JP7073606B2 - Separation device and separation method - Google Patents

Description

The present invention relates to a separation device and a separation method.

Conventionally, a separation device for widening the mutual spacing between a plurality of adherends attached to an adhesive sheet has been known (see, for example, Patent Document 1).

Japanese Unexamined Patent Publication No. 2016-127124

However, in the conventional separation device as described in Patent Document 1, for example, when a piece-like body (adhesive body) having widened mutual spacing is conveyed together with the adhesive sheet, the holding means is used. When the adhesive sheet is no longer held by the adhesive sheet, the tension applied to the adhesive sheet is released and the adhesive sheet tends to approach the state before deformation, so that there is an inconvenience that the mutual spacing between the adherends becomes narrow.

An object of the present invention is to provide a separating device and a separating method capable of preventing the mutual spacing between adherends from becoming as narrow as possible even when the tension applied to the adhesive sheet is released.

The present invention has adopted the configuration described in the claims.

According to the present invention, since the adhesive sheet is cured by applying the predetermined energy to the adhesive sheet that can be cured by applying the predetermined energy, the tension applied to the adhesive sheet is released. However, it is possible to prevent the mutual spacing between the adherends from becoming as narrow as possible.
Further, if the maintenance member mounting means is provided, the mutual spacing between the adherends can be prevented from becoming narrower.
Further, if the cutting means is provided, it is possible to prevent the end portion of the adhesive sheet from hindering the transfer when the adherends having widened mutual spacing are conveyed on the adhesive sheet.
Further, if the second energy applying means is provided, it is possible to easily widen the mutual spacing between the adherends.

(A) is a plan view of the separation device according to the embodiment of the present invention. (B) is a side view of FIG. 1 (A). (A) and (B) are operation explanatory views of the separation device which concerns on embodiment of this invention. (A) to (C) are operation explanatory views of the separation device which concerns on embodiment of this invention. (A) and (B) are explanatory views of other examples of this invention.

Hereinafter, embodiments of the present invention will be described with reference to the drawings.
The X-axis, Y-axis, and Z-axis in the present embodiment are orthogonal to each other, the X-axis and the Y-axis are axes in a predetermined plane, and the Z-axis is an axis orthogonal to the predetermined plane. do. Further, in the present embodiment, when viewed from the direction of the arrow BD parallel to the Y axis as a reference, and when the direction is shown without giving a reference figure, "up" is "down" in the direction of the arrow on the Z axis. Is the opposite direction, "left" is the direction of the arrow on the X axis, "right" is the opposite direction, "front" is the direction of the arrow on the Y axis, and "rear" is the opposite direction.

The separation device 10 of the present invention includes a plurality of holding means 20 for holding the ends of the adhesive sheet AS to which a plurality of adherend CPs are attached to one surface AS1, and holding means for holding the ends of the adhesive sheet AS. A separation means 30 that moves the 20 relative to each other to widen the mutual spacing of the adherend CP, and a camera, a projector, or the like that can detect the mutual spacing of the adherend CP and the overall collective shape of each adherend CP. An ultraviolet UV as a predetermined energy is applied to the adhesive sheet AS in a state where the mutual distance between the adherend CP is widened by the detection means 40 such as an image pickup means, various sensors such as an optical sensor and a sound wave sensor, and the separation means 30. As a result, the first energy applying means 50 for curing the adhesive sheet AS, the second energy applying means 60 for applying infrared IR as another energy to the adhesive sheet AS, and the adherend CP are in a state of widening the mutual spacing. The adhesive sheet AS is provided with a maintenance member attaching means 70 for attaching the interval maintaining member DM, and a cutting means 80 for cutting the adhesive sheet AS.
The adhesive sheet AS is deformed when an ultraviolet curable adhesive layer is laminated on one surface of the base sheet, tension is applied, and then the tension is released without applying ultraviolet UV. It has the property of approaching the previous state, and is hardened by the application of ultraviolet UV, while it is softened by the application of infrared IR.

The holding means 20 includes a rotary motor 21 as a driving device supported by the separating means 30, and an upper holding member 22 supported by the output shaft 21A thereof.

The separating means 30 includes a linear motor 31 as a drive device, and a lower holding member 32 supported by the slider 31A and supporting the rotary motor 21 on the upper surface side.

The first energy applying means 50 includes a plurality of upper ultraviolet lamps 51 arranged in the upper case UC and a plurality of lower ultraviolet lamps 52 arranged in the lower case BC. The upper and lower ultraviolet lamps 51 and 52 are adapted to irradiate the adhesive sheet AS with ultraviolet UV as a whole.

The second energy applying means 60 is a linear motor 61 as a drive device having a slider 61A moving in the Y-axis direction, and a linear motor 61 as a drive device supported by the slider 61A and having a slider 62A moving in the X-axis direction. It includes a motor 62, a base table 63 supported by a slider 62A, and an infrared lamp 65 supported on the base table 63 via a stand 64 and a lower case BC. The infrared lamp 65 is adapted to partially irradiate the adhesive sheet AS with infrared IR.

The maintenance member mounting means 70 is supported by a linear motor 61, 62, a base table 63, a linear motor 71 as a drive device supported on the base table 63, and an output shaft 71A thereof, and is supported by a pressure reducing pump, a vacuum ejector, or the like. It is provided with a support table 72 having a support surface 72A capable of supporting the interval maintaining member DM by a depressurizing means (not shown). In the case of the present embodiment, the interval maintaining member DM used is one in which the double-sided adhesive sheet BA is attached to one surface of the glass plate GP.

The cutting means 80 includes an articulated robot 81 as a drive device composed of a plurality of arms, and a cutter blade as a cutting member supported by a tip arm 81A, which is a working portion of the articulated robot 81, via a bracket 82. It is equipped with 83. The articulated robot 81 may be a so-called 6-axis robot or the like that can displace the robot supported by the tip arm 81A at any position and any angle within the working range, and is exemplified by Japanese Patent Application Laid-Open No. 2016-81974. The articulated robot 111 and the like can be exemplified.

The operation of the separation device 10 described above will be described.
First, the user of the separation device 10 (hereinafter, simply referred to as "user") operates the separation device 10 in which each member is waiting at the initial position shown by the solid line in FIGS. 1A and 1B. A signal for starting automatic operation is input via an operation means (not shown) such as a panel or a personal computer. After that, when the operator or a transporting means (not shown) such as a drive device or a conveyor places the spacing member DM on the support surface 72A so that the double-sided adhesive sheet BA side is on the upper side, the maintenance member mounting means 70 is shown. No depressurizing means is driven, and the suction holding of the interval maintaining member DM is started. Then, when an operator or a transport means (not shown) places the adhesive sheet AS to which the plurality of adherend CPs are attached on the lower holding member 32, the holding means 20 drives each rotation motor 21, and FIG. B) As shown by the middle two-dot chain line, the upper holding member 22 and the lower holding member 32 hold the end portion of the adhesive sheet AS.

Next, the separation means 30 drives each linear motor 31 to separate the holding means 20 from each other to widen the mutual distance between the adherend CPs. At this time, as shown in FIG. 2A, the mutual spacing of the adherend CPs may not be widened to a predetermined spacing due to the strain of the adhesive sheet AS or the like. Therefore, the detection means 40 drives a camera or the like to detect the mutual spacing between the adherend CPs, the overall aggregate shape of the adherend CPs, and the like. Next, based on the detection result of the detecting means 40, the separating means 30 drives each linear motor 31 so that the mutual spacing of the adherend CPs becomes a predetermined spacing as shown in FIG. 2 (B). Or, each holding means 20 is individually moved so that the overall aggregate shape of each adherend CP is similar to the overall aggregate shape of the base. At this time, when the detecting means 40 detects that there is a difficult-to-open portion where the mutual spacing between the adherend CPs is difficult to open, the second energy applying means 60 drives the linear motors 61 and 62 and the infrared lamp 65, and the difficult-to-open portion. Is partially irradiated with infrared IR (see FIG. 3A). As a result, the difficult-to-open portion is softened, and the mutual spacing between the adherend CPs becomes easy to open.

After that, the first energy applying means 50 drives the upper and lower ultraviolet lamps 51 and 52, and as shown in FIG. 3A, applies ultraviolet UV to one surface AS1 and the other surface AS2 of the adhesive sheet AS. Then, the adhesive sheet AS is cured so that the mutual spacing between the adherend CPs is not narrowed. Next, the maintenance member mounting means 70 drives the linear motors 61 and 62, arranges the spacing member DM below the adherend CP whose mutual spacing is widened, and then drives the linear motor 71 to drive the linear motor 71 (FIG. 3). As shown in B), the spacing member DM is attached to the other surface AS2 side of the adhesive sheet AS via the double-sided adhesive sheet BA.

After that, the cutting means 80 drives the articulated robot 81, and as shown in FIG. 3C, the cutter blade 83 is pierced into the adhesive sheet AS, and then the cutter blade 83 is inserted along the outer edge of the entire adherend CP. The adhesive sheet AS is cut by making one round, and the spacing member DM is attached to form an integral WK on the adhesive sheet AS in which the mutual spacing between the adherend CPs is widened. Next, when the cutting means 80 drives the articulated robot 81 and returns the cutter blade 83 to the initial position, the maintenance member mounting means 70 stops driving the decompression means (not shown), and the suction holding of the interval maintenance member DM is released. do. Then, when an operator or a transporting means (not shown) transports the integrated WK to another process, the holding means 20 drives the rotation motor 21 to form an adhesive sheet AS between the upper holding member 22 and the lower holding member 32. Release the hold. After that, when the operator or the transport means (not shown) removes the adhesive sheet AS portion left on the lower holding member 32, each means drives each drive device and returns each member to the initial position. The same operation as above is repeated.

According to the separation device 10 as described above, the ultraviolet UV is applied to the adhesive sheet AS which can be cured by applying the ultraviolet UV, and the adhesive sheet AS is cured. Therefore, the tension applied to the adhesive sheet AS is applied. Even if it is released, the mutual spacing between the adherend CPs can be prevented from becoming as narrow as possible.

The means and processes in the present invention are not limited as long as they can perform the operations, functions or processes described for the means and processes, much less the constituents of the mere embodiment shown in the above-described embodiment. It is not limited to the process at all. For example, if the holding means can hold the end portion of the adhesive sheet to which a plurality of adherends are attached to at least one of one surface and the other surface, the holding means is based on the common general technical knowledge at the time of filing. There is no limitation as long as it is within the technical scope (the same applies to other means and processes).

As shown in FIG. 4A, the separating device of the present invention is outside the holding means 20 and the adherend adhesive region CE to which a plurality of adherend CPs are attached in the adhesive sheet AS, and holds the adhesive sheet AS. The abutting means 90 that abuts the adhesive sheet AS inside the holding region HE held by the means 20 and the holding means 20 and the abutting means 90 that hold the end of the adhesive sheet AS are relatively moved to move the adherend CP. A maintenance member attaching means for attaching the spacing member DM to the adhesive sheet AS with the spacing means 30A, the detecting means 40, the first energy applying means 50, and the adherend CP widening the mutual spacing. The separation device 10A including the 70A and the cutting means 80 may be used.
In the separation device 10A, those having the same configuration as the separation device 10 and having the same function are assigned the same numbers as the separation device 10 and the configuration description is omitted, and the operation description is simplified.

The separating means 30A includes a linear motor 33 as a drive device supported on the base plate BP, and a lower holding member 34 supported by the output shaft 33A and supporting the rotary motor 21 on the upper surface side.
In the maintenance member mounting means 70A, the support table 72 is supported on the slider 73A of the linear motor 73 as a drive device provided with the slider 73A that moves in the Y-axis direction via the linear motion motor 71.
The abutting means 90 is provided with a cylindrical abutting member 91 supported on the base plate BP and having a notch 91A formed on the front side to allow entry and exit of the maintenance member attaching means 70A. Inside the contact member 91, a support rail 91B for supporting the lower ultraviolet lamp 52 is provided.

In such a separation device 10A, when the adhesive sheet AS to which a plurality of adherend CPs are attached is placed on the lower holding member 34 in the same manner as the separation device 10, the holding means 20 causes the rotation motor 21 to move. It is driven, and as shown by the alternate long and short dash line in FIG. 4A, the upper holding member 22 and the lower holding member 34 hold the end portion of the adhesive sheet AS. The spacing member DM is placed on the support table 72 located on the outside (front side) of the contact member 91 in the same manner as the spacing device 10. Further, as shown in FIG. 4, a ring-shaped frame RF is attached to the end of the adhesive sheet AS, but the frame RF may not be present. Next, the separating means 30A drives the linear motion motor 33, lowers the holding means 20, and relatively moves the holding means 20 and the contacting means 90, and as shown in FIG. 4B, the adherend CPs are mutually moved. Widen the interval. After that, in the same manner as the separation device 10, ultraviolet UV is applied by the first energy applying means 50 to cure the adhesive sheet AS, and then the maintenance member attaching means 70A drives the linear motor 73 to widen the mutual spacing. The spacing member DM is arranged below the adherend CP. Then, in the same manner as the separation device 10, as shown in FIG. 4B, the maintenance member attaching means 70A attaches the spacing member DM to the other surface AS2 side of the adhesive sheet AS, and the cutting means 80 attaches the adhesive sheet AS. After cutting, the integrated WK is transported to another process.

With such a separation device 10A, the same effect as that of the separation device 10 can be obtained.

The holding means 20 may be configured to hold the end portion of the adhesive sheet AS to which a plurality of adherend CPs are attached to both the other surface AS2 and the one surface AS1 and the other surface AS2, or the mechanism. The end portion of the adhesive sheet AS may be held by a gripping means such as a chuck or a chuck cylinder, a Coulomb force, an adhesive, an adhesive, a magnetic force, Bernoulli adsorption, a drive device, or the like.
In the case of the separation device 10, the holding means 20 may be composed of, for example, two holding means 20 moving to the right and one holding means 20 moving to the left. For example, it may be composed of three or more bodies that move to the right, left, and other directions.
In the case of the separating device 10A, the holding means 20 may be one body or two or more bodies.

The separating means 30 and 30A may be a single number instead of a plurality. In this case, for example, the separating device 10 supports the holding means 20 one by one with two sliders of one linear motor, and the adherend CP. The mutual spacing of the adherends CP may be widened only in one axis direction (for example, the X-axis direction or the Y-axis direction).
The separating means 30 may be configured to widen the mutual spacing in three or more axes (for example, the X-axis direction, the Y-axis direction, and other axial directions), or, for example, the plurality of holding means 20 moved in the X-axis direction. May be configured to move in the Y-axis direction (a configuration in which a plurality of holding means 20 moved in the Y-axis direction are each moved in the X-axis direction), and the mutual spacing between the adherend CPs may be widened or adhered. Even in a configuration in which the mutual spacing of the body CPs cannot be operated so as to be a predetermined interval, or a configuration in which the overall aggregate shape of each adherend CP cannot be actuated so as to have a similar relationship with the overall aggregate shape of the base. good.
The separating means 30A may move the holding means 20 and the contacting means 90 relative to each other by moving the contacting means 90 while stopping or moving the holding means 20, and widen the mutual spacing between the adherend CPs. ..
In the separation means 30 and 30A, the operator may operate a button, a lever, or the like to drive the linear motor 31 and the linear motor 33. In this case, for example, the detection result by the detection means 40 may be monitored or a detector. Etc., so that the mutual spacing of the adherend CPs becomes a predetermined spacing according to the detection result displayed on this display, or the overall aggregate shape of each adherend CP. The operator may drive the linear motor 31 and the linear motor 33 so that is similar to the overall collective shape of the base.

The detection means 40 may be visually observed by the operator, for example, so that the mutual spacing between the adherend CPs becomes a predetermined interval by the operator visually, or the overall shape of each adherend CP is based on the overall shape. The linear motor 31 and the linear motor 33 may be driven by operating a button, a lever, or the like so as to have a similar relationship with the overall collective shape of the above. It does not have to be provided in 10 and 10A.

The first energy applying means 50 may be configured to apply the first energy to at least one surface side of one surface AS1 side and the other surface AS2 side of the adhesive sheet AS, or an electromagnetic wave of any wavelength (for example, X-ray or the like). (Infrared rays, etc.), heated or cooled fluid such as gas or liquid may be applied to the adhesive sheet AS as the first energy, and the first energy capable of curing the adhesive sheet AS depending on the configuration of the adhesive sheet AS may be applied. Any can be given, one or more may be arranged in the upper case UC, one or more may be arranged in the lower case BC, the upper case UC or the lower. It may not be arranged in the case BC, the upper case UC or the lower case BC itself may not be present, or the adhesive sheet AS may be configured to partially apply the first energy, and the upper side and the lower side may be provided. As the ultraviolet lamps 51 and 52, any LED (Light Emitting Diode) lamp, high-pressure mercury lamp, low-pressure mercury lamp, metal halide lamp, xenon lamp, halogen lamp, etc. may be adopted, and they may be appropriately combined. You may adopt the thing.

The second energy applying means 60 may be configured to apply the second energy to at least one surface side of one surface AS1 side and the other surface AS2 side of the adhesive sheet AS, or an electromagnetic wave of any wavelength (for example, X-ray or the like). (Ultraviolet rays, etc.), heated or cooled fluid such as gas or liquid may be applied to the adhesive sheet AS as the second energy, and the second energy capable of softening the adhesive sheet AS depending on the configuration of the adhesive sheet AS may be applied. Any can be given, one or more may be arranged in the upper case UC, one or more may be arranged in the lower case BC, the upper case UC or the lower. It does not have to be arranged in the case BC, or it may be configured to give the second energy to the adhesive sheet AS as a whole, and the infrared lamp 65 includes an LED lamp, a high-pressure mercury lamp, a low-pressure mercury lamp, and a metal halide lamp. Any of a xenon lamp, a halogen lamp, or the like may be adopted, or a combination thereof may be adopted as appropriate, or may not be provided in the separation device 10 of the present invention.

The maintenance member mounting means 70, 70A may be configured to support the spacing member DM by a gripping means such as a mechanical chuck or a chuck cylinder, a Coulomb force, an adhesive, an adhesive, a magnetic force, Bernoulli suction, a drive device, or the like. The separation devices 10 and 10A of the present invention may not be provided, and thus, even if the maintenance member attaching means 70 and 70A are not provided, the adhesive sheet AS is cured in a state where the mutual spacing between the adherend CPs is widened. Therefore, even if the tension applied to the adhesive sheet AS is released, the mutual spacing between the adherends can be prevented from becoming as narrow as possible.
The maintenance member attaching means 70, 70A may attach the annular or non-annular spacing member DM to one surface AS1 or the other surface AS2 of the adhesive sheet AS in a state where the mutual spacing of the adherend CP is widened. After applying the first energy to the adhesive sheet AS, before or at the same time as applying the first energy, the spacing member DM may be attached to the adhesive sheet AS.

Instead of the cutter blade 83, the cutting means 80 employs a laser cutter, an ion beam, thermal power, heat, water pressure, a heating wire, spraying of gas, liquid, etc. as a cutting member, or combines an appropriate drive device. The cutting member may be moved to be cut by a thing, or may not be provided in the separation devices 10 and 10A of the present invention.

As the contacting means 90, a contact member 91 having another shape such as a cylinder, a prism, or an ellipse may be adopted in addition to a square cylinder or an ellipse.

The separating device 10A may include a second energy applying means 60, or arranges the maintenance member attaching means 70A inside the abutting member 91, and the maintaining member attaching means 70A goes in and out of the abutting member 91. In this case, the maintenance member mounting means 70A may not have the linear motor 73, and the contact member 91 may not have the notch 91A.

As the space maintaining member DM, for example, a member such as metal, resin, wood, or pottery may be used instead of the glass plate GP, or an adhesive, wettability, magnetic coating, etc. may be used instead of the double-sided adhesive sheet BA. It may be attached to the adhesive sheet by adsorption, Bernoulli adsorption, etc., or it may be a cup-shaped or pot-shaped one having an outer edge having a thickness larger than that of other regions, or it may be an adhesive sheet AS or itself. It may be composed of another adhesive sheet different from the adhesive sheet AS, and may be any shape as long as the adhesive sheet AS has rigidity to overcome the force to approach the state before deformation. Shape may be used.

The materials, types, shapes, etc. of the adhesive sheet AS, the double-sided adhesive sheet BA, other adhesive sheets, and the adherend CP in the present invention are not particularly limited. For example, the adhesive sheet AS is not limited as long as it is cured by applying the first energy. Further, the adhesive sheet AS, the double-sided adhesive sheet BA and other adhesive sheets may have, for example, a circular shape, an elliptical shape, a polygonal shape such as a triangle or a square shape, or any other shape, and may have pressure-sensitive adhesiveness or heat-sensitive adhesiveness. If a heat-sensitive adhesive is adopted, it may be bonded by an appropriate method such as providing an appropriate coil heater for heating the adhesive or a heating means such as the heating side of the heat pipe. It should be done. Further, the adhesive sheet AS may not be softened by being applied with the second energy. Further, the adhesive sheet AS and other adhesive sheets are, for example, a single layer having only an adhesive layer, an intermediate layer between the base material and the adhesive layer, a cover layer on the upper surface of the base material, and the like. It may be a so-called double-sided adhesive sheet having three or more layers, or a so-called double-sided adhesive sheet capable of peeling the base material from the adhesive layer, and such a double-sided adhesive sheet or double-sided adhesive sheet BA may be a single layer. Alternatively, it may be one having an intermediate layer of multiple layers, or one having a single layer or multiple layers without an intermediate layer. The adherend CP includes, for example, foods, resin containers, semiconductor wafers such as silicon semiconductor wafers and compound semiconductor wafers, semiconductor chips, circuit boards, information recording boards such as optical disks, glass plates, steel plates, pottery, wooden boards, or It may be a single material such as a resin, or a composite material formed of two or more of them, and any form of a member or an article can be targeted. The adhesive sheet AS may be read in a functional and versatile manner, and may be, for example, an information description label, a decorative label, a protective sheet, a dicing tape, a die attach film, a die bonding tape, a recording layer forming resin sheet, or the like. Sheets, films, tapes, etc. may be used.
A plurality of adherend CPs may be present on the adhesive sheet AS in advance, or are separated into individual pieces when tension is applied to the adhesive sheet AS by the separating means 30 and 30A, and a plurality of adherend CPs are present on the adhesive sheet AS. It may be something that becomes. As the adherend CP that becomes present at the time when tension is applied to such an adhesive sheet AS, for example, a semiconductor wafer is irradiated with a laser, and the semiconductor wafer is fragile such as linear or lattice-shaped. A line is formed, and when tension is applied to the adhesive sheet AS, it is individualized to form multiple adherend CPs, for example, a resin or glass plate is cut with a cutter blade into the resin or glass plate. A line to be cut that does not penetrate the front and back of a line or a grid, a line to be cut at a perforation, etc. are formed, and when tension is applied to the adhesive sheet AS, a plurality of adherend CPs are formed. Things are not limited in any way.

As the drive device in the above embodiment, electric devices such as a rotary motor, a linear motion motor, a linear motor, a single axis robot, and an articulated robot, and actuators such as an air cylinder, a hydraulic cylinder, a rodless cylinder, and a rotary cylinder are adopted. In addition, it is possible to adopt a combination of them directly or indirectly.

10, 10A ... Separation device 20 ... Holding means 30, 30A ... Separation means 50 ... First energy applying means 60 ... Second energy applying means 70, 70A ... Maintaining member mounting means 80 ... Cutting means 90 ... Contact means AS ... Adhesive Sheet AS1 ... One side CE ... Adhesive area CP ... Adhesive HE ... Holding area DM ... Spacing maintenance member IR ... Infrared (another energy)
UV ... Ultraviolet rays (predetermined energy)

Claims (4)

A plurality of holding means for holding the end portion of the adhesive sheet to which a plurality of adherends are attached to only one surface, and
A separating means for deforming the adhesive sheet and widening the mutual spacing between the adherends by relatively moving the holding means holding the end portion of the adhesive sheet is provided.
The adhesive sheet can be cured by applying a predetermined energy.
A first energy applying means for curing the adhesive sheet by applying the predetermined energy to the adhesive sheet in a state where the mutual distance between the adherends is widened by the separating means.
The adhesive sheet has rigidity to overcome the force to approach the state before deformation, and abuts only on the other surface of the adhesive sheet in a state where the mutual spacing of the adherends is widened, and the gap is widened. A separation device comprising a maintenance member mounting means for mounting a spacing member for maintaining the mutual spacing of the bodies. A holding means for holding the end of the adhesive sheet to which a plurality of adherends are attached to only one surface, and
An abutting means that abuts on the adhesive sheet outside the adherend adhesive region to which the plurality of adherends are attached in the adhesive sheet and inside the holding region held by the holding means.
A separating means for deforming the adhesive sheet and widening the mutual spacing between the adherends by relatively moving the holding means and the contacting means holding the end portion of the adhesive sheet is provided.
The adhesive sheet can be cured by applying a predetermined energy.
A first energy applying means for curing the adhesive sheet by applying the predetermined energy to the adhesive sheet in a state where the mutual distance between the adherends is widened by the separating means.
The adhesive sheet has rigidity to overcome the force to approach the state before deformation, and abuts only on the other surface of the adhesive sheet in a state where the mutual spacing of the adherends is widened, and the gap is widened. A separation device comprising a maintenance member mounting means for mounting a spacing member for maintaining the mutual spacing of the bodies. A holding step of holding the end of an adhesive sheet to which a plurality of adherends are attached to only one surface by a plurality of holding means, and a holding step.
It has a separation step of deforming the adhesive sheet and widening the mutual distance between the adherends by relatively moving the holding means holding the end portion of the adhesive sheet.
The adhesive sheet can be cured by applying a predetermined energy.
A first energy applying step of curing the adhesive sheet by applying the predetermined energy to the adhesive sheet in a state where the mutual spacing between the adherends is widened in the separation step.
The adhesive sheet has rigidity to overcome the force to approach the state before deformation, and abuts only on the other surface of the adhesive sheet in a state where the mutual spacing of the adherends is widened, and the gap is widened. A separation method comprising a maintenance member mounting step of mounting a spacing member for maintaining the mutual spacing of the bodies. A holding step of holding the end of the adhesive sheet to which a plurality of adherends are attached to only one surface by a holding means, and a holding step.
An abutting means that abuts on the adhesive sheet outside the adherend adhesive region to which the plurality of adherends are attached in the adhesive sheet and inside the holding region held by the holding means, and the adhesive. It has a separation step of deforming the adhesive sheet and widening the mutual spacing of the adherends by relatively moving the holding means holding the end portion of the sheet.
The adhesive sheet can be cured by applying a predetermined energy.
A first energy applying step of curing the adhesive sheet by applying the predetermined energy to the adhesive sheet in a state where the mutual spacing between the adherends is widened in the separation step.
The adhesive sheet has rigidity to overcome the force to approach the state before deformation, and abuts only on the other surface of the adhesive sheet in a state where the mutual spacing of the adherends is widened, and the gap is widened. A separation method comprising a maintenance member mounting step of mounting a spacing member for maintaining the mutual spacing of the bodies.

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