TWI743321B - Separation device and separation method - Google Patents

Abstract

The subject of the present invention is to provide a separation device and a separation method that does not break the adhesive sheet and can expand the mutual spacing of the adherends adhered to the adhesive sheet. The solution of the present invention is to constitute at least one of the one side (AS1) and the other side (AS2), maintain the adhered body (CP) or be divided into plural adhered bodies ( The plural holding means (20) of the end of the adhesive sheet (AS) of CP) move relative to the holding means (20) that holds the end of the adhesive sheet (AS) to apply tension to the adhesive sheet (AS) Separation means (30) to expand the mutual spacing of adhered bodies (CP); Separation means (30), which is repeatedly carried out by tying the edges, in accordance with the expanding direction of the expansion of the mutual spacing of adherends (CP) to maintain means (20) ) The first movement of the relative movement and the reciprocating movement of the second movement of the relative movement of the holding means (20) in the opposite direction of the expansion direction opposite to the expansion direction, while expanding the mutual spacing of the adherends (CP).

Description

Separation device and separation method

The present invention relates to a separation device and a separation method.

Conventionally, there has been known a separation device that expands the mutual distance between the adherends to be adhered to the adhesive sheet (for example, refer to Patent Document 1). [Prior Technical Documents] [Patent Documents]

[Patent Document 1] JP 2007-103649 A

[The problem to be solved by the invention]

However, in the conventional separation device such as described in Patent Document 1, since the first sheet 13 (adhesive sheet) is applied only in the direction of expanding the distance between the chips C (adhesive body), the substrate is expanded. The mutual spacing of the adhesive bodies, and in a part of the adhesive sheet (for example, the boundary part of the adhesive sheet and the first ring frame 12, or the corner of the adhesive sheet contacting the expand table 3) When the applied stress increases, the adhesive sheet breaks and the distance between the adherends cannot be enlarged.

The object of the present invention is to provide a separation device and a separation method that does not break the adhesive sheet and can expand the mutual separation of the adhered bodies adhered to the adhesive sheet. [Means for problem solving]

The present invention adopts the composition described in the scope of the patent application. [Effects of Invention]

According to the present invention, by repeatedly performing reciprocating movement, it is possible to relax the stress applied to a part or all of the adhesive sheet while expanding the distance between the adhered bodies, without breaking the adhesive sheet, and expanding the adhesive sheet. The distance between the adherends of the adhesive sheet. In addition, if a stress measuring means is provided, it can be formed that the stress applied to a part or all of the adhesive sheet will not exceed the stress that causes the adhesive sheet to break, and the adhesive sheet will not be broken surely, and the adhesive sheet can be expanded. The distance between the bonded bodies of the bonding sheet.　　Furthermore, by means of a separation method, the relative movement in the expansion direction from the stress applied to the adhesive sheet reaches the specified lower limit, so that the mutual distance between the adherends can be enlarged after the stress is reliably relieved.　　 In addition, if the detection means is provided, the mutual interval of the adherends can be expanded to the desired interval.

Hereinafter, embodiments of the present invention will be described based on the drawings. In addition, the X-axis, Y-axis, and Z-axis systems of this embodiment have a relationship of being orthogonal to each other. The X-axis and Y-axis systems are set to be the axes in the designated plane, and the Z-axis is set to be perpendicular to the aforementioned designated plane. axis. In addition, in this embodiment, when viewed from the direction of the arrow BD parallel to the Y axis as a reference, when the direction is displayed without citing the reference diagram, set "up" as the arrow direction of the Z axis and " "Down" is the reverse direction, "Left" is the X-axis arrow direction and "Right" is the reverse direction, "Front" is the Y-axis arrow direction and "Back" is the reverse direction.

The separating device 10 of the present invention is provided with a plurality of holding means 20 for holding the end of the adhesive sheet AS to which the plurality of adherends CP are pasted on one surface AS1, and holding means for holding the end of the adhesive sheet AS 20 Relative movement, applying tension to the adhesive sheet AS to expand the distance between the adherends CP. 30, can detect the mutual separation of the adherends CP or the collective shape of the entire adherend CP, etc. The detection means 40 of various sensors such as a camera or a projector, various sensors such as an optical sensor or a sonic sensor, and a stress measurement means 50 that can measure the stress applied to the adhesive sheet AS.

The holding means 20 is provided with a reversing motor 21 as a driving device supported by the separating means 30, and a holding member 22 supported on the output shaft 21A thereof.

The separating means 30 is provided with a linear motor 31 as a driving device, and a holding member 32 under the sliding member 31A supported on the upper surface side of the reversing motor 21.

The stress measuring means 50 is provided with a stress measuring device 51 using an infrared camera, X-ray, laser, optical fiber, etc.

The operation of the aforementioned separation device 10 will be described. First of all, for the separation device 10 whose components are on standby in the initial position shown by the solid line in Figures 1, 2(A), the user of the separation device 10 (hereinafter referred to as "user") through the operation panel or personal computer The operation means not shown in the figure will set the upper limit of the stress applied to the adhesive sheet AS without breaking the adhesive sheet AS, and the lower limit of the stress applied to the adhesive sheet AS released from the upper limit. After the limit value is input, input the signal to start automatic operation. After that, when an operator, or a conveying means (not shown) such as a driving machine or a conveyor belt, places the adhesive sheet AS to which the plural adherends CP are pasted on the lower holding member 32, the holding means 20 drives each reversal In the motor 21, as shown by the two-dot dashed line in FIG. 2(A), the upper holding member 22 and the lower holding member 32 hold the ends of the adhesive sheet AS.

Next, the separating means 30 drives each linear motor 31, as shown in FIG. 2(B), the holding means 20 are separated from each other, tension is applied to the adhesive sheet AS, and the direction of expansion to expand the mutual interval of the adherend CP is performed. Relative movement. At this time, although stress is applied to the adhesive sheet AS while extending, when the stress exceeds a specified value, it will break. Therefore, the separating means 30 of the present embodiment is configured to repeatedly perform the first movement of the holding means 20 relative to the expansion direction in the expansion direction that expands the mutual interval of the adherend CP, and the reverse expansion in the opposite direction to the expansion direction. The direction causes the reciprocating movement of the second movement of the relative movement of the holding means 20 (hereinafter, this movement is simply referred to as "reciprocating movement"), while expanding the mutual interval of the adhered bodies CP. That is, in the first movement of the separating means 30, when the stress measuring means 50 detects that the stress applied to the adhesive sheet AS has reached the previously input upper limit value, the second movement is performed as shown in FIG. 2(C) . Then, in the second movement, the separating means 30 performs the first movement as shown in FIG. 2(D) when the stress measuring means 50 detects that the stress applied to the adhesive sheet AS has reached the previously input lower limit value. After that, the separating means 30 reciprocally moves repeatedly, and when the detecting means 40 detects the mutual spacing of the adherends CP or the collective shape of the entire adherend CP, etc., it becomes a designated interval or a designated entire set. When the shape is in shape, the driving of each linear motor 31 is stopped.

In addition, when the mutual distance between the adherends CP is expanded by the above-mentioned method, the mutual distance between the adherends CP may not be expanded to a predetermined distance due to deformation of the adhesive sheet AS or the like. Then, based on the detection result of the detection means 40, the separation means 30 drives each linear motor 31 to move each holding means 20 individually so that the mutual interval of each adherend CP becomes a predetermined interval. In addition, at this time, the separating means 30 may repeatedly reciprocate.

Then, when all the adhered objects CP or a specified amount of adhered objects CP are removed from the adhesive sheet AS by means of unillustrated adhered object removal means such as a pickup device or a conveying device, the separating means 30 drives each line After the sex motor 31 returns each slider 31A to the initial position, the holding means 20 drives the reversing motor 21 to return the upper holding member 22 to the initial position. Next, an operator or a conveying means not shown removes the adhesive sheet AS remaining on the lower holding member 32, and then repeats the same operation as described above.

According to the separation device 10 such as the above, by reciprocating repeatedly, it is possible to relax the stress applied to a part or all of the adhesive sheet AS and enlarge the mutual distance between the adhered bodies CP without causing the adhesive sheet AS The gap between the adherends CP adhered to the adhesive sheet AS can be enlarged.

The methods and programs of the present invention are not limited as long as they can implement the actions, functions, or programs described for the methods and programs, and are not limited in any way by the structure or program of a single embodiment shown in the foregoing embodiments. For example, the holding means, as long as it can hold the end of the adhesive sheet to which the plural adhesive bodies are pasted on at least one of one side and the other side, compare it to the technical common sense at the beginning of the application and within its technical scope It is not limited (other methods and procedures are the same).

The separating device of the present invention can also be made as shown in FIG. 3(A), which is equipped with: holding means 20, in the adhesive sheet AS compared to the adhered body bonding area CE where the plural adhered bodies CP are pasted On the outside, the inner side of the holding area HE held by the holding means 20 abuts against the abutting means 60 of the adhesive sheet AS, so that the holding means 20 and the abutting means 60 holding the ends of the adhesive sheet AS are relatively moved, Separating means 30A, detecting means 40, and separating means 10A of stress measuring means 50 for expanding the mutual distance between adherend CP.　　 In addition, if the separation device 10A has the same function with the same configuration as the separation device 10, the same figure number as the separation device 10 is attached, and the description of the structure is omitted, and the description of the operation is simplified.

The separating means 30A is provided with a linear motor 33 as a driving device supported on the bottom plate BP, and a holding member 34 supported on the output shaft 33A and supporting the reverse motor 21 on the upper side. The "abutting means 60" is provided with a cylindrical abutting member 61 supported on the bottom plate BP.

This type of separation device 10A works in the same way as the separation device 10. When the adhesive sheet AS to which the plurality of adhered bodies CP are pasted is placed on the lower holding member 34, the holding means 20 drives the reversing motor 21, such as As shown by the two-dot dashed line in FIG. 3(A), the upper holding member 22 and the lower holding member 34 hold the ends of the adhesive sheet AS. Moreover, as shown in FIG. 3, a ring-shaped frame RF is attached to the end of the adhesive sheet AS, but the frame RF is not required. Next, the separating means 30A drives the linear motor 33, as shown in FIG. 3(B), the holding means 20 is lowered and the holding means 20 and the abutting means 60 are moved relatively, tension is applied to the adhesive sheet AS and will be adhered The mutual interval of the body CP expands. At this time, the separating means 30 also performs the same reciprocating movement as the separating device 10, and when the detecting means 40 detects the mutual spacing of the adherend CP or the collective shape of the entire adherend CP, etc., it becomes When the specified interval or the specified overall assembly shape is specified, the driving of each linear motor 33 is stopped. Then, when the adherend CP is detached from the adhesive sheet AS by the means for removing the adherend, not shown, each means drives the respective driving devices to return the components to the initial position, and then keep the remaining underneath. The adhesive sheet AS on the member 34 is disassembled, and the same action as described above is repeated in the following.

Even if such a separating device 10A is used, the same effect as that of the separating device 10 can be obtained.

The holding means 20 can be configured to hold the end of the adhesive sheet AS to which the plural adherend CP is adhered on the other surface AS2, or on both the one surface AS1 and the other surface AS2, or by mechanical The structure of holding the end of the adhesive sheet AS by holding means such as a chuck or a clamping cylinder, Coulomb force, adhesive, adhesive, magnetic force, Bernoulli adsorption, and driving machinery. In the case of the holding means 20 and the separating device 10, for example, the holding means 20 that has moved to the right in the past can be made into one body, and the holding means 20 that has moved to the left can be made into a structure of one body and two bodies, for example, or A structure with three or more bodies moving to the right, left, and other directions. In the case of the "holding means 20" and the separating device 10A, it may be one body or two or more.

The separating means 30 and 30A may not be plural but singular. In this case, for example, the separating device 10 is made of two sliders of a one-piece linear motor, each supporting the holding means 20 in one body, and the body to be bonded is A configuration in which the mutual interval between CPs is enlarged, or a configuration in which the mutual interval between the adhered bodies CP is enlarged only in the one-axis direction (for example, the X-axis direction or the Y-axis direction, etc.). The separating means 30 may be configured to expand the mutual spacing in the directions of three or more axes (for example, the X-axis direction, the Y-axis direction, and other axial directions). For example, a plurality of holding means 20 that move in the X-axis direction may be formed. The structure that moves in the Y-axis direction (a structure in which the plural holding means 20 that move in the Y-axis direction are moved in the X-axis direction) expands the mutual spacing of the adhered body CP, or cannot move the adhered body CP The mutual interval becomes the configuration of the specified interval, or the configuration of the entire assembly shape of each adherend CP, the specified interval or the specified entire assembly shape cannot be operated. The separating means 30A can also stop or move the holding means 20 and moving the abutting means 60, so that the holding means 20 and the abutting means 60 are relatively moved, and tension is applied to the adhesive sheet AS to reduce the adhesion of the adhered body CP. Mutual separation expands. The separation means 30, 30A, for example, can or set the speed of the first movement and the speed of the second movement to the same speed first, and adjust the time of the first movement and the second movement (the user inputs through the operation means not shown) To the separation device 10, 10A), or first set the time of the first movement and the time of the second movement to the same time, adjust the speed of the first movement and the speed of the second movement (the user inputs through the operating means not shown) To the separating device 10, 10A), it is formed to repeatedly move back and forth so that the distance of the first movement is greater than the distance of the second movement; the distance, time and speed of the first movement and the second movement can be any value, and the user can Decide arbitrarily. The separation means 30 and 30A can also be operated by the operator to drive the linear motor 31 and the linear motor 33 by operating buttons or levers. In this case, for example, it can also be configured to display the detection result according to the stress measuring means 50 on the monitor When the detection result displayed on the display reaches the upper limit, the operator operates the button or lever to move the second time. When the detection result displayed on the same display reaches the lower limit At this time, the operator operates the button or lever to move the first movement; or it is configured to display the detection result according to the detection means 40 on the display, and the operator drives the linear motor 31 and the linear motor 33 to display on the display The detection result becomes the specified value.

The detection means 40 may also be the operator’s visual inspection. For example, in the case of the separating device 10, the operator may use visual inspection, operating buttons or levers, etc., to make the distance between the adhered bodies CP a predetermined interval, or to make each The collective shape of the entire adherend CP has a similar relationship with the collective shape of the entire base, and the linear motor 31 is driven, or the separating device 10, 10A of the present invention is not provided.

The stress measuring means 50 can be a torque sensor built-in or installed in the linear motor 31, the linear motor 33, or a force sensor or a force sensor installed between the slider 31A of the linear motor 31 and the lower holding member 32. A pressure sensor, etc., or a force sensor or a pressure sensor provided between the output shaft 33A of the linear motor 33 and the lower holding member 34, as long as it can measure the stress applied to the adhesive sheet AS. Yes, or the separation device 10, 10A of the present invention does not have it.

The abutting means 60 can also be cylindrical, prismatic, elliptical, or other shapes of abutting members 61 in addition to the angular cylindrical shape or the elliptical cylindrical shape.

The separating device 10, 10A can also perform the adhesive force reduction treatment to reduce the adhesive force of the adhesive sheet AS before removing the adhered body CP from the adhesive sheet AS. In this case, for example, as the adhesive sheet AS , Adopting an adhesive layer on one side of the substrate sheet to reduce the adhesive force by using ultraviolet, X-ray, infrared, etc. as the specified energy. It has the ability to impart ultraviolet and X to this type of adhesive sheet AS. Specified energy-giving means such as light and infrared rays are sufficient.　　 The upper limit or lower limit of the stress applied to the adhesive sheet AS can be any value, and the user can decide arbitrarily.

The material, type, shape, etc. of the adhesive sheet AS and the adherend CP of the present invention are not particularly limited. For example, the adhesive sheet AS or the adhered body CP can be a polygonal shape such as a circle, an ellipse, a triangle or a quadrangle, and other shapes are also possible; the adhesive sheet AS can also be pressure-sensitive adhesive or heat-sensitive adhesive. And other bonding forms. In addition, the adhesive sheet AS may be, for example, a single layer having only an adhesive layer, an intermediate layer between the base material and the adhesive layer, and three or more layers such as a cap layer on the base material. , The so-called double-sided adhesive sheet that can peel the substrate from the adhesive layer can also be used. Such double-sided adhesive sheet may have a single-layer or multi-layer intermediate layer, or a single-sided adhesive sheet without an intermediate layer. Layered or multi-layered. In addition, as the adherend CP, for example, semiconductor wafers such as food, resin containers, silicon semiconductor wafers or compound semiconductor wafers, semiconductor wafers, circuit boards, optical discs and other information recording substrates, glass plates, steel plates, Monomers such as pottery, wooden boards, or resins, or composites formed by two or more of these, can be objects of any form of members or objects. In addition, the adhesive sheet AS can also be replaced with a functional and practical reading method, such as information recording labels, decorative labels, protective sheets, dicing tape, bare die film, die adhesive tape, recording layer formation Any sheets such as resin sheets, films, tapes, etc. The adhered body CP may be a plural number on the adhesive sheet AS in advance, or it may be divided into plural numbers when external force is applied by means of separation means 30, 30A, other mechanisms or human hands, etc., and plural on the adhesive sheet AS Existence and the like are divided and become plural. As this type of adherend CP that is divided into plurals, for example, a semiconductor wafer or substrate is irradiated with a laser, and a fragile layer such as a line or a grid is formed on the semiconductor wafer or substrate. Or when tension is applied to the adhesive sheet AS, or when an external force is applied directly or indirectly to a semiconductor wafer or substrate, etc., they are formed into multiple pieces of the adherend CP, or, for example, a cutting blade cuts into the resin or For glass plates, etc., firstly form a cut line that does not penetrate through the front and back of the linear or grid-shaped front and back of the resin or glass plate or the like, or apply tension to the adhesive sheet AS, or apply tension to the adhesive sheet AS. There are no limitations on the timing when external force is directly or indirectly applied to the resin or glass plate, etc., to be sliced to form a plurality of adherends CP and the like.

The drive machine of the foregoing embodiment can use electric machines, pneumatic cylinders, hydraulic cylinders, rodless cylinders, rotary cylinders, etc., such as reversing motors, linear motors, linear motors, single-axis robotic arms, multi-joint robotic arms, etc. In addition to actuators, etc., a direct or indirect combination of these driving machines can also be used.

10、10A‧‧‧Separation device 20‧‧‧Retention means 30,30A‧‧‧Separation means 40‧‧‧Detection means 50‧‧‧Stress measurement means 60‧‧‧Abutment means AS‧‧‧Adhesive sheet AS1‧‧‧One side AS2‧‧‧The other side CE‧‧‧The area of the adhered body CP‧‧‧The area of the adhered body HE‧‧‧The area to be held

Fig. 1 is a plan view of a separating device related to an embodiment of the present invention.　　 Figures 2 (A) to (D) are diagrams for explaining the operation of the separation device in the embodiment of the present invention.　　 Figures 3 (A) and (B) are explanatory diagrams of other examples of the present invention.

10‧‧‧Separation device

20‧‧‧Keep the means

21‧‧‧Reversing motor

21A‧‧‧Output shaft

22‧‧‧Upper holding member

30‧‧‧Means of separation

31‧‧‧Linear Motor

31A‧‧‧Slide

32‧‧‧Lower holding member

CP‧‧‧Bonded body

AS‧‧‧Adhesive sheet

AS1‧‧‧One Side

Claims (4)

A separating device characterized by: at least one of one side and the other side, holding a plurality of bonded bodies or divided into a plurality of bonded bodies on at least one of the ends of the adhesive sheet The holding means is a separating means that moves relative to the holding means that holds the end of the adhesive sheet, and applies tension to the adhesive sheet to expand the mutual distance between the adherends; the separating means is repeatedly tied in accordance with The first movement of the relative movement of the holding means in the expansion direction that expands the mutual spacing of the adhered bodies, and the reciprocating movement of the second movement of the relative movement of the holding means in the opposite direction of the expansion direction opposite to the expansion direction, While expanding the mutual spacing of the aforementioned adherends. A separating device characterized by: holding the end of an adhesive sheet that holds a plurality of adherends or is divided into plural adherends on at least one of one surface and the other surface The means is to contact the adhesive sheet on the outside of the area of the adhered body to which the plurality of adherends are pasted on the adhesive sheet, and the inside of the area to be held by the holding means to abut against the adhesive sheet. Means to relatively move the holding means and the abutting means that hold the end of the adhesive sheet, and apply tension to the adhesive sheet to make the adherend Separating means for expanding the distance between each other, and stress measuring means that can measure the stress applied to the aforementioned adhesive sheet; the aforementioned means of separating, tying the edge repeatedly in accordance with the expansion direction in the expansion of the mutual distance between the adherends, the holding means and The first movement of the relative movement of the abutting means, and the reciprocating movement of the second movement of the relative movement of the holding means and the abutting means in the opposite direction of the expansion direction opposite to the expansion direction, while expanding the mutual distance between the adherends In the relative movement in the anti-expansion direction, when the stress measuring means detects that the stress applied to the adhesive sheet has reached a predetermined lower limit, the relative movement in the expansion direction is performed. A method of separation, characterized by: on at least one of one side and the other side, a plurality of holding means are used to hold the adhesive sheet that is pasted or divided into a plurality of adherends. The retaining procedure of the end is a separation procedure in which the retaining means that retains the end of the adhesive sheet is moved relative to each other, and tension is applied to the adhesive sheet to expand the distance between the adherends; the separation procedure is a side edge Repetitively perform one of the first movement in which the holding means is relatively moved in the expansion direction that expands the mutual spacing of the adherends, and the second movement in which the holding means is relatively moved in the opposite expansion direction opposite to the expansion direction. The reciprocating movement expands the gap between the adherends. A separation method, which is characterized by: on at least one of one side and the other side, the end of the adhesive sheet that is pasted or divided into plural adherends is held by holding means. The holding procedure of the part is to make the inner side of the holding area held by the holding means abut on the inner side of the area to be adhered than the area where the plurality of adhered objects are pasted on the adhesive sheet. The contact means of the sheet and the holding means that hold the end of the adhesive sheet move relative to each other, apply tension to the adhesive sheet to expand the distance between the adherends, and measure the distance applied to the adhesive The stress measurement procedure of the stress of the splice; the aforementioned separation procedure, the tie edge is repeatedly carried out in accordance with the expansion direction of the expansion of the mutual distance between the adhered bodies, the first movement of the relative movement of the holding means and the abutting means, and the expansion in the aforementioned The direction opposite to the expansion direction is the reciprocating movement of the second movement of the relative movement of the holding means and the abutting means, while expanding the mutual spacing of the adherends. In the relative movement to the opposite expansion direction, when When the stress measurement program detects that the stress applied to the adhesive sheet reaches a specified lower limit, it performs a relative movement in the expansion direction.

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