JP6180120B2 - Expansion device and expansion method - Google Patents

Expansion device and expansion method Download PDF

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JP6180120B2
JP6180120B2 JP2013010813A JP2013010813A JP6180120B2 JP 6180120 B2 JP6180120 B2 JP 6180120B2 JP 2013010813 A JP2013010813 A JP 2013010813A JP 2013010813 A JP2013010813 A JP 2013010813A JP 6180120 B2 JP6180120 B2 JP 6180120B2
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direction
clamping means
sheet
clamping
means
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JP2014143297A (en
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高澤 徹
徹 高澤
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株式会社ディスコ
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  In the present invention, a workpiece in which a dividing start point is formed along a plurality of intersecting scheduled lines, or a workpiece divided into individual chips along a plurality of intersecting scheduled lines is attached. The present invention relates to an expansion device and an expansion method for expanding a sheet to form an interval between adjacent chips.

  For example, in a manufacturing process of a semiconductor device, a semiconductor wafer on which a large number of devices having electronic circuits are formed is divided along a grid-like division planned line that divides a formation region of each device, thereby It is divided into a large number of semiconductor chips having As a means for dividing a thin plate-like workpiece such as a semiconductor wafer into fine chips in this way, in recent years, a laser beam having a wavelength that is transparent to the workpiece is focused on the inside of the workpiece. By irradiating along the planned dividing line in the positioned state, a modified layer whose strength is weaker than other parts is formed inside the workpiece along the planned dividing line. A method has been proposed in which an external force is applied to divide a workpiece from a modified layer (PTL 1). In addition, in such a dividing method, a technique is also known in which, after forming the modified layer as described above, the workpiece is ground or polished to thin it, and the workpiece is divided along with this thinning step. (Patent Document 2).

  In the dividing method described in Patent Document 2, since the divided surfaces of the workpieces are in close contact with each other, chipping and cracking can be prevented. By the way, in the state where the divided surfaces of the workpieces are kept in close contact with each other, there is a risk that adjacent chips may come into contact with each other and be damaged during handling. Therefore, a sheet is attached to the workpiece divided into a plurality of chips. The space is formed between the chips by expanding the sheet. On the other hand, an expansion device is known in which an external force is applied to a workpiece by dividing the sheet attached to the workpiece to divide the chip into chips, and an interval is formed between the chips (Patent Document 3).

Japanese Patent No. 3408805 Japanese Patent No. 3762409 JP 2011-77482 A

  In the expansion device described in Patent Document 3, since the sheet is expanded radially, the expansion amount of the sheet is substantially uniform in any direction. For this reason, for example, in the case of rectangular shapes having different chip sizes in the vertical and horizontal directions, they are formed between the chips in the first direction and the second direction, that is, the long side direction (vertical direction) and the short side direction (horizontal direction) of the chip. Even if a sufficient inter-chip distance is formed in one direction, the inter-chip distance is insufficient in the other direction, which may cause a problem that adjacent chips come into contact with each other during handling. .

  The present invention has been made in view of the above circumstances, and its main technical problem is to extend the sheet so that the distance between the chips becomes an appropriate distance even in workpieces having different vertical and horizontal sizes of the chips. It is an object of the present invention to provide an expansion device and an expansion method capable of performing the above.

The expansion device of the present invention is applied to a workpiece in which a division start point is formed along a plurality of intersecting scheduled lines or a workpiece divided into individual chips along a plurality of intersecting scheduled lines. An expansion device that expands a seated sheet to form an interval between adjacent chips, and is disposed to face each other with a workpiece sandwiched in a first direction, and is arranged on the opposite surfaces of the first direction. In the second direction orthogonal to the first direction, the first clamping means, and the second clamping means for sandwiching the sheet with the rollers, respectively. There are rollers arranged opposite to each other with a work piece interposed between them and rotatably supported around a rotation axis parallel to the second direction on the opposing surfaces, and the rollers sandwich the sheet respectively. The third gripper And the fourth clamping means, the first clamping means and the second clamping means are movable in directions away from each other in the first direction, and the third clamping means and the fourth clamping means are Moving means capable of moving in directions away from each other in two directions, imaging means for imaging a workpiece to form a captured image, and distance between chips of the workpiece in the captured image formed by the imaging means Control means for controlling the moving means based on the above.

Further, the expansion method of the present invention provides a workpiece in which division start points are formed along a plurality of intersecting scheduled lines, or a workpiece divided into individual chips along a plurality of intersecting scheduled lines. Is an expansion method for expanding a sheet to which a sheet is attached to form an interval between adjacent chips, in which a sheet is formed by a first clamping unit and a second clamping unit facing each other with a workpiece sandwiched in a first direction. A sandwiching step of sandwiching a sheet by a third sandwiching means and a fourth sandwiching means facing each other with the workpiece sandwiched in a second direction orthogonal to the first direction, and the first sandwiching means, A first expansion step of expanding the sheet in the first direction by moving the first clamping unit and the second clamping unit away from each other in a state where the second clamping unit clamps the sheet; The third sandwich A second expansion step of expanding the sheet in the second direction by moving the third clamping means and the fourth clamping means away from each other in a state where the step and the fourth clamping means sandwich the sheet. And detecting the top surface of the workpiece with an imaging means to form a captured image and detecting the inter-chip distance of the workpiece in the captured image, the first extension step and the second extension in the step, the detection step in said first clamping means on the basis of the distance between chips it is detected that the second clamping means and the third clamping means and the fourth clamping means is found by moving the first The first clamping means and the second clamping means have rollers configured to be rotatably supported on opposite surfaces with a rotation axis parallel to the first direction as a center, and each of the rollers holds the sheet. The third clamping means and the fourth clamping means have rollers supported on opposite surfaces so as to be rotatable about a rotation axis parallel to the second direction, and each of the rollers is used to clamp the sheet. It is characterized by comprising .

  According to the present invention, the distance between the chips is detected from a captured image obtained by imaging the workpiece, and the sheet is expanded in the first direction and the second direction so that the detected distance between the chips becomes an appropriate distance. Control can be performed. As a result, even if the workpieces have different vertical and horizontal sizes, the distance between the chips in the first direction (for example, the horizontal direction of the chip) and the second direction (for example, the vertical direction of the chip) will be appropriate. As a result, it is possible to reduce the risk that the distance between chips is insufficient and adjacent chips come into contact with each other during handling. Further, it is possible to reduce a risk that the sheet is excessively expanded and broken.

  According to the present invention, it is possible to provide an expansion device and an expansion method that can expand a sheet so that the distance between chips is an appropriate distance even in workpieces having different vertical and horizontal sizes.

It is a top view showing the state where the work concerning one embodiment of the present invention was stuck on the sheet. It is a perspective view of the expansion device concerning one embodiment of the present invention. It is a top view which shows the clamping step of the expansion method of one Embodiment of this invention. It is a side view which shows the clamping step. It is a top view which shows the 1st and 2nd expansion step of the expansion method of one Embodiment. It is a side view which shows the 1st and 2nd expansion step. It is a figure which shows the picked-up image of the to-be-processed object by an imaging means, Comprising: (a) Before sheet expansion, (b) During sheet expansion: Detection step of expansion method of one embodiment, (c) First, not one embodiment The case where the expansion amount in the direction and the second direction is the same is shown. It is a top view which shows simply the example of a change of the expansion apparatus which concerns on this invention.

Hereinafter, an embodiment of the present invention will be described with reference to the drawings.
[1] Workpiece FIG. 1 shows a state in which a workpiece 10 of one embodiment is stuck on a sheet 1. The workpiece 10 is a disk-shaped wafer such as a semiconductor wafer or an optical device wafer. A plurality of division lines 101 that intersect at right angles with each other are set in a lattice shape on the surface of the workpiece 10, and the workpiece 10 according to the present invention has no division start points formed along the division lines 101. A rectangular region divided by the planned division line 101 along the planned division line 101 where the division start point is formed is divided into individual chips 102 in advance.

  For example, before or after the workpiece 10 is attached to the sheet 1, the division starting point is formed along the division line 101. Then, when an external force is applied by, for example, grinding the workpiece 10 in a state where the division starting point is formed and adhered to the sheet 1, the workpiece 10 is adhered to the chip 102 while being adhered to the sheet 1. It is in a divided state. In the following description of the present embodiment, it is assumed that the workpiece 10 is divided into individual chips 102.

  In addition to the above-described modified layer formed in the workpiece 10 by laser beam irradiation, a division start point formed along the planned division line 101 forms a groove along the planned division line 101 on the surface of the workpiece 10. And this groove | channel can also be made into a division | segmentation starting point. The groove can be formed, for example, by performing ablation processing by laser irradiation, cutting processing for cutting a cutting blade, or groove processing such as scribing.

  The sheet 1 is a sheet in which an adhesive layer to which the workpiece 10 is stuck is formed on one surface of an expandable synthetic resin sheet such as polyvinyl chloride or polyolefin. In this case, the sheet 1 is more than the workpiece 10. A large square shape is used. In this case, each rectangular chip 102 obtained by dividing the workpiece 10 is rectangular.

  In the embodiment, the workpiece 10 is a wafer such as a semiconductor wafer. However, the workpiece in the present invention is not limited to this type of material, and an adhesive sheet such as DAF (Die Attach Film) for chip mounting. In addition, various plate-like objects such as those in which DAF is attached to a wafer divided into chips, glass, ceramics, resin, and the like can be objects of the workpiece.

[2] Expansion Device Next, an expansion device according to an embodiment shown in FIG. 2 for expanding the sheet 1 to which the workpiece 10 is attached will be described. The expansion device 2 includes a square fixed base 20 with four corners formed at right angles, and a sheet 1 disposed on the fixed base 20 and having a workpiece 10 attached thereto mounted horizontally. A disc-shaped holding table 3 to be placed, a first clamping means 4A, a second clamping means 4B, a third clamping means 4C, and a fourth clamping means 4D for clamping the sheet 1 placed on the holding table 3, The first moving means 5A, the second moving means 5B, and the third and fourth holding means 4C are provided for each of the holding means 4A to 4D and move the first and second holding means 4A to 4B in the first direction, respectively. -4D are respectively provided with 3rd moving means 5C and 4th moving means 5D which move to 2nd direction.

  The holding table 3 is supported on the upper surface of the central portion of the fixed base 20 via a cylindrical table 30. The holding table 3 is rotatably supported on the cylindrical table 30 by a rotating mechanism (not shown), and supported on the cylindrical table 30 by a vertical movement mechanism (not shown). The upper surface of the holding table 3 has a diameter on which the workpiece 10 can be placed, and the sheet 1 to which the workpiece 10 is attached is arranged concentrically with the workpiece 10 on the upper side. It is placed on the upper surface of the holding table 3 in the arranged state.

  At the center of each of the four edges 200a, 200b, 200c, and 200d of the fixed base 20, a rectangular protrusion 201 that protrudes outward is formed. A portion of the fixed base 20 extending from each convex portion 201 to the inside of the convex portion 201 (on the holding table 3 side) has a rectangular first guide groove 201a extending along the direction in which the corresponding convex portion 201 extends, and the second A guide groove 201b, a third guide groove 201c, and a fourth guide groove 201d are formed.

  As shown in FIG. 2, in this case, the extending direction of the pair of parallel edges 200c and 200d of the fixed base 20 is the first direction, the direction orthogonal to the first direction, and the extending direction of the edges 200a and 200b. In the second direction, the first clamping means 4A and the second clamping means 4B are respectively arranged at both ends of the fixed base 20 in the first direction, and the third clamping means 4C and the fourth clamping means are arranged at both ends in the second direction side. The clamping means 4D are respectively disposed.

  The first moving means 5A and the second moving means 5B reciprocate the first holding means 4A and the second holding means 4B in the first direction, respectively. The third moving means 5C and the fourth moving means 5D The three clamping means 4C and the fourth clamping means 4D are reciprocated along the second direction, respectively.

  The first clamping means 4A and the second clamping means 4B face each other across the holding table 3 in the first direction, and are arranged so as to be movable in the first direction with respect to the first guide groove 201a and the second guide groove 201b, respectively. Has been. Further, the third clamping means 4C and the fourth clamping means 4D face each other with the holding table 3 in the second direction, and can move in the second direction with respect to the third guide groove 201c and the fourth guide groove 201d, respectively. It is arranged.

  The first to fourth clamping means 4A to 4D have the same configuration, and an L-shaped movable base 41 that is movably incorporated along the guide grooves 201a to 201d, and moves up and down inside the movable base 41. A lower holding mechanism 42 and an upper holding mechanism 43 that are detachably mounted, and a lower moving mechanism 44 and an upper moving mechanism 45 that move the holding mechanisms 42 and 43 in the vertical direction, respectively, are provided.

  The movable base 41 includes a slide part 411 slidably fitted in the guide grooves 201a to 201d, and a support part 412 erected on the outer end of the slide part 411.

  A guide rail 412 a extending in the vertical direction is formed on the inner surface of the support portion 412. A guide groove 412b extending in the vertical direction is formed on the outer surface of the support portion 412. Further, a guide hole 412c extending in the vertical direction penetrating from the inner surface of the guide rail 412a to the guide groove 412b is formed in the support portion 412.

  The first to fourth moving means 5A to 5D for moving the first to fourth clamping means 4A to 4D along the guide grooves 201a to 201d, respectively, have the same configuration, and are screwed into the slide portion 411 to guide the guide grooves 201a to 201d. The screw rod 51 extends along the 201d, and the pulse motor 52 is provided on the convex portion 201 and drives the screw rod 51 to rotate forward and backward. The tip of the screw rod 51 is rotatably supported by bearings 53 that are respectively fixed inside guide grooves 201 a to 201 d on the fixed base 20.

  The slide portion 411 of the movable base 41 to which the screw rod 51 is screwed is moved from the outside to the inside or from the inside to the outside along the guide grooves 201a to 201d according to the rotation direction of the screw rod 51 that is rotationally driven by the pulse motor 52. Thus, the first and second clamping means 4A, 4B are reciprocated in the first direction, and the third and fourth clamping means 4C, 4D are reciprocated in the second direction. Therefore, the first moving means 5A and the second moving means 5B can move the first holding means 4A and the second holding means 4B in directions away from each other in the first direction, and the third moving means 5C and the second moving means 5B can move. The four moving means 5D can move the third clamping means 4C and the fourth clamping means 4D in directions away from each other in the second direction.

  The lower clamping mechanism 42 includes an arm portion 421 extending inwardly supported along the guide rail 412a so as to be movable up and down, and a lower clamping portion fixed to the tip of the arm portion 421 at right angles to the arm portion 421. 422 and a T-shape. The base end portion 421c of the arm portion 421 passes through the guide hole 412c and is disposed in the outer guide groove 412b.

  The lower clamping part 422 of the first and second clamping means 4A, 4B extends parallel to the second direction, and the lower clamping part 422 of the third and fourth clamping means 4C, 4D is parallel to the first direction. It extends. The lower clamping part 422 is formed in a rectangular parallelepiped shape, and a plurality of rollers 423 are arranged close to each other on the upper surface thereof. The rollers 423 of the first and second clamping means 4A, 4B are supported by the lower clamping part 422 so as to be rotatable about a rotation axis parallel to the first direction, and the third and fourth clamping means 4C, 4D The roller 423 is supported by the lower clamping portion 422 so as to be rotatable about a rotation axis parallel to the second direction. The roller 423 is mounted such that about half of the outer peripheral surface protrudes from the upper surface of the lower clamping portion 422.

  The upper clamping mechanism 43 disposed on the upper side of the lower clamping mechanism 42 has a configuration that is generally vertically symmetric with the lower clamping mechanism 42, and faces inwardly supported so as to be vertically movable along the guide rail 412a. The arm portion 431 is formed in a T-shape including an arm portion 431 that extends and an upper holding portion 432 that is fixed to the tip of the arm portion 431 at a right angle to the arm portion 431 and is disposed to face the lower holding portion 422. Yes. The base end portion 431c of the arm portion 431 passes through the guide hole 412c and is disposed in the outer guide groove 412b.

  The upper clamping parts 432 of the first and second clamping means 4A, 4B extend in parallel with the second direction, and the upper clamping parts 432 of the third and fourth clamping means 4C, 4D extend in parallel with the first direction. Yes. The upper clamping part 432 is formed in a rectangular parallelepiped shape, and a plurality of rollers 433 are arranged close to each other on the lower surface thereof as shown in FIG. These rollers 433 are arranged so as to be paired with the respective rollers 423 of the lower holding portion 422, and the rollers 433 of the first and second holding means 4A and 4B rotate around a rotation axis parallel to the first direction. The rollers 433 of the third and fourth clamping means 4C and 4D are supported by the upper clamping unit 432 so as to be rotatable about a rotation axis parallel to the second direction. The roller 433 is mounted such that about half of the outer peripheral surface protrudes from the lower surface of the upper clamping portion 432.

  The lower holding mechanism 42 and the upper holding mechanism 43 can reciprocate the support portion 412 in the vertical direction along the guide rail 412a by the lower moving mechanism 44 and the upper moving mechanism 45, respectively.

  The lower moving mechanism 44 is screwed into the base end portion 421c of the arm portion 421, and is disposed at a lower end portion of the guide groove 412b and a screw rod 441 extending in the vertical direction along the guide groove 412b. And a pulse motor 442 for forward / reverse rotation driving. The upper end of the screw rod 441 is rotatably supported by a bearing 443 fixed in the guide groove 412b. The base end portion 421c into which the screw rod 441 is screwed is sent up and down along the guide groove 412b in accordance with the rotation direction of the screw rod 441 that is rotationally driven by the pulse motor 442, whereby the lower clamping mechanism 42 is moved up and down. Be moved.

  The upper moving mechanism 45 disposed on the upper side of the lower moving mechanism 44 has a configuration that is generally symmetrical with the lower moving mechanism 44, and is screwed into the base end portion 431c of the arm portion 431 to guide the guide groove 412b. And a pulse motor 452 that is disposed at the upper end of the support portion 412 and that drives the screw rod 451 to rotate forward and backward. The lower end of the screw rod 451 is rotatably supported by a bearing 453 fixed in the guide groove 412b. The base end portion 431c into which the screw rod 451 is screwed is sent up and down along the guide groove 412b in accordance with the rotation direction of the screw rod 451 that is rotationally driven by the pulse motor 452, whereby the upper clamping mechanism 43 moves up and down. Be made.

  As shown in FIG. 2, an imaging unit 6 including a microscope or the like that images the upper surface of the workpiece 10 placed on the holding table 3 via the sheet 1 is provided above the holding table 3. Etc. are supported and arranged. The imaging unit 6 forms a captured image of the captured workpiece 10, and the image data is sent to the control unit 7. As shown in FIG. 7A, the range (view angle) captured by the imaging means 6 is one of the intersections at the boundary corresponding to the planned division line 101 between the divided chips 102 and one of the chips 102 around the intersection. Part. The imaging means 6 is arranged in a fixed state or movable up and down and / or laterally.

  The control means 7 sends an operation control signal to each pulse motor 52 of the first to fourth moving means 5A to 5D. The control means 7 detects the distance between the chips 102 of the workpiece 10 included in the image data of the picked-up image sent from the image pickup means 6, and controls the operation of each pulse motor 52 based on the distance between the chips 102. Thus, the movement of the first and second clamping means 4A and 4B in the first direction and the movement of the third and fourth clamping means 4C and 4D in the second direction are controlled. This control mode will be described in detail in the following expansion method.

[3] Expansion method Next, the expansion device 2 is used to expand the sheet 1 on which the workpieces 10 divided into individual chips 102 are adhered along the planned division line 101, and adjacent chips 102 are expanded. An expansion method according to an embodiment in which an interval is formed therebetween will be described.

  First, the sheet 1 on which the workpiece 10 is adhered is placed on the upper surface of the holding table 3 in a state where the workpiece 10 is arranged on the upper side and arranged concentrically. In this case, as shown in FIG. 3, the short side direction (lateral direction) of each rectangular chip 102 is parallel to the first direction, and the long side direction (vertical direction) is parallel to the second direction. The sheet 1 is placed on the upper surface of the holding table 3. Alternatively, the workpiece 10 placed on the upper surface of the holding table 3 via the sheet 1 is imaged by the imaging means 6, and the short side direction of each chip 102 of the workpiece 10 is based on the captured image. An alignment step is performed in which the holding table 3 is rotated by a rotation mechanism (not shown) so as to be parallel to one direction.

  Therefore, the short side and the long side of each chip 102 are directed to the first to fourth clamping means 4A to 4D, respectively, the short side of each chip 102 is parallel to the first direction, and the long side of each chip 102 is the first side. Parallel to two directions. At this time, the holding table 3 has an upper surface at a height intermediate between the lower holding portion 422 of the lower holding mechanism 42 of the first to fourth holding means 4A to 4D and the upper holding portion 432 of the upper holding mechanism 43. Positioned.

  Next, the first to fourth moving means 5A to 5D are operated to move the first and second holding means 4A and 4B appropriately in the first direction, and the third and fourth holding means 4C and 4D are moved to the second direction. The edge of the sheet 1 is clamped between the lower clamping unit 422 of each lower clamping mechanism 42 and the upper clamping unit 432 of each upper clamping mechanism 43 by appropriately moving in the direction. Each clamping means 4A-4D is positioned at a position where it can be moved. Then, each lower moving mechanism 44 and each upper moving mechanism 45 are operated to raise each lower holding portion 422 and lower each upper holding portion 432, and as shown in FIGS. In a horizontal state, the respective edges of the four sides of the sheet 1 are clamped by the rollers 423 and 433 of the clamping units 422 and 432 (a clamping step).

  The state in which the edges of the four sides of the sheet 1 are clamped by the plurality of upper and lower rollers 433 and 423 of each clamping means 4A to 4D is held, and then the first to fourth moving means 5A to 5D are operated, 5 and 6, the first and second clamping means 4A, 4B are moved outward in the first direction so as to be separated from each other, and the sheet 1 is expanded in the first direction (first expansion step). At the same time, the sheet 1 is expanded in the second direction by moving the third and fourth clamping means 4C, 4D outward in the second direction so as to be separated from each other (second expansion step). By expanding the sheet 1 in the first direction and the second direction, an interval is formed between the divided chips 102. When the sheet 1 is expanded, the rollers 423 and 433 of the lower clamping unit 422 and the upper clamping unit 432 roll following the expansion of the edge of the sheet 1, and the sheet 1 is moved in the first direction and the second direction. Smoothly expanded in the direction.

  In addition, when the workpiece 10 is not divided into individual chips 102 and the division starting point is formed along the planned division line 101, when the first expansion step and the second expansion step are performed, As the sheet 1 is expanded, an external force is applied to the workpiece 10, and the workpiece 10 is broken along the scheduled division line 101 where the division start points are formed and divided into individual chips 102. As the sheet 1 expands, a gap is formed between the chips 102.

  Further, the upper surface of the workpiece 10 is imaged by the imaging means 6 while performing the first expansion step and the second expansion step. The imaging unit 6 forms a captured image and sends the image data to the control unit 7. Then, the control means 7 detects a distance 103A in the first direction side between the chips 102 shown in FIG. 7B and a distance 103C in the second direction side from the image data (detection step).

  That is, the first and second expansion steps and the detection step are performed simultaneously, and the control means 7 detects the distances 103A and 103C between the chips 102 on the first direction side and the second direction side while detecting these chips 102. The first and second clamping means 4A and 4B on the first direction side and the third and fourth clamping means 4C and 4D on the second direction side are moved so that the distances 103A and 103C between them become a desired distance. .

  Such sheet expansion control by the control means 7 is performed, for example, when the desired distance between the chips 102 on the first direction side and the second direction side is 50 μm or more, as described above. By operating 5D, the first to fourth clamping means 4A to 4D are moved outward to expand the sheet 1, and the distances 103A and 103C between the first direction side and the second direction side between the expanding chips 102 are increased. Detect continuously. When the distances 103A and 103C between these chips 102 reach 50 μm or more, the operation of the first to fourth moving means 5A to 5D is stopped and the movement of the first to fourth holding means 4A to 4D is stopped. Then, the expansion of the sheet 1 is finished.

  The chips 102 of the workpiece 10 of the present embodiment are rectangular, and when the chip sizes are different vertically and horizontally as described above, the spacing between the chips 102 in the disk-shaped workpiece 10 as shown in FIG. The number of division lines 101 is greater in the horizontal direction (first direction) than in the vertical direction (second direction). For this reason, when the sheet expansion amounts in the first direction and the second direction are the same, the first direction with a larger number of intervals is formed with a smaller interval than the second direction with a smaller number of intervals. Therefore, when the sheet expansion amount is the same, if the chip sizes are different vertically and horizontally, a difference occurs in the distance between the chips 102 in the two expansion directions as shown in FIG. 7C, and the distance 103A having a narrow interval is more appropriate. There is a risk that expansion will end without reaching a certain distance. However, in the present embodiment, the sheet 1 is expanded while detecting the distance between the chips 102 in the first direction and the second direction, and therefore, between the chips 102 in the first direction and the second direction as shown in FIG. The distance can be an appropriate distance and uniform.

  In this embodiment, the sheet 1 can be expanded so that the distance between the chips 102 in the first direction and the second direction is an appropriate distance as described above. As a result, the distance between the chips 102 is insufficient and handling is performed. It is possible to reduce the possibility that the adjacent chips 102 sometimes come into contact with each other. Moreover, the possibility that the sheet 1 is excessively expanded and broken can be reduced.

[4] Other forms of expansion method In the expansion method of the above-mentioned one embodiment, the first expansion step and the second expansion step are performed simultaneously. However, after the first expansion step is performed, the second expansion step is performed. Or vice versa. In any case, in the process of performing the expansion step, the detection step is performed at the same time while detecting the interval between the chips in the expansion direction.

  In addition, a detection step is performed in advance to detect the distance between chips before sheet expansion, and the desired distance between chips after sheet expansion and the number of intervals between chips (from the size of the workpiece and the chip size) Calculated), a required expansion amount may be calculated, and a first expansion step and a second expansion step may be performed based on the required expansion amount. In that case, after performing the first extension step and the second extension step, the inter-chip distance is detected again by the imaging means 6, and when the desired inter-chip distance is not reached, the inter-chip distance is the desired distance. Add expansion steps until.

[5] Modification Example of Expansion Device The expansion device 2 according to the embodiment shown in FIG. 2 has a configuration in which a workpiece 10 is set by placing a sheet 1 cut in a square shape on a holding table 3 in advance. However, the operation of drawing a sheet from a sheet roll accumulated by rolling a long sheet in a roll shape and placing it on the holding table 3 and sticking the workpiece 10 thereon to expand the sheet is repeated. The sheet can be continuously expanded. In FIG. 8, the configuration of the expansion device 2 is changed so as to enable such continuous processing, and the same components are denoted by the same reference numerals.

  In this modified example, the sheet 1 pulled out from the sheet roll is transported horizontally in the first direction in the left direction in FIG. 8 and placed on the holding table 3, and is disposed on the first direction side. The first and second clamping means 4A, 4B and the first and second moving means 5A, 5B are retracted from the conveying path of the sheet 1 so that the sheet 1 can be conveyed onto the holding table 3.

  Each movable base 41 provided with the lower clamping mechanism 42 and the upper clamping mechanism 43 of the first and second clamping means 4A, 4B is disposed movably along the first direction on the side of the sheet conveying path. These are moved in the first direction by the first and second moving means 5A and 5B, respectively. The arm portions 421 and 431 of the lower clamping mechanism 42 and the upper clamping mechanism 43 (only the upper clamping mechanism 43 is shown in FIG. 8) are formed in an L shape symmetrically in the figure, and the sheet 1 is sandwiched from above and below. It extends toward the conveyance path. And the lower side clamping part 422 and the upper side clamping part 432 are being fixed to the front-end | tip of these arm parts 421 and 431, respectively. Each of the lower clamping portions 422 and the upper clamping portions 432 provided with the rollers 423 and 433 of the first and second clamping means 4A and 4B are opposed to each other in the first direction of the sheet 1 as in FIG. It is positioned at a position that can be expanded in the first direction while sandwiching the side.

  As shown in FIG. 8, the movable bases 41 of the first and second clamping means 4A and 4B are positioned to the side of the sheet conveying path, and the lower clamping unit 422 and the upper clamping unit 432 are connected via the arm units 421 and 431. By positioning the sheet 1 above and below the sheet conveying path, the sheet 1 can be conveyed onto the holding table 3 and the sheet expansion process can be performed continuously.

DESCRIPTION OF SYMBOLS 1 ... Sheet 10 ... Workpiece 101 ... Planned division line 102 ... Chip 103A, 103C ... Chip distance 2 ... Expansion device 4A ... First clamping means 4B ... Second clamping means 4C ... Third clamping means 4D ... Fourth clamping Means 5A ... First moving means 5B ... Second moving means 5C ... Third moving means 5D ... Fourth moving means 6 ... Imaging means 7 ... Control means

Claims (2)

  1. Extends the work piece with split starting points formed along multiple intersecting planned division lines, or a sheet with work pieces divided into individual chips along multiple cross planned split lines. An expansion device for forming a gap between adjacent chips,
    In the first direction, the rollers are disposed opposite to each other with the workpiece interposed therebetween, and are supported on the opposing surfaces so as to be rotatable about a rotation axis parallel to the first direction. A first clamping means for clamping the sheet, a second clamping means,
    Rollers that are arranged opposite to each other with a workpiece sandwiched in a second direction orthogonal to the first direction, and that are supported on opposite surfaces so as to be rotatable around a rotation axis parallel to the second direction. A third clamping means for clamping the sheet with the rollers, and a fourth clamping means,
    The first clamping means and the second clamping means can be moved in directions away from each other in the first direction, and the third clamping means and the fourth clamping means in directions away from each other in the second direction. A moving means for allowing movement;
    Imaging means for imaging a workpiece and forming a captured image;
    Control means for controlling the moving means based on the inter-chip distance of the workpiece in the captured image formed by the imaging means;
    An expansion device comprising:
  2. Extends the work piece with split starting points formed along multiple intersecting planned division lines, or a sheet with work pieces divided into individual chips along multiple cross planned split lines. An expansion method for forming a gap between adjacent chips,
    The sheet is sandwiched between the first clamping means and the second clamping means facing each other with the workpiece sandwiched in the first direction, and opposed to each other with the workpiece sandwiched in the second direction orthogonal to the first direction. A clamping step of clamping the sheet between the third clamping means and the fourth clamping means;
    With the first clamping means and the second clamping means clamping the sheet, the first clamping means and the second clamping means are moved away from each other to expand the sheet in the first direction. A first expansion step;
    With the third clamping means and the fourth clamping means clamping the sheet, the third clamping means and the fourth clamping means are moved away from each other to expand the sheet in the second direction. A second expansion step;
    A detection step of imaging the upper surface of the workpiece with an imaging means to form a captured image and detecting a distance between chips of the workpiece in the captured image;
    With
    In the first extension step and the second extension step, the first clamping means, the second clamping means, the third clamping means, and the fourth clamping are based on the inter-chip distance detected in the detection step. and means which we move,
    The first clamping means and the second clamping means have rollers supported on mutually opposing surfaces so as to be rotatable about a rotation axis parallel to the first direction, and each of the rollers holds the sheet. And the third clamping means and the fourth clamping means have rollers supported on opposite surfaces so as to be rotatable about a rotation axis parallel to the second direction, and each of these rollers is a sheet. An expansion method characterized by comprising a structure for sandwiching the frame .
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