TWI755490B - Separation device and separation method - Google Patents

Abstract

An object of the present invention is to provide a separation device and a separation method that can prevent the held area of the adhesive sheet held by the holding member from being adhered to the holding member. The solution of the present invention is a separation device, which is characterized by having: on at least one of one side (AS1) and the other side (AS2), a plurality of adherends (CP) or divided into a plurality of A plurality of holding means (20) for holding the end of the adhesive sheet (AS) of the body to be adhered (CP) by the holding member (22), and holding means (20) for holding the end of the adhesive sheet (AS) ) relative movement, imparting tension to the adhesive sheet (AS) to expand the mutual interval of the adhered body (CP) (30); the adhesive sheet (AS) is provided with a specified energy (UV ) to reduce its adhesive force, and is provided with energy imparting means (50) for imparting a predetermined energy (UV) to the adhesive sheet (AS); the holding member (22) is formed by abutting on one side of the adhesive sheet (AS). One side holding member (22A) on the side of the surface (AS1) and the other side holding member (22B) on the side of the other surface (AS2) of the adhesive sheet (AS) sandwich and hold the adhesive sheet The structure of the end portion of (AS); the energy imparting means (50) is used to adhere to the one side holding member (22A) and the other side holding member (22B) before being held by the holding member (22). The retained area of the tab (AS) imparts a specified energy (UV).

Description

Separation device and separation method

The present invention relates to a separation device and a separation method.

Conventionally, there has been known a separation device that widens the mutual interval of a plurality of adherends pasted on an adhesive sheet (for example, refer to Patent Document 1). [Prior Art Literature] [Patent Literature]

[Patent Document 1] Japanese Patent Laid-Open No. 2016-127124

[The problem to be solved by the invention]

However, in the conventional separation device as described in Patent Document 1, an adhesive sheet AS (adhesive sheet) is held by a lower support member 22 (holding member) and an upper support member 24 (holding member), and the adhesive sheet The structure of applying tension to expand the mutual interval of the wafers CP (adhered bodies), therefore, the adhesive surface of the adhesive sheet held by the holding member is adhered to the holding member, and it is difficult to remove the adhesive sheet from the holding member. Inconvenience, or inconvenience of having to remove the adhesive attached to the holding member.

An object of the present invention is to provide a separation device and a separation method that can prevent the holding area of the adhesive sheet held by the holding member from being adhered to the holding member. [Means for solving problems]

The present invention adopts the constitution described in the scope of the patent application. [Effect of invention]

According to the present invention, the energy imparting means imparts predetermined energy to the area to be held of the adhesive sheet before being held by the holding member, so that the adhesive sheet whose adhesive force is reduced by the application of the predetermined energy, The held area of the adhesive sheet held by the holding member can be prevented from sticking to the holding member. In addition, if the energy imparting means is provided with the first energy imparting means and the second energy imparting means, the second energy imparting means can focus on reducing the adhesive force of the held area of the adhesive sheet, and can prevent the held area more reliably. Adhesive to the holding member.

Hereinafter, embodiments of the present invention will be described with reference to the drawings. In addition, the X-axis, Y-axis, and Z-axis of the present embodiment have a relationship of being orthogonal to each other, and the X-axis and Y-axis are set as the axes in the designated plane, and the Z-axis is set as the axis orthogonal to the above-mentioned designated plane. axis. Furthermore, in the present embodiment, the case where viewed from the direction of the arrow BD parallel to the Y-axis is taken as the reference, and when the direction is displayed without citing the reference, "up" is set as the direction of the arrow on the Z-axis and "up" Down is the opposite direction, "Left" is the arrow direction of the X axis and "Right" is the opposite direction, "Front" is the arrow direction of the Y axis and "Back" is the opposite direction.

The separation device 10 of the present invention is provided with a plurality of holding means 20 for holding the ends of the adhesive sheets AS to which the plurality of adherends CP are adhered by the holding member 22 on the one hand AS1, so that the ends of the adhesive sheets AS are held by the holding members 22. The holding means 20 at the ends move relatively, and the separation means 30 that apply tension to the adhesive sheet AS to widen the mutual interval of the adherends CP can detect the mutual interval of the adherends CP or the distance between the adherends CP. Photographic means 40 such as a camera or a projector such as an overall collective shape, detection means 40 such as various sensors such as an optical sensor or a sonic sensor, and ultraviolet rays UV that impart predetermined energy to the adhesive sheet AS. Grants 50 energy means. In addition, the adhesive sheet AS is an adhesive layer in which the adhesive force is reduced by applying ultraviolet UV to one surface of the base sheet.

The holding means 20 includes a reversing motor 21 as a driving device, and a holding member 22 for holding the adhesive sheet AS. The holding member 22 is formed to be in contact with one side holding member 22A on the side of one surface AS1 of the adhesive sheet AS, and the other is supported by the separation means 30 and abuts against the other surface AS2 of the adhesive sheet AS. The one side holding member 22B sandwiches and holds the end portion of the adhesive sheet AS. In addition, the one side holding member 22A is supported by the output shaft 21A of the reversing motor 21 supported by the other side holding member 22B.

The separation means 30 includes a linear motor 31 as a driving device, and a holding arm 32 supported by the slider 31A and supporting the other side holding member 22B on the upper surface side.

The energy imparting means 50 is provided with: a first energy imparting means 51 for imparting ultraviolet UV to the adhesive sheet AS to the adherends of the plurality of adherends CP, the adherends, the adhesive field CE, and the adhesive to hold the holding member 22. The second energy imparting means 52 for imparting ultraviolet UV to the retained area HE of the tab AS. The first energy imparting means 51 is provided with an ultraviolet light emitting source 51A for the area to be adhered which is positioned below the adhesive sheet AS held by the holding means 20. The second energy imparting means 52 includes a holder 52A supported by the holding arm 32 , and ultraviolet rays for the held area supported by the holder 52A and positioned above the end of the adhesive sheet AS held by the holding means 20 . Light source 52B.

The operation of the above-mentioned separation device 10 will be described. First, for the separation device 10 in which each component is in standby at the initial position indicated by the solid line in FIGS. 1(A) and (B), the user of the separation device 10 (hereinafter referred to as “user”) uses the operation panel or the personal A computer or other operating means not shown in the figure inputs a signal for the start of automatic operation. After that, when an operator or a conveying means such as a driving machine or a conveyor belt, which is not shown in the figure, places the adhesive sheets AS to which the plurality of to-be-adhered bodies CP are pasted on the other side holding member 22B, the holding member 22 Before being sandwiched, the energy imparting means 50 imparts ultraviolet rays UV to the held area HE of the adhesive sheet AS sandwiched by the one-side holding member 22A and the other-side holding member 22B. That is, when the adhesive sheet AS is placed on the other side holding member 22B, the energy imparting means 50 drives the ultraviolet light emitting source 52B for the held area, as shown in FIG. The adhesive force of the held area HE is reduced by applying ultraviolet rays.

Next, the holding means 20 drives each reversing motor 21, and as shown in FIG. 2(A), after holding the end of the adhesive sheet AS with the one side holding member 22A and the other side holding member 22B, the separating means 30 drives each linear motor 31. The holding means 20 are separated from each other, tension is applied to the adhesive sheet AS, and the mutual interval of the adherends CP is widened. At this time, the mutual intervals between the adherends CP may not expand to a predetermined interval due to deformation of the adhesive sheet AS or the like. Then, based on the detection result of the detection means 40, the separation means 30 drives each linear motor 31, and moves each holding means 20 individually so that the mutual interval of each to-be-adhered body CP becomes a predetermined interval.

After that, the energy imparting means 50 drives the ultraviolet light emitting source 51A for the bonding area of the adherend, as shown in FIG. 2(B), to apply ultraviolet UV to the bonding area CE of the adherend, so that the adhesive sheet AS will The adhesive force of the bonded CP decreases. Next, when all the to-be-adhered bodies CP or a predetermined amount of the to-be-adhered body CP are detached from the adhesive sheet AS by the unillustrated to-be-adhered body take-out means such as a pick-up device or a conveying device, the separating means 30 drives each wire After the sex motor 31 returns each slider 31A to the initial position, the holding means 20 drives the return motor 21 to return the one side holding member 22A to the initial position. After that, an operator or a conveying means not shown removes the adhesive sheet AS remaining on the other side holding member 22B, and the same operation as described above is repeated below.

According to the separation device 10 as described above, the energy imparting means 50 imparts ultraviolet UV to the held area HE of the adhesive sheet AS before being held by the holding member 22 . The adhesive sheet AS with reduced contact force can prevent the holding area HE of the adhesive sheet AS held by the holding member 22 from being adhered to the holding member 22 .

The means and programs of the present invention are not limited as long as they can realize the actions, functions, or programs described with respect to the means and programs, and are not limited to the components or programs of a single embodiment shown in the foregoing embodiments. For example, the energy imparting means is not limited as long as the specified energy can be imparted to the adhesive sheet, compared with the technical common sense at the beginning of the application and within the technical scope (the same applies to other means and procedures).

As shown in FIG. 3(A), the separating device of the present invention may be provided with: the holding means 20 on the inner side of the held area HE, which is more outside the adhesive sheet AS than the to-be-adhered body adhesion area CE The abutting means 60 abutting on the adhesive sheet AS, the holding means 20 and the abutting means 60 holding the end of the adhesive sheet AS are moved relative to each other, tension is applied to the adhesive sheet AS, and the adherend CP is moved. The separation means 30A, the detection means 40 , and the energy imparting means 50 are separated from each other by increasing the distance from each other. In addition, in the separation device 10A, those with the same structure and the same function as the separation device 10 are assigned the same reference numerals as the separation device 10, and the description of the structure and the description of the operation are omitted.

The contact means 60 includes a cylindrical contact member 61 supported on the base plate BP, and supports the ultraviolet light emitting source 51A for the area to be adhered on the base plate BP inside the contact member 61 . The separating means 30A is provided with a linear motor 33 as a driving device supported on the base plate BP, and a holding arm 34 supported on the output shaft 33A thereof and supporting the other side holding member 22B and the bracket 52A on the upper surface side.

This type of separation device 10A is performed in the same manner as the separation device 10, and when the adhesive sheets AS to which the plurality of adherends CP are attached are placed on the other side holding member 22B, the energy imparting means 50 is driven to be held. As shown in FIG. 3(A) , the area-use ultraviolet light emitting source 52B applies ultraviolet UV to the held area HE to reduce the adhesive force of the held area HE. Then, the holding means 20 drives the reversing motor 21, and as shown in FIG. 3(B), after holding the end of the adhesive sheet AS with the one side holding member 22A and the other side holding member 22B, the separating means 30A drives the direct motion motor 33. The holding means 20 is lowered, the holding means 20 and the contact means 60 are moved relatively, and tension is applied to the adhesive sheet to widen the mutual interval of the adherends CP. Thereafter, in the same manner as in the separation device 10, the energy supply means 50 drives the ultraviolet light emitting source 51A for the bonding area of the adherend to reduce the adhesion force of the adhesive sheet AS to the adherend CP, and the unillustrated The adherend removal means conveys each adherend CP to another process. Therefore, when the adherend CP is detached from the adhesive sheet AS by means of taking out the adherend, which is not shown in the figure, each means drives each drive device to return each member to the initial position, and then remains in the The adhesive sheet AS on the other side holding member 22B is removed, and the same operation as described above is repeated below.

Even with such a separation device 10A, the same effects as those of the separation device 10 can be obtained.

The holding means 20 may be configured to hold the ends of the adhesive sheets AS to which the plurality of adherends CP are adhered on the other side AS2, or the sides of the one side AS1 and the other side AS2, or mechanically. The structure of holding the end of the adhesive sheet AS by means of gripping means such as a chuck or a holding cylinder, Coulomb force, adhesive, adhesive, magnetic force, Bernoulli adsorption, driving machine, etc. In the case of the holding means 20 and the separation device 10, for example, the holding means 20 that moves to the right can be formed as one body, and the holding means 20 that move to the left can be formed into two bodies. It consists of 3 or more bodies that move to the right, left and other directions. In the case of the holding means 20 and the separating device 10A, there may be one or two or more.

The separation means 30 and 30A are not plural but may be singular. In this case, for example, the separation device 10 is made of two sliders of a linear motor of one body, each of which integrally supports the holding means 20 and holds the body to be adhered. A configuration in which the mutual interval between CPs is widened, or a configuration in which the mutual interval between the adherends CP is widened only in one axis direction (eg, the X-axis direction, the Y-axis direction, etc.). The separating means 30 may be configured to widen the distance from each other in directions of three or more axes (for example, the X-axis direction, the Y-axis direction, and the other axis directions). The configuration of moving in the Y-axis direction (the configuration in which the plurality of holding means 20 moving in the Y-axis direction is moved in the X-axis direction respectively) can widen the mutual interval of the adherend CP, or make it impossible to move the adherend CP. The mutual interval constitutes the specified interval. The separating means 30A may stop or move the holding means 20 and move the abutting means 60, so that the holding means 20 and the abutting means 60 are relatively moved, and tension is applied to the adhesive sheet AS, so that the adhesion of the adherend CP can be adjusted. The distance from each other expands. The separation means 30 and 30A may be operated by the operator to drive the linear motor 31 and the linear motor 33 by operating a button, a lever, or the like. In this case, for example, the detection result by the detection means 40 may be displayed on the monitor or the detection result. A display such as a device can also be used to make the mutual interval of the adherend CP a predetermined interval according to the detection result displayed on the display, or the collective shape of the whole of each to-be-adhered body CP relative to the collective shape of the entire base can be used. In a similar manner, the operator drives the linear motor 31 and the linear motor 33 .

The detection means 40 may be the visual inspection of the operator. For example, the operator may operate a button, a lever, or the like to set the mutual interval between the adherends CP to a predetermined interval, or make each adherend CP as a whole. The aggregate shape of the base unit is in a similar relationship with the aggregate shape of the entire base, and drives the linear motor 31 and the linear motor 33, or may not be provided in the separation devices 10 and 10A of the present invention.

The energy imparting means 50, as the first energy imparting means 51, employs a configuration in which ultraviolet rays UV are applied to at least one of the one surface AS1 side and the other surface AS2 side of the adhesive sheet AS, and the first configuration of such a configuration is also possible. The energy imparting means 51 also imparts ultraviolet rays UV to the held area HE to reduce the adhesive force of the adhesive sheet AS to the one side holding member 22A or the other side holding member 22B, or does not have the first energy imparting means 51 . The energy imparting means 50, as the second energy imparting means 52, adopts a configuration in which ultraviolet rays UV are applied to at least one of the side AS1 on one side and the side AS2 on the other side of the adhesive sheet AS. 2. The energy imparting means 52 imparts ultraviolet rays UV to the held area HE to reduce the adhesive force of the adhesive sheet AS to the one-side holding member 22A or the other-side holding member 22B. In addition, in the separating apparatuses 10 and 10A shown in the above-mentioned embodiments, when the energy imparting means 50 applies ultraviolet rays UV to the holding area HE of the adhesive sheet AS from the other side holding member 22B side, it is constituted by a member that is permeable to ultraviolet rays. The other side holding member 22B, the holding arm 34 or the like may be used. The energy imparting means 50 may use electromagnetic waves of all wavelengths (such as X-rays or infrared rays) as energy to impart energy to the adhesive sheet AS, or use fluids such as heated or cooled gas or liquid as energy to impart energy to the adhesive sheet AS. The structure of the adhesive sheet AS can be any energy that can reduce the adhesive force of the adhesive sheet AS. It can be a structure that imparts energy to the whole or part of the adhesive sheet AS, and is used in the field of bonding of the adherend. The ultraviolet light emitting source 51A or the ultraviolet light emitting source 52B for the protected area can also be any LED (Light Emitting Diode, light emitting diode), high pressure mercury lamp, low pressure mercury lamp, metal halide lamp, xenon lamp, halogen lamp, etc., or use Consider combining these light sources. The first energy imparting means 51 may irradiate the adhesive sheet AS with ultraviolet rays UV in a state where the distance between the adherends CP is not widened.

The abutting means 60 can be formed of abutting members 61 having other shapes such as a column, a square column, and an elliptical column, in addition to a rectangular cylindrical shape or an elliptical cylindrical shape.

The material, type, shape, etc. of the adhesive sheet AS and the adherend CP of the present invention are not particularly limited. For example, the adhesive sheet AS is not limited at all as long as the adhesive force is reduced by being energized, and it may be in an adhesive form such as pressure-sensitive adhesiveness and heat-sensitive adhesiveness. Furthermore, the adhesive sheet AS or the adherend CP may be, for example, a polygonal shape such as a circle, an ellipse, a triangle, or a quadrangle, and other shapes are also possible. In addition, the adhesive sheet AS may be, for example, a single layer of only the adhesive layer, one having an intermediate layer between the substrate and the adhesive layer, and one having three or more layers such as a cap layer on the upper surface of the substrate, and further, A so-called double-sided adhesive sheet that can peel the substrate from the adhesive layer is also acceptable. Such a double-sided adhesive sheet can be a single-layer or multi-layer intermediate layer, or a single layer without an intermediate layer. or stratified. In addition, as the adherend CP, for example, a food, a resin container, a semiconductor wafer such as a silicon semiconductor wafer or a compound semiconductor wafer, an information recording substrate such as a semiconductor chip, a circuit board, an optical disc, a glass plate, a steel plate, A single substance such as pottery, wood, or resin, or a composite of two or more of these can be used as a target for members or articles of any form. In addition, the adhesive sheet AS can also be replaced with functional and useful readings, such as labels for information recording, labels for decoration, protective sheets, dicing tapes, bare die stickers, die attach tapes, and recording layer formation. Resin sheets and other arbitrary sheets, films, tapes, etc. The to-be-adhered body CP may exist in plural on the adhesive sheet AS in advance, or may be divided into plural numbers when an external force is applied by the separating means 30, 30A, other mechanisms, or human hands, and the plural numbers may be present on the adhesive sheet AS. Beings and the like are divided into plurals. As such a plurality of bonded bodies CP divided into a plurality, for example, a semiconductor wafer or a substrate is irradiated with a laser, and a fragile fragile layer such as a line or a lattice is first formed on the semiconductor wafer or substrate. Or when tension is applied to the adhesive sheet AS, or when an external force is directly or indirectly applied to a semiconductor wafer or substrate, it is individualized to become a plurality of adherends CP, or, for example, a cutting edge is used to cut into the resin or Glass plates, etc., are first formed in the resin or glass plate, etc., without cutting lines or rows of holes penetrating through the front and back of the line or lattice shape, etc., or before applying tension to the adhesive sheet AS, or in the There is no limitation on the timing of applying external force directly or indirectly to resins, glass plates, etc., into individual pieces to form a plurality of adherends CP and the like.

The driving machine of the above-mentioned embodiment can use electric machines such as rotary motors, direct motion motors, linear motors, single-axis robot arms, multi-joint robot arms, etc., air cylinders, hydraulic cylinders, rodless cylinders, and rotary cylinders, etc. In addition to actuators and the like, it is also possible to use a drive machine that directly or indirectly combines these.

10. 10A‧‧‧Separation device 20‧‧‧holding means 22‧‧‧holding member 22A‧‧‧one side holding member 22B‧‧‧other side holding member 30, 30A‧‧‧separating means 50‧‧‧provided Energy Means 51‧‧‧First Energy Means52‧‧‧Second Energy Means60‧‧‧Abutting Means AS‧‧‧Adhesive Sheets AS1‧‧‧One Side AS2‧‧‧Another Side CE ‧‧‧Attachment area CP‧‧‧Attachment HE‧‧‧Retaining area UV‧‧‧Ultraviolet (specified energy)

Fig. 1(A) is a plan view of a separation device according to an embodiment of the present invention. (B) is a side view of FIG. 1(A). 2(A) and (B) are diagrams for explaining the operation of the separating device according to the embodiment of the present invention. 3(A) and (B) are explanatory diagrams of other examples of the present invention.

10‧‧‧Separation device

20‧‧‧Maintaining Means

21‧‧‧Reversing motor

21A‧‧‧Output shaft

22‧‧‧Maintaining member

22A‧‧‧One side holding member

22B‧‧‧The other side holding member

30‧‧‧ Means of alienation

31‧‧‧Drive Linear Motor

31A‧‧‧Slide

32‧‧‧Retaining Arm

40‧‧‧Detection methods

50‧‧‧Empowering Means

51‧‧‧The first means of empowering energy

51A‧‧‧UV light source

52‧‧‧Second Energy Empowerment Means

52A‧‧‧Bracket

52B‧‧‧UV light source for protected areas

AS‧‧‧adhesive sheet

AS1‧‧‧One Side

AS2‧‧‧The other side

BD‧‧‧arrow

CE‧‧‧Adhering body bonding field

CP‧‧‧adhered body

HE‧‧‧Retained area

UV‧‧‧UV (specified energy)

Claims (5)

A separation device, which is characterized by comprising: on at least one of one side and the other side, the ends of a plurality of adherends or an end portion of an adhesive sheet that is divided into a plurality of adherends are held by a holding member. The plurality of holding means for holding and the holding means for holding the end of the adhesive sheet are relatively moved to apply tension to the adhesive sheet to widen the mutual interval between the adherends; The above-mentioned adhesive sheet, The adhesive force is reduced by being imparted with a predetermined energy, and an energy imparting means for imparting the predetermined energy to the adhesive sheet is provided; A structure in which one side holding member and the other side holding member abutting on the other surface side of the adhesive sheet sandwich and hold the end of the adhesive sheet; the energy imparting means is connected to the holding member Before being held in, the above-mentioned predetermined energy is given to the held area of the above-mentioned adhesive sheet held by the above-mentioned one side holding member and the other side holding member. A separation device, which is characterized by comprising: on at least one of one side and the other side, the ends of a plurality of adherends or an end portion of an adhesive sheet that is divided into a plurality of adherends are held by a holding member. The holding means for holding is in contact with the adhesive sheet on the outer side of the adhesive sheet than the adherend area to which the plurality of adherends are adhered, that is, the inside of the held area held by the holding means The abutting means is a separation means for relatively moving the holding means and the abutting means for holding the end of the adhesive sheet, and applying tension to the adhesive sheet to expand the mutual interval between the adherends; The adhesive sheet is provided with a predetermined energy to reduce its adhesive force, and is provided with energy imparting means for imparting the predetermined energy to the adhesive sheet; The holding member is formed by contacting one of the adhesive sheets. One side holding member on the surface side and the other side holding member abutting on the other surface side of the adhesive sheet sandwich and hold the end of the adhesive sheet; The energy imparting means is attached to Before being held by the holding member, the predetermined energy is given to the held area of the adhesive sheet held by the one side holding member and the other side holding member. The separation device according to claim 1 or 2, wherein the energy imparting means is provided with a means of imparting the specified energy to the adherend area of the adherend to which the plurality of adherends are adhered to the adhesive sheet. The first energy imparting means and the second energy imparting means for imparting the predetermined energy to the held area of the adhesive sheet held by the holding member. A separation method, which is characterized by the following: On at least one of one side and the other side, the ends of the adhesive sheets that adhere a plurality of adherends or are divided into a plurality of adherends are held by a plurality of holding means The holding procedure of holding each holding member is a separation procedure of relatively moving the holding means for holding the end of the adhesive sheet, applying tension to the adhesive sheet, and expanding the mutual interval between the adherends; The adhesive sheet is provided with a predetermined energy to reduce its adhesive force, and has an energy imparting program for imparting the predetermined energy to the adhesive sheet; the holding member is formed by abutting on one of the adhesive sheets. The structure of one side holding member on the surface side and the other side holding member abutting on the other surface side of the above-mentioned adhesive sheet sandwiching and holding the end of the above-mentioned adhesive sheet; Before being held by the holding member, the predetermined energy is given to the held area of the adhesive sheet held by the one side holding member and the other side holding member. A separation method, which is characterized by comprising: on at least one of the one side and the other side, the ends of the adhesive sheets that adhere a plurality of adherends or are divided into a plurality of adherends are held by a plurality of holding means The holding procedure for holding each of the holding members is to make the area of the adherend to which the plurality of adherends are adhered on the outside of the adhesive sheet, that is, the inside of the area to be held held by the holding means. The abutting means abutting against the adhesive sheet and the holding means for holding the end of the adhesive sheet are relatively moved to apply tension to the adhesive sheet to expand the distance between the adherends; The above-mentioned adhesive sheet is provided with a predetermined energy to reduce its adhesive force, and has an energy imparting program for imparting the above-mentioned predetermined energy to the above-mentioned adhesive sheet; One side holding member on one face side and the other side holding member abutting on the other face side of the adhesive sheet sandwich and hold the end of the adhesive sheet; The energy imparting process is: Before being held by the holding member, the predetermined energy is given to the held area of the adhesive sheet held by the one side holding member and the other side holding member.

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