CN108695195B - Separation device and separation method - Google Patents
Separation device and separation method Download PDFInfo
- Publication number
- CN108695195B CN108695195B CN201810193530.0A CN201810193530A CN108695195B CN 108695195 B CN108695195 B CN 108695195B CN 201810193530 A CN201810193530 A CN 201810193530A CN 108695195 B CN108695195 B CN 108695195B
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- adhesive sheet
- adherends
- holding
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- separation
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67132—Apparatus for placing on an insulating substrate, e.g. tape
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67092—Apparatus for mechanical treatment
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
- H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
Abstract
The invention provides a separation device and a separation method, which can prevent the mutual interval of adherends from being narrowed as far as possible even if tension applied to an adhesive sheet is released. The separation device is provided with: a plurality of holding units (20) that hold the end of an Adhesive Sheet (AS) to which a plurality of adherends (CP) are adhered on at least one of one surface (AS 1) and the other surface (AS 2); a separation unit (30) for relatively moving the holding unit (20) holding the end of the Adhesive Sheet (AS) and expanding the interval between the adherends (CP); the Adhesive Sheet (AS) is formed so AS to be curable by applying a predetermined energy (UV), and the separating device is provided with a first energy applying means (50) for applying the predetermined energy (UV) to the Adhesive Sheet (AS) in which the distance between the adherends (CP) is increased by the separating means (30), thereby curing the Adhesive Sheet (AS).
Description
Technical Field
The present invention relates to a separation apparatus and a separation method.
Background
Conventionally, a separating device is known in which the distance between a plurality of adherends adhered to an adhesive sheet is widened (for example, refer to patent document 1).
Prior art literature
Patent literature
Patent document 1: japanese patent application laid-open No. 2016-127124
However, in the conventional separating device described in patent document 1, for example, when a sheet-like body (adherend) in which the distance between the adhesive sheets is enlarged is conveyed together with the adhesive sheet, when the holding of the adhesive sheet by the holding means is eliminated, the tension applied to the adhesive sheet is released, and the state is brought close to the state before deformation, and thus, there is a problem in that the distance between the adherends is narrowed.
Disclosure of Invention
The present invention aims to provide a separation device and a separation method, which can prevent the mutual interval of adherends from being narrowed as far as possible even if tension applied to an adhesive sheet is released.
The present invention employs the structure described in the claims.
According to the present invention, since the predetermined energy is applied to the adhesive sheet formed to be curable by the predetermined energy being applied thereto and the adhesive sheet is cured, the distance between the adherends can be kept as small as possible even when the tension applied to the adhesive sheet is released.
Further, if the holding member mounting means is provided, the distance between the adherends can be further kept constant.
Further, if the cutting means is provided, the end portion of the adhesive sheet can be prevented from interfering with the conveyance when the objects to be adhered are conveyed on the adhesive sheet while being spaced apart from each other.
Further, if the second energy applying means is provided, the mutual distance between the adherends can be easily increased.
Drawings
Fig. 1 (a) is a plan view of a separation device according to an embodiment of the present invention, and fig. 1 (B) is a side view of fig. 1 (a);
fig. 2 (a) and 2 (B) are operation explanatory views of the separation device according to the embodiment of the present invention;
fig. 3 (a) to (C) are operation explanatory diagrams of the separating device according to the embodiment of the present invention;
fig. 4 (a) and 4 (B) are explanatory views of another example of the present invention.
Description of the marking
10. 10A: separation device
20: holding unit
30. 30A: separation unit
50: first energy imparting unit
60: second energy imparting unit
70. 70A: maintenance component mounting unit
80: cutting unit
90: abutting unit
AS: adhesive sheet
AS1: one side is provided with
CE: adhesive region of adherend
CP: adherends
HE: holding area
DM: spacing maintaining component
IR: infrared ray (another energy)
UV: ultraviolet ray (specified energy)
Detailed Description
Hereinafter, embodiments of the present invention will be described with reference to the drawings.
The X axis, the Y axis, and the Z axis of the present embodiment are in an orthogonal relationship, and the X axis and the Y axis are axes in a predetermined plane, and the Z axis is an axis orthogonal to the predetermined plane. Further, in the present embodiment, based on the case of viewing from the arrow BD direction parallel to the Y axis, when the direction is indicated without drawing of the reference, the arrow direction of the Z axis is defined as "up", the arrow direction of the Z axis is defined as "down", the arrow direction of the X axis is defined as "left", the arrow direction of the X axis is defined as "right", and the arrow direction of the Y axis is defined as "front", and the arrow direction of the Y axis is defined as "rear".
The separation device 10 of the present invention includes: a plurality of holding units 20 that hold end portions of an adhesive sheet AS to which a plurality of adherends CP are adhered on one surface AS 1; a separating unit 30 for relatively moving the holding unit 20 holding the end portion of the adhesive sheet AS to enlarge the interval between the adherends CP; a detection unit 40 such as a camera, a projector, or the like, or various sensors such as an optical sensor or an acoustic wave sensor, which can detect the mutual interval of the adherends CP, the collective shape of the adherends CP as a whole, or the like; a first energy applying unit 50 that applies ultraviolet rays UV AS predetermined energy to the adhesive sheet AS in a state in which the distance between the adherends CP is enlarged by the separating unit 30, thereby curing the adhesive sheet AS; a second energy applying unit 60 that applies infrared rays IR AS another energy to the adhesive sheet AS; a holding member mounting unit 70 for mounting the interval holding member DM to the adhesive sheet AS in a state in which the interval between the adherends CP is enlarged; and a cutting unit 80 for cutting the adhesive sheet AS.
The adhesive sheet AS has the following properties: an ultraviolet-curable adhesive layer is laminated on one surface of a base sheet, tension is applied thereto, and then when the tension is released and ultraviolet UV is not applied thereto, the state before deformation is approximated; the adhesive sheet is adopted as follows: the resin is cured by applying ultraviolet rays UV thereto, and is softened by applying infrared rays IR thereto.
The holding unit 20 includes a rotation motor 21 as a driving device, the rotation motor 21 being supported by the separation unit 30, and an upper holding member 22, the upper holding member 22 being supported by an output shaft 21A of the rotation motor 21.
The separation unit 30 includes a linear motor 31 as a driving device, and a lower holding member 32, and the lower holding member 32 is supported by a slider 31A of the linear motor 31 and supports the rotary motor 21 on the upper surface side.
The first energy applying unit 50 includes: an upper ultraviolet lamp 51 having a plurality of ultraviolet lamps disposed in an upper case UC; a plurality of lower ultraviolet lamps 52 are disposed in the lower casing BC. The upper and lower ultraviolet lamps 51 and 52 irradiate the entire adhesive sheet AS with ultraviolet rays UV.
The second energy applying unit 60 includes: a linear motor 61 as a driving device, which is provided with a slider 61A that moves in the Y-axis direction; a linear motor 62 as a driving means supported by the slider 61A and provided with a slider 62A that moves in the X-axis direction; a base 63 supported by the slider 62A; an infrared lamp 65 is supported on the base 63 via a bracket 64 and a lower casing BC. The infrared lamp 65 irradiates the adhesive sheet AS with infrared rays IR locally.
The maintenance component mounting unit 70 includes: linear motors 61, 62 and a base 63; a linear motor 71 as a driving means supported on the base 63; a support base 72 that is supported by the output shaft 71A of the linear motor 71 and has a support surface 72A, and the support surface 72A can support the interval maintaining member DM by a decompression means, not shown, such as a decompression pump or a vacuum ejector. In the case of the present embodiment, the interval maintaining member DM may be the following member: a double-sided adhesive sheet BA is attached to one side of the glass plate GP.
The cutting unit 80 includes: a multi-joint robot 81 as a driving device, which is constituted by a plurality of arms; a cutter 83 as a cutting member is supported by a distal end arm 81A, which is a working part of the articulated robot 81, through a bracket 82. The articulated robot 81 may be a so-called six-axis robot or the like capable of moving a support supported by the front end arm 81A to an arbitrary position and an arbitrary angle within the working range thereof, and for example, the articulated robot 111 exemplified in japanese patent application laid-open No. 2016-81974 or the like can be exemplified.
The operation of the separation device 10 will be described.
First, with respect to the separating apparatus 10 having the components standing by at the initial positions indicated by solid lines in fig. 1 (a) and (B), a user of the separating apparatus 10 (hereinafter, simply referred to as "user") inputs a signal for starting the automatic operation via an operation panel, an operation means not shown, such as a personal computer, or the like. Thereafter, the worker, a driving device, a conveying machine, or other conveying means, not shown, places the interval maintaining member DM on the support surface 72A with the double-sided adhesive sheet BA side on the upper side, and in this case, the maintaining member mounting means 70 drives a pressure reducing means, not shown, to start suction holding of the interval maintaining member DM. Then, the worker or a not-shown conveying unit places the adhesive sheet AS to which the plurality of adherends CP are adhered on the lower holding member 32, and in this case, the holding unit 20 drives the respective rotation motors 21, and holds the ends of the adhesive sheet AS by the upper holding member 22 and the lower holding member 32 AS indicated by two-dot chain lines in fig. 1 (B).
Next, the separating unit 30 drives the respective linear motors 31 to separate the holding units 20 from each other, and enlarges the mutual interval of the adherends CP. At this time, AS shown in fig. 2 (a), the distance between the adherends CP may not be increased to a predetermined distance due to the strain of the adhesive sheet AS or the like. Therefore, the detecting unit 40 drives the camera or the like, and detects the mutual interval of each adherend CP, the collective shape of each adherend CP as a whole, or the like. Next, based on the detection result of the detection unit 40, the separation unit 30 drives the respective linear motors 31 to move the respective holding units 20 individually so that the mutual interval of the respective adherends CP becomes a predetermined interval or so that the aggregate shape of the respective adherends CP as a whole is in a similar relationship with respect to the reference overall aggregate shape, as shown in fig. 2 (B). At this time, when the detecting means 40 detects the presence of the hard-to-open portions of the adherend CP that are difficult to open at the intervals therebetween, the second energy applying means 60 drives the linear motors 61, 62 and the infrared lamp 65, and irradiates the hard-to-open portions with infrared rays IR locally (see fig. 3 (a)). This softens the hardly opened portions, and the mutual spacing of the adherends CP is easily spread.
Thereafter, the first energy applying unit 50 drives the upper and lower ultraviolet lamps 51 and 52, and applies ultraviolet rays UV to one surface AS1 and the other surface AS2 of the adhesive sheet AS shown in fig. 3 (a), thereby curing the adhesive sheet AS so that the distance between the adherends CP is not narrowed. Next, the maintenance member mounting unit 70 drives the linear motors 61 and 62, disposes the interval maintenance member DM under the adherend CP having an enlarged interval therebetween, and thereafter drives the linear motor 71, and mounts the interval maintenance member DM on the other surface AS2 side of the adhesive sheet AS via the double-sided adhesive sheet BA AS shown in fig. 3 (B).
Thereafter, the cutting unit 80 drives the multi-joint robot 81, and AS shown in fig. 3 (C), cuts the adhesive sheet AS by making the cutter 83 to bypass the cutter 83 along the outer edge of the entire adherend CP for 1 week, thereby forming the following integrated body WK: the interval maintaining members DM are attached, and the interval between the adherends CP on the adhesive sheet AS is enlarged. Next, the cutting unit 80 drives the multi-joint robot 81 to return the cutter 83 to the initial position, and in this case, the maintenance member mounting unit 70 stops driving of a decompression unit, not shown, and releases the suction and holding of the interval maintenance member DM. Then, the worker or a not-shown conveying means conveys the integrated object WK to another process, and in this case, the holding means 20 drives the rotation motor 21 to release the holding of the adhesive sheet AS by the upper holding member 22 and the lower holding member 32. Then, the worker or a not-shown conveying unit removes the adhesive sheet AS portion remaining on the lower holding member 32, and in this case, each unit drives the respective driving means to return each member to the initial position, and thereafter, the same operation AS described above is repeated.
According to the separating apparatus 10 described above, since the ultraviolet UV is applied to the adhesive sheet AS formed to be curable by the ultraviolet UV, the distance between the adherends CP can be kept AS small AS possible even when the tension applied to the adhesive sheet AS is released.
The units and steps of the present invention are not limited in any way as long as the operations, functions, or steps described in the units and steps can be realized, and are not limited to the structures or steps of the single embodiment described in the above-described embodiments. For example, the holding means may be capable of holding the end portion of the adhesive sheet to which a plurality of adherends are adhered to at least one of the one surface and the other surface, and may be any means as long as it is within the technical scope (the same applies to other means and steps) by referring to common knowledge at the time of application.
As shown in fig. 4 (a), the separation device of the present invention may be configured as a separation device 10A, including: a holding unit 20; an abutting means 90 that abuts the adhesive sheet AS on the outer side of the adherend bonding region CE to which the plurality of adherends CP are adhered and on the inner side of the holding region HE held by the holding means 20; a separating unit 30A for relatively moving the holding unit 20 holding the end of the adhesive sheet AS and the abutting unit 90 to enlarge the interval between the adherends CP; a detection unit 40; a first energy imparting unit 50; a maintenance member mounting unit 70A for mounting the interval maintenance member DM to the adhesive sheet AS in a state in which the interval between the adherends CP is enlarged; and a cutting unit 80.
In the separation device 10A, members having the same structure and the same function as those of the separation device 10 are denoted by the same reference numerals as those of the separation device 10, and the description of the structure is omitted, thereby simplifying the description of the operation.
The separation unit 30A includes a linear motor 33 as a driving device, and a lower holding member 34, the linear motor 33 being supported on the base plate BP, the lower holding member 34 being supported on an output shaft 33A of the linear motor 33, and the rotating motor 21 being supported on the upper surface side.
The linear motor 73 as a driving device of the maintenance component mounting unit 70A includes a slider 73A that moves in the Y-axis direction, and a support base 72 is supported by the slider 73A via a linear motor 71.
The abutting means 90 includes a cylindrical abutting member 91, and the abutting member 91 is supported by the base plate BP and has a notch 91A formed on the near side to allow the holding member mounting means 70A to enter and exit. Inside the contact member 91, a support rod 91B for supporting the lower ultraviolet lamp 52 is provided.
In this separating apparatus 10A, when the adhesive sheet AS to which the plurality of adherends CP are adhered is placed on the lower holding member 34, AS in the separating apparatus 10, the holding unit 20 drives the rotating motor 21, and the ends of the adhesive sheet AS are held by the upper holding member 22 and the lower holding member 34 AS shown by two-dot chain lines in fig. 4 (a). The interval maintaining member DM is mounted on the support base 72 located outside (near side) the contact member 91, similarly to the separating device 10. AS shown in fig. 4, a ring-shaped frame RF is attached to the end of the adhesive sheet AS, but the frame RF may not be provided. Next, the separating unit 30A drives the linear motor 33, lowers the holding unit 20, and relatively moves the holding unit 20 and the abutting unit 90, as shown in fig. 4 (B), to expand the mutual interval of the adherends CP. Thereafter, similarly to the separating apparatus 10, the first energy applying unit 50 applies ultraviolet light UV to cure the adhesive sheet AS, and the maintenance member mounting unit 70A drives the linear motor 73 to dispose the interval maintenance member DM below the adherend CP having an enlarged interval therebetween. Then, AS in the separating apparatus 10, AS shown in fig. 4 (B), the interval maintaining member DM is mounted on the other surface AS2 side of the adhesive sheet AS by the maintaining member mounting means 70A, the adhesive sheet AS is cut by the cutting means 80, and then the integrated object WK is conveyed to another step.
The same effects as those of the separation device 10 can be obtained by the separation device 10A.
The holding means 20 may be configured to hold the end portions of the adhesive sheet AS to which the plurality of adherends CP are adhered on the other surface AS2, or both the one surface AS1 and the other surface AS2, or may be configured to hold the end portions of the adhesive sheet AS by a holding means such AS a mechanical chuck or a chuck pump, coulomb force, an adhesive, magnetic force, bernoulli adsorption, a driving device, or the like.
In the case of the separating device 10, the holding unit 20 may be configured of two units, for example, one unit for the holding unit 20 that moves rightward and one unit for the holding unit 20 that moves leftward, or may be configured of three or more units that move rightward, leftward, and other directions.
In the case of the separation device 10A, the holding unit 20 may be one unit or two or more units.
In this case, for example, the separating device 10 may be configured such that the holding unit 20 is supported by two sliders of a single linear motor one by one to enlarge the mutual spacing of the adherends CP, or may be configured such that the mutual spacing of the adherends CP is enlarged only in the uniaxial direction (for example, the X-axis direction, the Y-axis direction, or the like).
The separating unit 30 may be configured to expand the interval between the two or more axes (for example, the X-axis direction, the Y-axis direction, and the other axis directions), or may be configured to move the plurality of holding units 20 after moving in the X-axis direction in the Y-axis direction (to move the plurality of holding units 20 after moving in the Y-axis direction in the X-axis direction), or may be configured to expand the interval between the adherends CP, or may be configured to be unable to activate the interval between the adherends CP at a predetermined interval, or may be configured to cause the collective shape of the adherends CP as a whole to have a similar relationship with respect to the reference collective shape.
The separating unit 30A may stop or move the holding unit 20 and move the abutting unit 90, thereby relatively moving the holding unit 20 and the abutting unit 90 to enlarge the mutual interval of the adherends CP.
In this case, for example, the detection result of the detection unit 40 may be displayed on a display such as a monitor or a detector, and the separation units 30 and 30A may be configured such that the operator drives the linear motor 31 and the linear motor 33 so that the distance between the adherends CP becomes a predetermined distance or so that the collective shape of the adherends CP as a whole is similar to the reference collective shape, based on the detection result displayed on the display.
The detection means 40 may be visual observation by an operator, and for example, the operator may operate a button, lever, or the like to drive the linear motor 31 or the linear motor 33 so that the distance between the adherends CP becomes a predetermined distance or so that the aggregate shape of the adherends CP as a whole is similar to the reference overall aggregate shape, and the separation devices 10, 10A of the present invention may not include the detection means 40.
The first energy applying means 50 may be configured to apply a first energy to at least one of the one surface AS1 side and the other surface AS2 side of the adhesive sheet AS, and may apply a first energy to the adhesive sheet AS by an electromagnetic wave of an arbitrary wavelength (for example, X-ray, infrared ray, or the like), a fluid such AS a heated or cooled gas, a liquid, or the like, and may be any energy AS long AS the first energy capable of curing the adhesive sheet AS can be applied according to the configuration of the adhesive sheet AS, and may be a single or a plurality of lamps, or may be disposed in the upper case UC, or may be disposed in the lower case BC, or may not be disposed in the upper case UC or the lower case BC, or may not be a structure in which the first energy is locally applied to the adhesive sheet AS itself, or may be any of lamps such AS an LED (Light Emitting Diode, a light emitting diode), a high-pressure mercury lamp, a low-pressure lamp, a metal halide lamp, a xenon lamp, a halogen lamp, or the like, and may be a combination of these lamps AS appropriate.
The second energy applying means 60 may be configured to apply second energy to at least one of the one surface AS1 side and the other surface AS2 side of the adhesive sheet AS, electromagnetic waves (for example, X-rays, infrared rays, and the like), heated or cooled gas, liquid, and the like of any wavelength may be applied AS the second energy to the adhesive sheet AS, and any energy may be applied to the adhesive sheet AS according to the configuration of the adhesive sheet AS, a single or a plurality of the second energies may be disposed in the upper case UC, a single or a plurality of the second energies may be disposed in the lower case BC, a configuration of the second energies may not be disposed in the upper case UC or the lower case BC, or a configuration of the second energies may be applied to the entire adhesive sheet AS the infrared lamp 65, any lamp such AS an LED lamp, a high-pressure mercury lamp, a low-pressure mercury lamp, a metal halide lamp, a xenon lamp, or a halogen lamp may be used, and the second energy applying means 60 may not be provided in the separator 10 of the present invention.
The holding member mounting units 70, 70A may be configured to support the space holding members DM by a holding unit such AS a mechanical chuck or a chuck pump, coulomb force, an adhesive, a magnetic force, bernoulli suction, a driving device, or the like, and the separating device 10, 10A of the present invention may not be provided with the holding member mounting units 70, 70A, and thus, even if the holding member mounting units 70, 70A are not provided, the adhesive sheet AS is cured in a state in which the mutual space of the adherends CP is widened, and therefore, even if the tension applied to the adhesive sheet AS is released, the mutual space of the adherends can be kept AS narrow AS possible.
The retaining member mounting units 70 and 70A may mount the annular or non-annular space retaining member DM on one surface AS1 or the other surface AS2 of the adhesive sheet AS in which the space between the adherends CP is enlarged, or may mount the space retaining member DM on the adhesive sheet AS after, before, or simultaneously with the first energy is applied to the adhesive sheet AS.
The cutting means 80 may be used as a cutting member instead of the cutter 83, such as laser cutting, ion beam, flame, heat, water pressure, heating wire, blowing of gas or liquid, or the like, or the cutting member may be moved by a combination of appropriate driving devices to cut, and the separating apparatus 10, 10A of the present invention may not be provided with the cutting means 80.
The contact means 90 may be a contact member 91 having a shape other than a prismatic shape, an elliptical shape, or the like, such as a cylinder, a prism, or an ellipse.
The separation device 10A may be provided with the second energy applying unit 60, or may be configured such that the holding member attaching unit 70A is disposed inside the contact member 91, and the holding member attaching unit 70A does not come in and out of the inside of the contact member 91, and in this case, the holding member attaching unit 70A may be the wireless motor 73, and the contact member 91 may be the non-notched 91A.
The space maintaining member DM may be a member made of, for example, metal, resin, wood, or ceramic instead of the glass plate GP, may be a member attached to the adhesive sheet by an adhesive, wettability, magnetic attachment, adsorption, bernoulli adsorption, or the like, may be a cup-shaped or pan-shaped member having an outer edge thicker than other regions, may be a member made of the adhesive sheet AS itself or another adhesive sheet different from the adhesive sheet AS, and may be any member having rigidity against a force to bring the adhesive sheet AS close to a state before deformation, or may be any member having a shape.
The material, type, shape, and the like of the adhesive sheet AS, the double-sided adhesive sheet BA, the other adhesive sheet, and the adherend CP of the present invention are not particularly limited. For example, the adhesive sheet AS is not limited in any way AS long AS it is cured by being applied with the first energy. Further, the adhesive sheet AS, the double-sided adhesive sheet BA, and the other adhesive sheet may be, for example, a polygonal shape such AS a circle, an ellipse, a triangle, or a quadrangle, or may be an adhesive sheet of a pressure-sensitive adhesive type or a heat-sensitive adhesive type, and in the case of using the heat-sensitive adhesive type, the adhesive may be bonded by a suitable method such AS providing a suitable coil heater for heating the adhesive sheet or a heating means such AS a heating side of a heat pipe. The adhesive sheet AS may be one which is not softened by the application of the second energy. Further, the adhesive sheet AS and other adhesive sheets may be: for example, the double-sided adhesive sheet or the double-sided adhesive sheet BA may have a single-layer or multi-layer intermediate layer, or a single-layer or multi-layer structure, such as a single-layer structure of only the adhesive layer, a structure having an intermediate layer between the substrate and the adhesive layer, a structure having three or more layers such as a cover layer on the upper surface of the substrate, or a structure capable of separating the substrate from the adhesive layer. The adherend CP may be: for example, a single body such as a food, a resin container, a semiconductor wafer such as a silicon semiconductor wafer or a compound semiconductor wafer, a semiconductor chip, a circuit board, an information recording board such as an optical disk, a glass plate, a steel plate, a ceramic, a wood plate, or a resin may be used, or a composite of two or more of the single bodies may be used, and any type of member, article, or the like may be used. The adhesive sheet AS may be replaced by a functional or functional call, or may be: for example, any sheet, film, tape, etc. such as information recording labels, decorative labels, protective sheets, dicing tapes, die bonding films, patch tapes, recording layer forming resin sheets, etc.
The number of the adherends CP may be plural in advance on the adhesive sheet AS, or may be plural in number on the adhesive sheet AS while the separation units 30, 30A apply tension to the adhesive sheet AS. AS the adherend CP configured such that a plurality of pieces exist at the time of applying tension to the adhesive sheet AS, for example, a semiconductor wafer is irradiated with laser light, a brittle line such AS a line shape or a lattice shape is formed on the semiconductor wafer, and the plurality of pieces of adherend CP are formed by singulation at the time of applying tension to the adhesive sheet AS; alternatively, for example, the resin or glass plate is cut by a cutter, and a plurality of adherends CP are formed on the resin or glass plate in the form of a line, a lattice, or the like, without going through predetermined cut lines of the front and back surfaces, predetermined cut lines of the perforations, or the like, at the time of applying tension to the adhesive sheet AS, without limitation.
The driving device according to the above embodiment may be an electric device such as a rotary motor, a linear motor, a single-axis robot, or a multi-joint robot, a cylinder, a hydraulic cylinder, a rodless cylinder, or a driver such as a swinging cylinder, or may be a combination of these directly or indirectly.
Claims (4)
1. A separation device is characterized by comprising:
a plurality of holding units that hold an end portion of an adhesive sheet to which a plurality of adherends are adhered only on one surface;
a separation unit that deforms the adhesive sheet by relatively moving the holding unit that holds an end portion of the adhesive sheet, thereby expanding a mutual interval of the adherends;
the adhesive sheet is formed so as to be curable by applying predetermined energy,
the separation device is provided with:
a first energy applying unit that applies the predetermined energy to the adhesive sheet in which the distance between the adherends is increased by the separating unit, thereby curing the adhesive sheet;
and a holding member mounting means for mounting a spacing holding member that has rigidity against a force that brings the adhesive sheet close to a state before deformation, and that abuts only on the other surface of the adhesive sheet in a state in which the mutual spacing of the adherends is enlarged, and that holds the mutual spacing of the adherends with the spacing enlarged.
2. A separation device is characterized by comprising:
a holding unit that holds an end portion of an adhesive sheet to which a plurality of adherends are adhered only on one surface;
an abutting means for abutting the adhesive sheet on the outside of the adhesive region of the adhesive sheet to which the plurality of adherends are adhered, and on the inside of the holding region held by the holding means;
a separation unit that deforms the adhesive sheet by relatively moving the holding unit and the abutting unit that hold the end portion of the adhesive sheet, thereby expanding the mutual interval of the adherends;
the adhesive sheet is formed so as to be curable by applying predetermined energy,
the separation device is provided with:
a first energy applying unit that applies the predetermined energy to the adhesive sheet in which the distance between the adherends is increased by the separating unit, thereby curing the adhesive sheet;
and a holding member mounting means for mounting a spacing holding member that has rigidity against a force that brings the adhesive sheet close to a state before deformation, and that abuts only on the other surface of the adhesive sheet in a state in which the mutual spacing of the adherends is enlarged, and that holds the mutual spacing of the adherends with the spacing enlarged.
3. A separation method characterized by comprising:
a holding step of holding, by a plurality of holding means, an end portion of an adhesive sheet to which a plurality of adherends are adhered only on one surface;
a separation step of expanding a mutual interval of the adherends by deforming the adhesive sheet by relatively moving the holding means holding the end portion of the adhesive sheet;
the adhesive sheet is formed so as to be curable by applying predetermined energy,
the separation method comprises the following steps: a first energy applying step of applying the predetermined energy to the adhesive sheet in which the distance between the adherends is increased in the separating step, thereby curing the adhesive sheet;
and a holding member mounting step of mounting a gap holding member that has rigidity against a force to bring the adhesive sheet close to a state before deformation, and that abuts only the other surface of the adhesive sheet in a state in which the mutual gap between the adherends is enlarged, and that holds the mutual gap between the adherends with the gap enlarged.
4. A separation method characterized by comprising:
a holding step of holding an end portion of an adhesive sheet having a plurality of adherends adhered to only one surface thereof by a holding means;
a separation step of deforming the adhesive sheet by relatively moving an abutting means that abuts against the adhesive sheet on the outer side of an adherend bonding region of the adhesive sheet to which the plurality of adherends are adhered and on the inner side of a holding region held by the holding means, and the holding means holding an end portion of the adhesive sheet, so as to expand the mutual interval of the adherends;
the adhesive sheet is formed so as to be curable by applying predetermined energy,
the separation method comprises the following steps:
a first energy applying step of applying the predetermined energy to the adhesive sheet in which the distance between the adherends is increased in the separating step, thereby curing the adhesive sheet;
and a holding member mounting step of mounting a gap holding member that has rigidity against a force to bring the adhesive sheet close to a state before deformation, and that abuts only the other surface of the adhesive sheet in a state in which the mutual gap between the adherends is enlarged, and that holds the mutual gap between the adherends with the gap enlarged.
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| JP2017-078140 | 2017-04-11 | ||
| JP2017078140A JP7073606B2 (en) | 2017-04-11 | 2017-04-11 | Separation device and separation method |
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| CN108695195B true CN108695195B (en) | 2023-06-13 |
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| KR (1) | KR102506718B1 (en) |
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| JP7108516B2 (en) * | 2018-10-25 | 2022-07-28 | リンテック株式会社 | Sheet pasting method |
| JP6831035B1 (en) * | 2020-09-11 | 2021-02-17 | リンテック株式会社 | Individual piece manufacturing method and individual piece manufacturing equipment |
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| Publication number | Publication date |
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| JP2018182017A (en) | 2018-11-15 |
| JP7073606B2 (en) | 2022-05-24 |
| TWI778024B (en) | 2022-09-21 |
| CN108695195A (en) | 2018-10-23 |
| TW201838002A (en) | 2018-10-16 |
| KR20180114831A (en) | 2018-10-19 |
| KR102506718B1 (en) | 2023-03-06 |
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