member 21. The delivery means 40 is, for example, so that the center position of the entire adherend CP does not deviate from a predetermined position of the separation device 10 (for example, the position of the center of the separation device 10), or the entire adherend CP. The adherend CP is positioned so that the outer shell side and the outer shell side of each adherend CP are parallel to the X-axis and the Y-axis, respectively.

After that, when the separation holding means 20 drives each rotation motor 22 and the lower holding member 21 and the upper holding member 23 hold the end portion AE1 of the adhesive sheet AS, the delivery means 40 stops driving the decompression means (not shown). Then, after releasing the suction holding of the adhesive sheet AS, the articulated robot 43A is driven to return the suction pad 41A to the initial position. Next, the separating means 30 drives each linear motor 31, and as shown in FIG. 1C, the separating holding means 20 are separated from each other, and tension is applied to the adhesive sheet AS to apply tension to the adherend CP. Widen the mutual spacing. At this time, the mutual spacing of the adherend CPs may not be widened to a predetermined spacing due to the strain of the adhesive sheet AS or the like. Therefore, based on the detection result of the detection means 50, each separation holding means 20 is individually provided so that the separation means 30 drives each linear motor 31 and the mutual distance between the adherend CPs is a predetermined distance. Move.

Then, when all the adherend CPs or a predetermined amount of the adherend CPs are removed from the adhesive sheet AS by means for taking out the adherends (not shown) such as a pickup device or a transport device, the separation means 30 removes each linear motor 31. After driving and returning each slider 31A to the initial position, the separation holding means 20 drives the rotary motor 22 to return the upper holding member 23 to the initial position. Next, an operator or a transporting means (not shown) removes the adhesive sheet AS left on the lower holding member 21, and the same operation as described above is repeated thereafter.

According to the separation device 10 as described above, a predetermined tension is applied to the outer edge portion of the adhesive sheet AS including the end portion AE1 held by the separation holding means 20, and the integrated WK is delivered to the separation holding means 20. Therefore, the end portion AE1 of the adhesive sheet AS does not hang down or sway, and the end portion AE1 of the adhesive sheet AS can be reliably held by the separation holding means 20.

The means and processes in the present invention are not limited as long as they can perform the operations, functions or processes described for the means and processes, much less the components of the mere embodiment shown in the above-described embodiment. It is not limited to the process at all. For example, the separating holding means is composed of a plurality of or a single number, and a plurality of adherends or a plurality of adherends divided into a plurality of adherends are attached to at least one of one surface and the other surface of the adhesive sheet. As long as it can hold the end of the adhesive sheet in the integrated product, it is not limited as long as it is within the technical scope in light of the common general technical knowledge at the time of filing (other means and processes are also possible). the same).

As shown in FIG. 2A, the separation device of the present invention is outside the separation holding means 20 and the adherend adhesive region CE to which a plurality of adherend CPs are attached in the adhesive sheet AS. The abutting means 60 that abuts the adhesive sheet AS inside the held region HE held by the separating holding means 20, and the separating holding means 20 and the abutting means 60 that hold the end AE1 of the adhesive sheet AS. The separation device 10A may be provided with the separation means 30A which moves relative to each other and applies tension to the adhesive sheet AS to widen the mutual distance between the adherends CP, and the delivery means 40.
In the separation device 10A, those having the same configuration as the separation device 10 and having the same function are assigned the same numbers as the separation device 10 and the configuration description is omitted, and the operation description is simplified.

The separating means 30A includes a linear motor 33 as a driving device supported on the base plate BP, and the lower holding member 21 is supported by the output shaft 33A thereof.
The contact means 60 includes a cylindrical contact member 61 supported on the base plate BP.

In such a separation device 10A, the delivery means 40 drives the articulated robot 43A, the decompression means (not shown), and the XY table 42A in the same manner as the separation device 10, as shown by the alternate long and short dash line in FIG. 2 (A). The end portion AE1 of the adhesive sheet AS is placed on the lower holding member 21 while applying a predetermined tension to the outer edge portion of the adhesive sheet AS that is suction-held by the suction pad 41A. After that, the separation holding means 20 drives each rotation motor 22, and as shown in FIG. 2B, the lower holding member 21 and the upper holding member 23 hold the end portion AE1 of the adhesive sheet AS, and then separate. The means 30A drives each linear motor 33, lowers the separation holding means 20 to move the separation holding means 20 and the contacting means 60 relative to each other, and applies tension to the adhesive sheet AS to apply tension to the adherend CP. Widen the mutual spacing. After that, when the adherend CP is removed from the adhesive sheet AS by the adherend taking-out means (not shown), each means drives each drive device, returns each member to the initial position, and then lower holding member 21. The adhesive sheet AS left on the top is removed, and the same operation as described above is repeated thereafter.

With such a separation device 10A, the same effect as that of the separation device 10 can be obtained.

The separation holding means 20 may be configured to hold the end portion AE1 of the adhesive sheet AS to which a plurality of adherend CPs are attached to both the other surface AS2 and the one surface AS1 and the other surface AS2. However, the end portion AE1 of the adhesive sheet AS may be held by a gripping means such as a mechanical chuck or a chuck cylinder, a Coulomb force, an adhesive, an adhesive, a magnetic force, Bernoulli adsorption, a drive device, or the like.
In the case of the separation device 10, the separation holding means 20 is, for example, two bodies including the separation holding means 20 moving to the right as one body and the separation holding means 20 moving to the left as one body. It may be composed of three or more bodies that move to the right, left, and other directions, for example.
In the case of the separation device 10A, the separation holding means 20 may be one body or two or more bodies.

The separation means 30 and 30A may be a single number instead of a plurality. In this case, for example, the separation device 10 supports the separation holding means 20 by two sliders of one linear motor, and adheres to the separation means 30 and 30A. The mutual spacing between the body CPs may be widened, and the mutual spacing between the adherend CPs may be widened only in one axial direction (for example, the X-axis direction or the Y-axis direction).
The separation means 30 may be configured to widen the mutual distance in three or more axes (for example, the X-axis direction, the Y-axis direction, and other axial directions), or, for example, a plurality of separation holdings moved in the X-axis direction. The means 20 may be moved in the Y-axis direction (a plurality of separation holding means 20 moved in the Y-axis direction are moved in the X-axis direction, respectively), and the mutual spacing between the adherend CPs may be widened. However, it may not be possible to operate so that the mutual spacing between the adherend CPs is a predetermined spacing.
The separating means 30A moves the abutting means 60 while stopping or moving the separating holding means 20 to relatively move the separating holding means 20 and the abutting means 60, and applies tension to the adhesive sheet AS. The mutual spacing between the adherend CPs may be widened.
In the separation means 30 and 30A, the operator may operate a button, a lever, or the like to drive the linear motor 31 and the linear motor 33. In this case, for example, the detection result by the detection means 50 can be monitored or detected by the detection means 50. Etc., so that the mutual spacing of the adherend CPs becomes a predetermined spacing according to the detection result displayed on this display, or the overall aggregate shape of each adherend CP. The operator may drive the linear motor 31 and the linear motor 33 so that is similar to the overall shape of the base.

The delivery means 40 may place the end portion AE1 of the adhesive sheet AS in a state where a predetermined tension is applied to the outer edge portion on the lower holding member 21 without positioning the adherend CP.
The tension applying means 42 may apply a predetermined tension only to the outer edge portion of the adhesive sheet AS in the X-axis direction, the Y-axis direction, or other directions, and the suction pad 41A is specified instead of the predetermined torque. A predetermined tension may be applied to the outer edge of the adhesive sheet AS by moving it by a distance, or the suction pad 41A may be moved in a direction deviated from the diagonal direction of the adhesive sheet AS, or may be a single number instead of a plurality. Often, in this case, for example, two sliders of one linear motor support one set of each of the delivery holding means 41, and a predetermined tension is applied to the outer edge portion of the adhesive sheet AS, and the adherend CP. The mutual spacing may be widened only in one axial direction (for example, the X-axis direction or the Y-axis direction).
The delivery holding means 41 may be configured to hold the other end AE2 of the adhesive sheet AS by a gripping means such as a mechanical chuck or a chuck cylinder, a Coulomb force, an adhesive, an adhesive, a magnetic force, Bernoulli adsorption, a drive device, or the like. ..
The tension applying means 42 may drive the XY table 42A by the operator operating a button, a lever, or the like. In this case, for example, the torque output by the XY table 42A is displayed on a display such as a monitor or a detector. It is configured to be displayed so that the torque value displayed on this display becomes a predetermined value, or the amount of movement of the slider 42B of the XY table 42A is displayed on the display. The operator may drive the XY table 42A so that the displayed movement amount becomes a predetermined movement amount.
The value of the predetermined tension applied to the outer edge portion of the adhesive sheet AS by the delivery means 40 can be arbitrarily determined by the user as long as the tension is equal to or greater than the tension at which the outer edge portion of the adhesive sheet AS does not loosen.

The detecting means 50 may be visually observed by an operator, for example. In this case, a predetermined tension may be applied to the outer edge portion of the adhesive sheet AS by the operator's visual inspection, or the position of the adherend CP and the separating device 10 may be brought into contact with each other. Alignment is performed, the mutual spacing of the adherend CPs is set to a predetermined interval, or the overall aggregate shape of each adherend CP is similar to the overall aggregate shape of the base. It may be configured to drive the XY table 42A, the linear motor 31, and the linear motor 33 by operating a button, a lever, or the like, or the separation devices 10 and 10A of the present invention are provided. It does not have to be.

The contacting means 60 may employ a contact member 61 having another shape such as a cylinder, a prism, or an ellipse, in addition to a square cylinder or an elliptical cylinder.

In the separation device 10, first, the delivery means 40 drives the XY table 42A, applies a predetermined tension only in the X-axis direction to the outer edge portion of the adhesive sheet AS, and then the separation holding means 20 uses the rotation motor 22. The end portion AE1 of the adhesive sheet AS is held only by the separation holding means 20 arranged in the X-axis direction, and then similarly, a predetermined value is determined only in the Y-axis direction with respect to the outer edge portion of the adhesive sheet AS. After applying the tension, the end portion AE1 of the adhesive sheet AS may be held only by the separating holding means 20 arranged in the Y-axis direction (in this case, X and Y may be reversed).
When the adhesive force of the adhesive sheet AS is reduced by a predetermined energy, it is adhered by an energy applying means capable of applying a predetermined energy before removing the adherend CP from the adhesive sheet AS by an adherend taking out means (not shown). The adhesive strength of the sheet AS may be reduced. It should be noted that such an energy applying means may be one that applies an electromagnetic wave of any wavelength (for example, X-ray, infrared ray, etc.), a fluid such as a heated or cooled gas or liquid, or the like as energy to the adhesive sheet AS, and the adhesive sheet. Any material can be used as long as it can impart energy that can reduce the adhesive force of the adhesive sheet AS according to the structure of the AS.

The material, type, shape, etc. of the adhesive sheet AS and the adherend CP in the present invention are not particularly limited. For example, the adhesive sheet AS and the adherend CP may have a circular shape, an elliptical shape, a polygonal shape such as a triangle or a quadrangle, or any other shape, and the adhesive sheet AS may have pressure-sensitive adhesiveness, heat-sensitive adhesiveness, or the like. It may be in an adhesive form. Further, the adhesive sheet AS is, for example, a single layer having only an adhesive layer, a material having an intermediate layer between the base material and the adhesive layer, a material having a cover layer on the upper surface of the base material, and the like having three or more layers. Further, it may be a so-called double-sided adhesive sheet capable of peeling the base material from the adhesive layer, and such a double-sided adhesive sheet may have a single layer or a multi-layer intermediate layer. , It may be a single layer or a multi-layer without an intermediate layer. The adherend CP includes, for example, foods, resin containers, semiconductor wafers such as silicon semiconductor wafers and compound semiconductor wafers, information recording substrates such as semiconductor chips, circuit substrates, and optical disks, glass plates, steel plates, pottery, and wooden plates. It may be a single material such as a resin, or a composite product formed of two or more of them, and any form of a member or an article can be targeted. The adhesive sheet AS can be read in a functional and versatile manner, for example, an information description label, a decorative label, a protective sheet, a dicing tape, a die attach film, a die bonding tape, a recording layer forming resin sheet, or the like. Sheets, films, tapes, etc. may be used.
A plurality of adherend CPs may be present on the adhesive sheet AS in advance, or are divided into a plurality of objects when an external force is applied by the separating means 30, 30A, other mechanisms, or a human hand, and are formed on the adhesive sheet AS. It may be divided into a plurality of ones so as to exist in a plurality of cases. As the adherend CP that is divided into a plurality of pieces, for example, a semiconductor wafer, a substrate, or the like is irradiated with a laser to form a fragile fragile layer such as a linear or lattice shape on the semiconductor wafer or the substrate. Then, when tension is applied to the adhesive sheet AS or an external force is directly or indirectly applied to the semiconductor wafer, the substrate, or the like, the adhesive sheet AS is separated into individual pieces to form a plurality of adherend CPs, for example. A cutter blade is used to cut into a resin or glass plate, and a line or grid that does not penetrate the front and back of the resin or glass plate is formed to form a cut line such as a perforation or a line to be cut. There is no limitation on the case where tension is applied to the AS or external force is directly or indirectly applied to the resin, glass plate, etc., and the wafer is separated into a plurality of adherend CPs. ..

As the drive device in the above embodiment, electric devices such as rotary motors, linear motors, linear motors, single-axis robots, and articulated robots, actuators such as air cylinders, hydraulic cylinders, rodless cylinders, and rotary cylinders are adopted. In addition, a combination of them directly or indirectly can be adopted.

10, 10A ... Separation device 20 ... Separation holding means 30, 30A ... Separation means 40 ... Delivery means 41 ... Delivery holding means 42 ... Tension applying means 43 ... Transport means 60 ... Contact means AE1 ... End AE2 ... Another End AS ... Adhesive sheet AS1 ... One side AS2 ... The other side CE ... Adhesive area CP ... Adhesive HE ... Holding area WK ... One piece

Claims (4)

A plurality of distances for holding an end portion of the adhesive sheet in an integral body in which a plurality of adherends or a plurality of adherends divided into a plurality of adherends are attached to at least one surface of the adhesive sheet and the other surface. For holding means and
The separation holding means for holding the end portion of the adhesive sheet is relatively moved, and tension is applied to the adhesive sheet to provide a separation means for widening the mutual distance between the adherends.
It has a delivery means for holding the one-piece object and delivering the one-piece object to the plurality of separation holding means.
The delivery means relatively moves a plurality of delivery holding means for holding another end of the adhesive sheet and the delivery holding means for holding another end of the adhesive sheet, and separates the delivery means. It is provided with a tension applying means for applying a predetermined tension to the outer edge portion of the adhesive sheet including the end portion held by the holding means for delivery, and a transporting means for transporting the integrated object held by the holding means for delivery. A separation device characterized by. Separation holding for holding the end of the adhesive sheet in an integral body in which a plurality of adherends or divided adherends are attached to at least one of one surface and the other surface of the adhesive sheet. Means and
An abutting means that abuts on the adhesive sheet outside the adherend adhesive region to which the plurality of adherends are attached in the adhesive sheet and inside the holding region held by the separation holding means.
The separation holding means for holding the end portion of the adhesive sheet and the separation means for relatively moving the contact means to apply tension to the adhesive sheet to widen the mutual distance between the adherends are provided.
It has a delivery means for holding the one-piece object and delivering the one-piece object to the separation holding means.
The delivery means relatively moves a plurality of delivery holding means for holding another end of the adhesive sheet and the delivery holding means for holding another end of the adhesive sheet, and separates the delivery means. It is provided with a tension applying means for applying a predetermined tension to the outer edge portion of the adhesive sheet including the end portion held by the holding means for delivery, and a transporting means for transporting the integrated object held by the holding means for delivery. A separation device characterized by. Holds the ends of the adhesive sheet for separation in an integral body in which a plurality of adherends or divided adherends are attached to at least one of one surface and the other surface of the adhesive sheet. A separation holding process that is held by means,
It has a separation step of relatively moving the separation holding means holding the end portion of the adhesive sheet and applying tension to the adhesive sheet to widen the mutual distance between the adherends.
Further having a delivery step of holding the integrated object and delivering the integrated object to the plurality of separating holding means.
The delivery step is relative to the delivery holding step of holding another end of the adhesive sheet in the integrated object by a plurality of delivery holding means and the delivery holding means holding another end of the adhesive sheet. A tension applying step of moving and applying a predetermined tension to the outer edge portion of the adhesive sheet including the end portion held by the separating holding means, and a transporting step of transporting the integrated object held by the delivery holding means. A separation method characterized by having. The end portion of the adhesive sheet in an integral body in which a plurality of adherends or a plurality of adherends divided into a plurality of adherends are attached to at least one of one surface and the other surface of the adhesive sheet by a holding means for separation. Holding process for separation and holding
An abutting means that abuts on the adhesive sheet outside the adherend adhesive region to which the plurality of adherends are attached in the adhesive sheet and inside the holding region held by the separation holding means, and It has a separation step of relatively moving the separation holding means holding the end portion of the adhesive sheet and applying tension to the adhesive sheet to widen the mutual distance between the adherends.
Further having a delivery step of holding the integrated object and delivering the integrated object to the separating holding means.
The delivery step is relative to the delivery holding step of holding another end of the adhesive sheet in the integrated object by a plurality of delivery holding means and the delivery holding means holding another end of the adhesive sheet. A tension applying step of moving and applying a predetermined tension to the outer edge portion of the adhesive sheet including the end portion held by the separating holding means, and a transporting step of transporting the integrated object held by the delivery holding means. A separation method characterized by having.

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