JP6884961B2 - Separation device and separation method - Google Patents

Separation device and separation method Download PDF

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JP6884961B2
JP6884961B2 JP2017093950A JP2017093950A JP6884961B2 JP 6884961 B2 JP6884961 B2 JP 6884961B2 JP 2017093950 A JP2017093950 A JP 2017093950A JP 2017093950 A JP2017093950 A JP 2017093950A JP 6884961 B2 JP6884961 B2 JP 6884961B2
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adhesive sheet
holding member
holding
adhesive
adherends
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JP2018190887A (en
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芳昭 杉下
芳昭 杉下
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Lintec Corp
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Lintec Corp
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Priority to CN201810238947.4A priority patent/CN108878281B/en
Priority to KR1020180033697A priority patent/KR102408527B1/en
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
    • H01L21/304—Mechanical treatment, e.g. grinding, polishing, cutting
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67132—Apparatus for placing on an insulating substrate, e.g. tape
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/185—Joining of semiconductor bodies for junction formation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67092—Apparatus for mechanical treatment

Description

本発明は、離間装置および離間方法に関する。 The present invention relates to a separation device and a separation method.

従来、接着シートに貼付された複数の被着体の相互間隔を広げる離間装置が知られている（例えば、特許文献１参照）。 Conventionally, a separation device for widening the mutual distance between a plurality of adherends attached to an adhesive sheet has been known (see, for example, Patent Document 1).

特開２０１６−１２７１２４号公報Japanese Unexamined Patent Publication No. 2016-127124

しかしながら、特許文献１に記載されたような従来の離間装置では、下支持部材２２（保持部材）と上支持部材２４（保持部材）とで接着シートＡＳ（接着シート）を保持し、当該接着シートに張力を付与してチップＣＰ（被着体）の相互間隔を広げる構成であるため、保持部材で保持した接着シートの接着面が当該保持部材に接着し、保持部材から接着シートを取り外し難くなるという不都合や、保持部材に付着した接着剤を取り除くための作業が必要になるという不都合を招来する。 However, in the conventional separation device as described in Patent Document 1, the lower support member 22 (holding member) and the upper support member 24 (holding member) hold the adhesive sheet AS (adhesive sheet), and the adhesive sheet Since the structure is such that tension is applied to the tip CP (adhesive body) to widen the mutual spacing between the chips CP (adhesive body), the adhesive surface of the adhesive sheet held by the holding member adheres to the holding member, and it becomes difficult to remove the adhesive sheet from the holding member. Inconvenience, and the inconvenience that work for removing the adhesive adhering to the holding member is required is caused.

本発明の目的は、保持部材で保持した接着シートの被保持領域が当該保持部材に接着することを防止することができる離間装置および離間方法を提供することにある。 An object of the present invention is to provide a separating device and a separating method capable of preventing a held region of an adhesive sheet held by a holding member from adhering to the holding member.

本発明は、請求項に記載した構成を採用した。 The present invention has adopted the configuration described in the claims.

本発明によれば、保持部材で挟み込む前に、エネルギー付与手段が接着シートの被保持領域に所定のエネルギーを付与するので、所定のエネルギーが付与されることでその接着力が低下する接着シートに対し、保持部材で保持した接着シートの被保持領域が当該保持部材に接着することを防止することができる。
また、エネルギー付与手段が、第１のエネルギー付与手段と第２のエネルギー付与手段とを備えれば、第２のエネルギー付与手段で接着シートの被保持領域の接着力を重点的に低下させることができ、被保持領域が保持部材に接着することをより確実に防止することができる。 According to the present invention, since the energy applying means applies a predetermined energy to the held region of the adhesive sheet before being sandwiched between the holding members, the adhesive sheet whose adhesive force is lowered by the predetermined energy is applied. On the other hand, it is possible to prevent the held region of the adhesive sheet held by the holding member from adhering to the holding member.
Further, if the energy applying means includes the first energy applying means and the second energy applying means, the second energy applying means can intensively reduce the adhesive force of the held region of the adhesive sheet. Therefore, it is possible to more reliably prevent the held region from adhering to the holding member.

（Ａ）は、本発明の実施形態に係る離間装置の平面図。（Ｂ）は、図１（Ａ）の側面図。(A) is a plan view of the separation device according to the embodiment of the present invention. (B) is a side view of FIG. 1 (A). （Ａ）、（Ｂ）は、本発明の実施形態に係る離間装置の動作説明図。(A) and (B) are operation explanatory views of the separation device which concerns on embodiment of this invention. （Ａ）、（Ｂ）は、本発明の他の例の説明図。(A) and (B) are explanatory views of other examples of the present invention.

以下、本発明の実施形態を図面に基づいて説明する。
なお、本実施形態におけるＸ軸、Ｙ軸、Ｚ軸は、それぞれが直交する関係にあり、Ｘ軸およびＹ軸は、所定平面内の軸とし、Ｚ軸は、前記所定平面に直交する軸とする。さらに、本実施形態では、Ｙ軸と平行な矢印ＢＤ方向から観た場合を基準とし、基準となる図を挙げることなく方向を示した場合、「上」がＺ軸の矢印方向で「下」がその逆方向、「左」がＸ軸の矢印方向で「右」がその逆方向、「前」がＹ軸の矢印方向で「後」がその逆方向とする。 Hereinafter, embodiments of the present invention will be described with reference to the drawings.
The X-axis, Y-axis, and Z-axis in the present embodiment are orthogonal to each other, the X-axis and the Y-axis are axes in a predetermined plane, and the Z-axis is an axis orthogonal to the predetermined plane. To do. Further, in the present embodiment, when viewed from the direction of the arrow BD parallel to the Y-axis as a reference, and when the direction is shown without giving a reference figure, "up" is "down" in the direction of the arrow on the Z-axis. Is the opposite direction, "left" is the X-axis arrow direction, "right" is the opposite direction, "front" is the Y-axis arrow direction, and "rear" is the opposite direction.

本発明の離間装置１０は、一方の面ＡＳ１に複数の被着体ＣＰが貼付された接着シートＡＳの端部を保持部材２２で保持する複数の保持手段２０と、接着シートＡＳの端部を保持した保持手段２０を相対移動させ、接着シートＡＳに張力を付与して被着体ＣＰの相互間隔を広げる離間手段３０と、被着体ＣＰの相互間隔や各被着体ＣＰの全体的な集合形状等を検知可能なカメラや投影機等の撮像手段、光学センサや音波センサ等の各種センサ等の検知手段４０と、接着シートＡＳに所定のエネルギーとしての紫外線ＵＶを付与するエネルギー付与手段５０とを備えている。
なお、接着シートＡＳは、基材シートの一方の面に紫外線ＵＶが付与されることで、その接着力が低下する接着剤層が積層されたものが採用されている。 The separation device 10 of the present invention has a plurality of holding means 20 for holding the ends of the adhesive sheet AS to which a plurality of adherend CPs are attached to one surface AS1 by the holding member 22, and the ends of the adhesive sheet AS. The holding means 20 that has been held is relatively moved to apply tension to the adhesive sheet AS to widen the mutual spacing between the adherend CPs, and the mutual spacing between the adherend CPs and the overall distance between the adherend CPs. Imaging means such as a camera or a projector capable of detecting an aggregate shape or the like, detection means 40 such as various sensors such as an optical sensor or a sound wave sensor, and energy applying means 50 for applying ultraviolet UV as a predetermined energy to the adhesive sheet AS. And have.
As the adhesive sheet AS, one in which an adhesive layer whose adhesive force is reduced by applying ultraviolet UV rays to one surface of the base sheet is laminated is adopted.

保持手段２０は、駆動機器としての回動モータ２１と、接着シートＡＳの端部を保持する保持部材２２とを備えている。
保持部材２２は、接着シートＡＳの一方の面ＡＳ１側に当接する一方側保持部材２２Ａおよび、離間手段３０に支持され、接着シートＡＳの他方の面ＡＳ２側に当接する他方側保持部材２２Ｂで接着シートＡＳの端部を挟み込んで保持する構成とされている。
なお、一方側保持部材２２Ａは、他方側保持部材２２Ｂ上に支持された回動モータ２１の出力軸２１Ａに支持されている。 The holding means 20 includes a rotating motor 21 as a driving device and a holding member 22 that holds an end portion of the adhesive sheet AS.
The holding member 22 is bonded by a one-side holding member 22A that abuts on one surface AS1 side of the adhesive sheet AS and a other-side holding member 22B that is supported by the separating means 30 and abuts on the other surface AS2 side of the adhesive sheet AS. It is configured to sandwich and hold the end portion of the sheet AS.
The one-side holding member 22A is supported by the output shaft 21A of the rotary motor 21 supported on the other-side holding member 22B.

離間手段３０は、駆動機器としてのリニアモータ３１と、そのスライダ３１Ａに支持され、上面側で他方側保持部材２２Ｂを支持する保持アーム３２とを備えている。 The separating means 30 includes a linear motor 31 as a drive device, and a holding arm 32 supported by the slider 31A and supporting the other side holding member 22B on the upper surface side.

エネルギー付与手段５０は、接着シートＡＳにおける複数の被着体ＣＰが貼付された被着体接着領域ＣＥに紫外線ＵＶを付与する第１のエネルギー付与手段５１と、保持部材２２で保持した接着シートＡＳの被保持領域ＨＥに紫外線ＵＶを付与する第２のエネルギー付与手段５２とを備えている。
第１のエネルギー付与手段５１は、保持手段２０に保持された接着シートＡＳの下方に位置する被着体接着領域用紫外線発光源５１Ａを備えている。
第２のエネルギー付与手段５２は、保持アーム３２上に支持されたスタンド５２Ａと、スタンド５２Ａに支持され、保持手段２０に保持された接着シートＡＳの端部上方に位置する被保持領域用紫外線発光源５２Ｂとを備えている。 The energy applying means 50 includes a first energy applying means 51 that applies ultraviolet UV rays to the adherend adhesive region CE to which a plurality of adherend CPs are attached in the adhesive sheet AS, and the adhesive sheet AS held by the holding member 22. It is provided with a second energy applying means 52 for applying ultraviolet UV rays to the held region HE of the above.
The first energy applying means 51 includes an ultraviolet light emitting source 51A for an adherend adhesive region located below the adhesive sheet AS held by the holding means 20.
The second energy applying means 52 is a stand 52A supported on the holding arm 32 and ultraviolet light emitting for a held region located above the end of the adhesive sheet AS supported by the stand 52A and held by the holding means 20. It has a source 52B.

以上の離間装置１０の動作を説明する。
先ず、各部材が図１（Ａ）、（Ｂ）中実線で示す初期位置で待機している離間装置１０に対し、当該離間装置１０の使用者（以下、単に「使用者」という）が操作パネルやパーソナルコンピュータ等の図示しない操作手段を介して自動運転開始の信号を入力する。その後、作業者または、駆動機器やコンベア等の図示しない搬送手段が複数の被着体ＣＰが貼付された接着シートＡＳを他方側保持部材２２Ｂ上に載置すると、保持部材２２で挟み込む前に、エネルギー付与手段５０が一方側保持部材２２Ａおよび他方側保持部材２２Ｂで挟み込む接着シートＡＳの被保持領域ＨＥに紫外線ＵＶを付与する。すなわち、接着シートＡＳが他方側保持部材２２Ｂ上に載置されると、エネルギー付与手段５０が被保持領域用紫外線発光源５２Ｂを駆動し、図１（Ｂ）に示すように、被保持領域ＨＥに紫外線ＵＶを付与して当該被保持領域ＨＥの接着力を低下させる。 The operation of the separation device 10 described above will be described.
First, the user of the separation device 10 (hereinafter, simply referred to as "user") operates the separation device 10 in which each member stands by at the initial position shown by the solid line in FIGS. 1A and 1B. A signal for starting automatic operation is input via an operating means (not shown) such as a panel or a personal computer. After that, when a worker or a transport means (not shown) such as a drive device or a conveyor places the adhesive sheet AS on which the plurality of adherend CPs are attached on the other side holding member 22B, the adhesive sheet AS is placed on the other side holding member 22B before being sandwiched between the holding members 22. The energy applying means 50 applies ultraviolet UV rays to the held region HE of the adhesive sheet AS sandwiched between the one-side holding member 22A and the other-side holding member 22B. That is, when the adhesive sheet AS is placed on the other side holding member 22B, the energy applying means 50 drives the ultraviolet light emitting source 52B for the held region, and as shown in FIG. 1 (B), the held region HE UV UV is applied to the surface to reduce the adhesive strength of the held region HE.

次いで、保持手段２０が各回動モータ２１を駆動し、図２（Ａ）に示すように、一方側保持部材２２Ａと他方側保持部材２２Ｂとで接着シートＡＳの端部を保持した後、離間手段３０が各リニアモータ３１を駆動し、保持手段２０を相互に離間させ、接着シートＡＳに張力を付与して被着体ＣＰの相互間隔を広げる。このとき、各被着体ＣＰは、接着シートＡＳのひずみ等によって、相互間隔が所定の間隔に広がらないことがある。そこで、検知手段４０の検知結果を基にして、離間手段３０が各リニアモータ３１を駆動し、各被着体ＣＰの相互間隔が所定間隔となるように、各保持手段２０を個別に移動させる。 Next, the holding means 20 drives each rotation motor 21, and as shown in FIG. 2A, the one-side holding member 22A and the other-side holding member 22B hold the end portion of the adhesive sheet AS, and then the separating means. 30 drives each linear motor 31 to separate the holding means 20 from each other and apply tension to the adhesive sheet AS to widen the mutual distance between the adherend CPs. At this time, the mutual spacing of the adherend CPs may not be widened to a predetermined spacing due to strain of the adhesive sheet AS or the like. Therefore, based on the detection result of the detection means 40, the separation means 30 drives each linear motor 31, and each holding means 20 is individually moved so that the mutual distance between the adherend CPs becomes a predetermined distance. ..

その後、エネルギー付与手段５０が被着体接着領域用紫外線発光源５１Ａを駆動し、図２（Ｂ）に示すように、被着体接着領域ＣＥに紫外線ＵＶを付与して被着体ＣＰに対する接着シートＡＳの接着力を低下させる。次いで、ピックアップ装置や搬送装置等の図示しない被着体取出し手段によって、全ての被着体ＣＰまたは所定量の被着体ＣＰが接着シートＡＳから取り外されると、離間手段３０が各リニアモータ３１を駆動し、それぞれのスライダ３１Ａを初期位置に復帰させた後、保持手段２０が回動モータ２１を駆動し、一方側保持部材２２Ａを初期位置に復帰させる。その後、作業者または、図示しない搬送手段が、他方側保持部材２２Ｂ上に残された接着シートＡＳを取り去り、以降上記同様の動作が繰り返される。 After that, the energy applying means 50 drives the ultraviolet light emitting source 51A for the adherend adhesive region, and as shown in FIG. 2B, ultraviolet UV is applied to the adherend adhesive region CE to adhere to the adherend CP. It reduces the adhesive strength of the sheet AS. Next, when all the adherend CPs or a predetermined amount of the adherend CPs are removed from the adhesive sheet AS by means for taking out the adherends (not shown) such as a pickup device or a transport device, the separation means 30 removes each linear motor 31. After driving and returning each slider 31A to the initial position, the holding means 20 drives the rotary motor 21 to return the one-side holding member 22A to the initial position. After that, the operator or the transporting means (not shown) removes the adhesive sheet AS left on the other side holding member 22B, and thereafter, the same operation as described above is repeated.

以上のような離間装置１０によれば、保持部材２２で挟み込む前に、エネルギー付与手段５０が接着シートＡＳの被保持領域ＨＥに紫外線ＵＶを付与するので、紫外線ＵＶが付与されることでその接着力が低下する接着シートＡＳに対し、保持部材２２で保持した接着シートＡＳの被保持領域ＨＥが当該保持部材２２に接着することを防止することができる。 According to the separation device 10 as described above, since the energy applying means 50 applies ultraviolet UV to the held region HE of the adhesive sheet AS before being sandwiched between the holding members 22, the ultraviolet UV is applied to bond the adhesive sheet AS. It is possible to prevent the held region HE of the adhesive sheet AS held by the holding member 22 from adhering to the holding member 22 with respect to the adhesive sheet AS whose force is reduced.

本発明における手段および工程は、それら手段および工程について説明した動作、機能または工程を果たすことができる限りなんら限定されることはなく、まして、前記実施形態で示した単なる一実施形態の構成物や工程に全く限定されることはない。例えば、エネルギー付与手段は、接着シートに所定のエネルギーを付与可能なものであれば、出願当初の技術常識に照らし合わせ、その技術範囲内のものであればなんら限定されることはない（その他の手段および工程も同じ）。 The means and processes in the present invention are not limited as long as they can perform the operations, functions or processes described for the means and processes, much less the components of the mere embodiment shown in the above-described embodiment. It is not limited to the process at all. For example, the energy applying means is not limited as long as it can apply a predetermined energy to the adhesive sheet, as long as it is within the technical range in light of the common general technical knowledge at the time of filing (others). The means and process are the same).

本発明の離間装置は、図３（Ａ）に示すように、保持手段２０と、接着シートＡＳにおける被着体接着領域ＣＥよりも外側であって、被保持領域ＨＥの内側で当該接着シートＡＳに当接する当接手段６０と、接着シートＡＳの端部を保持した保持手段２０および当接手段６０を相対移動させ、接着シートＡＳに張力を付与して被着体ＣＰの相互間隔を広げる離間手段３０Ａと、検知手段４０と、エネルギー付与手段５０とを備えた離間装置１０Ａとしてもよい。
なお、離間装置１０Ａにおいて、離間装置１０と同等の構成で同等の機能を有するものは、当該離間装置１０と同じ番号を付してその構成説明は省略し、動作説明は簡略化する。 As shown in FIG. 3A, the separating device of the present invention is outside the holding means 20 and the adherend adhesive region CE in the adhesive sheet AS, and inside the held region HE, the adhesive sheet AS. The contacting means 60 that comes into contact with the adhesive sheet AS, the holding means 20 that holds the end of the adhesive sheet AS, and the contacting means 60 are relatively moved to apply tension to the adhesive sheet AS to widen the mutual spacing between the adherend CPs. The separation device 10A including the means 30A, the detecting means 40, and the energy applying means 50 may be used.
In the separation device 10A, those having the same configuration as the separation device 10 and having the same function are assigned the same numbers as the separation device 10 and the configuration description is omitted, and the operation description is simplified.

当接手段６０は、ベースプレートＢＰ上に支持された円筒状の当接部材６１を備えており、当接部材６１の内部のベースプレートＢＰ上に被着体接着領域用紫外線発光源５１Ａが支持されている。
離間手段３０Ａは、ベースプレートＢＰ上に支持された駆動機器としての直動モータ３３と、その出力軸３３Ａに支持され、上面側で他方側保持部材２２Ｂおよびスタンド５２Ａを支持する保持アーム３４とを備えている。 The abutting means 60 includes a cylindrical abutting member 61 supported on the base plate BP, and an ultraviolet light emitting source 51A for an adherend adhesive region is supported on the base plate BP inside the abutting member 61. There is.
The separating means 30A includes a linear motor 33 as a drive device supported on the base plate BP, and a holding arm 34 supported by the output shaft 33A and supporting the other side holding member 22B and the stand 52A on the upper surface side. ing.

このような離間装置１０Ａは、離間装置１０と同様にして複数の被着体ＣＰが貼付された接着シートＡＳが他方側保持部材２２Ｂ上に載置されると、エネルギー付与手段５０が被保持領域用紫外線発光源５２Ｂを駆動し、図３（Ａ）に示すように、被保持領域ＨＥに紫外線ＵＶを付与して被保持領域ＨＥの接着力を低下させる。そして、保持手段２０が回動モータ２１を駆動し、図３（Ｂ）に示すように、一方側保持部材２２Ａと他方側保持部材２２Ｂとで接着シートＡＳの端部を保持した後、離間手段３０Ａが直動モータ３３を駆動し、保持手段２０を下降させて保持手段２０および当接手段６０を相対移動させ、接着シートに張力を付与して被着体ＣＰの相互間隔を広げる。その後、離間装置１０と同様にして、エネルギー付与手段５０が被着体接着領域用紫外線発光源５１Ａを駆動し、被着体ＣＰに対する接着シートＡＳの接着力を低下させた後、図示しない被着体取出し手段が各被着体ＣＰを別工程に搬送する。そして、図示しない被着体取出し手段によって、被着体ＣＰが接着シートＡＳから取り外されると、各手段がそれぞれの駆動機器を駆動し、各部材を初期位置に復帰させた後、他方側保持部材２２Ｂ上に残された接着シートＡＳを取り外し、以降上記同様の動作が繰り返される。 In such a separation device 10A, when the adhesive sheet AS to which the plurality of adherend CPs are attached is placed on the other side holding member 22B in the same manner as the separation device 10, the energy applying means 50 is held in the held area. The UV light emitting source 52B is driven, and as shown in FIG. 3A, ultraviolet UV is applied to the held region HE to reduce the adhesive force of the held region HE. Then, the holding means 20 drives the rotary motor 21, and as shown in FIG. 3B, the one-side holding member 22A and the other-side holding member 22B hold the end portion of the adhesive sheet AS, and then the separating means. 30A drives the linear motion motor 33, lowers the holding means 20, moves the holding means 20 and the contacting means 60 relative to each other, and applies tension to the adhesive sheet to widen the mutual spacing between the adherend CPs. After that, in the same manner as the separation device 10, the energy applying means 50 drives the ultraviolet light emitting source 51A for the adherend adhesive region to reduce the adhesive force of the adhesive sheet AS to the adherend CP, and then the adhesion (not shown) is shown. The body taking-out means conveys each adherend CP to another process. Then, when the adherend CP is removed from the adhesive sheet AS by the adherend taking-out means (not shown), each means drives each drive device, returns each member to the initial position, and then holds the other side holding member. The adhesive sheet AS left on the 22B is removed, and the same operation as described above is repeated thereafter.

このような離間装置１０Ａによっても、離間装置１０と同様の効果を得ることができる。 With such a separation device 10A, the same effect as that of the separation device 10 can be obtained.

保持手段２０は、他方の面ＡＳ２や、一方の面ＡＳ１および他方の面ＡＳ２の両方の面に複数の被着体ＣＰが貼付された接着シートＡＳの端部を保持する構成でもよいし、メカチャックやチャックシリンダ等の把持手段、クーロン力、接着剤、粘着剤、磁力、ベルヌーイ吸着、駆動機器等で接着シートＡＳの端部を保持する構成でもよい。
保持手段２０は、離間装置１０の場合、例えば、右方へ移動する当該保持手段２０を１体とし、左方へ移動する当該保持手段２０を１体とした２体で構成してもよいし、例えば、右方、左方およびその他の方向へ移動する３体以上で構成してもよい。
保持手段２０は、離間装置１０Ａの場合、１体でもよいし２体以上でもよい。 The holding means 20 may be configured to hold the end portion of the adhesive sheet AS to which a plurality of adherend CPs are attached to both the other surface AS2, the one surface AS1 and the other surface AS2, or the mechanism. The end portion of the adhesive sheet AS may be held by a gripping means such as a chuck or a chuck cylinder, a Coulomb force, an adhesive, an adhesive, a magnetic force, Bernoulli adsorption, a driving device, or the like.
In the case of the separation device 10, the holding means 20 may be composed of, for example, two holding means 20 moving to the right and one holding means 20 moving to the left. For example, it may be composed of three or more bodies that move to the right, left, and other directions.
In the case of the separating device 10A, the holding means 20 may be one body or two or more bodies.

離間手段３０、３０Ａは、複数でなく単数でもよく、この場合、例えば、離間装置１０は、１体のリニアモータの２つのスライダで、保持手段２０をそれぞれ１体ずつ支持し、被着体ＣＰの相互間隔を広げる構成とし、被着体ＣＰの相互間隔を１軸方向（例えば、Ｘ軸方向またはＹ軸方向等）のみに広げる構成としてもよい。
離間手段３０は、相互間隔を３軸以上の方向（例えば、Ｘ軸方向、Ｙ軸方向およびその他の軸方向）に広げる構成でもよいし、例えば、Ｘ軸方向に移動させた複数の保持手段２０をそれぞれＹ軸方向に移動させる構成（Ｙ軸方向に移動させた複数の保持手段２０をそれぞれＸ軸方向に移動させる構成）とし、被着体ＣＰの相互間隔を広げてもよいし、被着体ＣＰの相互間隔が所定間隔となるように作動できない構成でもよい。
離間手段３０Ａは、保持手段２０を停止または移動させつつ、当接手段６０を移動させることで、保持手段２０および当接手段６０を相対移動させ、接着シートＡＳに張力を付与して被着体ＣＰの相互間隔を広げてもよい。
離間手段３０、３０Ａは、作業者がボタンやレバー等を操作して、リニアモータ３１、直動モータ３３を駆動してもよく、この場合、例えば、検知手段４０による検知結果をモニタや検出器等の表示器に表示するように構成し、この表示器に表示される検知結果によって被着体ＣＰの相互間隔が所定間隔となるように、または、各被着体ＣＰの全体的な集合形状が基の全体的な集合形状に対して相似関係となるように、作業者がリニアモータ３１、直動モータ３３を駆動させてもよい。 The separating means 30 and 30A may be a single number instead of a plurality. In this case, for example, the separating device 10 supports one holding means 20 by two sliders of one linear motor, and the adherend CP. The mutual spacing of the adherends CP may be widened only in one axial direction (for example, the X-axis direction or the Y-axis direction).
The separating means 30 may be configured to widen the mutual spacing in three or more axes (for example, the X-axis direction, the Y-axis direction, and other axial directions), or, for example, the plurality of holding means 20 moved in the X-axis direction. May be configured to be moved in the Y-axis direction (a configuration in which a plurality of holding means 20 moved in the Y-axis direction are each moved in the X-axis direction), and the mutual spacing between the adherend CPs may be widened, or the adherends may be adhered. The configuration may be such that the body CPs cannot be operated so as to have a predetermined interval between them.
The separating means 30A moves the abutting means 60 while stopping or moving the holding means 20, thereby relatively moving the holding means 20 and the abutting means 60, applying tension to the adhesive sheet AS, and applying tension to the adherend. The mutual interval between CPs may be widened.
The separating means 30 and 30A may be driven by an operator by operating a button, a lever, or the like to drive the linear motor 31 and the linear motor 33. Etc., so that the mutual spacing of the adherend CPs becomes a predetermined spacing according to the detection result displayed on this display, or the overall aggregate shape of each adherend CP. The operator may drive the linear motor 31 and the linear motor 33 so that the elements are similar to the overall shape of the base.

検知手段４０は、作業者の目視でもよく、例えば、作業者が目視によって、被着体ＣＰの相互間隔が所定間隔となるように、または、各被着体ＣＰの全体的な集合形状が基の全体的な集合形状に対して相似関係となるように、ボタンやレバー等を操作して、リニアモータ３１、直動モータ３３を駆動するように構成してもよいし、本発明の離間装置１０、１０Ａに備わっていなくてもよい。 The detection means 40 may be visually observed by the operator, for example, so that the mutual spacing between the adherend CPs becomes a predetermined interval by the operator visually, or the overall collective shape of each adherend CP is based on the detection means 40. The linear motor 31 and the linear motor 33 may be driven by operating a button, a lever, or the like so as to have a similar relationship with the overall collective shape of the above. It does not have to be provided in 10 and 10A.

エネルギー付与手段５０は、第１のエネルギー付与手段５１として、接着シートＡＳの一方の面ＡＳ１側および他方の面ＡＳ２側の少なくとも一方に紫外線ＵＶを付与する構成のものを採用し、このような構成の第１のエネルギー付与手段５１で被保持領域ＨＥにも紫外線ＵＶを付与して一方側保持部材２２Ａや他方側保持部材２２Ｂに対する接着シートＡＳの接着力を低下させてもよいし、第１のエネルギー付与手段５１がなくてもよい。
エネルギー付与手段５０は、第２のエネルギー付与手段５２として、接着シートＡＳの一方の面ＡＳ１側および他方の面ＡＳ２側の少なくとも一方の面側に紫外線ＵＶを付与する構成のものを採用し、このような構成の第２のエネルギー付与手段５２で被保持領域ＨＥに紫外線ＵＶを付与して一方側保持部材２２Ａや他方側保持部材２２Ｂに対する接着シートＡＳの接着力を低下させてもよい。なお、前記実施形態で示した離間装置１０、１０Ａで、他方側保持部材２２Ｂ側からエネルギー付与手段５０が接着シートＡＳの被保持領域ＨＥに紫外線ＵＶを付与する場合、当該他方側保持部材２２Ｂや保持アーム３４等を紫外線が透過する部材で構成すればよい。
エネルギー付与手段５０は、あらゆる波長の電磁波（例えばＸ線や赤外線等）をエネルギーとして接着シートＡＳに付与するものでもよいし、加熱または冷却された気体や液体等の流体等をエネルギーとして接着シートＡＳに付与するものでもよく、接着シートＡＳの構成に応じて当該接着シートＡＳの接着力を低下できるエネルギーを付与可能なものであれば何でもよいし、接着シートＡＳに全体的または部分的にエネルギーを付与する構成でもよいし、被着体接着領域用紫外線発光源５１Ａや被保持領域用紫外線発光源５２Ｂとして、ＬＥＤ（Light Emitting Diode、発光ダイオード）、高圧水銀ランプ、低圧水銀ランプ、メタルハライドランプ、キセノンランプ、ハロゲンランプ等何を採用してもよいし、それらを適宜に組み合わせたものを採用してもよい。
第１のエネルギー付与手段５１は、被着体ＣＰの相互間隔を広げていない状態で接着シートＡＳに紫外線ＵＶを照射してもよい。 The energy applying means 50 adopts a structure in which ultraviolet UV is applied to at least one of one surface AS1 side and the other surface AS2 side of the adhesive sheet AS as the first energy applying means 51, and such a configuration. The first energy applying means 51 may apply ultraviolet UV rays to the held region HE to reduce the adhesive force of the adhesive sheet AS to the one-side holding member 22A and the other-side holding member 22B, or the first one. The energy applying means 51 may not be provided.
The energy applying means 50 adopts a second energy applying means 52 having a configuration in which ultraviolet UV rays are applied to at least one surface side of one surface AS1 side and the other surface AS2 side of the adhesive sheet AS. The second energy applying means 52 having such a configuration may apply ultraviolet UV rays to the held region HE to reduce the adhesive force of the adhesive sheet AS to the one-side holding member 22A and the other-side holding member 22B. In the separation devices 10 and 10A shown in the above embodiment, when the energy applying means 50 applies ultraviolet UV rays to the held region HE of the adhesive sheet AS from the other side holding member 22B side, the other side holding member 22B or The holding arm 34 and the like may be made of a member through which ultraviolet rays are transmitted.
The energy applying means 50 may apply electromagnetic waves of all wavelengths (for example, X-rays, infrared rays, etc.) to the adhesive sheet AS as energy, or may use fluid such as a heated or cooled gas or liquid as energy for the adhesive sheet AS. Anything can be applied to the adhesive sheet AS as long as it can impart energy that can reduce the adhesive force of the adhesive sheet AS according to the configuration of the adhesive sheet AS, and energy can be applied to the adhesive sheet AS in whole or in part. An LED (Light Emitting Diode), a high-pressure mercury lamp, a low-pressure mercury lamp, a metal halide lamp, and a xenon may be used as the ultraviolet light emitting source 51A for the adherend adhesive region and the ultraviolet light emitting source 52B for the held region. Any lamp, halogen lamp, or the like may be adopted, or a combination thereof may be adopted as appropriate.
The first energy applying means 51 may irradiate the adhesive sheet AS with ultraviolet rays UV in a state where the mutual spacing between the adherend CPs is not widened.

当接手段６０は、角筒状や楕円筒状等の他、円柱、角柱、楕円柱等の他の形状の当接部材６１を採用してもよい。 As the contacting means 60, a contact member 61 having another shape such as a cylinder, a prism, an ellipse, or the like may be adopted in addition to the square cylinder or the elliptical cylinder.

本発明における接着シートＡＳおよび被着体ＣＰの材質、種別、形状等は、特に限定されることはない。例えば、接着シートＡＳは、エネルギーが付与されることでその接着力が低下するものであれば何ら限定されることはないし、感圧接着性、感熱接着性等の接着形態のものであってもよい。さらに、接着シートＡＳや被着体ＣＰは、例えば、円形、楕円形、三角形や四角形等の多角形、その他の形状であってもよい。また、接着シートＡＳは、例えば、接着剤層だけの単層のもの、基材と接着剤層との間に中間層を有するもの、基材の上面にカバー層を有する等３層以上のもの、更には、基材を接着剤層から剥離することのできる所謂両面接着シートのようなものであってもよく、そのような両面接着シートは、単層又は複層の中間層を有するものや、中間層のない単層又は複層のものであってもよい。また、被着体ＣＰとしては、例えば、食品、樹脂容器、シリコン半導体ウエハや化合物半導体ウエハ等の半導体ウエハ、半導体チップ、回路基板、光ディスク等の情報記録基板、ガラス板、鋼板、陶器、木板または樹脂等の単体物であってもよいし、それら２つ以上で形成された複合物であってもよく、任意の形態の部材や物品なども対象とすることができる。なお、接着シートＡＳは、機能的、用途的な読み方に換え、例えば、情報記載用ラベル、装飾用ラベル、保護シート、ダイシングテープ、ダイアタッチフィルム、ダイボンディングテープ、記録層形成樹脂シート等の任意のシート、フィルム、テープ等でもよい。
被着体ＣＰは、予め接着シートＡＳ上に複数存在しているものでもよいし、離間手段３０、３０Ａ、その他の機構または人手等で外力を付与した時点で複数に分割され、接着シートＡＳ上に複数存在するような分割されて複数になるものでもよい。このような分割されて複数になる被着体ＣＰとしては、例えば、半導体ウエハや基板等にレーザを照射し、当該半導体ウエハや基盤等に線状や格子状等の脆弱な脆弱層を形成しておき、接着シートＡＳに張力を付与したり、半導体ウエハや基盤等に直接的または間接的に外力を付与したりした時点で個片化し、複数の被着体ＣＰとなるものや、例えば、樹脂や硝子板等にカッター刃で切り込み、当該樹脂や硝子板等に線状や格子状等の表裏に貫通することのない切込やミシン目等の切断予定ラインを形成しておき、接着シートＡＳに張力を付与したり、樹脂や硝子板等に直接的または間接的に外力を付与したりした時点で個片化し、複数の被着体ＣＰとなるもの等、何ら限定されるものではない。 The material, type, shape, etc. of the adhesive sheet AS and the adherend CP in the present invention are not particularly limited. For example, the adhesive sheet AS is not limited as long as its adhesive strength is reduced by applying energy, and even if it has an adhesive form such as pressure-sensitive adhesiveness or heat-sensitive adhesiveness. Good. Further, the adhesive sheet AS and the adherend CP may have, for example, a circular shape, an elliptical shape, a polygonal shape such as a triangle or a quadrangle, or any other shape. Further, the adhesive sheet AS is, for example, a single layer having only an adhesive layer, a material having an intermediate layer between the base material and the adhesive layer, a material having a cover layer on the upper surface of the base material, and the like having three or more layers. Further, it may be a so-called double-sided adhesive sheet capable of peeling the base material from the adhesive layer, and such a double-sided adhesive sheet may have a single layer or a multi-layer intermediate layer. , It may be a single layer or a multi-layer without an intermediate layer. The adherend CP includes, for example, foods, resin containers, semiconductor wafers such as silicon semiconductor wafers and compound semiconductor wafers, information recording substrates such as semiconductor chips, circuit substrates, and optical disks, glass plates, steel plates, pottery, and wooden plates. It may be a single material such as a resin, or a composite product formed of two or more of them, and any form of a member or an article can be targeted. The adhesive sheet AS can be read in a functional and versatile manner, for example, an information description label, a decorative label, a protective sheet, a dicing tape, a die attach film, a die bonding tape, a recording layer forming resin sheet, or the like. Sheets, films, tapes, etc. may be used.
A plurality of adherend CPs may be present on the adhesive sheet AS in advance, or are divided into a plurality of objects when an external force is applied by the separating means 30, 30A, other mechanisms, or a human hand, and are formed on the adhesive sheet AS. It may be divided into a plurality of pieces such that there are a plurality of pieces in the above. As such a plurality of adherend CPs that are divided, for example, a semiconductor wafer, a substrate, or the like is irradiated with a laser to form a fragile fragile layer such as a linear or lattice shape on the semiconductor wafer, the substrate, or the like. Then, when tension is applied to the adhesive sheet AS or an external force is directly or indirectly applied to the semiconductor wafer, the substrate, or the like, the adhesive sheet AS is separated into individual pieces to form a plurality of adherend CPs, for example. A cutter blade is used to cut into a resin or glass plate, and a line or grid that does not penetrate the front and back of the resin or glass plate is formed to form a cut line such as a perforation or a line to be cut. There is no limitation on the case where tension is applied to the AS or external force is directly or indirectly applied to the resin, glass plate, etc., and the wafer is separated into a plurality of adherend CPs. ..

前記実施形態における駆動機器は、回動モータ、直動モータ、リニアモータ、単軸ロボット、多関節ロボット等の電動機器、エアシリンダ、油圧シリンダ、ロッドレスシリンダおよびロータリシリンダ等のアクチュエータ等を採用することができる上、それらを直接的又は間接的に組み合せたものを採用することもできる。 As the drive device in the above embodiment, electric devices such as rotary motors, linear motors, linear motors, single-axis robots, and articulated robots, actuators such as air cylinders, hydraulic cylinders, rodless cylinders, and rotary cylinders are adopted. In addition, a combination of them directly or indirectly can be adopted.

１０、１０Ａ…離間装置
２０…保持手段
２２…保持部材
２２Ａ…一方側保持部材
２２Ｂ…他方側保持部材
３０、３０Ａ…離間手段
５０…エネルギー付与手段
５１…第１のエネルギー付与手段
５２…第２のエネルギー付与手段
６０…当接手段
ＡＳ…接着シート
ＡＳ１…一方の面
ＡＳ２…他方の面
ＣＥ…被着体接着領域
ＣＰ…被着体
ＨＥ…被保持領域
ＵＶ…紫外線（所定のエネルギー）
10, 10A ... Separation device 20 ... Holding means 22 ... Holding member 22A ... One side holding member 22B ... Other side holding member 30, 30A ... Separation means 50 ... Energy applying means 51 ... First energy applying means 52 ... Second Energy applying means 60 ... Contact means AS ... Adhesive sheet AS1 ... One surface AS2 ... Another surface CE ... Adhesive body adhesive area CP ... Adhesive body HE ... Retained area UV ... Ultraviolet rays (predetermined energy)

Claims (5)

一方の面と他方の面との少なくとも一方に、複数の被着体または分割されて複数になる被着体が貼付された接着シートの端部を保持部材で保持する複数の保持手段と、
前記接着シートの端部を保持した前記保持手段を相対移動させ、前記接着シートに張力を付与して前記被着体の相互間隔を広げる離間手段とを備え、
前記接着シートは、所定のエネルギーが付与されることでその接着力が低下し、
前記接着シートに前記所定のエネルギーを付与するエネルギー付与手段を備え、
前記保持部材は、前記接着シートの一方の面側に当接する一方側保持部材および、前記接着シートの他方の面側に当接する他方側保持部材で前記接着シートの端部を挟み込んで保持する構成とされ、
前記エネルギー付与手段は、前記保持部材で挟み込む前に、前記一方側保持部材および他方側保持部材で挟み込む前記接着シートの被保持領域に前記所定のエネルギーを付与することを特徴とする離間装置。 A plurality of holding means for holding an end portion of an adhesive sheet having a plurality of adherends or a plurality of divided adherends attached to at least one of one surface and the other surface by a holding member.
The holding means holding the end portion of the adhesive sheet is relatively moved, and tension is applied to the adhesive sheet to provide a separation means for widening the mutual distance between the adherends.
The adhesive strength of the adhesive sheet is reduced by applying a predetermined energy, and the adhesive force is reduced.
An energy applying means for applying the predetermined energy to the adhesive sheet is provided.
The holding member has a configuration in which an end portion of the adhesive sheet is sandwiched and held by a one-side holding member that abuts on one surface side of the adhesive sheet and a other-side holding member that abuts on the other surface side of the adhesive sheet. And
The energy applying means is a separating device characterized in that a predetermined energy is applied to a held region of the adhesive sheet sandwiched between the one-side holding member and the other-side holding member before being sandwiched between the holding members. 一方の面と他方の面との少なくとも一方に、複数の被着体または分割されて複数になる被着体が貼付された接着シートの端部を保持部材で保持する保持手段と、
前記接着シートにおける前記複数の被着体が貼付された被着体接着領域よりも外側であって、前記保持手段が保持した被保持領域の内側で当該接着シートに当接する当接手段と、
前記接着シートの端部を保持した前記保持手段および前記当接手段を相対移動させ、前記接着シートに張力を付与して前記被着体の相互間隔を広げる離間手段とを備え、
前記接着シートは、所定のエネルギーが付与されることでその接着力が低下し、
前記接着シートに前記所定のエネルギーを付与するエネルギー付与手段を備え、
前記保持部材は、前記接着シートの一方の面側に当接する一方側保持部材および、前記接着シートの他方の面側に当接する他方側保持部材で前記接着シートの端部を挟み込んで保持する構成とされ、
前記エネルギー付与手段は、前記保持部材で挟み込む前に、前記一方側保持部材および他方側保持部材で挟み込む前記接着シートの被保持領域に前記所定のエネルギーを付与することを特徴とする離間装置。 A holding means for holding an end portion of an adhesive sheet to which a plurality of adherends or a plurality of adherends divided into a plurality of adherends are attached to at least one of one surface and the other surface by a holding member.
An abutting means that abuts on the adhesive sheet outside the adherend adhesive region to which the plurality of adherends are attached in the adhesive sheet and inside the adhered region held by the holding means.
The holding means for holding the end portion of the adhesive sheet and the contacting means are provided with a separating means for relatively moving the adhesive sheet to apply tension to the adhesive sheet to widen the mutual distance between the adherends.
The adhesive strength of the adhesive sheet is reduced by applying a predetermined energy, and the adhesive force is reduced.
An energy applying means for applying the predetermined energy to the adhesive sheet is provided.
The holding member has a configuration in which an end portion of the adhesive sheet is sandwiched and held by a one-side holding member that abuts on one surface side of the adhesive sheet and a other-side holding member that abuts on the other surface side of the adhesive sheet. And
The energy applying means is a separating device characterized in that a predetermined energy is applied to a held region of the adhesive sheet sandwiched between the one-side holding member and the other-side holding member before being sandwiched between the holding members. 前記エネルギー付与手段は、前記接着シートにおける前記複数の被着体が貼付された被着体接着領域に前記所定のエネルギーを付与する第１のエネルギー付与手段と、前記保持部材で保持した前記接着シートの被保持領域に前記所定のエネルギーを付与する第２のエネルギー付与手段とを備えていることを特徴とする請求項１または請求項２に記載の離間装置。 The energy applying means includes a first energy applying means for applying the predetermined energy to an adherend adhesive region to which the plurality of adherends are attached on the adhesive sheet, and the adhesive sheet held by the holding member. The separation device according to claim 1 or 2, further comprising a second energy applying means for applying the predetermined energy to the held region of the above. 一方の面と他方の面との少なくとも一方に、複数の被着体または分割されて複数になる被着体が貼付された接着シートの端部を複数の保持手段のそれぞれの保持部材で保持する保持工程と、
前記接着シートの端部を保持した前記保持手段を相対移動させ、前記接着シートに張力を付与して前記被着体の相互間隔を広げる離間工程とを有し、
前記接着シートは、所定のエネルギーが付与されることでその接着力が低下し、
前記接着シートに前記所定のエネルギーを付与するエネルギー付与工程を有し、
前記保持部材は、前記接着シートの一方の面側に当接する一方側保持部材および、前記接着シートの他方の面側に当接する他方側保持部材で前記接着シートの端部を挟み込んで保持する構成とされ、
前記エネルギー付与工程は、前記保持部材で挟み込む前に、前記一方側保持部材および他方側保持部材で挟み込む前記接着シートの被保持領域に前記所定のエネルギーを付与することを特徴とする離間方法。 The ends of the adhesive sheet to which a plurality of adherends or a plurality of adherends to be divided and a plurality of adherends are attached to at least one of one surface and the other surface are held by the respective holding members of the plurality of holding means. Holding process and
It has a separation step of relatively moving the holding means holding the end portion of the adhesive sheet and applying tension to the adhesive sheet to widen the mutual distance between the adherends.
The adhesive strength of the adhesive sheet is reduced by applying a predetermined energy, and the adhesive force is reduced.
It has an energy applying step of applying the predetermined energy to the adhesive sheet, and has an energy applying step.
The holding member has a configuration in which an end portion of the adhesive sheet is sandwiched and held by a one-side holding member that abuts on one surface side of the adhesive sheet and a other-side holding member that abuts on the other surface side of the adhesive sheet. And
The energy applying step is a separation method characterized in that a predetermined energy is applied to a held region of the adhesive sheet sandwiched between the one-side holding member and the other-side holding member before being sandwiched between the holding members. 一方の面と他方の面との少なくとも一方に、複数の被着体または分割されて複数になる被着体が貼付された接着シートの端部を複数の保持手段のそれぞれの保持部材で保持する保持工程と、
前記接着シートにおける前記複数の被着体が貼付された被着体接着領域よりも外側であって、前記保持手段が保持した被保持領域の内側で当該接着シートに当接する当接手段および、前記接着シートの端部を保持した前記保持手段を相対移動させ、前記接着シートに張力を付与して前記被着体の相互間隔を広げる離間工程とを有し、
前記接着シートは、所定のエネルギーが付与されることでその接着力が低下し、
前記接着シートに前記所定のエネルギーを付与するエネルギー付与工程を有し、
前記保持部材は、前記接着シートの一方の面側に当接する一方側保持部材および、前記接着シートの他方の面側に当接する他方側保持部材で前記接着シートの端部を挟み込んで保持する構成とされ、
前記エネルギー付与工程は、前記保持部材で挟み込む前に、前記一方側保持部材および他方側保持部材で挟み込む前記接着シートの被保持領域に前記所定のエネルギーを付与することを特徴とする離間方法。 The ends of the adhesive sheet to which a plurality of adherends or a plurality of adherends to be divided and a plurality of adherends are attached to at least one of one surface and the other surface are held by the respective holding members of the plurality of holding means. Holding process and
An abutting means that abuts on the adhesive sheet outside the adherend adhesive region to which the plurality of adherends are attached in the adhesive sheet and inside the adhered region held by the holding means, and the above. It has a separation step of relatively moving the holding means holding the end portion of the adhesive sheet and applying tension to the adhesive sheet to widen the mutual distance between the adherends.
The adhesive strength of the adhesive sheet is reduced by applying a predetermined energy, and the adhesive force is reduced.
It has an energy applying step of applying the predetermined energy to the adhesive sheet, and has an energy applying step.
The holding member has a configuration in which an end portion of the adhesive sheet is sandwiched and held by a one-side holding member that abuts on one surface side of the adhesive sheet and a other-side holding member that abuts on the other surface side of the adhesive sheet. And
The energy applying step is a separation method characterized in that a predetermined energy is applied to a held region of the adhesive sheet sandwiched between the one-side holding member and the other-side holding member before being sandwiched between the holding members.
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