TWI778024B - Separation device and separation method - Google Patents

Separation device and separation method Download PDF

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TWI778024B
TWI778024B TW107106097A TW107106097A TWI778024B TW I778024 B TWI778024 B TW I778024B TW 107106097 A TW107106097 A TW 107106097A TW 107106097 A TW107106097 A TW 107106097A TW I778024 B TWI778024 B TW I778024B
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adhesive sheet
attached
holding
separation
adhesive
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TW201838002A (en
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杉下芳昭
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日商琳得科股份有限公司
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005Apparatus not specifically provided for elsewhere
    • H01L21/67011Apparatus for manufacture or treatment
    • H01L21/67132Apparatus for placing on an insulating substrate, e.g. tape
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005Apparatus not specifically provided for elsewhere
    • H01L21/67011Apparatus for manufacture or treatment
    • H01L21/67092Apparatus for mechanical treatment
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/77Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
    • H01L21/78Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices

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  • Microelectronics & Electronic Packaging (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
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  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Dicing (AREA)
  • Adhesives Or Adhesive Processes (AREA)
  • Adhesive Tapes (AREA)
  • Transition And Organic Metals Composition Catalysts For Addition Polymerization (AREA)
  • Liquid Crystal Substances (AREA)
  • Input Circuits Of Receivers And Coupling Of Receivers And Audio Equipment (AREA)

Abstract

[課題]   在於提供一種分離裝置及分離方法,可作成即使解除對接著片賦予的張力,被著體的相互間隔仍不會盡可能變窄。 [解決手段]   具備複數個保持手段(20)、分離手段(30)、第1賦能手段(50),該複數個保持手段係就在其中一面(AS1)與另一面(AS2)中至少一者貼附複數個被著體(CP)的接著片(AS)的端部進行保持者,該分離手段(30)係使就接著片(AS)的端部進行保持的保持手段(20)相對移動,增加被著體(CP)的相互間隔者,接著片(AS)可因賦予既定的能量(UV)而硬化,該第1賦能手段(50)係對在以分離手段(30)增加被著體(CP)的相互間隔的狀態下的接著片(AS),賦予既定的能量(UV)從而使該接著片(AS)硬化者。[Problem] It is to provide a separation device and a separation method that can make the distance between the objects to be attached not narrow as much as possible even if the tension applied to the adhesive sheet is released. [Solution means] A plurality of holding means (20), separation means (30), and first enabling means (50) are provided, and the plurality of holding means are on at least one of one side (AS1) and the other side (AS2). The separation means (30) is a holding means (20) for holding the ends of the adhesive sheets (AS) facing each other by attaching the ends of the adhesive sheets (AS) of a plurality of objects to be attached (CP). Move, increase the mutual space of the object to be attached (CP), the adhesive sheet (AS) can be hardened by imparting a predetermined energy (UV), and the first enabling means (50) is increased by the separation means (30) The adhesive sheet (AS) in a state where the objects to be attached (CP) are spaced apart is given a predetermined energy (UV) to harden the adhesive sheet (AS).

Description

分離裝置及分離方法Separation device and separation method

本發明涉及分離裝置及分離方法。The present invention relates to a separation device and a separation method.

歷來,已知增加貼附於接著片的複數個被著體的相互間隔的分離裝置(例如,專利文獻1參照)。 [先前技術文獻] [專利文獻]Conventionally, there has been known a separation device that increases the distance between a plurality of to-be-adhered bodies attached to an adhesive sheet (for example, refer to Patent Document 1). [Prior Art Literature] [Patent Literature]

[專利文獻1] 日本特開2016-127124號公報[Patent Document 1] Japanese Patent Application Laid-Open No. 2016-127124

[發明所欲解決之問題][Problems to be Solved by Invention]

然而,在如記載於專利文獻1的歷來的分離裝置,例如在如將在接著片上增加相互間隔後的片狀體(被著體)與該接著片一起搬送的情況下,若透過保持手段所為的接著片的保持無作用,則接著片被解除被賦予的張力,將傾向接近變形前的狀態,故具有被著體的相互間隔變窄如此的不妥。However, as in the conventional separation device described in Patent Document 1, for example, when a sheet-like body (a body to be attached) in which the mutual space is increased on the adhesive sheet is conveyed together with the adhesive sheet, if the holding means is used for If the holding of the adhesive sheet does not work, the tension applied to the adhesive sheet is released, and the adhesive sheet tends to approach the state before deformation, so there is an inconvenience that the distance between the objects to be attached is narrowed.

本發明之目的在於提供一種分離裝置及分離方法,可作成即使解除對接著片賦予的張力,被著體的相互間隔仍不會盡可能變窄。 [解決問題之技術手段]An object of the present invention is to provide a separation device and a separation method which can make the distance between the objects to be attached not narrow as much as possible even if the tension applied to the adhesive sheet is released. [Technical means to solve problems]

本發明採用記載於請求項的構成。 [對照先前技術之功效]The present invention adopts the configuration described in the claims. [Compared to the efficacy of the prior art]

依本發明時,對可因被賦予既定的能量而硬化的接著片,賦予該既定的能量而使該接著片硬化,故可作成即使解除對接著片賦予的張力,被著體的相互間隔仍不會盡可能變窄。   再者,具備維持構材安裝手段時,可作成被著體的相互間隔不會變更窄。   此外,具備切斷手段時,在就在接著片上增加相互間隔後的被著體進行搬送之際,可防止接著片的端部成為搬送的障礙。   再者,具備第2賦能手段時,可容易增加被著體的相互間隔。According to the present invention, the adhesive sheet that can be hardened by imparting a predetermined energy is given a predetermined energy to harden the adhesive sheet, so that even if the tension applied to the adhesive sheet is released, the distance between the objects to be attached remains unchanged. Not as narrow as possible. In addition, if there is a maintenance member mounting means, the distance between the objects that can be attached will not be narrowed. In addition, when a cutting means is provided, the end of the adhesive sheet can be prevented from becoming an obstacle to the conveyance when conveying the object to be attached after increasing the mutual space on the adhesive sheet. Furthermore, when the second empowerment means is provided, the distance between the objects to be attached can be easily increased.

以下,基於圖式說明本發明的實施方式。   另外,本實施方式中的X軸、Y軸、Z軸存在彼此正交的關係,X軸及Y軸係既定平面內的軸,Z軸係與前述既定平面正交的軸。再者,在本實施方式,以從與Y軸平行的箭頭BD方向視看時的情況為基準,在未舉出作為基準之圖的情況下說明方向時,「上」為Z軸的箭頭方向、「下」為其逆向,「左」為X軸的箭頭方向、「右」為其逆向,「前」為Y軸的箭頭方向、「後」為其逆向。Hereinafter, embodiments of the present invention will be described based on the drawings. In addition, in this embodiment, the X axis, the Y axis, and the Z axis are in a relationship of being orthogonal to each other, the X axis and the Y axis are axes in a predetermined plane, and the Z axis is an axis that is orthogonal to the predetermined plane. In addition, in the present embodiment, the case when viewed from the direction of the arrow BD parallel to the Y-axis is used as a reference, and when the direction is described without a reference drawing, "up" is the direction of the arrow of the Z-axis. , "Down" is the reverse direction, "Left" is the arrow direction of the X-axis, "Right" is the reverse direction, "Front" is the Y-axis arrow direction, and "Back" is the reverse direction.

本發明的分離裝置10具備複數個保持手段20、分離手段30、檢測手段40、第1賦能手段50、第2賦能手段60、維持構材安裝手段70、切斷手段80,該複數個保持手段20係就在其中一面AS1貼附複數個被著體CP的接著片AS的端部進行保持者,該分離手段30係使就接著片AS的端部進行保持的保持手段20相對移動,增加被著體CP的相互間隔者,該檢測手段40係可就被著體CP的相互間隔、各被著體CP的整體的集合形狀等進行檢測的相機、投影機等的攝像手段、光學感測器、音波感測器等的各種感測器等者,該第1賦能手段50係對在以分離手段30增加被著體CP的相互間隔的狀態下的接著片AS賦予作為既定的能量的紫外線UV從而使該接著片AS硬化者,該第2賦能手段60係對接著片AS賦序作為別的能量的紅外線IR者,該維持構材安裝手段70係對在增加被著體CP的相互間隔的狀態下的接著片AS安裝間隔維持構材DM者,該切斷手段80係將接著片AS切斷者。   另外,接著片AS採用如下者:於基材片的其中一面層積紫外線硬化型的接著劑層,具備一性質,該性質係被賦予張力後,若在未被賦予紫外線UV之下該張力被解除時,傾向接近變形前的狀態者,且因被賦予紫外線UV而硬化,另一方面因被賦予紅外線IR因軟化。The separation device 10 of the present invention includes a plurality of holding means 20 , separation means 30 , detection means 40 , first energizing means 50 , second energizing means 60 , maintaining member attaching means 70 , and cutting means 80 . The holding means 20 is for holding the end of the adhesive sheet AS to which a plurality of objects CP are attached to one surface AS1, and the separating means 30 relatively moves the holding means 20 for holding the end of the adhesive sheet AS, The detection means 40 is an imaging means such as a camera, a projector, etc., which can detect the mutual distance of the attached body CPs, the overall aggregate shape of each attached body CP, etc. The first energizing means 50 applies predetermined energy to the adhesive sheet AS in a state in which the separation means 30 increases the distance between the objects CP and the like. The second energizing means 60 is used to align the adhesive sheet AS with the ultraviolet rays UV to harden the adhesive sheet AS, and the second energizing means 60 is the infrared IR which is another energy. The adhesive sheet AS in a state of being spaced apart from each other is attached to the space maintaining member DM, and the cutting means 80 cuts the adhesive sheet AS. In addition, the adhesive sheet AS adopts the following one: a UV-curable adhesive layer is laminated on one side of the base sheet, and has a property that after tension is applied, if the tension is not applied to ultraviolet UV When released, it tends to be close to the state before deformation, and is hardened by being given ultraviolet UV, and softened by being given infrared IR.

保持手段20具備:作為被分離手段30支撐的驅動機器的轉動馬達21、被其輸出軸21A支撐的上保持構材22。The holding means 20 includes a turning motor 21 as a driving device supported by the separating means 30 , and an upper holding member 22 supported by the output shaft 21A thereof.

分離手段30具備:作為驅動機器的線性馬達31、被其滑件31A支撐並以上表面側支撐轉動馬達21的下保持構材32。The separation means 30 includes a linear motor 31 as a driving device, and a lower holding member 32 that is supported by the slider 31A and that supports the rotary motor 21 on the upper surface side.

第1賦能手段50具備:配置複數個於上殼UC內的上側紫外線燈51、配置複數個於下殼BC內的下側紫外線燈52。上側、下側紫外線燈51、52係作成對接著片AS整體地照射紫外線UV。The first energizing means 50 includes a plurality of upper ultraviolet lamps 51 arranged in the upper case UC and a plurality of lower ultraviolet lamps 52 arranged in the lower case BC. The upper and lower ultraviolet lamps 51 and 52 are configured to irradiate the entire adhesive sheet AS with ultraviolet rays UV.

第2賦能手段60具備:具備移動於Y軸方向的滑件61A的作為驅動機器的線性馬達61、被滑件61A支撐並具備移動於X軸方向的滑件62A的作為驅動機器的線性馬達62、被滑件62A支撐的基台63、在基台63上被經由立架64及下殼BC而支撐的紅外線燈65。紅外線燈65係作成對接著片AS局部地照射紅外線IR。The second energizing means 60 includes a linear motor 61 as a driving device including a slider 61A that moves in the Y-axis direction, and a linear motor as a driving device that is supported by the slider 61A and includes a slider 62A that moves in the X-axis direction. 62. The base 63 supported by the slider 62A, and the infrared lamp 65 supported on the base 63 via the stand 64 and the lower case BC. The infrared lamp 65 is made to irradiate infrared rays IR locally to the adhesive sheet AS.

維持構材安裝手段70具備:線性馬達61、62及基台63、被支撐於基台63上的作為驅動機器的直線馬達71、被其輸出軸71A支撐、具有可透過減壓泵浦、真空噴射器等的未圖示的減壓手段而支撐間隔維持構材DM的支撐面72A的支撐台72。另外,本實施方式的情況下,間隔維持構材DM係使用在玻璃板GP的其中一面貼附雙面接著片BA者。The maintenance member mounting means 70 includes: linear motors 61 and 62 and a base 63, a linear motor 71 as a driving device supported on the base 63, supported by an output shaft 71A thereof, having a permeable decompression pump, a vacuum The support stand 72 of the support surface 72A of the space|interval maintaining member DM is supported by the pressure reduction means not shown, such as an ejector. In addition, in the case of this embodiment, the space|interval maintaining member DM uses what stuck the double-sided adhesive sheet BA on one surface of the glass plate GP.

切斷手段80具備:由複數個臂件而構成的作為驅動機器的多關節機器人81、被屬該多關節機器人81的作業部的前端臂81A經由托架82而支撐的作為切斷構材的刀刃83。多關節機器人81可為可於其作業範圍內將以前端臂81A支撐者位移至任一個位置、任一個角度的所謂6軸機器人等,可例示例如例示於日本特開2016-81974的多關節機器人111等。The cutting means 80 includes: an articulated robot 81 as a driving machine composed of a plurality of arm members; Blade 83. The articulated robot 81 may be a so-called 6-axis robot that can move a person supported by the front end arm 81A to any position or angle within its working range, and an articulated robot described in Japanese Patent Laid-Open No. 2016-81974 can be exemplified as an example. 111 et al.

說明以上的分離裝置10的動作。   首先,對各構材在圖1(A)、(B)中以實線表示的初始位置待機的分離裝置10,該分離裝置10的使用者(以下簡稱「使用者」)經由操作面板、個人電腦等的未圖示的操作手段輸入自動運轉開始的信號。之後,作業員或驅動機器、傳送裝置等的未圖示的搬送手段以雙面接著片BA側為上側的方式,將間隔維持構材DM載置於支撐面72A上時,維持構材安裝手段70驅動未圖示的減壓手段,開始該間隔維持構材DM的吸附保持。然後,作業員或未圖示的搬送手段將貼附複數個被著體CP下的接著片AS載置於下保持構材32上時,保持手段20驅動各轉動馬達21,如在圖1(B)中以雙點劃線表示,以上保持構材22與下保持構材32保持接著片AS的端部。The operation of the above-described separation device 10 will be described. First, the separation device 10 in which each member stands by at the initial position indicated by the solid line in FIGS. 1(A) and 1(B), the user of the separation device 10 (hereinafter referred to as “user”) uses an operation panel, a personal An operating means such as a computer, not shown, inputs a signal for starting the automatic operation. After that, when an operator or a conveyance means such as a driving machine, a conveyer, or the like, which is not shown in the figure, places the space maintaining member DM on the support surface 72A with the double-sided adhesive sheet BA side as the upper side, the maintaining member attaching means is used. 70 drives the decompression means not shown, and starts the adsorption holding of the interval maintaining member DM. Then, when an operator or a conveying means (not shown) places the adhesive sheet AS on the lower holding member 32 with a plurality of attached bodies CP attached, the holding means 20 drives the respective rotating motors 21, as shown in FIG. 1 ( In B), the upper holding member 22 and the lower holding member 32 hold the ends of the adhesive sheet AS, as indicated by the two-dot chain line.

接著,分離手段30驅動各線性馬達31,使保持手段20相互分離而增加被著體CP的相互間隔。此時,各被著體CP係如示於圖2(A),有時由於接著片AS的應變等使得相互間隔無法增加至既定之間隔。所以,檢測手段40驅動相機等,就各被著體CP的相互間隔、各被著體CP的整體的集合形狀等進行檢測。接著,以檢測手段40的檢測結果為基礎,分離手段30驅動各線性馬達31,如示於圖2(B),以各被著體CP的相互間隔成為既定間隔的方式,或以各被著體CP的整體的集合形狀相對於基礎的整體的集合形狀成為相似關係的方式,使各保持手段20個別移動。此時,檢測手段40檢測出存在被著體CP的相互間隔難分開的難分部分時,第2賦能手段60驅動線性馬達61、62及紅外線燈65,對難分部分局部地照射紅外線IR(圖3(A)參照)。藉此,難分部分軟化使得被著體CP的相互間隔容易分開。Next, the separating means 30 drives the linear motors 31 to separate the holding means 20 from each other, thereby increasing the distance between the objects CP. At this time, as shown in FIG. 2(A) , the mutual intervals cannot be increased to a predetermined interval due to the strain of the adhesive sheet AS or the like. Therefore, the detection means 40 drives a camera or the like, and detects the mutual distance of the respective objects CP, the overall aggregate shape of the respective objects CP, and the like. Next, based on the detection result of the detection means 40, the separation means 30 drives each linear motor 31, as shown in FIG. 2(B), so that the mutual intervals of the respective objects CP become predetermined intervals, or Each holding means 20 is moved individually so that the overall collective shape of the body CP is in a similar relationship to the overall collective shape of the base. At this time, when the detection means 40 detects that there is a difficult part that is difficult to be separated from each other by the distance of the object CP, the second energizing means 60 drives the linear motors 61 and 62 and the infrared lamp 65 to locally irradiate the difficult part with infrared rays IR (Refer to FIG. 3(A) ). Thereby, the hard-to-separate portions are softened so that the mutual intervals of the attached body CPs are easily separated.

之後,第1賦能手段50驅動上側、下側紫外線燈51、52,如示於圖3(A),對接著片AS的其中一面AS1及另一面AS2賦予紫外線UV,使該接著片AS硬化,作成被著體CP的相互間隔不會變窄。接著,維持構材安裝手段70驅動線性馬達61、62,將間隔維持構材DM配置於已增加相互間隔的被著體CP的下方後,驅動直線馬達71,如示於圖3(B),經由雙面接著片BA,於接著片AS的另一面AS2側安裝間隔維持構材DM。After that, the first energizing means 50 drives the upper and lower ultraviolet lamps 51 and 52, as shown in FIG. 3(A), to apply ultraviolet UV to one side AS1 and the other side AS2 of the adhesive sheet AS to cure the adhesive sheet AS , so that the mutual interval between the CPs to be attached will not be narrowed. Next, the maintaining member attaching means 70 drives the linear motors 61 and 62, arranges the space maintaining member DM under the object CP whose mutual spacing has been increased, and then drives the linear motor 71, as shown in FIG. 3(B), The gap maintaining member DM is attached to the other surface AS2 side of the adhesive sheet AS through the double-sided adhesive sheet BA.

之後,切斷手段80驅動多關節機器人81,如示於圖3(C),將刀刃83對接著片AS進行突刺後,沿著被著體CP整體的外緣使該刀刃83繞一周而將接著片AS切斷,形成被安裝間隔維持構材DM、在接著片AS上已增加被著體CP的相互間隔的一體物WK。接著,切斷手段80驅動多關節機器人81,使刀刃83回歸至初始位置時,維持構材安裝手段70停止未圖示的減壓手段的驅動,解除間隔維持構材DM的吸附保持。然後,作業員或未圖示的搬送手段將一體物WK搬送至別的程序時,保持手段20驅動轉動馬達21,解除利用上保持構材22與下保持構材32進行的接著片AS的保持。之後,作業員或未圖示的搬送手段除去殘留於下保持構材32上的接著片AS部分時,各手段驅動個別的驅動機器,使各構材回歸至初始位置,之後重複上述同樣的動作。After that, the cutting means 80 drives the articulated robot 81, and as shown in FIG. 3(C) , the blade 83 stabs the adhesive sheet AS, and then makes the blade 83 go around the entire outer edge of the body CP to cut The next sheet AS is cut to form a unitary body WK in which the distance maintaining member DM is attached and the distance between the to-be-attached bodies CP is increased on the adhesive sheet AS. Next, when the cutting means 80 drives the articulated robot 81 to return the blade 83 to the initial position, the maintaining member attaching means 70 stops the drive of the decompression means not shown, and releases the suction and holding of the space maintaining member DM. Then, when an operator or a conveying means (not shown) conveys the integrated object WK to another process, the holding means 20 drives the turning motor 21 to release the holding of the adhesive sheet AS by the upper holding member 22 and the lower holding member 32 . . After that, when an operator or a conveying means (not shown) removes the portion of the adhesive sheet AS remaining on the lower holding member 32, each means drives a separate driving device to return each member to the initial position, and then repeats the same operation as described above. .

依如以上的分離裝置10時,對可因被賦予紫外線UV而硬化的接著片AS,賦予該紫外線UV而予以硬化,故可作成即使解除對接著片AS賦予的張力,被著體CP的相互間隔仍不會盡可能變窄。In the case of the above-described separation device 10, the adhesive sheet AS that can be cured by being applied with ultraviolet UV is cured by applying the ultraviolet UV, so that even if the tension applied to the adhesive sheet AS is released, the mutual relationship of the adherend CP can be achieved. The interval is still not as narrow as possible.

在本發明中的手段及程序係只要可發揮就該等手段及程序進行說明的動作、功能或程序則無任何限定,更不論未完全限定於在前述實施方式所示的僅一實施方式的構成物、程序。例如,保持手段係只要為可就於其中一面與另一面中至少一者貼附複數個被著體下的接著片的端部進行保持者,則對照申請時的技術常識,只要為該技術範圍內者即無任何限定(其他手段及程序亦同)。The means and programs in the present invention are not limited in any way as long as the operations, functions, or programs described with respect to the means and programs can be achieved, and the configuration is not completely limited to only one embodiment shown in the above-mentioned embodiment. objects, programs. For example, as long as the holding means is capable of holding the end of the adhesive sheet under at least one of a plurality of objects to be attached to at least one of the one side and the other side, the technical common sense at the time of filing shall be compared with the technical common sense at the time of application, as long as it falls within the technical scope There is no restriction on the inside (other means and procedures are also the same).

本發明的分離裝置係如示於圖4(A),亦可為一分離裝置10A,該分離裝置10A具備保持手段20、抵接手段90、分離手段30A、檢測手段40、第1賦能手段50、維持構件安裝手段70A、切斷手段80,該抵接手段90係在接著片AS的比貼附複數個被著體CP的被著體接著區域CE靠外側、在保持手段20保持的保持區域HE的內側扺接於該接著片AS者,該分離手段30A係使保持接著片AS的端部下的保持手段20及抵接手段90相對移動,增加被著體CP的相互間隔者,該維持構材安裝手段70A係在增加被著體CP的相互間隔的狀態下,於接著片AS安裝間隔維持構材DM者。   另外,於分離裝置10A,具有與分離裝置10同等的構成、同等的功能者係標注與該分離裝置10相同的編號而省略其構成說明,動作說明係簡略化。As shown in FIG. 4(A), the separation device of the present invention may also be a separation device 10A, and the separation device 10A includes holding means 20, abutting means 90, separation means 30A, detection means 40, and first energizing means 50. Holding member mounting means 70A and cutting means 80, the abutting means 90 are held by the holding means 20 on the outer side of the adhesive sheet AS than the adherend area CE where the plurality of adherends CP are attached. If the inner side of the area HE is in contact with the adhesive sheet AS, the separating means 30A relatively moves the holding means 20 and the abutting means 90 under the end of the adhesive sheet AS to increase the mutual distance of the body to be attached CP. The member attaching means 70A maintains the member DM at the attaching interval of the adhesive sheet AS in a state where the mutual interval of the to-be-attached body CP is increased. In addition, in the separation device 10A, those having the same structure and function as the separation device 10 are denoted by the same reference numerals as the separation device 10, and the description of the configuration is omitted, and the description of the operation is simplified.

分離手段30A具備:支撐於底板BP上的作為驅動機器的直線馬達33、被其輸出軸33A支撐、以上表面側支撐轉動馬達21的下保持構材34。   維持構材安裝手段70A係在具備移動於Y軸方向的滑件73A的作為驅動機器的線性馬達73的該滑件73A上,經由直線馬達71支撐支撐台72。   抵接手段90具備:被支撐於底板BP上,在眼前側形成容許維持構材安裝手段70A的出入的切槽91A的圓筒狀的抵接構材91。於抵接構材91的內部,設置支撐下側紫外線燈52的支撐棧91B。The separation means 30A includes a linear motor 33 as a driving device supported on the base plate BP, and a lower holding member 34 supported by the output shaft 33A thereof and supporting the rotary motor 21 on the upper surface side. The maintenance member mounting means 70A is attached to the slider 73A provided with the slider 73A moving in the Y-axis direction as a linear motor 73 as a driving device, and supports the support table 72 via the linear motor 71. The abutment means 90 includes a cylindrical abutment member 91 supported on the base plate BP and formed on the front side with a cutout 91A that allows the maintenance member attachment means 70A to enter and exit. Inside the contact member 91, a support stack 91B for supporting the lower ultraviolet lamp 52 is provided.

如此的分離裝置10A係作成如同分離裝置10,被貼附複數個被著體CP的接著片AS被載置於下保持構材34上時,保持手段20驅動轉動馬達21,如在圖4(B)中以雙點劃線表示,以上保持構材22與下保持構材34保持接著片AS的端部。另外,間隔維持構材DM係作成如同分離裝置10而載置在位於抵接構材91的外側(眼前側)的支撐台72上。此外,於接著片AS的端部,如示於圖4,雖貼附環狀的框體RF,惟亦可無該框體RF。接著,分離手段30A驅動直線馬達33,使保持手段20下降而使保持手段20及抵接手段90相對移動,如示於圖4(B),增加被著體CP的相互間隔。之後,作成如同分離裝置10,以第1賦能手段50賦予紫外線UV而使接著片AS硬化後,維持構材安裝手段70A驅動線性馬達73,將間隔維持構材DM配置於已增加相互間隔的被著體CP的下方。然後,作成如同分離裝置10,如示於圖4(B),以維持構材安裝手段70A於接著片AS的另一面AS2側安裝間隔維持構材DM,以切斷手段80切斷接著片AS後,將一體物WK搬送至別的程序。Such a separating device 10A is constructed like the separating device 10. When the adhesive sheet AS to which the plurality of objects CP are attached is placed on the lower holding member 34, the holding means 20 drives the rotation motor 21, as shown in FIG. 4 ( In B), the upper holding member 22 and the lower holding member 34 hold the ends of the adhesive sheet AS, as indicated by the two-dot chain line. Moreover, the space|interval maintaining member DM is made like the separation apparatus 10, and is mounted on the support stand 72 located in the outer side (front side) of the contact|abutting member 91. In addition, as shown in FIG. 4, although the ring-shaped frame body RF is attached to the edge part of the adhesive sheet AS, the frame body RF may be absent. Next, the separation means 30A drives the linear motor 33 to lower the holding means 20 to relatively move the holding means 20 and the contact means 90, as shown in FIG. Then, as in the separation device 10, after the adhesive sheet AS is cured by applying ultraviolet UV by the first energizing means 50, the linear motor 73 is driven by the maintaining member mounting means 70A, and the space maintaining member DM is arranged in the space with the increased mutual spacing. Below the body CP. Then, as shown in FIG. 4(B) like the separating device 10 , the space maintaining member DM is attached to the other surface AS2 side of the adhesive sheet AS by the maintaining member mounting means 70A, and the adhesive sheet AS is cut by the cutting means 80 . Then, transfer the integrated object WK to another program.

依如此的分離裝置10A,亦可獲得與分離裝置10同樣的效果。According to this separation device 10A, the same effects as those of the separation device 10 can be obtained.

保持手段20亦可構成為就在另一面AS2貼附、在其中一面AS1及另一面AS2雙面貼附複數個被著體CP的接著片AS的端部進行保持者,亦可為構成以機械式夾具、夾頭缸等的把持手段、庫侖力、接著劑、黏著劑、磁力、白努力吸附、驅動機器等就接著片AS的端部進行保持者。   保持手段20係在分離裝置10的情況下,例如亦能以兩體而構成,該兩體係以往右方移動的該保持手段20為一體、以往左方移動的該保持手段20為一體者,亦可例如以能以往右方、左方及其他方向移動的三體以上而構成。   保持手段20係在分離裝置10A的情況下,可為一體亦可為兩體以上。The holding means 20 may be configured to hold the ends of the adhesive sheets AS that are attached to the other side AS2, and that a plurality of to-be-attached bodies CP are attached to both sides of the one side AS1 and the other side AS2. Holding means such as clamps, collet cylinders, Coulomb force, adhesive, adhesive, magnetic force, white effort adsorption, driving machine, etc., hold the end of the adhesive sheet AS. When the holding means 20 is used in the separation device 10, for example, it can also be constituted by two bodies. The holding means 20 that moves to the right in the past is integrated, and the holding means 20 that moves to the left is integrated. For example, it can be constituted by three or more bodies that can move in the right, left, and other directions. When the holding means 20 is used in the separation device 10A, the holding means 20 may be one body or two or more bodies.

分離手段30、30A可為單數而非複數,此情況下,例如分離裝置10可構成為以一體的線性馬達的兩個滑件就保持手段20分別按各體進行支撐,增加被著體CP的相互間隔者,亦可構成為將被著體CP的相互間隔僅增加於一軸方向(例如,X軸方向或Y軸方向等)者。   分離手段30亦可構成為將相互間隔增加於3軸以上的方向(例如,X軸方向、Y軸方向及其他的軸方向)者,例如可構成為使予以移動於X軸方向的複數個保持手段20分別移動於Y軸方向(構成為使予以移動於Y軸方向的複數個保持手段20分別移動於X軸方向),增加被著體CP的相互間隔者,亦可構成為無法以被著體CP的相互間隔成為既定間隔的方式而作動,或者構成為無法以各被著體CP的整體的集合形狀相對於基礎的整體的集合形狀成為相似關係的方式而作動者。   分離手段30A亦可一面使保持手段20停止或移動,一面使抵接手段90移動,從而使保持手段20及抵接手段90相對移動,增加被著體CP的相互間隔。   分離手段30、30A係可作業員操作按鍵、桿體等而驅動線性馬達31、直線馬達33,此情況下,例如可構成為將依檢測手段40所得的檢測結果顯示於監視器、檢測器等的顯示器,依顯示於此顯示器的檢測結果,以被著體CP的相互間隔成為既定間隔的方式,或以各被著體CP的整體的集合形狀相對於基礎的整體的集合形狀成為相似關係的方式,作業員將線性馬達31、直線馬達33予以驅動者。The separation means 30 and 30A may be singular rather than plural. In this case, for example, the separation device 10 may be configured to support the holding means 20 by two sliders of an integrated linear motor, respectively, thereby increasing the CP of the body to be attached. As for the distance between each other, the distance between the objects CP can be increased only in one axis direction (for example, the X axis direction or the Y axis direction, etc.). The separation means 30 may be configured to increase the distance from each other in the directions of three or more axes (for example, the X-axis direction, the Y-axis direction, and other axis directions), and may be configured to hold a plurality of pieces moved in the X-axis direction, for example. The means 20 are respectively moved in the Y-axis direction (configured so that the plurality of holding means 20 moved in the Y-axis direction are respectively moved in the X-axis direction), and the distance between the objects to be attached CP is increased, and it can also be constructed so as not to be attached. The bodies CPs are actuated so that the mutual distance between them becomes a predetermined distance, or the bodies CPs are configured so that they cannot be actuated so that the overall collective shape of each attached body CP is in a similar relationship with the overall collective shape of the base. The separating means 30A may move the abutting means 90 while the holding means 20 is stopped or moved, so that the holding means 20 and the abutting means 90 are moved relative to each other, thereby increasing the mutual interval of the to-be-attached body CP. The separation means 30 and 30A can be configured to display the detection results obtained by the detection means 40 on a monitor, a detector, etc. The display of the display, according to the detection result displayed on this display, in such a way that the mutual interval of the attached body CP becomes a predetermined interval, or the overall collective shape of each attached CP is in a similar relationship with the overall collective shape of the base. In this way, the operator drives the linear motor 31 and the linear motor 33 .

檢測手段40亦可為作業員的目視,例如亦可構成為作業員透過目視,以被著體CP的相互間隔成為既定間隔的方式,或以各被著體CP的整體的集合形狀相對於基礎的整體的集合形狀成為相似關係的方式,操作按鍵、桿體等,驅動線性馬達31、直線馬達33者,可不具備於本發明的分離裝置10、10A。The detection means 40 may be the visual inspection of the operator. For example, it may be configured such that the distance between the objects to be worn CP becomes a predetermined interval, or the collective shape of each of the objects to be worn is relative to the base. In such a manner that the overall collective shape of the slack is in a similar relationship, operating buttons, levers, etc., and driving the linear motor 31 and the linear motor 33 may not be provided in the separation devices 10 and 10A of the present invention.

第1賦能手段50可構成為對接著片AS的其中一面AS1側及另一面AS2側中至少一面側賦予第1能量者,可為將所有波長的電磁波(例如X射線、紅外線等)、加熱或冷卻的氣體、液體等的流體等作為第1能量而賦予接著片AS者,只要為可賦予可依接著片AS的構成使該接著片AS硬化的第1能量者則可為任意者,可於上殼UC內配置一體或複數個,可於下殼BC內配置一體或複數個,亦可未配置於上殼UC、下殼BC內,亦可無上殼UC、下殼BC本身,亦可構成為對接著片AS局部地賦予第1能量者,上側、下側紫外線燈51、52方面可採用LED(Light Emitting Diode:發光二極體)燈、高壓水銀燈、低壓水銀燈、金屬鹵素燈、氙燈、鹵素燈等任一者,亦可採用將該等酌情組合者。The first energizing means 50 may be configured to impart the first energy to at least one side of the one side AS1 side and the other side AS2 side of the adhesive sheet AS, and may apply electromagnetic waves of all wavelengths (for example, X-rays, infrared rays, etc.), heat A fluid such as a cooling gas, a liquid, etc., is used as the first energy to impart the adhesive sheet AS, as long as it can impart the first energy that can harden the adhesive sheet AS according to the structure of the adhesive sheet AS, any one can be used. One piece or multiple pieces are arranged in the upper shell UC, one piece or a plurality of pieces can be arranged in the lower shell BC, or not arranged in the upper shell UC and the lower shell BC, or without the upper shell UC and the lower shell BC itself, or It can be configured to locally impart the first energy to the adhesive sheet AS, and LED (Light Emitting Diode: light emitting diode) lamps, high-pressure mercury lamps, low-pressure mercury lamps, metal halide lamps, etc. Any of a xenon lamp, a halogen lamp, or the like may be used in combination as appropriate.

第2賦能手段60可構成為對接著片AS的其中一面AS1側及另一面AS2側中至少一面側賦予第2能量者,可為將所有波長的電磁波(例如X射線、紫外線等)、加熱或冷卻的氣體、液體等的流體等作為第2能量而賦予接著片AS者,只要為可賦予可依接著片AS的構成使該接著片AS軟化的第2能量者則可為任意者,可於上殼UC內配置一體或複數個,可於下殼BC內配置一體或複數個,亦可未配置於上殼UC、下殼BC內,亦可構成為對接著片AS整體地賦予第2能量者,紅外線燈65方面可採用LED燈、高壓水銀燈、低壓水銀燈、金屬鹵素燈、氙燈、鹵素燈等任一者,亦可採用將該等酌情組合者,亦可不具備於本發明的分離裝置10。The second energizing means 60 may be configured to impart the second energy to at least one of the one side AS1 side and the other side AS2 side of the adhesive sheet AS, and may apply electromagnetic waves of all wavelengths (for example, X-rays, ultraviolet rays, etc.), heat A fluid such as a cooled gas, a liquid, etc., is used as the second energy to impart the adhesive sheet AS, and any one can be used as long as it can impart the second energy that can soften the adhesive sheet AS according to the structure of the adhesive sheet AS. One piece or a plurality of pieces may be arranged in the upper case UC, one piece or a plurality of pieces may be arranged in the lower case BC, and may not be arranged in the upper case UC and the lower case BC, or the adhesive sheet AS may be integrally provided with a second For the energy source, the infrared lamp 65 can be any one of LED lamp, high-pressure mercury lamp, low-pressure mercury lamp, metal halide lamp, xenon lamp, halogen lamp, etc., or a combination of these can be used as appropriate, and the separation device of the present invention may not be provided. 10.

維持構材安裝手段70、70A可構成為以機械式夾具、夾頭缸等的把持手段、庫侖力、接著劑、黏著劑、磁力、白努力吸附、驅動機器等支撐間隔維持構材DM,而不具備於本發明的分離裝置10、10A者,如此般即使未具備維持構材安裝手段70、70A,接著片AS仍在增加被著體CP的相互間隔的狀態下硬化,故可作成即使解除對接著片AS賦予的張力,被著體的相互間隔仍不會盡可能變窄。   維持構材安裝手段70、70A可對在增加被著體CP的相互間隔的狀態下的接著片AS的其中一面AS1、另一面AS2,安裝環狀或非環狀的間隔維持構材DM,亦可在對接著片AS賦予第1能量後、賦予前、賦予同時,對該接著片AS安裝間隔維持構材DM。The maintenance member mounting means 70, 70A may be configured to maintain the member DM by a holding means such as a mechanical jig, a chuck cylinder, etc., a Coulomb force, an adhesive, an adhesive, a magnetic force, a white effort adsorption, a driving machine, etc. to support the distance maintenance member DM, and If the separation device 10, 10A of the present invention is not provided, even if the maintenance member mounting means 70, 70A is not provided, the adhesive sheet AS is hardened in a state where the distance between the to-be-attached bodies CP is increased. Even with the tension applied to the adhesive sheet AS, the distance between the objects to be attached is not narrowed as much as possible. The maintaining member attaching means 70 and 70A can attach annular or non-annular space maintaining members DM to one side AS1 and the other side AS2 of the adhesive sheet AS in a state where the distance between the adherends CP is increased. The gap maintaining member DM may be attached to the adhesive sheet AS after the first energy is applied to the adhesive sheet AS, before the application, and at the same time as the application.

切斷手段80係可代替刀刃83採用雷射切割機、離子束、火力、熱、水壓、電熱線、氣體、液體等的吹拂等作為切斷構材,或亦能以將適當的驅動機器進行組合者使切斷構材移動而進行切斷,而可不具備於本發明的分離裝置10、10A。The cutting means 80 can use a laser cutter, ion beam, thermal power, heat, water pressure, electric heating wire, blowing of gas, liquid, etc. as the cutting member instead of the blade 83, or it can also be driven by an appropriate driving machine. The assembler moves the cutting member to cut, and may not be provided in the separation apparatuses 10 and 10A of the present invention.

抵接手段90除矩形狀、橢圓筒狀等以外,亦可採用圓柱、角柱、橢圓中等的其他形狀的抵接構材91。The abutting means 90 may employ abutting members 91 of other shapes, such as a column, a square column, and an ellipse, in addition to a rectangular shape, an elliptical cylindrical shape, and the like.

分離裝置10A可具備第2賦能手段60,亦可構成為將維持構材安裝手段70A配置於抵接構材91的內部,該維持構材安裝手段70A不出入於抵接構材91的內部者,此情況下維持構材安裝手段70A可無線性馬達73,抵接構材91可無切槽91A。The separation device 10A may include the second energizing means 60 , or may be configured such that the maintaining member attaching means 70A is disposed inside the abutting member 91 , and the maintaining member attaching means 70A does not enter and exit the interior of the abutting member 91 . Alternatively, in this case, the holding member mounting means 70A may not have the wireless motor 73, and the abutting member 91 may not have the notch 91A.

間隔維持構材DM亦可代替玻璃板GP採用例如金屬、樹脂、木材、陶器等的構材,亦可作成代替雙面接著片BA以接著劑、潤濕性、磁附、吸附、白努力吸附等安裝於接著片,可為以外緣部厚度比其他區域大的方式而形成的杯狀、鍋狀者,亦可將其本身以接著片AS或與接著片AS係不同的其他接著片而構成,只要具備勝過接著片AS傾向接近變形前的狀態的力的剛性者則可為任意者,形狀亦可為任意形狀。The space maintaining member DM can also be used instead of the glass plate GP, such as metal, resin, wood, pottery, etc., and can also be used as a substitute for the double-sided adhesive sheet BA. Such as attaching to the adhesive sheet, it may be cup-shaped or pot-shaped formed so that the thickness of the outer edge is larger than that of the other regions, and it can also be constituted by the adhesive sheet AS or other adhesive sheets different from the adhesive sheet AS. , as long as the adhesive sheet AS has a rigidity that exceeds the force which tends to approach the state before deformation, and the shape may be any shape.

本發明中的接著片AS、雙面接著片BA、其他接著片及被著體CP的材質、類別、形狀等未特別限定。例如,接著片AS只要為因被賦予第1能量而硬化者則無任意限定。再者,接著片AS、雙面接著片BA及其他接著片可為例如圓形、橢圓形、三角形、四角形等的多角形或其他形狀,可為感壓接著性、感熱接著性等接著方式者,採用感熱接著性者的情況下,以設置將其加熱的適當的線圈加熱器、熱管的加熱側等的加熱手段等的適當的方法進行接著即可。此外,接著片AS亦可為不因賦予第2能量而軟化者。再者,接著片AS及其他接著片可為例如僅接著劑層的單層者、在基材與接著劑層之間具有中間層者、在基材之上表面具有遮蓋層等3層以上者,再者亦可為如可將基材從接著劑層剝離的所謂兩面接著片者,如此的雙面接著片、雙面接著片BA可為具有單層或複層之中間層者,亦可為無中間層的單層或複層者。此外,被著體CP方面,例如可為食品、樹脂容器、矽半導體晶圓、化合物半導體晶圓等的半導體晶圓、半導體晶片、電路基板、光碟等的資訊記錄基板、玻璃板、鋼板、陶器、木板或樹脂等的單體物,亦可為將該等以兩者以上而形成的複合物,任意的方式的構材、物品等亦可作為對象。另外,接著片AS係換功能性、用途性的讀法,例如可為資訊記載用標籤、裝飾用標籤、保護片、切割帶、晶粒接著膜DAF、晶粒接合帶、記錄層形成樹脂片等的任意的薄片、膜、貼帶等。   被著體CP亦可為在接著片AS上預先存在複數個,可為在以分離手段30、30A對接著片AS賦予張力的時點進行單片化,成為在接著片AS上存在複數個者。在對如此的接著片AS賦予張力的時點存在複數個的被著體CP方面,例如為下述者而無任何限定:對半導體晶圓照射雷射,於該半導體晶圓形成線狀、格狀等的脆弱的弱線,在對接著片AS賦予張力的時點進行單片化,成為複數個被著體CP;例如以刀刃切入於樹脂、玻璃板,於該樹脂、玻璃板形成線狀、格狀等的未貫通表背的切斷預定線、穿孔的切斷預定線等,在對接著片AS賦予張力的時點成為複數個被著體CP。The material, type, shape, etc. of the adhesive sheet AS, the double-sided adhesive sheet BA, other adhesive sheets, and the to-be-attached body CP in the present invention are not particularly limited. For example, the adhesive sheet AS is not limited arbitrarily as long as it is hardened by being given the first energy. In addition, the adhesive sheet AS, double-sided adhesive sheet BA and other adhesive sheets can be polygonal or other shapes such as circle, ellipse, triangle, square, etc., and can be pressure sensitive adhesive, heat sensitive adhesive and other adhesive methods. In the case of using a heat-sensitive adhesive, the bonding may be performed by an appropriate method such as providing a suitable coil heater for heating it, a heating means such as the heating side of the heat pipe, or the like. In addition, the adhesive sheet AS may not be softened by imparting the second energy. Furthermore, the adhesive sheet AS and other adhesive sheets may be, for example, a single layer of only the adhesive layer, those having an intermediate layer between the substrate and the adhesive layer, and those having three or more layers such as a cover layer on the upper surface of the substrate. Furthermore, it may be a so-called double-sided adhesive sheet that can peel the base material from the adhesive layer. Such double-sided adhesive sheet and double-sided adhesive sheet BA may have a single-layer or multi-layer intermediate layer, or It is a single-layer or multi-layer without an intermediate layer. In addition, the substrate CP can be, for example, semiconductor wafers such as food, resin containers, silicon semiconductor wafers, compound semiconductor wafers, semiconductor wafers, circuit boards, information recording substrates such as optical discs, glass plates, steel plates, and ceramics. , a single substance such as a wood board or a resin may be a composite formed of two or more of these, and a member, an article, or the like of any form may also be a target. In addition, the adhesive sheet AS depends on the reading method of functionality and application, and for example, it can be a label for information recording, a label for decoration, a protective sheet, a dicing tape, a die-bonding film DAF, a die-bonding tape, and a recording layer forming resin sheet. Any sheet, film, tape, etc. The to-be-attached body CP may be pre-existed on the adhesive sheet AS in plural, and may be separated into pieces when tension is applied to the adhesive sheet AS by the separating means 30 and 30A, and a plurality of the adhesive sheet AS may be present. In terms of the existence of a plurality of substrates CP at the point of applying tension to the adhesive sheet AS, for example, it is not limited at all, for example, a semiconductor wafer is irradiated with a laser to form a linear or lattice shape on the semiconductor wafer. Weak lines of weakness, etc., are singulated at the point of applying tension to the adhesive sheet AS, and become a plurality of substrates CP; A line to cut that does not penetrate through the front and back, such as a line to cut that does not penetrate the front and back, or a line to cut that is perforated, etc., becomes a plurality of to-be-attached bodies CP when tension is applied to the adhesive sheet AS.

前述實施方式中的驅動機器只要可採用轉動馬達、直線馬達、線性馬達、單軸機器人、多關節機器人等的電動機器、汽缸、油壓缸、無桿缸及旋缸等的致動器等,則亦可採用將該等直接或間接組合者。As long as the driving machine in the above-mentioned embodiment can use electric machines such as rotary motors, linear motors, linear motors, single-axis robots, articulated robots, etc., and actuators such as cylinders, hydraulic cylinders, rodless cylinders, and rotary cylinders, etc., A direct or indirect combination of these can also be used.

10、10A10‧‧‧分離裝置2010‧‧‧保持手段30、30A10‧‧‧分離手段5010‧‧‧第1賦能手段6010‧‧‧第2賦能手段70、70A10‧‧‧維持構材安裝手段8010‧‧‧切斷手段9010‧‧‧抵接手段AS10‧‧‧接著片AS110‧‧‧其中一面CE10‧‧‧被著體接著區域CP10‧‧‧被著體HE10‧‧‧保持區域DM10‧‧‧間隔維持構材IR10‧‧‧紅外線(別的能量)UV10‧‧‧紫外線(既定的能量)10. 10A10‧‧‧Separation device 2010‧‧‧Maintaining means 30, 30A10‧‧‧Separating means 5010‧‧‧First energizing means 6010‧‧‧Second energizing means 70, 70A10‧‧‧Maintaining member installation Means 8010‧‧‧Cutting Means 9010‧‧‧Abutting Means AS10‧‧‧Adhesive Sheet AS110‧‧‧One Side CE10‧‧‧Attached Body Adhesion Area CP10‧‧‧Attached Body HE10‧‧‧Retaining Area DM10 ‧‧‧Interval maintenance member IR10‧‧‧Infrared (other energy) UV10‧‧‧Ultraviolet (predetermined energy)

[圖1] (A)係本發明的實施方式相關的分離裝置的平面圖。(B)係圖1(A)之側視圖。   [圖2] (A)、(B)係本發明的實施方式相關的分離裝置的動作說明圖。   [圖3] (A)~(C)係本發明的實施方式相關的分離裝置的動作說明圖。   [圖4] (A)、(B)係本發明的其他例的說明圖。[ Fig. 1] (A) is a plan view of a separation device according to an embodiment of the present invention. (B) is a side view of FIG. 1(A). [Fig. 2] (A) and (B) are diagrams for explaining the operation of the separation device according to the embodiment of the present invention. [Fig. 3] (A) to (C) are diagrams for explaining the operation of the separation device according to the embodiment of the present invention. [Fig. 4] (A) and (B) are explanatory diagrams of other examples of the present invention.

10‧‧‧分離裝置 10‧‧‧Separation device

20‧‧‧保持手段 20‧‧‧Maintaining Means

21‧‧‧轉動馬達 21‧‧‧Rotating the motor

21A‧‧‧輸出軸 21A‧‧‧Output shaft

22‧‧‧上保持構材 22‧‧‧Upholding member

30‧‧‧分離手段 30‧‧‧Means of separation

31‧‧‧線性馬達 31‧‧‧Linear motor

31A‧‧‧滑件 31A‧‧‧Slide

32‧‧‧下保持構材 32‧‧‧Lower retaining member

40‧‧‧檢測手段 40‧‧‧Detection methods

50‧‧‧第1賦能手段 50‧‧‧First means of empowerment

51‧‧‧上側紫外線燈 51‧‧‧Upper UV Lamp

52‧‧‧下側紫外線燈 52‧‧‧Ultraviolet lamp on the lower side

60‧‧‧第2賦能手段 60‧‧‧Second enabling means

61‧‧‧線性馬達 61‧‧‧Linear motor

61A‧‧‧滑件 61A‧‧‧Slide

62‧‧‧線性馬達 62‧‧‧Linear motor

62A‧‧‧滑件 62A‧‧‧Slide

63‧‧‧基台 63‧‧‧Abutment

64‧‧‧立架 64‧‧‧Rack

65‧‧‧紅外線燈 65‧‧‧Infrared light

70‧‧‧構材安裝手段 70‧‧‧Means of member installation

71‧‧‧直線馬達 71‧‧‧Linear motor

71A‧‧‧輸出軸 71A‧‧‧Output shaft

72‧‧‧支撐台 72‧‧‧Support

72A‧‧‧支撐面 72A‧‧‧Support surface

80‧‧‧切斷手段 80‧‧‧Means of cutting

81‧‧‧多關節機器人 81‧‧‧Articulated robot

81A‧‧‧前端臂 81A‧‧‧Front end arm

82‧‧‧托架 82‧‧‧Bracket

83‧‧‧刀刃 83‧‧‧Blade

AS‧‧‧接著片 AS‧‧‧Continued film

AS1‧‧‧其中一面 AS1‧‧‧One side

AS2‧‧‧另一面 AS2‧‧‧The other side

BA‧‧‧雙面接著片 BA‧‧‧ Double Sided Adhesive

BC‧‧‧下殼 BC‧‧‧lower shell

CP‧‧‧被著體 CP‧‧‧Worn body

DM‧‧‧間隔維持構材 DM‧‧‧Interval maintenance member

GP‧‧‧玻璃板 GP‧‧‧glass plate

UC‧‧‧上殼 UC‧‧‧Upper case

Claims (6)

一種分離裝置,其具備複數個保持手段、分離手段、第1賦能手段及維持構材安裝手段,該複數個保持手段係就僅在其中一面貼附複數個被著體的接著片的端部進行保持者,該分離手段係使保持前述接著片的端部的前述保持手段相對移動,從而使前述接著片變形而增加前述被著體的相互間隔者,前述接著片可因賦予既定的能量而硬化,該第1賦能手段係對以前述分離手段增加前述被著體的相互間隔的狀態下的前述接著片,賦予前述既定的能量從而使該接著片硬化者,該維持構材安裝手段係安裝間隔維持構材者,該間隔維持構材係具備勝過接著片傾向接近變形前的狀態的力的剛性,僅抵接於增加了前述被著體的相互間隔的狀態下的前述接著片的另一面,並維持間隔被增加的前述被著體的相互間隔者。 A separation device comprising a plurality of holding means, a separation means, a first energizing means, and a holding member mounting means, the plurality of holding means attaching the ends of the adhesive sheets of the plurality of to-be-attached bodies to only one of them For the holder, the separation means relatively moves the holding means holding the end of the adhesive sheet, thereby deforming the adhesive sheet and increasing the distance between the objects to be attached. hardening, the first energizing means is to apply the predetermined energy to the adhesive sheet in a state in which the distance between the objects to be attached is increased by the separation means to harden the adhesive sheet, and the maintaining member attaching means is a If the spacer maintaining member is attached, the spacer maintaining member has rigidity that exceeds the force of the adhesive sheet tending to approach the state before deformation, and only abuts against the adhesive sheet in a state where the mutual space between the to-be-attached bodies is increased. On the other side, and maintaining the mutual spacers of the aforementioned objects with increased spacing. 一種分離裝置,其具備保持手段、抵接手段、分離手段、第1賦能手段及維持構材安裝手段,該保持手段其係就在其中一面與另一面中至少一者貼附複數個被著體的接著片的端部進行保持者,該抵接手段係在前述接著片的比貼附前述複數個被著 體的被著體接著區域靠外側、在前述保持手段進行保持的保持區域的內側抵接於該接著片者,該分離手段係使保持前述接著片的端部的前述保持手段及抵接手段相對移動,從而使前述接著片變形而增加前述被著體的相互間隔者,前述接著片可因賦予既定的能量而硬化,該第1賦能手段係對以前述分離手段增加前述被著體的相互間隔的狀態下的前述接著片,賦予前述既定的能量從而使該接著片硬化者,該維持構材安裝手段係安裝間隔維持構材者,該間隔維持構材係具備勝過接著片傾向接近變形前的狀態的力的剛性,僅抵接於增加了前述被著體的相互間隔的狀態下的前述接著片的另一面,並維持間隔被增加的前述被著體的相互間隔者。 A separation device comprising holding means, abutting means, separating means, first energizing means and holding member mounting means, wherein the holding means is attached to at least one of one side and the other side with a plurality of The end portion of the adhesive sheet of the body is held, and the abutting means is attached to the plurality of adhesive sheets than the adhesive sheet. If the body to be attached is on the outside and the inside of the holding area held by the holding means is in contact with the adhesive sheet, the separation means is to make the holding means and the abutting means that hold the end of the adhesive sheet face each other. If the adhesive sheet is moved to deform and increase the mutual distance between the object to be attached, the adhesive sheet can be hardened by imparting a predetermined energy. The adhesive sheet in a spaced state is provided with the predetermined energy to harden the adhesive sheet, and the maintaining member mounting means is to install the space maintaining member, and the space maintaining member has a tendency to be close to deformation over the adhesive sheet. The rigidity of the force in the previous state is only in contact with the other surface of the adhesive sheet in the state where the distance between the to-be-attached bodies is increased, and the distance between the to-be-attached bodies with the increased distance is maintained. 如請求項1或2的分離裝置,其具備切斷前述接著片的切斷手段。 The separating apparatus according to claim 1 or 2, comprising cutting means for cutting the adhesive sheet. 如請求項1或2的分離裝置,其中,前述接著片可因賦予與前述既定的能量係不同的別的能量而軟化,具備對前述接著片賦予前述別的能量的第2賦能手段。 The separation apparatus according to claim 1 or 2, wherein the adhesive sheet can be softened by imparting another energy different from the predetermined energy system, and includes a second energizing means for imparting the other energy to the adhesive sheet. 一種分離方法,其具有保持程序、分離程序、第1賦能程序及維持構材安裝程序,該保持程序係以複數個保持手段就在其中一面與另一面中至少一者貼附複數個被著體的接著片的端部進行保持者,該分離程序係使保持前述接著片的端部的前述保持手段相對移動,從而使前述接著片變形而增加前述被著體的相互間隔者,前述接著片可因賦予既定的能量而硬化,該第1賦能程序係對在前述分離程序增加前述被著體的相互間隔的狀態下的前述接著片,賦予前述既定的能量從而使該接著片硬化者,該維持構材安裝程序係安裝間隔維持構材者,該間隔維持構材係具備勝過接著片傾向接近變形前的狀態的力的剛性,僅抵接於增加了前述被著體的相互間隔的狀態下的前述接著片的另一面,並維持間隔被增加的前述被著體的相互間隔者。 A separation method comprising a holding procedure, a separation procedure, a first enabling procedure, and a maintenance member installation procedure, wherein the holding procedure is to attach a plurality of clasps to at least one of one side and the other side by a plurality of holding means A person holding the end of the adhesive piece of the body, and the separation procedure is to relatively move the holding means for holding the end of the adhesive piece, thereby deforming the adhesive piece and increasing the mutual distance of the body to be attached, the adhesive piece. It can be hardened by imparting a predetermined energy, and the first energizing process is to apply the predetermined energy to the adhesive sheet in the state where the distance between the objects to be attached is increased in the separation process to harden the adhesive sheet, This maintaining member installation procedure is for attaching an interval maintaining member having rigidity that exceeds the force with which the adhesive sheet tends to approach the state before deformation, and only abuts against the increased mutual interval of the to-be-attached body. The other side of the adhesive sheet in the state is maintained, and the mutual spacer of the adherend whose spacing is increased is maintained. 一種分離方法,其具有保持程序、分離程序、第1賦能程序及維持構材安裝程序,該保持程序係以保持手段就在其中一面與另一面中至少一者貼附複數個被著體的接著片的端部進行保持者,該分離程序係使抵接手段及使保持前述接著片的端部的前述保持手段相對移動,從而使前述接著片變形而增加 前述被著體的相互間隔者,該抵接手段係在前述接著片的比貼附前述複數個被著體的被著體接著區域靠外側、在前述保持手段進行保持的保持區域的內側抵接於該接著片者,前述接著片可因賦予既定的能量而硬化,該第1賦能程序係對在前述分離程序增加前述被著體的相互間隔的狀態下的前述接著片,賦予前述既定的能量從而使該接著片硬化者,該維持構材安裝程序係安裝間隔維持構材者,該間隔維持構材係具備勝過接著片傾向接近變形前的狀態的力的剛性,僅抵接於增加了前述被著體的相互間隔的狀態下的前述接著片的另一面,並維持間隔被增加的前述被著體的相互間隔者。 A separation method comprising a holding procedure, a separation procedure, a first enabling procedure, and a maintenance member installation procedure, wherein the holding procedure is to attach a plurality of objects to be attached to at least one of one side and the other side by means of holding means. The end portion of the adhesive sheet is held, and the separation procedure is to relatively move the abutting means and the holding means for holding the end portion of the adhesive sheet, thereby deforming the adhesive sheet and increasing the When the objects to be attached are spaced apart from each other, the abutting means is in contact with the inner side of the holding region held by the holding means on the outer side of the adhesive sheet than the region of the object to be attached to which the plurality of objects to be attached are attached. In the case of the adhesive sheet, the adhesive sheet can be hardened by applying a predetermined energy, and the first energizing process is to impart the predetermined energy to the adhesive sheet in the state where the distance between the objects to be attached is increased in the separation process. If the energy thereby hardens the adhesive sheet, the maintenance member installation procedure is to install an interval maintenance member that has a rigidity that exceeds the force that the adhesive sheet tends to approach the state before deformation, and only increases in abutment. The other side of the adhesive sheet in the state where the said to-be-attached body is spaced apart from each other is maintained, and the said to-be-attached body spaced apart from each other is maintained.
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