JP2019179846A - Separation device and separation method - Google Patents

Abstract

To provide a technique capable of preventing positional displacement of a to-be-adhered object remaining on an adhesive sheet as much as possible even if some to-be-adhered objects are removed from the adhesive sheet among a plurality of to-be-adhered objects whose mutual intervals are widened on the adhesive sheet.SOLUTION: A separation device EA for expanding a mutual interval between a plurality of to-be-adhered objects CP affixed to one surface AS1 of an adhesive sheet AS, includes: a plurality of holding means 10 for holding an end of the adhesive sheet AS; separation means 20 for applying tension to the adhesive sheet AS to widen the mutual interval between the to-be-adhered objects CP by relatively moving the holding means 10 holding the edge of the adhesive sheet AS; and control means 50 for controlling the entire separation device EA. The control means 50 controls the separating means 20 so that the mutual interval between the to-be-adhered objects CP is a predetermined interval by moving the holding means 10 relative to each other in an expansion direction to increase the mutual interval of the to-be-adhered objects CP and moving the holding means 10 relative to the anti-expansion direction opposite to the expansion direction after widening the mutual interval of the to-be-adhered objects CP larger than the predetermined interval.SELECTED DRAWING: Figure 1

Description

  The present invention relates to a separation device and a separation method.

  There is known a separation device that widens the interval between a plurality of adherends attached to an adhesive sheet (see, for example, Patent Document 1).

JP 2007-103649 A

  In the conventional expanding device (separating device) described in Patent Document 1, the mutual distance between the chips C (adhered body) is increased while the mutual distance between the chips C (adhered body) is increased by the stretching operation of the first sheet 13 (adhesive sheet). When the predetermined interval is reached, the stretching operation of the adhesive sheet is completed. At this time, the release sheet portion, which is an adhesive sheet portion that is not attached to the adherend, is stretched with plastic deformation and elastic deformation, and stress (hereinafter, referred to as a plastic deformation state) due to elastic restoring force. (Referred to as “shrinkage stress”). For example, when a part of the adherend is removed from the adhesive sheet by a conveying means such as a pickup device while the shrinkage stress remains in the release sheet portion, the adhesive sheet from which the adherend has been removed is removed. The shrinkage stress is dispersed in the part, and the balanced state of the adhesive sheet is lost due to the dispersing action, and a phenomenon occurs in which the adherend remaining on the adhesive sheet is displaced. As a result, the adherend is held and transported by the transport unit in a state where the positional deviation has occurred, and there is a problem that the adherend is placed on or adhered to the transport destination in a state where the positional deviation has occurred. .

  An object of the present invention is to provide an adherend that remains on an adhesive sheet even if some of the adherends are removed from the adhesive sheet among a plurality of adherends that are spaced apart from each other on the adhesive sheet. It is an object of the present invention to provide a separation device and a separation method that can prevent positional displacement as much as possible.

  The present invention employs the configurations described in the claims.

According to the present invention, the mutual distance between the adherends attached to the adhesive sheet is made larger than a predetermined distance, and then the mutual distance between the adherends is set to the predetermined distance while the mutual distance between the adherends is narrowed. It is possible to reduce the shrinkage stress remaining in the release sheet portion that is not attached to the adherend, and some adherends adhere to each other among a plurality of adherends that are spaced apart from each other on the adhesive sheet. Even if it is removed from the sheet, it is possible to prevent the adherend remaining on the adhesive sheet from being displaced as much as possible.
Moreover, if a detection means is provided, the mutual space | interval of a to-be-adhered body can be correctly made into a predetermined space | interval.
Furthermore, if the energy application means is provided, even after the shrinkage stress remaining in the release sheet portion disappears and the adhesive sheet is in a plastically deformed state, the adhesive sheet is further contracted to reduce the mutual interval between the adherends. The predetermined interval can be set.
Further, if the relative movement speed in the anti-expansion direction is slower than the relative movement speed in the expansion direction, the mutual distance between the adherends can be accurately set to a predetermined distance.

Explanatory drawing of the separation apparatus which concerns on embodiment of this invention. (A)-(C) are operation | movement explanatory drawings of the separation apparatus which concerns on embodiment of this invention. (A)-(C) are explanatory drawings of the other example of this invention.

Hereinafter, embodiments of the present invention will be described with reference to the drawings.
In this embodiment, the X axis, the Y axis, and the Z axis are orthogonal to each other, the X axis and the Y axis are axes in a predetermined plane, and the Z axis is an axis that is orthogonal to the predetermined plane. To do. Further, in the present embodiment, when viewing from the direction of the arrow BD parallel to the Y axis, and indicating the direction without designating the figure, “up” is the arrow direction of the Z axis and “down” is the direction In the reverse direction, “left” is the X-axis arrow direction, “right” is the reverse direction, “front” is the Y-axis arrow direction, and “rear” is the reverse direction.

The separation device EA of the present invention is a device that widens the interval between a plurality of adherends CP affixed to one surface AS1 of the adhesive sheet AS to a predetermined interval, and holds a plurality of ends of the adhesive sheet AS. The holding means 10 and the holding means 10 holding the end of the adhesive sheet AS are moved relative to each other to apply tension to the adhesive sheet AS to widen the interval between the adherends CP, and the adherend CP. Detection means 30 for detecting the mutual distance, energy application means 40 for applying infrared IR as predetermined energy to the adhesive sheet AS, and control means 50 for controlling the entire separation device EA.
In the present embodiment, an adhesive sheet AS that can be shrunk by infrared IR as a predetermined energy is employed.

  The holding means 10 includes a rotation motor 11 as a driving device supported by the separation means 20 and an upper holding member 12 supported by the output shaft 11A.

  The separating means 20 includes a linear motor 21 as a driving device and a lower holding member 22 supported by the slider 21A and supporting the rotating motor 11 on the upper surface side.

  The detection means 30 includes imaging means such as a camera and a projector, and various sensors 31 such as an optical sensor and a sound wave sensor.

  The energy applying means 40 includes an infrared lamp 41 that emits infrared IR.

  The control means 50 includes a control device 51 such as a computer or a sequencer, and is connected to each means constituting the separation device EA by a communication medium such as electricity or radio waves, and extends in an expansion direction that widens the interval between the adherends CP. The holding means 10 is moved relative to each other so that the mutual distance between the adherends CP is larger than a predetermined distance, and then the holding means 10 is moved relative to the anti-expansion direction opposite to the expansion direction to move the adherend CP. The separating means 20 is controlled so that the mutual interval is a predetermined interval.

The operation of the above separating device EA will be described.
First, a user (hereinafter simply referred to as “user”) of the separation device EA controls the separation device EA in which each member stands by at an initial position indicated by a solid line in FIGS. 1 and 2A. A predetermined mutual interval of the adherend CP expanded by the separation device EA is input to the control device 51 through an operation unit (not shown) such as a personal computer or the like, and then a signal for starting automatic operation is input to the control device 51.
In this embodiment, the predetermined mutual interval of the adherend CP to be widened is input as 1.0 mm, and the control means 50 performs the actual adherend with respect to the input predetermined interval of the adherend CP. After the mutual interval of CP is increased to 1.5 mm which is 1.5 times larger than the predetermined interval, the mutual interval of the adherend CP is set to 1.0 mm which is the predetermined mutual interval. Thus, the separation means 20 is controlled.

  Then, when an operator or a conveying means (not shown) such as a driving device or a conveyor places the adhesive sheet AS to which a plurality of adherends CP are attached on the lower holding member 22, the holding means 10 causes the rotation motors 11 to move. Driven and the end of the adhesive sheet AS is held by the upper holding member 12 and the lower holding member 22 as indicated by a two-dot chain line in FIG. Next, the separating means 20 drives each linear motor 21 to move the holding means 10 located on the left side to the left and move the holding means 10 located on the right side to the right as shown in FIG. The holding means 10 located at the front is moved forward, and the holding means 10 located at the rear is moved rearward. Thereafter, when the detecting means 30 detects that the mutual distance between the adherends CP is 1.5 mm, the separating means 20 stops driving the linear motors 21.

  Next, the separating means 20 drives each linear motor 21, and as shown in FIG. 2C, the holding means 10 located on the left is moved to the right and the holding means 10 located on the right is moved. The holding means 10 located at the front is moved rearward, and the holding means 10 located at the rear is moved forward. Then, the adhesive sheet AS is contracted and deformed by the elastic restoring force, and when the detecting means 30 detects that the mutual interval between the adherends CP becomes 1.0 mm, the separating means 20 stops driving each linear motor 21. To do.

  When the separating unit 20 relatively moves the holding unit 10 in the anti-expanding direction, the energy applying unit 40 drives the infrared lamp 41 to irradiate the adhesive sheet AS with infrared IR as shown in FIG. The shrinkage of the adhesive sheet AS may be assisted. Further, the control means 50 may control the separation means 20 so that the relative movement speed in the anti-expansion direction is slower than the relative movement speed in the expansion direction.

  An adherend take-out means (not shown) such as a pick-up device or a transport device holds the adherend CP and removes it from the adhesive sheet AS, and the removed adherend CP is placed on another object such as a lead frame or a substrate. Or glue. Next, when all the adherends CP or a predetermined amount of the adherends CP are removed from the adhesive sheet AS, the separating means 20 drives the linear motors 21 to return the respective sliders 21A to the initial positions. The holding means 10 drives the rotation motor 11 to return the upper holding member 12 to the initial position. Thereafter, the operator or a conveying means (not shown) removes the adhesive sheet AS left on the lower holding member 22, and thereafter the same operation as described above is repeated.

  According to the separation device EA as described above, after the mutual interval between the adherends CP adhered to the adhesive sheet AS is expanded larger than a predetermined interval (1.0 mm) (to 1.5 mm), Since the mutual distance between the adherend CPs is reduced to a predetermined distance (1.0 mm) while reducing the mutual distance between the adherend CPs, it is possible to reduce the contraction stress remaining in the release sheet portion not attached to the adherend CP, Among the plurality of adherends CP whose mutual intervals are widened on the adhesive sheet AS, even if a part of the adherends CP is removed from the adhesive sheet AS, the adherend CP remaining on the adhesive sheet AS is It is possible to prevent positional deviation as much as possible.

  The means and steps in the present invention are not limited in any way as long as they can perform the operations, functions, or steps described with respect to those means and steps. The process is not limited at all. For example, as long as the holding means can hold the edge of the adhesive sheet, it is not limited in any way as long as it is within the technical scope in light of the technical common sense at the beginning of the application (other means and The process is the same).

For example, the separation device of the present invention may be a separation device EA1 as shown in FIG.
That is, the separating device EA1 relatively moves the holding unit 10, the contact unit 60 that contacts the adhesive sheet AS, and the holding unit 10 and the contact unit 60 that hold the end of the adhesive sheet AS, so that the adhesive sheet AS Separating means 20A for applying tension to widen the interval between adherends CP, detecting means 30, energy applying means 40, and control means 50 for controlling the entire separating device EA1 are provided.
In the separating device EA1, those having the same configuration and the same function as the separating device EA are denoted by the same reference numerals as those of the separating device EA, the description of the configuration is omitted, and the operation description is simplified.

  The separation means 20A includes a linear motion motor 23 as a driving device supported on the base plate BP, and a lower holding member 24 supported by the output shaft 23A and supporting the rotation motor 11 on the upper surface side.

  The control means 50 moves the holding means 10 and the abutting means 60 relative to each other in the expansion direction that increases the mutual distance between the adherends CP, and expands the mutual distance between the adherends CP to be larger than a predetermined distance, and then expands. The holding means 10 and the abutting means 60 are relatively moved in the anti-expansion direction opposite to the direction, and the separating means 21A is controlled so that the mutual distance between the adherends CP becomes a predetermined distance.

  The contact means 60 includes a cylindrical contact member 61 supported on the base plate BP, and the energy applying means 40 is supported therein.

Such a separation device EA1 is the same as the separation device EA in a state in which each member is waiting at the initial position indicated by a solid line in FIG. 3A, and a predetermined adherend CP that is spread by the separation device EA1. The mutual interval and an automatic operation start signal are input to the control device 51 by the user.
Here, the predetermined mutual interval between the adherends CP to be widened is inputted as 0.5 mm, and the control means 50 determines the actual adherend CP to the predetermined mutual interval between the inputted adherends CP. After the mutual distance is expanded to 1.0 mm, which is twice as large as the predetermined distance, the separating means 20A is arranged so that the mutual distance of the adherend CP is 0.5 mm which is the predetermined mutual distance. To control.

  Then, when the operator or a conveying means (not shown) places the adhesive sheet AS to which the plurality of adherends CP are attached on the lower holding member 24 in the same manner as the separation device EA, the holding means 10 causes the rotation motor 11 to move. Driven, and the end of the adhesive sheet AS is held by the upper holding member 12 and the lower holding member 24 as indicated by a two-dot chain line in FIG. In addition, as shown in FIG. 3, although the cyclic | annular ring frame RF as a frame member is affixed to the edge part of adhesive sheet AS, the said ring frame RF does not need to be. Next, the separating means 20A drives each linear motor 23, and as shown in FIG. 3B, the holding means 10 is lowered to detect that the mutual distance between the adherends CP is 1.0 mm. If 30 detects, the drive of each linear motion motor 23 will be stopped.

  Thereafter, the separating means 20A drives each linear motor 23, and as shown in FIG. 3C, the holding means 10 is lifted to detect that the mutual interval of the adherend CP becomes 0.5 mm. If 30 detects, the drive of each linear motion motor 23 will be stopped. Also at this time, the energy applying means 40 may drive the infrared lamp 41 to irradiate the adhesive sheet AS with the infrared IR, and the control means 50 may move in the anti-expansion direction compared to the relative moving speed in the expansion direction. The separating means 20A may be controlled so that the relative movement speed becomes slower. Next, when the adherend CP is removed from the adhesive sheet AS by the adherend takeout means (not shown), each means drives the respective driving device to return each member to the initial position, and then the lower holding member. The adhesive sheet AS left on 24 is removed, and thereafter the same operation as described above is repeated.

  Such a separation device EA1 can also achieve the same effect as the separation device EA.

  The holding means 10 is a gripping means such as a mechanical chuck or chuck cylinder, coulomb force, adhesive (adhesive sheet, adhesive tape), adhesive (adhesive sheet, adhesive tape), magnetic force, Bernoulli adsorption, suction adsorption, drive device, etc. For example, in the case of the separation device EA, the adhesive sheet AS may be configured with two bodies, one body that moves to the right and one body that moves to the left, For example, it may be composed of three or more bodies that move to the right, left, front, rear, and other directions, or may be one or two or more in the case of the separation device EA1.

The separation means 20 and 20A may be singular. In this case, for example, the separation device EA supports the holding means 10 one by one with two sliders of one linear motor, and the mutual distance between the adherends CP. May be expanded or contracted only in one axis direction (for example, the X axis direction or the Y axis direction).
For example, the separation means 20 stops the holding means 10 located on the left side, moves the holding means 10 located on the right side to the left and right, or stops the holding means 10 located on the front side, By moving the holding means 10 located in the back-and-forth direction, the holding means 10 may be moved relative to each other to widen or shrink the mutual interval of the adherend CP, or the holding means 10 may be moved in three or more directions ( For example, it may be configured to move in the X-axis direction, the Y-axis direction, and other axial directions). For example, a configuration in which each of the plurality of holding means 10 moved in the X-axis direction is moved in the Y-axis direction (Y-axis direction). A plurality of holding means 10 moved in the X direction may be moved in the X-axis direction), and the interval between the adherends CP may be increased or decreased.
The separation means 20A moves the abutment means 60 while stopping or moving the retention means 10, thereby moving the retention means 10 and the abutment means 60 relative to each other, thereby widening or reducing the mutual interval of the adherend CP. May be.

The detection means 30 may detect the position where the mutual interval of the adherend CP is detected may be one, or may be two or more, or when the position where the mutual interval of the adherend CP is detected is two or more. The value of the mutual interval may be averaged as the detection interval.
The detection means 30 may be configured to detect the overall aggregate shape of the adherends CP to detect the mutual interval between the adherends CP, or may not be provided in the separation devices EA and EA1 of the present invention. When the detection means 30 is not provided in the separation devices EA and EA1 of the present invention, for example, the mutual interval between the adherends CP becomes a predetermined interval, or the overall aggregate shape of each adherend CP is The linear motor 21 and the linear motor 23 are driven by operating a push button, a lever, etc. while visually observing the operator so that the overall collective shape of the base is similar. Also good.

  The energy imparting means 40 may impart, as predetermined energy, electromagnetic waves such as ultraviolet rays, visible rays, sound waves, X-rays or gamma rays, heat such as hot water or hot air, in addition to infrared rays, and characteristics of the adhesive sheet AS, It can be arbitrarily determined in consideration of characteristics, properties, materials, composition, configuration, etc., and a concentration means such as a light collecting plate, a collecting plate, and a lens that concentrates and applies predetermined energy to the adhesive sheet AS is adopted. As an emission source such as infrared rays or ultraviolet rays, an LED (Light Emitting Diode) lamp, a high pressure mercury lamp, a low pressure mercury lamp, a metal halide lamp, a xenon lamp, a halogen lamp, etc. may be adopted. What combined them suitably may be employ | adopted, and energy may be provided to the said adhesive sheet AS from the upper direction of the adhesive sheet AS. , It may be imparted energy from both the adhesive sheet AS the upper and lower adhesive sheet AS, may not be provided in spacing device EA, EA1 of the present invention.

  In the control means 50, the mutual interval between the adherends CP to be spread may be set to less than 0.5 mm, set to 0.5 mm or more and less than 1.0 mm, or set to 1.0 mm or more. It may be set to any size, and after expanding the mutual interval of the adherends to any magnification or size as long as it is larger than the set mutual interval of the adherend CP The mutual distance between the adherends CP may be a predetermined distance, the relative movement speed in the anti-expansion direction may be higher than the relative movement speed in the expansion direction, or the relative movement speed in the expansion direction. And the relative movement speed in the anti-expansion direction may be the same speed.

  The contact means 60 may be a cylindrical contact member 61 such as a cylinder, a rectangular tube, or an elliptical cylinder, or may be a contact member 61 having a cylindrical shape, a rectangular column, an elliptical column, or the like. The one having a bottom at the top or the one without a bottom at the top may be used.

  The separation devices EA, EA1 may perform an adhesive strength reduction process in which the adhesive strength of the adhesive sheet AS is reduced before removing the adherend CP from the adhesive sheet AS. In this case, for example, as the adhesive sheet AS, Adopting one surface of the substrate sheet laminated with an adhesive layer whose adhesive strength is reduced by a predetermined adhesive strength lowering energy such as ultraviolet rays, X-rays, infrared rays, etc., is applied to such an adhesive sheet AS. What is necessary is just to provide the adhesive force fall energy provision means which provides predetermined | prescribed adhesive force fall energy, such as an ultraviolet-ray, X-ray | X_line, and infrared rays.

As the predetermined energy, the adhesive sheet AS may be contracted by electromagnetic waves such as ultraviolet rays, visible rays, sound waves, X-rays or gamma rays, heat such as hot water or hot air, etc. in addition to infrared rays, and the characteristics of the adhesive sheet AS. The energy applying means 40 may be selected depending on the characteristics, properties, material, composition, configuration, and the like.
The adherend CP may be affixed only to the other surface AS2 of the adhesive sheet AS, or both the one surface AS1 and the other surface AS2, or a plurality of the adherend CP may be present on the adhesive sheet AS in advance. Alternatively, it may be divided at the time when the external force is applied by the separating means 20, 20A, other mechanisms or hands, and becomes a plurality of adherends CP (hereinafter referred to as “base member”). As the base member, for example, food, resin containers, semiconductor wafers such as silicon semiconductor wafers and compound semiconductor wafers, circuit board, information recording substrates such as optical disks, glass plates, steel plates, earthenware, wood plates or resins, etc. Well, for example, cuts that penetrate the base member are provided intermittently, cuts that do not penetrate the base member are provided continuously or intermittently, characteristics, characteristics, properties of the base member Material, composition, structure, by changing the dimensions or the like, fragile portion that is weakened to the base member can be exemplified continuously or intermittently formed or ones like, is not intended to be limited.
The frame member may be, for example, a ring shape, an elliptical ring shape, a polygonal ring shape such as a triangle or a quadrangle in a plan view looking down from above, or a non-ring shape such as a C shape or a U shape, or other shapes, for example. Any shape may be used.

  The material, type, shape, and the like of the adhesive sheet AS, the adherend CP, and the base member in the present invention are not particularly limited. For example, the adhesive sheet AS may be a circle, an ellipse, a polygon such as a triangle or a quadrangle, or other shapes, or may be an adhesive form such as pressure-sensitive adhesiveness or heat-sensitive adhesiveness. Such an adhesive sheet AS is, for example, a single layer having only an adhesive layer, a layer having an intermediate layer between the base material and the adhesive layer, and a cover layer on the upper surface of the base material. The above-described ones, and further, a so-called double-sided adhesive sheet that can peel the substrate from the adhesive layer may be used, and the double-sided adhesive sheet has a single-layer or multi-layer intermediate layer, It may be a single layer or multiple layers without an intermediate layer. Examples of the adherend CP and the base member include foods, resin containers, semiconductor wafers such as silicon semiconductor wafers and compound semiconductor wafers, information recording substrates such as circuit boards and optical disks, glass plates, steel plates, ceramics, wood plates, It may be a simple substance such as a resin, or may be a composite formed of two or more of them, and can be a target of any form of member or article. Note that the adhesive sheet AS can be read in a functional or application manner, for example, any information label, decorative label, protective sheet, dicing tape, die attach film, die bonding tape, recording layer forming resin sheet, etc. Sheets, films, tapes, etc. may be used.

  The drive device in the embodiment is a rotary motor, a linear motion motor, a linear motor, a single-axis robot, an electric device such as a multi-joint robot having a joint of two axes or three or more axes, an air cylinder, a hydraulic cylinder, a rodless An actuator such as a cylinder and a rotary cylinder can be employed, and a combination of them directly or indirectly can also be employed.

EA, EA1 ... separation device 10 ... holding means 20, 20A ... separation means 30 ... detection means 40 ... energy application means 50 ... control means 60 ... contact means AS ... adhesive sheet AS1 ... one side AS2 ... other side CP ... Adherend

Claims (7)

In a separation device that expands the interval between a plurality of adherends attached to at least one of one surface and the other surface of the adhesive sheet to a predetermined interval,
A plurality of holding means for holding an end of the adhesive sheet;
A separation unit that relatively moves the holding unit that holds the end portion of the adhesive sheet, applies tension to the adhesive sheet, and widens the interval between the adherends;
Control means for controlling the entire separation device,
The control means moves the holding means relative to each other in an expansion direction that increases the mutual distance between the adherends, and widens the mutual distance between the adherends more than the predetermined distance, and then reverses the expansion direction. A separation apparatus characterized by controlling the separation means so that the mutual distance between the adherends is the predetermined distance by relatively moving the holding means in the anti-expansion direction. In a separation device that expands the interval between a plurality of adherends attached to at least one of one surface and the other surface of the adhesive sheet to a predetermined interval,
Holding means for holding an end of the adhesive sheet;
A contact means for contacting the adhesive sheet;
A separating means for relatively moving the holding means and the abutting means for holding an end portion of the adhesive sheet, and applying tension to the adhesive sheet to widen an interval between the adherends;
Control means for controlling the entire separation device,
The control means moves the holding means and the abutting means relative to each other in an extending direction that widens the interval between the adherends, and widens the mutual interval between the adherends to be larger than the predetermined interval. Wherein the holding means and the abutting means are relatively moved in an anti-expansion direction opposite to the expansion direction, and the separation means is controlled so that a mutual interval between the adherends becomes the predetermined interval. Separation device.   The separating apparatus according to claim 1, further comprising a detecting unit that detects a mutual interval between the adherends.   The said adhesive sheet is provided so that shrinkage | contraction by predetermined energy is provided, The energy provision means which provides the said predetermined energy to the said adhesive sheet is provided, The Claim 1 thru | or 3 characterized by the above-mentioned. Spacing device.   The said control means controls the said separation means so that the relative movement speed to the said anti-expansion direction may become slow compared with the relative movement speed to the said expansion direction. The spacing device according to any one of the above. In the separation method of widening the mutual interval of the plurality of adherends attached to at least one of the one surface and the other surface of the adhesive sheet to a predetermined interval,
A holding step of holding the end of the adhesive sheet with a plurality of holding means;
A separation step of relatively moving the holding means holding the edge of the adhesive sheet, and applying tension to the adhesive sheet to increase the interval between the adherends,
In the separation step, the holding means is relatively moved in an expansion direction that widens the mutual interval of the adherends to increase the mutual interval of the adherends to be larger than the predetermined interval, and then opposite to the expansion direction. A separation method characterized in that the holding means is relatively moved in the anti-expanding direction to set the mutual distance between the adherends to the predetermined distance. In the separation method of widening the mutual interval of the plurality of adherends attached to at least one of the one surface and the other surface of the adhesive sheet to a predetermined interval,
A holding step of holding the end of the adhesive sheet with a holding means;
A contact step of contacting the contact means with the adhesive sheet;
A separation step of relatively moving the holding means and the abutting means holding the edge of the adhesive sheet, and applying tension to the adhesive sheet to widen the interval between the adherends, and
In the separating step, the holding means and the abutting means are relatively moved in an extending direction to widen the mutual distance between the adherends, and the mutual distance between the adherends is increased more than the predetermined distance, A separation method characterized in that the holding means and the abutment means are relatively moved in an anti-expansion direction opposite to the expansion direction to set the mutual distance between the adherends to the predetermined distance.