JP6880431B2 - Separation device and separation method - Google Patents

Separation device and separation method Download PDF

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JP6880431B2
JP6880431B2 JP2017078141A JP2017078141A JP6880431B2 JP 6880431 B2 JP6880431 B2 JP 6880431B2 JP 2017078141 A JP2017078141 A JP 2017078141A JP 2017078141 A JP2017078141 A JP 2017078141A JP 6880431 B2 JP6880431 B2 JP 6880431B2
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adhesive sheet
holding
adherends
attached
attaching
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JP2018182018A (en
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芳昭 杉下
芳昭 杉下
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Lintec Corp
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Priority to KR1020180027911A priority patent/KR102457844B1/en
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67126—Apparatus for sealing, encapsulating, glassing, decapsulating or the like
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67132—Apparatus for placing on an insulating substrate, e.g. tape
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/185—Joining of semiconductor bodies for junction formation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67092—Apparatus for mechanical treatment
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
    • H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Dicing (AREA)
  • Adhesive Tapes (AREA)

Description

本発明は、離間装置および離間方法に関する。 The present invention relates to a separation device and a separation method.

従来、接着シートに貼付された複数の被着体の相互間隔を広げるテープ拡張装置（離間装置）が知られている（例えば、特許文献１参照）。 Conventionally, a tape expansion device (separation device) for widening the mutual spacing between a plurality of adherends attached to an adhesive sheet is known (see, for example, Patent Document 1).

特開２００８−１４０８７４号公報Japanese Unexamined Patent Publication No. 2008-140874

しかしながら、特許文献１に記載されたような従来の離間装置では、粘着テープ（接着シート）におけるウエハ（被着体）が貼付された表面（一方の面）側に移し替えフレーム（間隔維持部材）を貼付する（取り付ける）ため、間隔維持部材として、被着体を避けるための内径（貫通孔）を有する環状の部材が必要となり、延いては離間装置としての汎用性が欠如するという不都合がある。 However, in the conventional separation device as described in Patent Document 1, the transfer frame (interval maintenance member) is transferred to the surface (one surface) side of the adhesive tape (adhesive sheet) to which the wafer (adhesive body) is attached. In order to attach (attach), an annular member having an inner diameter (through hole) for avoiding an adherend is required as an interval maintaining member, and there is an inconvenience that the versatility as a separation device is lacking. ..

本発明の目的は、間隔維持部材の形状の選択自由度を広げ、汎用性が欠如することを防止することができる離間装置および離間方法を提供することにある。 An object of the present invention is to provide a separating device and a separating method capable of increasing the degree of freedom in selecting the shape of the spacing member and preventing the lack of versatility.

本発明は、請求項に記載した構成を採用した。 The present invention has adopted the configuration described in the claims.

本発明によれば、一方の面に被着体が貼付された接着シートにおける他方の面に間隔維持部材を取り付けるので、間隔維持部材として被着体を避けるための貫通孔を有する環状の部材を採用する必要がなくなり、当該間隔維持部材の形状の選択自由度を広げ、汎用性が欠如することを防止することができる。
また、切断手段を備えれば、接着シート上で相互間隔が広げられた被着体を別の工程に搬送する際、接着シートの端部が搬送の妨げになることを防止することができる。
さらに、間隔維持部材として、基材と保持用接着剤層との少なくとも２層の積層体を採用すれば、間隔維持部材の選択自由度がさらに広がり、汎用性が欠如することを効果的に防止することができる。
また、維持部材取付手段が積層手段を備えれば、予め基材と保持用接着剤層とが積層された間隔維持部材を用意する必要がなくなる。
さらに、間隔維持部材として、他の接着シートを採用すれば、当該間隔維持部材を簡単に接着シートに取り付けることができる。 According to the present invention, since the interval maintaining member is attached to the other surface of the adhesive sheet to which the adherend is attached to one surface, an annular member having a through hole for avoiding the adherend is provided as the interval maintaining member. It is not necessary to adopt it, the degree of freedom in selecting the shape of the spacing member can be increased, and the lack of versatility can be prevented.
Further, if the cutting means is provided, it is possible to prevent the end portion of the adhesive sheet from hindering the transfer when the adherends having widened mutual spacing on the adhesive sheet are conveyed to another process.
Further, if at least two layers of the base material and the holding adhesive layer are used as the spacing member, the degree of freedom in selecting the spacing member is further expanded, and the lack of versatility is effectively prevented. can do.
Further, if the maintaining member attaching means is provided with the laminating means, it is not necessary to prepare the spacing maintaining member in which the base material and the holding adhesive layer are laminated in advance.
Further, if another adhesive sheet is adopted as the interval maintenance member, the interval maintenance member can be easily attached to the adhesive sheet.

（Ａ）は、本発明の実施形態に係る離間装置の平面図。（Ｂ）は、図１（Ａ）の側面図。(A) is a plan view of the separation device according to the embodiment of the present invention. (B) is a side view of FIG. 1 (A). （Ａ）、（Ｂ）は、本発明の実施形態に係る離間装置の動作説明図。(A) and (B) are operation explanatory views of the separation device which concerns on embodiment of this invention. （Ａ）〜（Ｃ）は、本発明の実施形態に係る離間装置の動作説明図。(A) to (C) are operation explanatory views of the separation device which concerns on embodiment of this invention. （Ａ）、（Ｂ）は、本発明の他の例の説明図。(A) and (B) are explanatory views of other examples of the present invention.

以下、本発明の実施形態を図面に基づいて説明する。
なお、本実施形態におけるＸ軸、Ｙ軸、Ｚ軸は、それぞれが直交する関係にあり、Ｘ軸およびＹ軸は、所定平面内の軸とし、Ｚ軸は、前記所定平面に直交する軸とする。さらに、本実施形態では、Ｙ軸と平行な矢印ＢＤ方向から観た場合を基準とし、基準となる図を挙げることなく方向を示した場合、「上」がＺ軸の矢印方向で「下」がその逆方向、「左」がＸ軸の矢印方向で「右」がその逆方向、「前」がＹ軸の矢印方向で「後」がその逆方向とする。 Hereinafter, embodiments of the present invention will be described with reference to the drawings.
The X-axis, Y-axis, and Z-axis in the present embodiment are orthogonal to each other, the X-axis and the Y-axis are axes in a predetermined plane, and the Z-axis is an axis orthogonal to the predetermined plane. To do. Further, in the present embodiment, when viewed from the direction of the arrow BD parallel to the Y-axis as a reference, and when the direction is shown without giving a reference figure, "up" is "down" in the direction of the arrow on the Z-axis. Is the opposite direction, "left" is the X-axis arrow direction, "right" is the opposite direction, "front" is the Y-axis arrow direction, and "rear" is the opposite direction.

本発明の離間装置１０は、一方の面ＡＳ１に複数の被着体ＣＰが貼付された接着シートＡＳの端部を保持する複数の保持手段２０と、接着シートＡＳの端部を保持した保持手段２０を相対移動させ、被着体ＣＰの相互間隔を広げる離間手段３０と、被着体ＣＰの相互間隔や各被着体ＣＰの全体的な集合形状等を検知可能なカメラや投影機等の撮像手段、光学センサや音波センサ等の各種センサ等の検知手段４０と、離間手段３０によって広げられた被着体ＣＰの相互間隔を維持可能な間隔維持部材ＤＭを接着シートＡＳに取り付ける維持部材取付手段５０と、接着シートＡＳを切断する切断手段６０とを備えている。
なお、接着シートＡＳは、基材シートの一方の面に接着剤層が積層され、張力が付与された後、当該張力が解除されると、変形前の状態に近付こうとする性質を備えている。 The separation device 10 of the present invention includes a plurality of holding means 20 for holding the ends of the adhesive sheet AS to which a plurality of adherend CPs are attached to one surface AS1, and holding means for holding the ends of the adhesive sheet AS. A separation means 30 that moves 20 relative to each other to widen the mutual spacing between the adherend CPs, and a camera, a projector, or the like that can detect the mutual spacing between the adherend CPs and the overall aggregate shape of each adherend CP. A maintenance member attachment that attaches a distance maintenance member DM capable of maintaining a mutual distance between the detection means 40 such as an image pickup means, an optical sensor, a sound sensor, and the like and the adherend CP expanded by the separation means 30 to the adhesive sheet AS. The means 50 and the cutting means 60 for cutting the adhesive sheet AS are provided.
The adhesive sheet AS has a property that the adhesive layer is laminated on one surface of the base material sheet, tension is applied, and then the tension is released to approach the state before deformation. ing.

保持手段２０は、離間手段３０に支持された駆動機器としての回動モータ２１と、その出力軸２１Ａに支持された上保持部材２２とを備えている。 The holding means 20 includes a rotating motor 21 as a driving device supported by the separating means 30, and an upper holding member 22 supported by the output shaft 21A thereof.

離間手段３０は、駆動機器としてのリニアモータ３１と、そのスライダ３１Ａに支持され、上面側で回動モータ２１を支持する下保持部材３２とを備えている。 The separating means 30 includes a linear motor 31 as a drive device, and a lower holding member 32 supported by the slider 31A and supporting the rotary motor 21 on the upper surface side.

維持部材取付手段５０は、接着シートＡＳが変形前の状態に近付こうとする力に打ち勝つことが可能な剛性を備えた基材としての硝子板ＧＰと、当該硝子板ＧＰに貼付された保持用接着剤層としての両面接着シートＢＡとの２層の積層体から構成された間隔維持部材ＤＭを接着シートＡＳの他方の面ＡＳ２に取り付けるようになっている。
すなわち、維持部材取付手段５０は、Ｙ軸方向に移動するスライダ５１Ａを備えた駆動機器としてのリニアモータ５１と、スライダ５１Ａに支持され、Ｘ軸方向に移動するスライダ５２Ａを備えた駆動機器としてのリニアモータ５２と、スライダ５２Ａに支持された駆動機器としての直動モータ５３と、その出力軸５３Ａに支持され、減圧ポンプや真空エジェクタ等の図示しない減圧手段によって間隔維持部材ＤＭを支持可能な支持面５４Ａを有する支持テーブル５４と、硝子板ＧＰに両面接着シートＢＡを積層し、間隔維持部材ＤＭを形成する積層手段５５とを備えている。
積層手段５５は、両面接着シートＢＡの一方の面が帯状の剥離シートＲＬ上に仮着され、他方の面にカバーシートＣＳが仮着された原反ＲＳを支持する支持ローラ５５Ａと、原反ＲＳを案内するガイドローラ５５Ｂと、剥離シートＲＬを折り返し、当該剥離シートＲＬから両面接着シートＢＡを剥離する剥離手段としての剥離板５５Ｃと、カバーシートＣＳを介して硝子板ＧＰに両面接着シートＢＡを押圧して貼付するとともに、両面接着シートＢＡからカバーシートＣＳを剥離する押圧手段としての押圧ローラ５５Ｄと、駆動機器としての回動モータ５５Ｅによって駆動され、カバーシートＣＳを回収する第１回収ローラ５５Ｆと、駆動機器としての回動モータ５５Ｇによって駆動され、ピンチローラ５５Ｊとの間に剥離シートＲＬを挟み込む駆動ローラ５５Ｈと、図示しない駆動機器によって駆動し、剥離シートＲＬを回収する第２回収ローラ５５Ｋとを備えている。 The maintenance member mounting means 50 includes a glass plate GP as a base material having rigidity capable of overcoming the force of the adhesive sheet AS to approach the state before deformation, and a holding attached to the glass plate GP. An interval maintaining member DM composed of a two-layer laminate with a double-sided adhesive sheet BA as an adhesive layer for use is attached to the other surface AS2 of the adhesive sheet AS.
That is, the maintenance member mounting means 50 is a drive device including a linear motor 51 as a drive device having a slider 51A moving in the Y-axis direction and a slider 52A supported by the slider 51A and moving in the X-axis direction. A linear motor 52, a linear motor 53 as a drive device supported by the slider 52A, and a support that is supported by the output shaft 53A and can support the interval maintenance member DM by a decompression means (not shown) such as a decompression pump or a vacuum ejector. A support table 54 having a surface 54A and a laminating means 55 for laminating a double-sided adhesive sheet BA on a glass plate GP to form an interval maintaining member DM are provided.
The laminating means 55 includes a support roller 55A for supporting the original fabric RS in which one surface of the double-sided adhesive sheet BA is temporarily attached on the strip-shaped release sheet RL and the cover sheet CS is temporarily attached to the other surface, and the original fabric. The guide roller 55B that guides the RS, the release plate 55C as a release means for peeling the double-sided adhesive sheet BA from the release sheet RL by folding back the release sheet RL, and the double-sided adhesive sheet BA on the glass plate GP via the cover sheet CS. A first recovery roller that is driven by a pressing roller 55D as a pressing means for peeling the cover sheet CS from the double-sided adhesive sheet BA and a rotating motor 55E as a driving device to collect the cover sheet CS. A drive roller 55H that is driven by a rotating motor 55G as a drive device and sandwiches a release sheet RL between the pinch roller 55J and a second recovery roller that is driven by a drive device (not shown) to collect the release sheet RL. It has 55K.

切断手段６０は、複数のアームによって構成された駆動機器としての多関節ロボット６１と、当該多関節ロボット６１の作業部である先端アーム６１Ａにブラケット６２を介して支持された切断部材としてのカッター刃６３とを備えている。多関節ロボット６１は、その作業範囲内において、先端アーム６１Ａで支持したものを何れの位置、何れの角度にでも変位可能な所謂６軸ロボット等でよく、例えば、特開２０１６−８１９７４に例示されている多関節ロボット１１１等が例示できる。 The cutting means 60 includes an articulated robot 61 as a drive device composed of a plurality of arms, and a cutter blade as a cutting member supported by a tip arm 61A, which is a working portion of the articulated robot 61, via a bracket 62. It is equipped with 63. The articulated robot 61 may be a so-called 6-axis robot or the like that can displace the robot supported by the tip arm 61A at any position and any angle within the working range, and is exemplified by Japanese Patent Application Laid-Open No. 2016-81974. The articulated robot 111 and the like can be exemplified.

以上の離間装置１０の動作を説明する。
先ず、各部材が図１（Ａ）、（Ｂ）中実線で示す初期位置で待機している離間装置１０に対し、当該離間装置１０の使用者（以下、単に「使用者」という）が原反ＲＳを同図のようにセットした後、操作パネルやパーソナルコンピュータ等の図示しない操作手段を介して自動運転開始の信号を入力する。その後、作業者または、駆動機器やコンベア等の図示しない搬送手段が、硝子板ＧＰを支持面５４Ａ上に載置すると、維持部材取付手段５０が図示しない減圧手段を駆動し、当該硝子板ＧＰの吸着保持を開始する。なお、本実施形態の硝子板ＧＰおよび両面接着シートＢＡは、被着体ＣＰを避けるための貫通孔を有しない平面視四角形の部材が採用されている。 The operation of the separation device 10 described above will be described.
First, with respect to the separation device 10 in which each member stands by at the initial position shown by the solid line in FIGS. 1A and 1B, the user of the separation device 10 (hereinafter, simply referred to as “user”) is the source. After setting the anti-RS as shown in the figure, a signal for starting automatic operation is input via an operation means (not shown) such as an operation panel or a personal computer. After that, when a worker or a transport means (not shown) such as a drive device or a conveyor places the glass plate GP on the support surface 54A, the maintenance member mounting means 50 drives a decompression means (not shown) of the glass plate GP. Start adsorption retention. The glass plate GP and the double-sided adhesive sheet BA of the present embodiment employ a quadrangular member in a plan view that does not have a through hole for avoiding the adherend CP.

そして、作業者または、図示しない搬送手段が複数の被着体ＣＰが貼付された接着シートＡＳを下保持部材３２上に載置すると、保持手段２０が回動モータ２１を駆動し、図１（Ｂ）中二点鎖線で示すように、上保持部材２２と下保持部材３２とで接着シートＡＳの端部を保持する。次いで、離間手段３０が各リニアモータ３１を駆動し、保持手段２０を相互に離間させて被着体ＣＰの相互間隔を広げる。このとき、各被着体ＣＰは、図２（Ａ）に示すように、接着シートＡＳのひずみ等によって、相互間隔が所定の間隔に広がらないことがある。そこで、検知手段４０がカメラ等を駆動し、各被着体ＣＰの相互間隔や各被着体ＣＰの全体的な集合形状等を検知する。次に、検知手段４０の検知結果を基にして、離間手段３０が各リニアモータ３１を駆動し、図２（Ｂ）に示すように、各被着体ＣＰの相互間隔が所定間隔となるように、または、各被着体ＣＰの全体的な集合形状が基の全体的な集合形状に対して相似関係となるように、各保持手段２０を個別に移動させる。 Then, when an operator or a transporting means (not shown) places the adhesive sheet AS to which the plurality of adherend CPs are attached on the lower holding member 32, the holding means 20 drives the rotary motor 21 and FIG. B) As shown by the alternate long and short dash line, the upper holding member 22 and the lower holding member 32 hold the end portion of the adhesive sheet AS. Next, the separating means 30 drives each linear motor 31 to separate the holding means 20 from each other to widen the mutual spacing of the adherend CPs. At this time, as shown in FIG. 2A, the mutual spacing of the adherend CPs may not be widened to a predetermined spacing due to the strain of the adhesive sheet AS or the like. Therefore, the detection means 40 drives a camera or the like to detect the mutual spacing between the adherend CPs, the overall aggregate shape of the adherend CPs, and the like. Next, based on the detection result of the detecting means 40, the separating means 30 drives each linear motor 31 so that the mutual spacing of the adherend CPs becomes a predetermined spacing as shown in FIG. 2 (B). Or, each holding means 20 is individually moved so that the overall aggregate shape of each adherend CP is similar to the overall aggregate shape of the base.

被着体ＣＰの相互間隔が所定間隔に広げられたことまたは、各被着体ＣＰの全体的な集合形状が所定形状となったことを検知手段４０が検知すると、維持部材取付手段５０がリニアモータ５２を駆動し、硝子板ＧＰを支持した支持テーブル５４を左方へ移動させる。次いで、硝子板ＧＰが所定の位置に達すると、維持部材取付手段５０が回動モータ５５Ｅ、５５Ｇを駆動し、原反ＲＳを繰り出し、図１（Ｂ）中二点鎖線で示すように、硝子板ＧＰに両面接着シートＢＡを貼付して間隔維持部材ＤＭを形成する。次いで、維持部材取付手段５０がリニアモータ５１、５２を駆動し、図３（Ａ）に示すように、相互間隔が拡げられた被着体ＣＰの下方に間隔維持部材ＤＭを配置した後、直動モータ５３を駆動し、図３（Ｂ）に示すように、接着シートＡＳの他方の面ＡＳ２側に間隔維持部材ＤＭを取り付ける。 When the detecting means 40 detects that the mutual spacing between the adherend CPs is widened to a predetermined interval or that the overall collective shape of each adherend CP has become a predetermined shape, the maintenance member mounting means 50 is linear. The motor 52 is driven to move the support table 54 supporting the glass plate GP to the left. Next, when the glass plate GP reaches a predetermined position, the maintenance member mounting means 50 drives the rotary motors 55E and 55G to feed the original fabric RS, and as shown by the alternate long and short dash line in FIG. 1 (B), the glass. A double-sided adhesive sheet BA is attached to the plate GP to form an interval maintaining member DM. Next, the maintenance member mounting means 50 drives the linear motors 51 and 52, and as shown in FIG. 3A, the spacing member DM is placed below the adherend CP whose mutual spacing is widened, and then directly. The dynamic motor 53 is driven, and as shown in FIG. 3B, the spacing member DM is attached to the other surface AS2 side of the adhesive sheet AS.

その後、切断手段６０が多関節ロボット６１を駆動し、図３（Ｃ）に示すように、カッター刃６３を接着シートＡＳに突き刺した後、当該カッター刃６３を被着体ＣＰ全体の外縁に沿って１周させて接着シートＡＳを切断し、間隔維持部材ＤＭが取り付けられ、接着シートＡＳ上で被着体ＣＰの相互間隔が広げられた一体物ＷＫを形成する。次いで、切断手段６０が多関節ロボット６１を駆動し、カッター刃６３を初期位置に復帰させると、維持部材取付手段５０が図示しない減圧手段の駆動を停止し、間隔維持部材ＤＭの吸着保持を解除する。そして、作業者または、図示しない搬送手段が一体物ＷＫを別の工程に搬送すると、保持手段２０が回動モータ２１を駆動し、上保持部材２２と下保持部材３２とでの接着シートＡＳの保持を解除する。その後、作業者または、図示しない搬送手段が、下保持部材３２上に残された接着シートＡＳ部分を取り去ると、各手段がそれぞれの駆動機器を駆動し、各部材を初期位置に復帰させ、以降上記同様の動作が繰り返される。 After that, the cutting means 60 drives the articulated robot 61, and as shown in FIG. 3C, the cutter blade 63 is pierced into the adhesive sheet AS, and then the cutter blade 63 is inserted along the outer edge of the entire adherend CP. The adhesive sheet AS is cut by making one round, and the spacing member DM is attached to form an integral WK on the adhesive sheet AS in which the mutual spacing between the adherends CP is widened. Next, when the cutting means 60 drives the articulated robot 61 and returns the cutter blade 63 to the initial position, the maintenance member attaching means 50 stops driving the decompression means (not shown), and the suction holding of the interval maintaining member DM is released. To do. Then, when an operator or a conveying means (not shown) conveys the integrated WK to another process, the holding means 20 drives the rotary motor 21 to form an adhesive sheet AS between the upper holding member 22 and the lower holding member 32. Release the hold. After that, when an operator or a conveying means (not shown) removes the adhesive sheet AS portion left on the lower holding member 32, each means drives each driving device and returns each member to the initial position. The same operation as above is repeated.

以上のような離間装置１０によれば、一方の面ＡＳ１に被着体ＣＰが貼付された接着シートＡＳにおける他方の面ＡＳ２に間隔維持部材ＤＭを取り付けるので、間隔維持部材ＤＭとして被着体ＣＰを避けるための貫通孔を有する環状の部材を採用する必要がなくなり、当該間隔維持部材ＤＭの形状の選択自由度を広げ、汎用性が欠如することを防止することができる。 According to the separation device 10 as described above, since the spacing member DM is attached to the other surface AS2 of the adhesive sheet AS in which the adherend CP is attached to one surface AS1, the adherend CP is used as the spacing member DM. It is not necessary to adopt an annular member having a through hole for avoiding the above, and it is possible to increase the degree of freedom in selecting the shape of the interval maintaining member DM and prevent the lack of versatility.

本発明における手段および工程は、それら手段および工程について説明した動作、機能または工程を果たすことができる限りなんら限定されることはなく、まして、前記実施形態で示した単なる一実施形態の構成物や工程に全く限定されることはない。例えば、保持手段は、一方の面に複数の被着体が貼付された接着シートの端部を保持可能なものであれば、出願当初の技術常識に照らし合わせ、その技術範囲内のものであればなんら限定されることはない（その他の手段および工程も同じ）。 The means and processes in the present invention are not limited as long as they can perform the operations, functions or processes described for the means and processes, much less the components of the mere embodiment shown in the above-described embodiment. It is not limited to the process at all. For example, if the holding means can hold the end portion of the adhesive sheet to which a plurality of adherends are attached to one surface, the holding means may be within the technical range in light of the common general technical knowledge at the time of filing. There is no limitation (the same applies to other means and processes).

本発明の離間装置は、図４（Ａ）に示すように、保持手段２０と、接着シートＡＳにおける複数の被着体ＣＰが貼付された被着体接着領域ＣＥよりも外側であって、保持手段２０が保持した保持領域ＨＥの内側で当該接着シートＡＳに当接する当接手段７０と、接着シートＡＳの端部を保持した保持手段２０および当接手段７０を相対移動させ、被着体ＣＰの相互間隔を広げる離間手段３０Ａと、検知手段４０と、離間手段３０Ａによって広げられた被着体ＣＰの相互間隔を維持可能な間隔維持部材ＤＭを接着シートＡＳに取り付ける維持部材取付手段５０Ａと、切断手段６０とを備えた離間装置１０Ａとしてもよい。
なお、離間装置１０Ａにおいて、離間装置１０と同等の構成で同等の機能を有するものは、当該離間装置１０と同じ番号を付してその構成説明は省略し、動作説明は簡略化する。 As shown in FIG. 4A, the separating device of the present invention holds the holding means 20 outside the adherend adhesive region CE to which a plurality of adherend CPs are attached in the adhesive sheet AS. The contacting means 70 that comes into contact with the adhesive sheet AS inside the holding region HE held by the means 20 and the holding means 20 and the contacting means 70 that hold the ends of the adhesive sheet AS are relatively moved to move the adherend CP. The separating means 30A for widening the mutual spacing between the two, the detecting means 40, and the maintaining member attaching means 50A for attaching the spacing maintaining member DM capable of maintaining the mutual spacing of the adherend CP expanded by the separating means 30A to the adhesive sheet AS. The separation device 10A provided with the cutting means 60 may be used.
In the separation device 10A, those having the same configuration as the separation device 10 and having the same function are assigned the same numbers as the separation device 10 and the configuration description is omitted, and the operation description is simplified.

離間手段３０Ａは、ベースプレートＢＰ上に支持された駆動機器としての直動モータ３３と、その出力軸３３Ａに支持され、上面側で回動モータ２１を支持する下保持部材３４とを備えている。
維持部材取付手段５０Ａは、Ｙ軸方向に移動するスライダ５６Ａを備えた駆動機器としてのリニアモータ５６の当該スライダ５６Ａ上に、直動モータ５３を介して支持テーブル５４が支持されている。
当接手段７０は、ベースプレートＢＰ上に支持され、手前側に維持部材取付手段５０Ａの出入りを許容する切欠７１Ａが形成された円筒状の当接部材７１を備えている。 The separating means 30A includes a linear motor 33 as a drive device supported on the base plate BP, and a lower holding member 34 supported by the output shaft 33A and supporting the rotary motor 21 on the upper surface side.
In the maintenance member mounting means 50A, the support table 54 is supported on the slider 56A of the linear motor 56 as a drive device including the slider 56A that moves in the Y-axis direction via the linear motor 53.
The contact means 70 includes a cylindrical contact member 71 that is supported on the base plate BP and has a notch 71A formed on the front side that allows the maintenance member mounting means 50A to enter and exit.

このような離間装置１０Ａは、硝子板ＧＰ上に予め両面接着シートＢＡが積層された間隔維持部材ＤＭが、当接部材７１の外側（手前側）に位置する支持テーブル５４上に両面接着シートＢＡ側が上側となるように載置される。その後、離間装置１０と同様にして複数の被着体ＣＰが貼付された接着シートＡＳが下保持部材３４上に載置されると、保持手段２０が回動モータ２１を駆動し、図４（Ａ）中二点鎖線で示すように、上保持部材２２と下保持部材３４とで接着シートＡＳの端部を保持する。なお、接着シートＡＳの端部には、図４に示すように、リング状のフレームＲＦが貼付されているが、当該フレームＲＦは、なくてもよい。次いで、離間手段３０Ａが直動モータ３３を駆動し、保持手段２０を下降させて保持手段２０および当接手段７０を相対移動させ、図４（Ｂ）に示すように、被着体ＣＰの相互間隔を広げた後、維持部材取付手段５０Ａがリニアモータ５６を駆動し、相互間隔が拡げられた被着体ＣＰの下方に間隔維持部材ＤＭを配置する。そして、離間装置１０と同様にして、図４（Ｂ）に示すように、維持部材取付手段５０Ａで接着シートＡＳの他方の面ＡＳ２側に間隔維持部材ＤＭを取り付け、切断手段６０で接着シートＡＳを切断した後、一体物ＷＫを別の工程に搬送する。 In such a separation device 10A, the interval maintenance member DM in which the double-sided adhesive sheet BA is previously laminated on the glass plate GP is placed on the support table 54 located on the outside (front side) of the contact member 71. It is placed so that the side is on the upper side. After that, when the adhesive sheet AS to which the plurality of adherend CPs are attached is placed on the lower holding member 34 in the same manner as the separating device 10, the holding means 20 drives the rotary motor 21 and FIG. A) As shown by the alternate long and short dash line, the upper holding member 22 and the lower holding member 34 hold the end portion of the adhesive sheet AS. As shown in FIG. 4, a ring-shaped frame RF is attached to the end of the adhesive sheet AS, but the frame RF may not be provided. Next, the separating means 30A drives the linear motor 33 to lower the holding means 20 to move the holding means 20 and the contacting means 70 relative to each other, and as shown in FIG. 4B, the adherend CPs are mutually moved. After widening the interval, the maintenance member attaching means 50A drives the linear motor 56, and the spacing member DM is arranged below the adherend CP in which the mutual spacing is widened. Then, in the same manner as the separation device 10, as shown in FIG. 4B, the maintenance member attaching means 50A attaches the spacing member DM to the other surface AS2 side of the adhesive sheet AS, and the cutting means 60 attaches the adhesive sheet AS. After cutting, the integral WK is transported to another process.

このような離間装置１０Ａによっても、離間装置１０と同様の効果を得ることができる。 With such a separation device 10A, the same effect as that of the separation device 10 can be obtained.

保持手段２０は、図１、４で示した状態に対し、接着シートＡＳが上下反転した状態（被着体ＣＰが下方に位置する状態）で、当該接着シートＡＳの端部を保持する構成でもよく、この場合、維持部材取付手段５０、５０Ａは、接着シートＡＳの上面側に間隔維持部材ＤＭを取り付ける構成となる。
保持手段２０は、メカチャックやチャックシリンダ等の把持手段、クーロン力、接着剤、粘着剤、磁力、ベルヌーイ吸着、駆動機器等で接着シートＡＳの端部を保持する構成でもよい。
保持手段２０は、離間装置１０の場合、例えば、右方へ移動する当該保持手段２０を１体とし、左方へ移動する当該保持手段２０を１体とした２体で構成してもよいし、例えば、右方、左方およびその他の方向へ移動する３体以上で構成してもよい。
保持手段２０は、離間装置１０Ａの場合、１体でもよいし２体以上でもよい。 The holding means 20 is also configured to hold the end portion of the adhesive sheet AS in a state in which the adhesive sheet AS is turned upside down (a state in which the adherend CP is located below) with respect to the state shown in FIGS. Often, in this case, the maintenance member attaching means 50, 50A has a configuration in which the interval maintaining member DM is attached to the upper surface side of the adhesive sheet AS.
The holding means 20 may be configured to hold the end portion of the adhesive sheet AS by a gripping means such as a mechanical chuck or a chuck cylinder, a Coulomb force, an adhesive, an adhesive, a magnetic force, Bernoulli adsorption, a driving device, or the like.
In the case of the separation device 10, the holding means 20 may be composed of, for example, two holding means 20 moving to the right and one holding means 20 moving to the left. For example, it may be composed of three or more bodies that move to the right, left, and other directions.
In the case of the separating device 10A, the holding means 20 may be one body or two or more bodies.

離間手段３０、３０Ａは、複数でなく単数でもよく、この場合、例えば、離間装置１０は、１体のリニアモータの２つのスライダで、保持手段２０をそれぞれ１体ずつ支持し、被着体ＣＰの相互間隔を広げる構成とし、被着体ＣＰの相互間隔を１軸方向（例えば、Ｘ軸方向またはＹ軸方向等）のみに広げる構成としてもよい。
離間手段３０は、相互間隔を３軸以上の方向（例えば、Ｘ軸方向、Ｙ軸方向およびその他の軸方向）に広げる構成でもよいし、例えば、Ｘ軸方向に移動させた複数の保持手段２０をそれぞれＹ軸方向に移動させる構成（Ｙ軸方向に移動させた複数の保持手段２０をそれぞれＸ軸方向に移動させる構成）とし、被着体ＣＰの相互間隔を広げてもよいし、被着体ＣＰの相互間隔が所定間隔となるように作動できない構成、または、各被着体ＣＰの全体的な集合形状が基の全体的な集合形状に対して相似関係となるように作動できない構成でもよい。
離間手段３０Ａは、保持手段２０を停止または移動させつつ、当接手段７０を移動させることで、保持手段２０および当接手段７０を相対移動させ、被着体ＣＰの相互間隔を広げてもよい。
離間手段３０、３０Ａは、作業者がボタンやレバー等を操作して、リニアモータ３１、直動モータ３３を駆動してもよく、この場合、例えば、検知手段４０による検知結果をモニタや検出器等の表示器に表示するように構成し、この表示器に表示される検知結果によって被着体ＣＰの相互間隔が所定間隔となるように、または、各被着体ＣＰの全体的な集合形状が基の全体的な集合形状に対して相似関係となるように、作業者がリニアモータ３１、直動モータ３３を駆動させてもよい。 The separating means 30 and 30A may be a single number instead of a plurality. In this case, for example, the separating device 10 supports one holding means 20 by two sliders of one linear motor, and the adherend CP. The mutual spacing of the adherends CP may be widened only in one axial direction (for example, the X-axis direction or the Y-axis direction).
The separating means 30 may be configured to widen the mutual spacing in three or more axes (for example, the X-axis direction, the Y-axis direction, and other axial directions), or, for example, the plurality of holding means 20 moved in the X-axis direction. May be configured to be moved in the Y-axis direction (a configuration in which a plurality of holding means 20 moved in the Y-axis direction are each moved in the X-axis direction), and the mutual spacing between the adherend CPs may be widened, or the adherends may be adhered. Even in a configuration in which the mutual intervals of the body CPs cannot be operated so as to be a predetermined interval, or in a configuration in which the overall aggregate shape of each adherend CP cannot be operated so as to have a similar relationship with the overall aggregate shape of the base. Good.
The separating means 30A may move the holding means 20 and the contacting means 70 relative to each other by moving the contacting means 70 while stopping or moving the holding means 20, and widen the mutual spacing between the adherend CPs. ..
In the separation means 30 and 30A, the operator may operate a button, a lever, or the like to drive the linear motor 31 and the linear motor 33. In this case, for example, the detection result by the detection means 40 is monitored or detected by the detector or the detector. Etc., so that the mutual spacing of the adherend CPs becomes a predetermined spacing according to the detection result displayed on this display, or the overall aggregate shape of each adherend CP. The operator may drive the linear motor 31 and the linear motor 33 so that the elements are similar to the overall shape of the base.

検知手段４０は、作業者の目視でもよく、例えば、作業者が目視によって、被着体ＣＰの相互間隔が所定間隔となるように、または、各被着体ＣＰの全体的な集合形状が基の全体的な集合形状に対して相似関係となるように、ボタンやレバー等を操作して、リニアモータ３１、直動モータ３３を駆動するように構成してもよいし、本発明の離間装置１０、１０Ａに備わっていなくてもよい。 The detection means 40 may be visually observed by the operator, for example, so that the mutual spacing between the adherend CPs becomes a predetermined interval by the operator visually, or the overall collective shape of each adherend CP is based on the detection means 40. The linear motor 31 and the linear motor 33 may be driven by operating a button, a lever, or the like so as to have a similar relationship with the overall collective shape of the above. It does not have to be provided in 10 and 10A.

維持部材取付手段５０、５０Ａは、メカチャックやチャックシリンダ等の把持手段、クーロン力、接着剤、粘着剤、磁力、ベルヌーイ吸着、駆動機器等で間隔維持部材ＤＭを支持する構成でもよいし、間隔維持部材ＤＭとして、接着シートＡＳが変形前の状態に近付こうとする力に打ち勝つことが可能な剛性を備えた図示しない他の接着シートを採用し、当該図示しない他の接着シートを接着シートＡＳの他方の面に貼付する構成としてもよいし、間隔維持部材ＤＭとして、被着体ＣＰを避けるための貫通孔を有する環状の部材を採用してもよいし、間隔維持部材ＤＭとして、平面視三角形や、五角形以上の多角形のもの、円形、楕円形、その他の形状のものを採用してもよい。
維持部材取付手段５０、間隔維持部材ＤＭとして、予め接着シートＡＳに取り付けることができるものが備わっているものを採用してもよく、この場合、積層手段５５はなくてもよい。
維持部材取付手段５０Ａは、間隔維持部材ＤＭとして、硝子板ＧＰ上に予め両面接着シートＢＡが積層されていないものを採用し、離間装置１０と同等の積層手段５５で硝子板ＧＰ上に両面接着シートＢＡを積層するように構成してもよい。 The maintenance member mounting means 50 and 50A may be configured to support the interval maintenance member DM by a gripping means such as a mechanical chuck or a chuck cylinder, a Coulomb force, an adhesive, an adhesive, a magnetic force, Bernoulli adsorption, a drive device, or the like. As the maintenance member DM, another adhesive sheet (not shown) having rigidity capable of overcoming the force of the adhesive sheet AS to approach the state before deformation is adopted, and the other adhesive sheet (not shown) is used as the adhesive sheet. It may be attached to the other surface of the AS, or an annular member having a through hole for avoiding the adherend CP may be adopted as the spacing member DM, or a flat surface as the spacing member DM. A visual triangle, a polygonal shape having a pentagon or more, a circular shape, an elliptical shape, and other shapes may be adopted.
As the maintenance member attaching means 50 and the interval maintaining member DM, those provided with those that can be attached to the adhesive sheet AS in advance may be adopted, and in this case, the laminating means 55 may not be provided.
The maintenance member mounting means 50A adopts a space maintenance member DM in which the double-sided adhesive sheet BA is not laminated on the glass plate GP in advance, and double-sided adhesion is performed on the glass plate GP by the lamination means 55 equivalent to the separation device 10. The sheet BA may be configured to be laminated.

切断手段６０は、カッター刃６３の代わりに、レーザカッタ、イオンビーム、火力、熱、水圧、電熱線、気体や液体等の吹付け等を切断部材として採用したり、適宜な駆動機器を組み合わせたもので切断部材を移動させて切断するようにしたりしてもよいし、本発明の離間装置１０、１０Ａに備わっていなくてもよい。 Instead of the cutter blade 63, the cutting means 60 employs a laser cutter, an ion beam, thermal power, heat, water pressure, heating wire, spraying of gas, liquid, etc. as a cutting member, or combines an appropriate drive device. The cutting member may be moved to cut by a thing, or may not be provided in the separation devices 10 and 10A of the present invention.

当接手段７０は、角筒状や楕円筒状等の他、円柱、角柱、楕円中等の他の形状の当接部材７１を採用してもよい。 The contacting means 70 may employ a contact member 71 having another shape such as a cylinder, a prism, or an ellipse, in addition to a square cylinder or an ellipse.

離間装置１０Ａは、維持部材取付手段５０Ａを当接部材７１の内部に配置し、当該維持部材取付手段５０Ａが当接部材７１の内部に出入りしない構成としてもよく、この場合、維持部材取付手段５０Ａは、リニアモータ５６がなくてもよく、当接部材７１は切欠７１Ａがなくてもよい。 The separation device 10A may have a configuration in which the maintenance member mounting means 50A is arranged inside the contact member 71 so that the maintenance member mounting means 50A does not go in and out of the contact member 71. In this case, the maintenance member mounting means 50A The linear motor 56 may not be provided, and the contact member 71 may not have the notch 71A.

間隔維持部材ＤＭは、硝子板ＧＰの代わりに、例えば、金属、樹脂、木材、陶器等の部材を採用したり、外縁部がその他の領域よりも厚さが大きく形成されたカップ形状や鍋形状のものを採用したりしてもよく、接着シートＡＳが変形前の状態に近付こうとする力に打ち勝つことができる剛性を備えたものであれば何でもよいし、形状もどのような形状でもよい。
保持用接着剤層は、基材シートの両面に同じ成分または異なる成分で構成された接着剤層を有する両面接着シートや、液体またはジェル状の接着剤でもよい。
間隔維持部材ＤＭは、保持用接着剤層を用いずに、濡れ性、磁着、吸着、ベルヌーイ吸着等で接着シートＡＳに取り付くものを採用してもよい。 The interval maintenance member DM uses, for example, a member such as metal, resin, wood, or pottery instead of the glass plate GP, or has a cup shape or a pot shape in which the outer edge is formed to be thicker than other regions. Any shape may be used as long as the adhesive sheet AS has rigidity capable of overcoming the force of approaching the state before deformation. Good.
The holding adhesive layer may be a double-sided adhesive sheet having adhesive layers composed of the same component or different components on both sides of the base sheet, or a liquid or gel-like adhesive.
As the interval maintaining member DM, a member that attaches to the adhesive sheet AS by wettability, magnetism, adsorption, Bernoulli adsorption, or the like may be adopted without using the holding adhesive layer.

本発明における接着シートＡＳ、両面接着シートＢＡ、他の接着シートおよび被着体ＣＰの材質、種別、形状等は、特に限定されることはない。このような接着シートＡＳ、両面接着シートＢＡ、および他の接着シートは、例えば、円形、楕円形、三角形や四角形等の多角形、その他の形状であってもよいし、感圧接着性、感熱接着性等の接着形態のものであってもよく、感熱接着性のものが採用された場合は、それを加熱する適宜なコイルヒータやヒートパイプの加熱側等の加熱手段を設けるといった適宜な方法で接着されればよい。また、接着シートＡＳおよび他の接着シートは、例えば、接着剤層だけの単層のもの、基材と接着剤層との間に中間層を有するもの、基材の上面にカバー層を有する等３層以上のもの、更には、基材を接着剤層から剥離することのできる所謂両面接着シートのようなものであってもよく、そのような両面接着シートや両面接着シートＢＡは、単層又は複層の中間層を有するものや、中間層のない単層又は複層のものであってよい。また、被着体ＣＰとしては、例えば、食品、樹脂容器、シリコン半導体ウエハや化合物半導体ウエハ等の半導体ウエハ、半導体チップ、回路基板、光ディスク等の情報記録基板、ガラス板、鋼板、陶器、木板または樹脂等の単体物であってもよいし、それら２つ以上で形成された複合物であってもよく、任意の形態の部材や物品なども対象とすることができる。なお、接着シートＡＳは、機能的、用途的な読み方に換え、例えば、情報記載用ラベル、装飾用ラベル、保護シート、ダイシングテープ、ダイアタッチフィルム、ダイボンディングテープ、記録層形成樹脂シート等の任意のシート、フィルム、テープ等でもよい。
被着体ＣＰは、予め接着シートＡＳ上で複数存在していてもよいし、離間手段３０、３０Ａで接着シートＡＳに張力を付与した時点で個片化し、接着シートＡＳ上に複数存在するようになるものでもよい。このような接着シートＡＳに張力を付与した時点で複数存在するようになる被着体ＣＰとしては、例えば、半導体ウエハにレーザを照射し、当該半導体ウエハに線状や格子状等の脆弱な脆弱ラインを形成しておき、接着シートＡＳに張力を付与した時点で個片化し、複数の被着体ＣＰとなるものや、例えば、樹脂や硝子板にカッター刃で切り込み、当該樹脂や硝子板に線状や格子状等の表裏に貫通することのない切断予定ラインや、ミシン目の切断予定ライン等を形成しておき、接着シートＡＳに張力を付与した時点で複数の被着体ＣＰとなるもの等、何ら限定されるものではない。 The materials, types, shapes, etc. of the adhesive sheet AS, the double-sided adhesive sheet BA, other adhesive sheets, and the adherend CP in the present invention are not particularly limited. Such an adhesive sheet AS, a double-sided adhesive sheet BA, and other adhesive sheets may have, for example, a circular shape, an elliptical shape, a polygonal shape such as a triangle or a quadrangular shape, or other shapes, and may have pressure-sensitive adhesiveness and heat sensitivity. It may be of an adhesive form such as adhesiveness, and when a heat-sensitive adhesive type is adopted, an appropriate method such as providing an appropriate coil heater for heating the adhesive or a heating means such as the heating side of the heat pipe is provided. It should be glued with. Further, the adhesive sheet AS and other adhesive sheets include, for example, a single layer having only an adhesive layer, an intermediate layer between the base material and the adhesive layer, a cover layer on the upper surface of the base material, and the like. It may be a so-called double-sided adhesive sheet having three or more layers, and further capable of peeling the base material from the adhesive layer, and such a double-sided adhesive sheet or double-sided adhesive sheet BA may be a single layer. Alternatively, it may be one having a multi-layered intermediate layer, or one having a single layer or a multi-layered structure without an intermediate layer. The adherend CP includes, for example, foods, resin containers, semiconductor wafers such as silicon semiconductor wafers and compound semiconductor wafers, information recording substrates such as semiconductor chips, circuit substrates, and optical disks, glass plates, steel plates, pottery, and wooden plates. It may be a single material such as a resin, or a composite product formed of two or more of them, and any form of a member or an article can be targeted. The adhesive sheet AS can be read in a functional and versatile manner, for example, an information description label, a decorative label, a protective sheet, a dicing tape, a die attach film, a die bonding tape, a recording layer forming resin sheet, or the like. Sheets, films, tapes, etc. may be used.
A plurality of adherend CPs may be present on the adhesive sheet AS in advance, or are separated into individual pieces when tension is applied to the adhesive sheet AS by the separating means 30 and 30A, and a plurality of adherend CPs are present on the adhesive sheet AS. It may be something that becomes. As the adherend CP that becomes present in a plurality when tension is applied to such an adhesive sheet AS, for example, a semiconductor wafer is irradiated with a laser, and the semiconductor wafer is fragile such as linear or lattice-shaped. A line is formed, and when tension is applied to the adhesive sheet AS, it is individualized to form a plurality of adherend CPs, for example, a resin or a glass plate is cut with a cutter blade into the resin or the glass plate. A plurality of adherend CPs are formed when tension is applied to the adhesive sheet AS by forming a line to be cut that does not penetrate the front and back surfaces such as a line or a grid, or a line to be cut at a perforation. Things are not limited in any way.

前記実施形態における駆動機器は、回動モータ、直動モータ、リニアモータ、単軸ロボット、多関節ロボット等の電動機器、エアシリンダ、油圧シリンダ、ロッドレスシリンダおよびロータリシリンダ等のアクチュエータ等を採用することができる上、それらを直接的又は間接的に組み合せたものを採用することもできる。 As the drive device in the above embodiment, electric devices such as rotary motors, linear motors, linear motors, single-axis robots, and articulated robots, actuators such as air cylinders, hydraulic cylinders, rodless cylinders, and rotary cylinders are adopted. In addition, a combination of them directly or indirectly can be adopted.

１０、１０Ａ…離間装置
２０…保持手段
３０、３０Ａ…離間手段
５０、５０Ａ…維持部材取付手段
５５…積層手段
６０…切断手段
７０…当接手段
ＡＳ…接着シート
ＡＳ１…一方の面
ＡＳ２…他方の面
ＢＡ…両面接着シート（保持用接着剤層）
ＣＥ…被着体接着領域
ＣＰ…被着体
ＨＥ…保持領域
ＤＭ…間隔維持部材
ＧＰ…硝子板（基材） 10, 10A ... Separation device 20 ... Holding means 30, 30A ... Separation means 50, 50A ... Maintaining member mounting means 55 ... Laminating means 60 ... Cutting means 70 ... Contact means AS ... Adhesive sheet AS1 ... One surface AS2 ... The other Surface BA: Double-sided adhesive sheet (holding adhesive layer)
CE ... Adhesion area CP ... Adhesion HE ... Holding area DM ... Spacing maintenance member GP ... Glass plate (base material)

Claims (8)

一方の面に複数の被着体が貼付された接着シートの端部を保持する複数の保持手段と、
前記接着シートの端部を保持した前記保持手段を相対移動させ、前記被着体の相互間隔を広げる離間手段と、
前記離間手段によって広げられた前記被着体の相互間隔を維持可能な間隔維持部材を前記接着シートに取り付ける維持部材取付手段とを備え、
前記接着シートは、前記離間手段による作用が解かれると、変形前の状態に近付こうとする性質を備え、
前記間隔維持部材は、前記接着シートが変形前の状態に近付こうとする力に打ち勝つことが可能な剛性を備えた基材と、当該基材に貼付された保持用接着剤層との少なくとも２層の積層体によって構成され、
前記維持部材取付手段は、前記間隔維持部材を前記接着シートの他方の面に取り付けることを特徴とする離間装置。 A plurality of holding means for holding the end portion of the adhesive sheet to which a plurality of adherends are attached to one surface, and
A separating means that relatively moves the holding means that holds the end portion of the adhesive sheet and widens the mutual spacing between the adherends.
A maintenance member attaching means for attaching a spacing member capable of maintaining the mutual spacing of the adherends expanded by the separating means to the adhesive sheet is provided.
The adhesive sheet has a property of approaching the state before deformation when the action of the separating means is released.
The space-maintaining member includes at least a base material having rigidity capable of overcoming the force of the adhesive sheet to approach the state before deformation and a holding adhesive layer attached to the base material. Consists of a two-layer laminate
The maintaining member attaching means is a separating device characterized in that the spacing member is attached to the other surface of the adhesive sheet. 一方の面に複数の被着体が貼付された接着シートの端部を保持する複数の保持手段と、
前記接着シートの端部を保持した前記保持手段を相対移動させ、前記被着体の相互間隔を広げる離間手段と、
前記離間手段によって広げられた前記被着体の相互間隔を維持可能な間隔維持部材を前記接着シートに取り付ける維持部材取付手段とを備え、
前記接着シートは、前記離間手段による作用が解かれると、変形前の状態に近付こうとする性質を備え、
前記間隔維持部材は、前記接着シートが変形前の状態に近付こうとする力に打ち勝つことが可能な剛性を備えた他の接着シートとされ、
前記維持部材取付手段は、前記他の接着シートを前記接着シートの他方の面に貼付することを特徴とする離間装置。 A plurality of holding means for holding the end portion of the adhesive sheet to which a plurality of adherends are attached to one surface, and
A separating means that relatively moves the holding means that holds the end portion of the adhesive sheet and widens the mutual spacing between the adherends.
A maintenance member attaching means for attaching a spacing member capable of maintaining the mutual spacing of the adherends expanded by the separating means to the adhesive sheet is provided.
The adhesive sheet has a property of approaching the state before deformation when the action of the separating means is released.
The spacing member is another adhesive sheet having rigidity capable of overcoming the force of the adhesive sheet to approach the state before deformation.
The maintenance member attaching means is a separation device, characterized in that the other adhesive sheet is attached to the other surface of the adhesive sheet. 一方の面に複数の被着体が貼付された接着シートの端部を保持する保持手段と、
前記接着シートにおける前記複数の被着体が貼付された被着体接着領域よりも外側であって、前記保持手段が保持した保持領域の内側で当該接着シートに当接する当接手段と、
前記接着シートの端部を保持した前記保持手段および当接手段を相対移動させ、前記被着体の相互間隔を広げる離間手段と、
前記離間手段によって広げられた前記被着体の相互間隔を維持可能な間隔維持部材を前記接着シートに取り付ける維持部材取付手段とを備え、
前記接着シートは、前記離間手段による作用が解かれると、変形前の状態に近付こうとする性質を備え、
前記間隔維持部材は、前記接着シートが変形前の状態に近付こうとする力に打ち勝つことが可能な剛性を備えた基材と、当該基材に貼付された保持用接着剤層との少なくとも２層の積層体によって構成され、
前記維持部材取付手段は、前記間隔維持部材を前記接着シートの他方の面に取り付けることを特徴とする離間装置。 A holding means for holding the end portion of the adhesive sheet to which a plurality of adherends are attached to one surface, and
An abutting means that abuts on the adhesive sheet outside the adherend adhesive region to which the plurality of adherends are attached in the adhesive sheet and inside the holding region held by the holding means.
A separating means that relatively moves the holding means and the contacting means that hold the end portion of the adhesive sheet to widen the mutual distance between the adherends.
A maintenance member attaching means for attaching a spacing member capable of maintaining the mutual spacing of the adherends expanded by the separating means to the adhesive sheet is provided.
The adhesive sheet has a property of approaching the state before deformation when the action of the separating means is released.
The space-maintaining member includes at least a base material having rigidity capable of overcoming the force of the adhesive sheet to approach the state before deformation and a holding adhesive layer attached to the base material. Consists of a two-layer laminate
The maintaining member attaching means is a separating device characterized in that the spacing member is attached to the other surface of the adhesive sheet. 一方の面に複数の被着体が貼付された接着シートの端部を保持する保持手段と、
前記接着シートにおける前記複数の被着体が貼付された被着体接着領域よりも外側であって、前記保持手段が保持した保持領域の内側で当該接着シートに当接する当接手段と、
前記接着シートの端部を保持した前記保持手段および当接手段を相対移動させ、前記被着体の相互間隔を広げる離間手段と、
前記離間手段によって広げられた前記被着体の相互間隔を維持可能な間隔維持部材を前記接着シートに取り付ける維持部材取付手段とを備え、
前記接着シートは、前記離間手段による作用が解かれると、変形前の状態に近付こうとする性質を備え、
前記間隔維持部材は、前記接着シートが変形前の状態に近付こうとする力に打ち勝つことが可能な剛性を備えた他の接着シートとされ、
前記維持部材取付手段は、前記他の接着シートを前記接着シートの他方の面に貼付することを特徴とする離間装置。 A holding means for holding the end portion of the adhesive sheet to which a plurality of adherends are attached to one surface, and
An abutting means that abuts on the adhesive sheet outside the adherend adhesive region to which the plurality of adherends are attached in the adhesive sheet and inside the holding region held by the holding means.
A separating means that relatively moves the holding means and the contacting means that hold the end portion of the adhesive sheet to widen the mutual distance between the adherends.
A maintenance member attaching means for attaching a spacing member capable of maintaining the mutual spacing of the adherends expanded by the separating means to the adhesive sheet is provided.
The adhesive sheet has a property of approaching the state before deformation when the action of the separating means is released.
The spacing member is another adhesive sheet having rigidity capable of overcoming the force of the adhesive sheet to approach the state before deformation.
The maintenance member attaching means is a separation device, characterized in that the other adhesive sheet is attached to the other surface of the adhesive sheet. 一方の面に複数の被着体が貼付された接着シートの端部を複数の保持手段で保持する保持工程と、
前記接着シートの端部を保持した前記保持手段を相対移動させ、前記被着体の相互間隔を広げる離間工程と、
前記離間工程で広げられた前記被着体の相互間隔を維持可能な間隔維持部材を前記接着シートに取り付ける維持部材取付工程とを有し、
前記接着シートは、前記離間工程による作用が解かれると、変形前の状態に近付こうとする性質を備え、
前記間隔維持部材は、前記接着シートが変形前の状態に近付こうとする力に打ち勝つことが可能な剛性を備えた基材と、当該基材に貼付された保持用接着剤層との少なくとも２層の積層体によって構成され、
前記維持部材取付工程では、前記間隔維持部材を前記接着シートの他方の面に取り付けることを特徴とする離間方法。 A holding step of holding the end of an adhesive sheet having a plurality of adherends attached to one surface by a plurality of holding means, and a holding step.
A separation step of relatively moving the holding means holding the end portion of the adhesive sheet to widen the mutual distance between the adherends, and a separation step.
It has a maintenance member attaching step of attaching a spacing member capable of maintaining the mutual spacing of the adherends expanded in the separating step to the adhesive sheet.
The adhesive sheet has a property of approaching the state before deformation when the action of the separation step is released.
The space-maintaining member includes at least a base material having rigidity capable of overcoming the force of the adhesive sheet to approach the state before deformation and a holding adhesive layer attached to the base material. Consists of a two-layer laminate
In the maintenance member attaching step, a separation method comprising attaching the spacing member to the other surface of the adhesive sheet. 一方の面に複数の被着体が貼付された接着シートの端部を複数の保持手段で保持する保持工程と、
前記接着シートの端部を保持した前記保持手段を相対移動させ、前記被着体の相互間隔を広げる離間工程と、
前記離間工程で広げられた前記被着体の相互間隔を維持可能な間隔維持部材を前記接着シートに取り付ける維持部材取付工程とを有し、
前記接着シートは、前記離間工程による作用が解かれると、変形前の状態に近付こうとする性質を備え、
前記間隔維持部材は、前記接着シートが変形前の状態に近付こうとする力に打ち勝つことが可能な剛性を備えた他の接着シートとされ、
前記維持部材取付工程では、前記他の接着シートを前記接着シートの他方の面に貼付することを特徴とする離間方法。 A holding step of holding the end of an adhesive sheet having a plurality of adherends attached to one surface by a plurality of holding means, and a holding step.
A separation step of relatively moving the holding means holding the end portion of the adhesive sheet to widen the mutual distance between the adherends, and a separation step.
It has a maintenance member attaching step of attaching a spacing member capable of maintaining the mutual spacing of the adherends expanded in the separating step to the adhesive sheet.
The adhesive sheet has a property of approaching the state before deformation when the action of the separation step is released.
The spacing member is another adhesive sheet having rigidity capable of overcoming the force of the adhesive sheet to approach the state before deformation.
The separation method, characterized in that the other adhesive sheet is attached to the other surface of the adhesive sheet in the maintenance member attaching step. 一方の面に複数の被着体が貼付された接着シートの端部を保持手段で保持する保持工程
と、
前記接着シートにおける前記複数の被着体が貼付された被着体接着領域よりも外側であって、前記保持手段が保持した保持領域の内側で当該接着シートに当接する当接手段および、前記接着シートの端部を保持した前記保持手段を相対移動させ、前記被着体の相互間隔を広げる離間工程と、
前記離間工程によって広げられた前記被着体の相互間隔を維持可能な間隔維持部材を前記接着シートに取り付ける維持部材取付工程とを有し、
前記接着シートは、前記離間工程による作用が解かれると、変形前の状態に近付こうとする性質を備え、
前記間隔維持部材は、前記接着シートが変形前の状態に近付こうとする力に打ち勝つことが可能な剛性を備えた基材と、当該基材に貼付された保持用接着剤層との少なくとも２層の積層体によって構成され、
前記維持部材取付工程では、前記間隔維持部材を前記接着シートの他方の面に取り付けることを特徴とする離間方法。 A holding step of holding the end of an adhesive sheet having a plurality of adherends attached to one surface by a holding means, and a holding step.
An abutting means that abuts on the adhesive sheet outside the adherend adhesive region to which the plurality of adherends are attached in the adhesive sheet and inside the holding region held by the holding means, and the adhesive. A separation step of relatively moving the holding means holding the edge of the sheet to widen the mutual distance between the adherends, and a separation step.
It has a maintenance member attaching step of attaching a spacing member capable of maintaining the mutual spacing of the adherends expanded by the separating step to the adhesive sheet.
The adhesive sheet has a property of approaching the state before deformation when the action of the separation step is released.
The space-maintaining member includes at least a base material having rigidity capable of overcoming the force of the adhesive sheet to approach the state before deformation and a holding adhesive layer attached to the base material. Consists of a two-layer laminate
In the maintenance member attaching step, a separation method comprising attaching the spacing member to the other surface of the adhesive sheet. 一方の面に複数の被着体が貼付された接着シートの端部を保持手段で保持する保持工程と、
前記接着シートにおける前記複数の被着体が貼付された被着体接着領域よりも外側であって、前記保持手段が保持した保持領域の内側で当該接着シートに当接する当接手段および、前記接着シートの端部を保持した前記保持手段を相対移動させ、前記被着体の相互間隔を広げる離間工程と、
前記離間工程によって広げられた前記被着体の相互間隔を維持可能な間隔維持部材を前記接着シートに取り付ける維持部材取付工程とを有し、
前記接着シートは、前記離間工程による作用が解かれると、変形前の状態に近付こうとする性質を備え、
前記間隔維持部材は、前記接着シートが変形前の状態に近付こうとする力に打ち勝つことが可能な剛性を備えた他の接着シートとされ、
前記維持部材取付工程では、前記他の接着シートを前記接着シートの他方の面に貼付することを特徴とする離間方法。 A holding step of holding the end of an adhesive sheet having a plurality of adherends attached to one surface by a holding means, and a holding step.
An abutting means that abuts on the adhesive sheet outside the adherend adhesive region to which the plurality of adherends are attached in the adhesive sheet and inside the holding region held by the holding means, and the adhesive. A separation step of relatively moving the holding means holding the edge of the sheet to widen the mutual distance between the adherends, and a separation step.
It has a maintenance member attaching step of attaching a spacing member capable of maintaining the mutual spacing of the adherends expanded by the separating step to the adhesive sheet.
The adhesive sheet has a property of approaching the state before deformation when the action of the separation step is released.
The spacing member is another adhesive sheet having rigidity capable of overcoming the force of the adhesive sheet to approach the state before deformation.
The separation method, characterized in that the other adhesive sheet is attached to the other surface of the adhesive sheet in the maintenance member attaching step.
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