JP6706979B2 - Expansion device and expansion method - Google Patents

Description

The present invention attaches a sheet to a work piece in which a division starting point is formed along a plurality of intersecting planned dividing lines, or is divided into individual chips along a plurality of intersecting dividing planned lines. The present invention relates to an expansion device and an expansion method for expanding the attached sheet to form a gap between adjacent chips.

Devices such as wafers have devices formed in the areas defined by the grid-like planned dividing lines on the surface, and by dividing along the dividing lines, individual device chips with devices are formed. Will be divided. The method of dividing the work piece into individual device chips is to irradiate the work piece with a laser beam having a wavelength that is transparent to form a modified layer inside the work piece and then to form the work piece. A method of applying an external force to the workpiece to divide the workpiece is used (for example, see Patent Document 1 below). As an example of a device that applies an external force to a workpiece, for example, an expansion device shown in Patent Document 2 below is used.

On the other hand, in the above method, after the modified layer is formed inside the work piece by laser beam irradiation, the work piece is thinned by grinding and polishing, and the work piece is divided in this thinning step. A method has also been proposed (for example, see Patent Document 3 below). Since the workpiece divided by the dividing method is in a state in which the divided chips are in close contact with each other without a gap, adjacent chips may be damaged due to contact between adjacent chips when handling the workpiece. .. Therefore, in order to expand the sheet to which the object to be processed is adhered and form a space between the adjacent chips, the expansion device as described above is used.

However, in the above-mentioned expansion device, since the sheet is expanded radially, the expansion amount of the sheet becomes substantially equal in any direction. Therefore, for example, when the chip sizes are different in the vertical and horizontal directions, the distance between the chips is different, and even if a sufficient inter-chip distance is formed in one direction (for example, the vertical direction of the chips), the other direction (for example, the horizontal direction of the chips) is formed. In the (direction), the distance between chips becomes insufficient, which may cause a problem that adjacent chips come into contact with each other during handling. Therefore, in view of such a problem, the present applicant has proposed an expansion device that holds and pulls the four sides of the sheet (for example, refer to Patent Document 4 below).

Japanese Patent No. 3408805 JP, 2011-77482, A Japanese Patent No. 3762409 JP, 2014-022382, A

In the expansion device as described above, the sheet to which the workpiece is attached is expanded, and a worker separately cuts the sheet normally provided in a roll shape, and the workpiece is attached to the cut sheet. You have to stick it. In addition, it is necessary for the worker to place the work piece on the holding table via the sheet, and to position the work piece so that the four sides of the sheet can be sandwiched by the sandwiching mechanism. It was necessary to replace the work piece placed on the holding table. In particular, the work piece with the division starting point is easily damaged, and when the sheet is attached to the work piece, when the sheet is expanded, or when the work piece is placed on the holding table, the work piece is placed once and lifted. There is a problem that the workpiece may be damaged when it is handled.

The present invention has been made in view of the above circumstances, and it is an object of the present invention to improve workability as compared with the related art and reduce the risk of damage to a workpiece when a sheet is expanded. ..

The present invention has an adhesive surface on a work piece in which a division starting point is formed along a plurality of intersecting division lines, or on a work piece divided into individual chips along a plurality of intersecting division lines. An expansion device for adhering the adhered sheet and expanding the adhered sheet to form a gap between adjacent chips, and a delivery reel for delivering the rolled sheet and a delivery reel for delivering the sheet. A take-up reel that winds up the sheet, an expansion unit that expands the sheet between the delivery reel and the take-up reel, and the sheet is attached to the upper side of the sheet that is expanded by the expansion unit. Holding means for holding the adhered surface of the workpiece to be faced to the adhesive surface of the sheet, and a holding means arranged below the sheet expanded by the expanding means. A sticking roller for sticking the sheet to the work piece, and an annular frame having an opening at the center above the sheet expanded by the expanding means are stuck to the sheet in the opening. A frame holding means for holding the workpiece so that it is positioned, and the sheet is attached to the annular frame arranged below the sheet to which the workpiece is attached and held by the frame holding means. A frame sticking roller, and cutting means for cutting the sheet along the annular frame held by the frame holding means, which is arranged below the sheet on which the workpiece is stuck, The expanding means are arranged so as to face each other with a workpiece to be adhered to the sheet sandwiched therebetween in the first direction, and each of the expanding means includes a first sandwiching means and a second sandwiching means for sandwiching the sheet, and Third sandwiching means and fourth sandwiching means, which are arranged to face each other with a workpiece to be stuck on the sheet sandwiched therebetween in a second direction orthogonal to one direction, and which sandwich the sheet, respectively. One clamping means and the second clamping means are movable in the first direction so as to move away from each other, and the third clamping means and the fourth clamping means move in the second direction away from each other. And a holding means for holding the sheet on the sheet sandwiched by the first sandwiching means, the second sandwiching means, the third sandwiching means, and the fourth sandwiching means. The work piece held by is attached .

Further, the present invention is an adhesive surface for a work piece in which a division starting point is formed along a plurality of intersecting division lines, or a work piece divided into individual chips along a plurality of intersecting division lines. Is a method of expanding the adhered sheet and expanding the adhered sheet to form a gap between adjacent chips, which is sent out together with sending out the sheet wound in a roll shape at one end. And a sheet feeding step of winding the sheet at the other end, and holding the work piece by a holding means and facing the sticking surface of the work piece to the adhesive surface of the sheet sent in the sheet sending step. After performing the workpiece facing step and the workpiece facing step, the sheet is sandwiched by the first sandwiching means and the second sandwiching means that face each other with the workpiece sandwiched in the first direction, and A sandwiching step of sandwiching the sheet by a third sandwiching means and a fourth sandwiching means, which face each other with a workpiece sandwiched in a second direction orthogonal to one direction, and the first sandwiching after performing the sandwiching step . Means, the second holding means, the third holding means and the fourth holding means, and the sheet held by the holding means by pressing the sheet from the side opposite to the adhesive surface of the sheet. An attaching step of attaching to the object, a releasing step of releasing the workpiece attached to the sheet from the holding means after performing the attaching step, and the first step after performing the releasing step. A first direction in which the sheet is expanded in the first direction by moving the first sandwiching means and the second sandwiching means away from each other while the sandwiching means and the second sandwiching means sandwich the sheet. After performing the expanding step and the releasing step, the third holding means and the fourth holding means move so as to separate the third holding means and the fourth holding means from each other while holding the sheet. After performing the second direction expanding step of expanding the sheet in the second direction, the first direction expanding step and the second direction expanding step, the first holding means and the second holding means With the sheet sandwiched by the third sandwiching means and the fourth sandwiching means, an annular frame having an opening at the center is made to face the adhesive surface of the sheet and a workpiece is positioned in the opening. A frame positioning step, a frame bonding step of bonding the sheet to the annular frame positioned to face the adhesive surface in the frame positioning step, and a frame bonding step after performing the frame bonding step. Along the said A sheet cutting step of cutting the sheet; and a carrying-out step of carrying out the frame unit, in which the workpiece is attached to the annular frame via the sheet, after carrying out the sheet cutting step, from the sheet. .

In the expansion method, the first holding means and the second holding means hold the sheet and the first holding means and the second holding means hold the sheet after performing the holding step and before performing the attaching step. A first pre-expanding step of moving the second clamping means away from each other to expand the sheet in the first direction to eliminate bending of the sheet in the first direction; and the third clamping means. The third holding means and the fourth holding means are moved so as to separate from each other while the fourth holding means holds the sheet, and the sheet is expanded in the second direction to move in the second direction. A second pre-expanding step of eliminating bending of the sheet.

The expansion device according to the present invention is a delivery reel that delivers a sheet wound in a roll, a take-up reel that winds the delivered sheet, and an extension unit that extends the sheet between the delivery reel and the take-up reel. A holding means for holding the work piece, a frame holding means for holding the annular frame, a sticking roller for sticking a sheet to the work piece held by the holding means, and an annular shape held by the frame holding means. The frame sticking roller for sticking the sheet to the frame and the cutting means for cutting the sheet along the annular frame held by the frame holding means are provided, and the expanding means is stuck to the sheet in the first direction. First sandwiching means and second sandwiching means, which are arranged to face each other with the workpiece sandwiched therebetween and sandwich the sheet respectively, and the workpiece attached to the sheet in the second direction orthogonal to the first direction. The third sandwiching means and the fourth sandwiching means, which are arranged to face each other with the sheet sandwiched therebetween, respectively, and the first sandwiching means and the second sandwiching means can be moved in directions away from each other in the first direction. In addition, since the third holding means and the fourth holding means are provided with a moving means that can move the first holding means and the fourth holding means in directions away from each other in the second direction, attachment and processing of the sheet to the work in the expansion device. The sheet to which the object is attached can be expanded, and the workability is improved as compared with the conventional one. Further, when the sheet is attached to the work piece, the work piece is held by the holding means, and the first holding means, the second holding means, the third holding means and the fourth holding means place the sheet on the sheet. The lower surface is clamped, and further, the first clamping means, the second clamping means, the third clamping means until the sheet is adhered to the workpiece and then the sheet is adhered to the annular frame and the sheet is cut. Since the state in which the upper and lower surfaces of the sheet are held by the holding means and the fourth holding means is maintained, it is possible to reduce the risk of damaging the workpiece.

The expansion method according to the present invention includes a sheet feeding step of feeding a sheet wound in a roll shape at one end and winding the fed sheet at the other end, and a sheet feeding step of holding a workpiece by a holding means. The workpiece facing step of facing the sticking surface of the workpiece to the adhesive surface of the fed sheet, and the first sandwiching means and the second sandwiching means facing each other with the workpiece in the first direction. A sandwiching step of sandwiching the sheet and sandwiching the sheet by the third sandwiching means and the fourth sandwiching means, which face each other with the work piece sandwiched in the second direction orthogonal to the first direction, and the opposite of the adhesive surface of the sheet. There are a sticking step of pressing the sheet from the side to stick the sheet to the workpiece, a release step of releasing the workpiece stuck to the sheet from the holding means, and a first holding means and a second holding means. A first direction expanding step of expanding the sheet in the first direction by moving the first sandwiching means and the second sandwiching means away from each other while sandwiching the sheet; and the third sandwiching means and the fourth sandwiching means. A second direction expanding step of expanding the seat in the second direction by moving the third sandwiching means and the fourth sandwiching means so as to separate from each other while sandwiching the seat, the first sandwiching means, the second sandwiching means, and the first sandwiching means. With the sheet sandwiched between the third sandwiching means and the fourth sandwiching means, a frame positioning step of facing the annular frame having an opening at the center to the adhesive surface of the sheet and positioning the workpiece within the opening, and frame positioning. A frame attaching step of attaching a sheet to an annular frame positioned to face the adhesive surface in a step, a sheet cutting step of cutting a sheet along the annular frame, and a sheet cutting step, and then an annular frame. Since a frame unit to which the workpiece is attached via the sheet is carried out from the sheet, and when the sheet is attached to the workpiece, the workpiece is held by the holding means, Moreover, since the upper and lower surfaces of the sheet are sandwiched by the first sandwiching means, the second sandwiching means, the third sandwiching means, and the fourth sandwiching means, it is possible to reduce the risk of damaging the workpiece. In addition, the state where the upper and lower surfaces of the sheet are clamped by the first pinching means, the second pinching means, the third pinching means, and the fourth pinching means until the sheet cutting step is completed after the attaching step is performed. Since it is maintained, it is possible to reduce the possibility that the workpiece will be damaged when the seat is expanded, and the frame unit can be efficiently formed.

In the expansion method, the first holding means holds the sheet while the first holding means and the second holding means hold the sheet before the holding step is performed after the holding step is performed. And a step of moving the second pinching means away from each other to expand the sheet in the first direction to eliminate bending of the sheet in the first direction, the third pinching means and the third pinching means. In a state where the fourth sandwiching means sandwiches the sheet, the third sandwiching means and the fourth sandwiching means are moved so as to separate from each other to expand the sheet in the second direction and eliminate the bending of the sheet in the second direction. Since the pre-second direction expanding step is further provided, it is possible to perform the first direction expanding step and the second direction expanding step after eliminating the bending of the seat in advance. This can prevent the expansion amount of the seat from becoming insufficient.

It is a perspective view which shows the structure of an expansion device. It is an exploded perspective view showing composition of an expansion device. It is an expansion perspective view which shows the structure of the 1st hierarchy of an expansion device. It is an expansion perspective view which shows the structure of the 2nd hierarchy of an expansion device. It is an expansion perspective view which shows the structure of the 3rd hierarchy of an expansion apparatus. It is a perspective view which shows the structure of a holding means. It is a perspective view showing composition of tape holding means of a peeling unit. It is a perspective view which shows the structure of the bending roller moving means of a peeling unit. It is a perspective view which shows the structure of the peeling origin part production|generation means of a peeling unit. It is a sectional view showing a sheet sending-out step. It is sectional drawing which shows a workpiece carrying-in step. It is sectional drawing which shows a workpiece facing step. It is a top view which shows a clamping step. It is sectional drawing which shows the prior 1st direction expansion step. It is sectional drawing which shows the advance 2nd direction expansion step. It is sectional drawing which shows an attachment step. It is sectional drawing which shows a release step. It is sectional drawing which shows the state which made the tip needle-shaped member approach the to-be-processed object in the tape peeling step. It is sectional drawing which shows the state which a front-end|tip needle-shaped member was made to abut the peripheral edge side of the protection tape stuck to the to-be-processed object in the tape peeling step. It is sectional drawing which shows the state which injected the high pressure air from the air nozzle toward the part where the protective tape was peeled from the workpiece in the tape peeling step. It is sectional drawing which shows the state which pinched|interposed the peripheral edge side of the protective tape by two clamping pieces in a tape peeling step. It is sectional drawing which shows the state which moved the bending roller and made it contact with the protective tape in the tape peeling step. It is sectional drawing which shows the state which is advancing peeling from a to-be-processed object, moving a bending roller and bending a protective tape in a tape peeling step. FIG. 6 is a cross-sectional view showing a state in which the protective tape is completely peeled from the workpiece and the protective tape is suction-held on the lower surface of the holding plate in the tape peeling step. It is sectional drawing which shows the 1st direction expansion step. It is sectional drawing which shows the 2nd direction expansion step. It is sectional drawing which shows a frame positioning step. It is sectional drawing which shows a frame sticking step. It is sectional drawing which shows a sheet cutting step. It is sectional drawing which shows a carrying out step.

1 Expansion Device The expansion device 1 shown in FIG. 1 is an example of an expansion device that can expand the sheet 8 attached to the workpiece. The expansion device 1 has a three-layer structure, and a device base 100a extending in the first direction in the first layer portion, a device base 100b extending in the first direction in the second layer portion, and a first layer in the third layer portion. It has a pair of guide bases 103 extending in one direction. An opening 101 for communicating with the device base 100a side is formed in the central portion of the device base 100b. Guide rails 104 extending in the first direction are laid on the pair of guide bases 103, respectively. An annular frame supply unit 4 for accommodating a plurality of annular frames 2 having an opening 3 shown in FIG. 2 at the center is connected to the rear side of the device bases 100a and 100b in the first direction.

The expansion device 1 shown in FIG. 2 shows a state before the respective layers are connected and a state before the annular frame supply unit 4 is connected to the device bases 100a and 100b. The annular frame supply unit 4 includes, for example, a box-shaped frame stocker 5 for stacking and stocking the annular frames 2. Inside the frame stocker 5, a plurality of columnar members 5a (three in the example of FIG. 2) standing in contact with the inner peripheral surface of the annular frame 2 are erected at substantially equal intervals. A truck 6 having a plurality of casters 7 attached thereto is connected to the frame stocker 5. For example, the dolly 6 can run with the casters 7 driven by the human power of the worker as a power source.

On the apparatus base 100b, a delivery reel 20 that delivers the sheet 8 wound in a roll shape, a take-up reel 21 that takes up the delivered sheet 8, and a sheet 8 between the delivery reel 20 and the take-up reel 21. And an expansion means 10 for expanding. The pair of guide bases 103 are provided with a holding means 40 for holding the workpiece, a peeling unit 50 for peeling off the protective tape attached to the workpiece, and a frame holding means 60 for holding the annular frame 2. ing. The device base 100a is provided with a sticking roller 30 for sticking the sheet 8 to the workpiece held by the holding means 40, which is arranged below the sheet 8 expanded by the expanding means 10, and expanded by the expanding means 10. The release means 31 for holding the work piece via the sheet 8 to be processed and the annular frame 2 held below the sheet 8 to which the work piece is attached are held by the frame holding means 60. The frame sticking rollers 33a and 33b to be stuck, and the cutting for cutting the sheet 8 along the annular frame 2 which is arranged on the lower side of the sheet 8 to which the workpiece is stuck and which is held by the frame holding means 60. It is provided with a means 34 and a dividing means 35 for dividing an individual work piece by applying an external force to the work piece. Hereinafter, the configuration of each layer of the expansion device 1 will be described in detail with reference to FIGS.

In the first layer shown in FIG. 3, the adhering roller 30, the release means 31, the frame adhering rollers 33a and 33b, the cutting means 34 and the dividing means 35 are moved in the first direction by the first direction feeding means 37 in the device base 100a. It is movably arranged. The first direction feeding means 37 includes a ball screw 370 extending in the first direction, a motor 371 connected to an end of the ball screw 370, a pair of guide rails 372 extending in parallel with the ball screw 370, and a first direction. And a movable base 373 capable of moving horizontally. The fixed base 310 and the second direction feeding means 38 are arranged on the movable base 373. One surface of a moving base 373 is in sliding contact with the pair of guide rails 372, and a ball screw 370 is screwed into a nut formed on the moving base 373. Then, when the ball screw 370 is rotated by being driven by the motor 371, the moving base 373 is guided by the guide rail 372 to move in the first direction, and the sticking roller 30, the release means 31, and the frame sticking roller are attached. The 33a, 33b, the cutting means 34, and the dividing means 35 can be moved in the first direction.

The frame attaching rollers 33a and 33b, the cutting means 34, and the dividing means 35 are further arranged on the moving base 373 so as to be movable in the second direction by the second direction feeding means 38. The second-direction feeding means 38 includes a ball screw 380 extending in the second direction, a motor 381 connected to an end of the ball screw 380, a pair of guide rails 382 extending in parallel with the ball screw 380, and a second direction. And a movable base 383 that can move horizontally. The rotary table 36 is disposed on the moving base 383. One surface of the moving base 383 is in sliding contact with the pair of guide rails 382, and a ball screw 380 is screwed into a nut formed in the center of the moving base 383. Then, when the ball screw 380 is rotated by being driven by the motor 381, the moving base 383 is guided by the guide rail 382 to move in the second direction, and the frame attaching rollers 33a and 33b, the cutting means 34, and the dividing unit 34 and the dividing unit. The means 35 can be moved in the second direction.

The sticking roller 30 is arranged on the upper surface of a fixed base 32 fixed on the moving base 373. The sticking roller 30 extends in a second direction orthogonal to the first direction, and is supported by the support portion 300 so as to be rotatable about a shaft portion 301 having a shaft center in the second direction. Further, the sticking roller 30 can be moved up and down by an elevating mechanism including, for example, an air cylinder 302 and a piston 303.

The release means 31 is arranged in the vicinity of the sticking roller 30 and on the upper surface of the fixed base 32. The release means 31 includes a release table 311 that holds the workpiece by suction. Although not shown, a suction source is connected to the release table 311 so that the workpiece can be suction-held on the upper surface of the release table 311. To the lower part of the release table 311, each elevating mechanism including, for example, an air cylinder 312 and a piston 313 is connected, and the elevating mechanism can elevate the release table 311.

The frame attachment rollers 33 a and 33 b are pressing rollers that press the sheet 8 against the annular frame 2, and are rotatable around the shaft portion 330. A cutting means 34 is arranged between the frame sticking rollers 33a and 33b. The cutting means 34 is, for example, a cutter, and is rotatable around the shaft portion 340. The frame sticking rollers 33a and 33b and the cutting means 34 can be raised and lowered by an elevating mechanism including, for example, an air cylinder and a piston. The frame adhering rollers 33a, 33b and the cutting means 34 are disposed on the rotary table 36, and the rotary table 36 rotates so that the frame adhering rollers 33a, 33b and the cutting means 34 are, for example, the annular frame 2. Can be orbited along. The numbers of the frame attachment rollers 33a and 33b and the cutting means 34 are not limited to the configurations shown in the present embodiment.

The dividing means 35 includes a squeegee 350 arranged in the center of the rotary table 36 and extending in a second direction orthogonal to the first direction. The squeegee 350 has a slit 351 connected to a suction source. The squeegee 350 can be moved up and down by an elevating mechanism including, for example, an air cylinder 352 and a piston 353. When the rotary table 36 is rotated by 90°, for example, the extending direction of the squeegee 350 can be aligned with the planned dividing line of the workpiece facing the first direction and the planned dividing line of the workpiece facing the second direction, respectively. it can. In the dividing means 35, the squeegee 350 sucks the dividing line of the workpiece through the slit 351, so that the workpiece can be divided into individual chips.

Next, the configuration of the second layer shown in FIG. 4 will be described. The delivery reel 20 is arranged on the rear side of the apparatus base 100b in the first direction, and the take-up reel 21 is arranged on the front side of the apparatus base 100b in the first direction. The sheet 8 is wound around the delivery reel 20 in a roll shape. Below the delivery reel 20, a delivery roller 22 that delivers the sheet 8 in the first direction from the delivery reel 20 is arranged. The sheet 8 delivered from the delivery reel 20 is wound around the take-up reel 21 in a roll shape. Below the take-up reel 21, there are arranged pull-in rollers 23 and 24 which pull in the sheet 8 sent out in the first direction by the send-out roller 22 and take it up by the take-up reel 21.

The expansion means 10 is disposed on the upper surface of the apparatus base 100b and between the delivery reel 20 and the take-up reel 21. The expansion means 10 are arranged so as to face each other with the workpiece adhered to the sheet 8 sandwiched therebetween in the first direction, and each of the first sandwiching means 10A and the second sandwiching means 10B sandwiches the sheet 8. Third sandwiching means 10C and fourth sandwiching means 10D, which are arranged so as to face each other with the workpiece attached to the sheet 8 sandwiched therebetween in the second direction orthogonal to the first direction, and sandwich the sheet 8 respectively. Is equipped with.

The first holding means 10A and the second holding means 10B include a lower holding mechanism 11a for pressing the lower surface of the sheet 8, an upper holding mechanism 12a for pressing the upper surface of the sheet 8, and a recess formed on the upper surface of the apparatus base 100b. A movable base 13a movably arranged along the line 102a, and a first-direction moving means 14a for moving the first holding means 10A and the second holding means 10B in directions away from each other in the first direction. I have it.

The third holding means 10C and the fourth holding means 10D include a lower holding mechanism 11b that presses the lower surface of the sheet 8, an upper holding mechanism 12b that presses the upper surface of the sheet 8, and a recess formed on the upper surface of the apparatus base 100b. A movable base 13b movably arranged along the second holding means 102b, and a second direction moving means 14b for moving the third holding means 10C and the fourth holding means 10D in directions away from each other in the second direction. I have it.

The lower sandwiching mechanism 11 a includes a lower sandwiching portion 110 of a rectangular parallelepiped extending in the second direction, and an arm portion 111 having an L-shaped cross section, one end of which is connected to the lower sandwiching portion 110. A plurality of rollers 113 are arranged on the upper surface side of the lower sandwiching section 110 so as to be aligned in a direction parallel to the second direction. The plurality of rollers 113 included in the lower holding mechanism 11a are rotatable about a rotation axis parallel to the first direction, and are mounted such that about half of the outer peripheral surface of the lower holding portion 110 protrudes from the upper surface. ..

The upper gripping mechanism 12 a includes an upper gripping part 120 extending in parallel with the lower gripping part 110, and an arm part 121 having a substantially L-shaped cross section whose one end is connected to the upper gripping part 120. A plurality of rollers (not shown) are arranged in parallel with each other in a direction parallel to the second direction. The plurality of rollers included in the upper holding mechanism 12a are rotatable about a rotation axis parallel to the first direction, and are mounted such that about half of the outer peripheral surface of the upper holding unit 120 projects from the lower surface.

The lower sandwiching mechanism 11b includes a lower sandwiching portion 110 of a rectangular parallelepiped extending in the first direction, and an arm portion 112 having an end connected to the lower sandwiching portion 110 and extending in the second direction. A plurality of rollers 113 are arranged on the upper surface side of the lower sandwiching section 110 so as to be aligned in a direction parallel to the first direction. The plurality of rollers 113 included in the lower holding mechanism 11b are rotatable about a rotation axis parallel to the second direction, and are mounted such that about half of the outer peripheral surface of the lower holding portion 110 projects from the upper surface. ..

The upper holding mechanism 12b includes an upper holding portion 120 extending in parallel with the lower holding portion 110, and an arm portion 122 having one end connected to the upper holding portion 120 and extending in parallel with the arm portion 112. A plurality of rollers (not shown) are arranged on the lower surface side of the upper sandwiching portion 120 so as to be aligned in a direction parallel to the first direction. The plurality of rollers included in the upper holding mechanism 12b are rotatable about a rotation axis parallel to the second direction, and are mounted such that about half of the outer peripheral surface of the upper holding portion 120 projects from the lower surface.

The first direction moving means 14a includes a ball screw 140 extending in the first direction, a bearing portion 141 rotatably supporting one end of each ball screw 140, and a motor 142 connected to the other end of each ball screw 140. , Device base 100b, respectively. The second direction moving means 14b includes a ball screw 140 extending in the second direction, a bearing portion 141 rotatably supporting one end of each ball screw 140, and a motor 142 connected to the other end of each ball screw 140. , Are respectively disposed on the device base 100b.

The movable base 13 a includes a support portion 130 that supports the lower holding portion 110 and the upper holding portion 120, a slide portion 131 that is connected to a lower portion of the support portion 130 and is movable in the first direction, and one of the support portions 130. A guide rail 132 formed on the surface side and a guide groove 133 formed so as to penetrate from one surface side to the other surface side of the support portion 130 are provided. The ball screw 140 is screwed into a nut formed inside the slide portion 131, and the motor 142 drives the ball screw 140 to reciprocate the slide portion 131 in the first direction.

The movable base 13b includes a support portion 134 having a substantially L-shaped cross section that supports the lower holding portion 110 and the upper holding portion 120, and a slide portion 135 that is movable in the second direction is provided below the support portion 134. Are connected. The ball screw 140 is screwed into a nut formed inside the slide portion 135, and the motor 142 drives the ball screw 140 to reciprocate the slide portion 135 in the second direction.

The movable base 13a and the movable base 13b include a lower lifting mechanism 15 for lifting the lower clamping mechanism 11a and the lower clamping mechanism 11b, and an upper lifting mechanism 16 for lifting the upper clamping mechanism 12a and the upper clamping mechanism 12b. Are arranged along the guide groove 133. The lower elevating means 15 includes a ball screw 150 extending vertically, a bearing 151 connected to one end of the ball screw 150, and a motor 152 connected to the other end of the ball screw 150. The ball screw 150 is screwed into a nut formed on the base end portion 111 a of the arm portion 111 and the base end portion 112 a of the arm portion 112, and the ball screw 150 is driven by the motor 152 to drive the lower holding mechanism 11 a and the lower holding mechanism 11 a. The lower holding mechanism 11b can be vertically moved up and down.

The upper elevating means 16 also has the same structure as the lower elevating means 15, and includes a ball screw 160 extending in the vertical direction, a bearing portion 161 connected to one end of the ball screw 160, and a motor connected to the other end of the ball screw 160. 162. The ball screw 160 is screwed into a nut formed on the base end portion 121a of the arm portion 121 and the base end portion 122a of the arm portion 122. By driving the ball screw 160 by the motor 162, the upper holding mechanism 12a and the upper holding mechanism 12a The holding mechanism 12b can be vertically moved up and down.

In the expanding means 10 configured in this way, the sheet 8 sent from the sending reel 20 passes between the lower holding mechanisms 11a and 11b and the upper holding mechanisms 12a and 12b, and is taken up by the take-up reel 21. In this state, the upper and lower surfaces of the sheet 8 are sandwiched by the lower sandwiching mechanisms 11a and 11b and the upper sandwiching mechanisms 12a and 12b, and the first sandwiching means 10A, the second sandwiching means 10B, the third sandwiching means 10C and the fourth sandwiching means The sheet 8 can be expanded by moving the means 10D in a direction away from each other in the first direction and the second direction.

Next, the configuration of the third layer shown in FIG. 5 will be described. The frame holding means 60 is arranged on the rear side in the first direction of the pair of guide bases 103. The frame holding means 60 includes a circular plate-shaped frame holding portion 61 that holds the annular frame 2 shown in FIG. An elevating part 600 for vertically elevating the entire frame holding part 61 is connected to the frame holding part 61. The elevating unit 600 is, for example, an elevating mechanism having an air cylinder and a piston, or a motor and a guide rail, and is connected to a traveling unit 601 having a substantially L-shaped cross section. An opening 602 is formed in the traveling part 601, and the elevating part 600 moves up and down in the opening 602 to elevate and lower the frame holding part 61. The traveling unit 601 can travel in the first direction along the pair of guide rails 104. Then, the frame holding means 60 can move to the upper side of the annular frame supply unit 4 shown in FIG. 2 and enter the inside of the frame stocker 5 to carry out and carry in the annular frame 2.

The holding means 40 is arranged on the front side in the first direction of the pair of guide bases 103. As shown in FIG. 6, the holding means 40 includes a holding table 41 having a holding surface 41a for holding a workpiece, a rotary table 42 for rotating the holding table 41, and a holding table 41 and the rotary table 42 supported from below. A base 43, a rotary shaft 44 that is passed through the base 43 and reverses the holding surface 41a of the holding table 41, and a gate-shaped support part 45 that rotatably supports the end of the rotary shaft 44. .. The elevating part 400 is connected to the support part 45. The elevating unit 400 is, for example, an elevating mechanism having an air cylinder and a piston, or a motor and a guide rail, and is connected to the traveling unit 401 having a substantially L-shaped cross section shown in FIG. Although not shown, an opening is formed in the traveling section 401, and the elevating section 400 can move up and down in the opening to move the holding table 41 up and down.

As shown in FIG. 5, the peeling unit 50 is arranged between the holding means 40 and the frame holding means 60. The peeling unit 50 is a tape peeling unit for peeling the protective tape attached to the workpiece. The peeling unit 50 includes a tape holding means 50A shown in FIG. 7 that holds a protective tape, a folding roller moving means 50B shown in FIG. 8 that bends a protective tape that is peeled from a workpiece, and a protection that is peeled from the workpiece. It is configured by a peeling starting point generating means 50C shown in FIG. 9 for generating a peeling starting point of the tape, and the three means are housed in the frame 500, for example. The lower side of the frame 500 is open. The elevating part 501 is connected to the frame body 500. The elevating part 501 is, for example, an elevating mechanism having an air cylinder and a piston, or a motor and a guide rail, and is connected to the traveling part 502 having a substantially L-shaped cross section. An opening 503 is formed in the traveling part 502, and the elevating part 501 can elevate and lower the entire frame 500 at the opening 503.

As shown in FIGS. 7A to 7C, the tape holding means 50A has a holding base 52 supported by a first air cylinder 51a and a shaft 510a that is driven by the first air cylinder 51a and extends in the vertical direction. And a second air cylinder 51b that is erected on the upper surface of the holding base 52, and a shaft 510b that penetrates from the second air cylinder 51b to the lower surface side of the holding base 52 and is driven by the second air cylinder 51b to move back and forth. The holding plate 53 to be supported, a third air cylinder 51c which is provided on the holding base 52, and has a holding piece 511 at an end thereof, and which moves the shaft 510c which can move back and forth in the horizontal direction in the horizontal direction, and the holding base 52. On the lower surface side, it is constituted by a sandwiching piece 512 arranged at a position facing the sandwiching piece 511.

The inside of the holding plate 53 is hollow, and a large number of fine holes (not shown) are provided on the entire lower surface, and the inside of the holding plate 53 is inserted through a shaft 510b that connects the second air cylinder 51b and the holding plate 53. Is sucked, and it is possible to generate a negative pressure on the lower surface of the holding plate 53 through the fine holes.

The holding base 52 is configured to be movable up and down together with a shaft 510a that is driven by a first air cylinder 51a so as to be able to advance and retreat. Further, as shown by an arrow in FIG. 7B, the holding base 52 is horizontally oriented around the shaft 510a. It can be rotated.

As shown in FIG. 8, the bending roller moving means 50B is composed of a support frame 54 having a gate shape, and the support frame 54 has pillar portions 540 and 540a arranged side by side with a gap, and the pillar portion 540. The support portion 541 is connected to the lower end of the support portion 540a, and the bending roller 55 that moves along a guide hole 542 of the support portion 541 by a drive mechanism (not shown) built in the support portion 541. The folding roller 55 is rotatable about the axial center in the longitudinal direction, and its length is at least longer than the diameter of the protective tape attached to the workpiece.

As shown in FIG. 9, the peeling starting point generating means 50C includes a fourth air cylinder 51d, a shaft 510d that extends from the fourth air cylinder 51d and can move back and forth, and can finely adjust the position in the height direction, and an arm member 56. And a tip member 57 provided at the tip of the arm member 56, a tip needle member 58 attached to the tip member 57, and an air nozzle 59. The tip member 57 is configured to be movable up and down, and the height position thereof is adjusted so that the tip portion of the tip needle member 58 can be positioned at the height of the protective tape attached to the workpiece. Has been done. The high pressure air is supplied to the air nozzle 59 via the fourth air cylinder 51d and the shaft 510d, and the high pressure air can be ejected as needed.

As described above, the expansion device 1 according to the present invention includes the delivery reel 20 that delivers the sheet 8 wound into a roll, the take-up reel 21 that takes up the delivered sheet 8, the delivery reel 20, and the take-up reel. The expansion means 10 for expanding the sheet 8 between the sheet 21, the holding means 40 for holding the workpiece, the frame holding means 60 for holding the annular frame 2, and the sheet for the workpiece held by the holding means 40. 8 for attaching the sheet 8, the frame attaching rollers 33a, 33b for attaching the sheet 8 to the annular frame 2 held by the frame holding means 60, and the annular frame 2 held by the frame holding means 60. And a cutting means 34 for cutting the sheet 8 along with the expanding means 10 arranged so as to face each other with the workpiece attached to the sheet 8 interposed therebetween in the first direction. The first sandwiching means 10A and the second sandwiching means 10B for sandwiching are arranged to face each other with the workpiece attached to the sheet 8 sandwiched therebetween in the second direction orthogonal to the first direction, and the sheets 8 respectively. Since the third holding means 10C and the fourth holding means 10D for holding the sheet are provided, the sheet 8 is attached to the workpiece and the sheet 8 to which the workpiece is attached is expanded in the expansion device 1. The workability is improved as compared with the conventional one. When the sheet 8 is attached to the work piece, the work piece is held by the holding means 40, and the first holding means 10A, the second holding means 10B, the third holding means 10C, and the fourth holding means. The upper and lower surfaces of the sheet 8 are sandwiched by the means 10D, and further, after the sheet 8 is attached to the workpiece, the sheet 8 is attached to the annular frame 2 and the sheet 8 is cut. Since the state in which the upper and lower surfaces of the sheet 8 are clamped by the one clamping means 10A, the second clamping means 10B, the third clamping means 10C, and the fourth clamping means 10D is maintained, it is possible to reduce the risk of damage to the workpiece. it can.

2 Expansion Method Next, using the expansion device 1 described above, the sheet 8 is attached to the workpiece divided into individual chips, and the sheet 8 is expanded to form a gap between adjacent chips. The method will be described. A work piece to which the present invention is applied is a work piece in which a division starting point (for example, a modified layer) is formed along a division line, or a work piece divided into individual chips along the division line. It is a thing.

(1) Sheet Sending Step As shown in FIG. 10, the sending roller 22 sends the rolled-up sheet 8 from the sending reel 20 on one end side in the first direction, and the sent-out sheet 8 pulls in the drawing roller 23. , 24, and winds by the take-up reel 21. At this time, the upper surface of the fed-out sheet 8 exposed upward serves as an adhesive surface 8a having adhesiveness. The sheet 8 used in this embodiment is not particularly limited, but for example, an expanded sheet in which an adhesive layer is laminated on a base material layer such as polyolefin or polyvinyl chloride is used.

(2) Step of Loading Workpiece As shown in FIG. 11, the wafer W is loaded into the holding means 40. The wafer W is an example of a workpiece, and a device is formed in each region defined by a plurality of dividing lines that intersect the surface Wa. A protection tape T for protecting the device is attached to the front surface Wa of the wafer W. The back surface opposite to the front surface Wa is an adhered surface Wb that is adhered to the sheet 8 in an adhesion step described below. In the wafer W shown in the present embodiment, a modified layer along a dividing line is formed inside the wafer W by, for example, irradiation with a laser beam, and is thinned in a grinding machine, for example, and is divided into individual chips starting from the modified layer. Has been done.

For example, the wafer W is carried into the holding means 40 by the robot hand 70. The robot hand 70 holds the adherend surface Wb of the wafer W and moves to the upper side of the holding means 40. At this time, the holding means 40 preferably waits with the holding surface 41a of the holding table 41 facing upward. As a result, after the grinding/cleaning is completed, the robot hand 70 can directly carry in the wafer W onto the holding table 41 without inverting the front and back sides of the wafer W, so that the risk of damage to the wafer W in the state of being diced into individual chips is increased. Can be reduced. The worker may directly carry the wafer W onto the holding table 41.

(3) Workpiece facing step As shown in FIG. 12, the wafer W is held by the holding means 40, and the sticking surface Wb of the wafer W faces the adhesive surface 8a of the sheet 8 sent in the sheet sending step. Let Specifically, with the holding surface 41a of the holding table 41 holding the front surface Wa side of the wafer W, the rotating shaft 44 shown in FIG. 6 rotates and the holding surface 41a of the holding table 41 is inverted to cover the wafer W. The attachment surface Wb is exposed downward. Next, the holding means 40 is moved to a desired position by traveling of the traveling unit 401 shown in FIG. 5, and then the elevating unit 400 lowers the holding table 41 to move the wafer W to a position several millimeters above the sheet 8. The sticking surface Wb of the wafer W is positioned, and the sticking surface Wb of the wafer W faces the adhesive surface 8a of the sheet 8. In addition, the holding means 40 moves the holding table 41 to a desired position without inverting the holding table 41, and then turns the holding table 41 to turn the holding surface 41 so that the attachment surface Wb of the wafer W is located at a position several mm above the sheet 8. It may be positioned.

(4) Clamping Step After performing the workpiece facing step, as shown in FIG. 13, the sheet 8 is held by the first clamping means 10A and the second clamping means B that face each other with the wafer W in the first direction. The sheet 8 is sandwiched and sandwiched by the third sandwiching means 10C and the fourth sandwiching means 10D that face each other with the wafer W sandwiched in the second direction orthogonal to the first direction. First, the two first direction moving means 14a are operated to horizontally move the respective slide portions 131 shown in FIG. 4 in the first direction so that the first holding means 10A and the second holding means 10B approach each other. Further, the two second-direction moving means 14b are operated to horizontally move the respective slide portions 135 in the second direction so that the third holding means 10C and the fourth holding means 10D approach each other. In this way, the first holding means 10A, the second holding means 10B, the third holding means 10C and the fourth holding means 10D are brought close to each other.

At this time, the sheet 8 extending in the first direction is the same as the lower holding portions 110 shown in FIG. 4 in the first holding means 10A, the second holding means 10B, the third holding means 10C and the fourth holding means 10D. It is positioned between each upper holding part 120. Then, each lower elevating means 15 operates to raise each lower sandwiching portion 110, and each upper elevating means 16 operates to descend each upper sandwiching portion 120. The roller 113 of the lower sandwiching unit 110 presses the lower surface of the sheet 8, and the roller 123 of the upper sandwiching unit 120 presses the upper surface of the sheet 8 to sandwich the upper and lower surfaces of the sheet 8.

(5) Pre-first direction expansion step If the sheet 8 is warped in the first direction after the sandwiching step and before the attaching step, as shown in FIG. 14, the first direction At, the seat 8 is expanded to eliminate the bending of the seat 8. Specifically, the first holding means 10A and the second holding means 10B move the first holding means 10A and the second holding means 10B so as to separate from each other while holding the upper and lower surfaces of the sheet 8 therebetween. That is, the two first direction moving means 14a shown in FIG. 13 are actuated so that the first gripping means 10A and the second gripping means 10B are separated from each other, and the slide portions 131 shown in FIG. In the above, the sheet 8 sandwiched by the rollers 113 of the lower sandwiching portions 110 and the rollers 123 of the upper sandwiching portions 120 is pulled outward in the first direction. As a result, the sheet 8 is stretched in the first direction and the bending is eliminated.

(6) Preliminary second direction expansion step Next, when the seat 8 is bent in the second direction, as shown in FIG. 15, the seat 8 is expanded in the second direction to eliminate the bending of the seat 8. To do. The third holding means 10C and the fourth holding means 10D move the third holding means 10C and the fourth holding means 10D so as to separate from each other in a state where the upper and lower surfaces of the sheet 8 are held between the third holding means 10C and the fourth holding means 10D. That is, the two second-direction moving means 14b shown in FIG. 13 are actuated so that the third holding means 10C and the fourth holding means 10D are separated from each other, and the slide portions 135 shown in FIG. In (2), the sheet 8 sandwiched by the rollers 113 of the lower sandwiching portions 110 and the rollers 123 of the upper sandwiching portions 120 is pulled outward in the second direction. As a result, the sheet 8 is stretched in the second direction and the bending is eliminated.

In the present embodiment, the pre-second directional expansion step is performed after the pre-first directional expansion step, but the present invention is not limited to this case, and the pre-first directional expansion step and the pre-second directional expansion step are performed simultaneously. It may be carried out, or the seat 8 may be expanded in the second direction and then expanded in the first direction. The expansion amount in the first direction and the expansion amount in the second direction of the seat 8 may be equal or different. However, the expansion amount in the first direction and the expansion amount in the second direction of the seat 8 may be appropriately set according to the degree of bending of the seat 8.

(7) Sticking Step After performing the sandwiching step (after performing the preliminary first direction expanding step and the preliminary second direction expanding step), as shown in FIG. 16, the sheet 8 is on the opposite side of the adhesive surface 8a. The sheet 8 is pressed to adhere the sheet 8 to the wafer W. Specifically, as the piston 303 rises in the air cylinder 302, the sticking roller 30 is brought into contact with the lower surface of the sheet 8. Subsequently, the lower surface of the sheet 8 is pressed upward while rotating the sticking roller 30, and the moving base 373 is moved in the first direction by the first direction feeding means 37 shown in FIG. To move. The pressure of the rolling sticking roller 30 causes the sheet 8 to be pressed toward the sticking surface Wb of the wafer W, thereby sticking the adhesive surface 8a of the sheet 8 to the entire sticking surface Wb. After that, the piston 303 descends in the air cylinder 302, and the sticking roller 30 is retracted from the sheet 8. At this time, the upper and lower surfaces of the sheet 8 are sandwiched by the first sandwiching means 10A, the second sandwiching means 10B, the third sandwiching means 10C and the fourth sandwiching means 10D shown in FIG. 15, and this state will be described later. It is maintained until the step is completed.

(8) Release Step After performing the attaching step, as shown in FIG. 17, the wafer W attached to the sheet 8 is released from the holding means 40. Specifically, the moving base 373 is moved in the first direction by the first direction feeding means 37 shown in FIG. 3, and the release table 311 is moved in the first direction. Then, in the air cylinder 312, the piston 313 moves up to raise the release table 311 and position the release table 311 at a position facing the holding means 40. That is, the release table 311 contacts the adhered surface Wb of the wafer W held by the holding table 41 via the sheet 8. After that, the holding table 41 releases the suction of the wafer W, and the release table 311 sucks and holds the wafer W. In this way, by taking over suction and holding of the wafer W from the holding table 41 to the release table 311, it is possible to reduce the occurrence of damage to the wafer W.

(9) Tape Peeling Step Next, the protective tape T is peeled from the front surface Wa of the wafer W using the peeling unit 50. First, as shown in FIG. 18, the tape holding means 50A and the peeling starting point portion generating means 50C are moved above the release table 311. At this time, a slightly outer peripheral portion of the outer peripheral end portion of the protective tape T attached to the wafer W is positioned immediately below the front end of the tip needle member 58 in the peeling starting point generating means 50C. Then, the fourth air cylinder 51d shown in FIG. 9 is operated to lower the tip of the tip needle-shaped member 58 to a position close to the outer peripheral end of the protective tape T.

The tip height of the tip needle-like member 58 is finely adjusted according to the surface height of the protection tape T so that the tip of the tip needle-like member 58 approaches the outer peripheral portion of the protection tape T, and the tip is in close proximity. By slightly moving the tape holding means 50A and the peeling starting point portion generating means 50C to the left in the figure, the tip of the tip needle member 58 abuts the outer peripheral portion of the protective tape T as shown in FIG. .. As shown in the figure, the tip of the tip needle-like member 58 may be abutted from the outer side in the circumferential direction of the protective tape T, but the tip of the tip needle-like member 58 is abutted from above the outer peripheral portion of the protective tape T. It is also possible to hit.

After the tip of the tip needle-shaped member 58 hits the outer peripheral portion of the protective tape T, the fourth air cylinder 51d is actuated to slightly raise the tip needle-shaped member 58, so that one part of the outer peripheral portion of the protective tape T is moved. The part is peeled off well.

After a part of the protective tape T is peeled off, as shown in FIG. 20, the tip member 57 is lifted and high-pressure air is jetted from the air nozzle 59, so that the protective tape T is fed from the tip of the tip needle member 58. The outer peripheral portion of the protective tape T separates from the outer peripheral portion of the protective tape T, and the peeling area including a part of the protective tape T that has been peeled earlier expands, and the peeling starting point portion TS suitable for being held by the tape holding means 50A is generated. The height of the holding base 52 in the peeling starting point generating step is such that the peeling starting point TS is provided on the holding base 52 when the peeling starting point TS is peeled off by the high pressure air from the air nozzle 59. , 512 to be adjusted. When the high-pressure air is jetted by the air nozzle 59 to enlarge the peeling area, the tip needle member 58 described above may be further abutted. In this way, the peeling starting point TS is preferably generated.

When the outer peripheral portion of the protective tape T is lifted by the high-pressure air jetted from the air nozzle 59, the holding piece 512 is moved to the holding piece 511 side by the operation of the third air cylinder 50c as shown in FIG. The outer peripheral portion of the protective tape T is sandwiched by the sandwiching piece 511 and the sandwiching piece 512. Then, by operating the first air cylinder 51a, the entire tape holding means 50A is moved upward to such an extent that the bending roller 55 can enter below the holding pieces 511, 512.

The tape holding means 50A is moved upward, and the bending roller 55 is moved to the tape holding means 50A side, as shown in FIG. Since the bending roller 55 advances the peeling while abutting on the adhesive surface side of the protective tape T with respect to the wafer W, the bending roller 55 is rotatable about the axis in the longitudinal direction, and the adhesive surface of the protective tape T in contact does not adhere. The surface is coated with fluororesin.

In this embodiment, the protective tape T on the wafer W is bent 180 degrees in the peeling direction (left in the figure) as shown in FIG. 23, but the bending angle is not necessarily 180 degrees. Absent. However, the wafer W is ground and formed into an extremely thin plate shape, and if the bending angle is small, the wafer W may be cracked or damaged when the protective tape T is peeled off. It is preferable to be bent at an angle close to that.

As shown in FIG. 24, when the bending roller 55 moves to the other end of the lower surface of the holding plate 53 on the left side in the drawing, the protective tape T is completely peeled off from the front surface Wa of the wafer W. The protective tape T separated from the front surface Wa of the wafer W is suction-held by the holding plate 53. Then, by operating the third air cylinder 51c, the sandwiching piece 512 is separated from the sandwiching piece 511 to release the outer peripheral portion of the protective tape T, and is discarded in, for example, a waste container. Thus, the tape peeling step is completed.

(10) First Direction Expansion Step Next, as shown in FIG. 25, the sheet 8 is further expanded in the first direction to form the intervals between the individual chips C. Specifically, the first holding means 10A and the second holding means 10B move the first holding means 10A and the second holding means 10B so as to separate from each other in the first direction while the sheet 8 is held between them. That is, by operating the two first-direction moving means 14a shown in FIG. 4, each slide part 131 is moved in the first direction in the recess 102a so that the first holding means 10A and the second holding means 10B are separated from each other. The sheet 8 held by the rollers 113 of the lower holding parts 110 and the rollers 123 of the upper holding parts 120 is pulled outward. As the sheet 8 further expands, the distance between the adjacent chips C increases, and a sufficient distance can be formed between the chips C. Thereby, it is possible to prevent the adjacent chips C from coming into contact with each other when the wafer W is transported.

(11) Second-direction expansion step Subsequently, as shown in FIG. 26, the sheet 8 is further expanded in the second direction to form intervals between the individual chips C. Specifically, the third holding means 10C and the fourth holding means 10D move the third holding means 10C and the fourth holding means 10D so as to separate from each other in the second direction while the sheet 8 is held between the third holding means 10C and the fourth holding means 10D. That is, the two second-direction moving means 14b shown in FIG. 4 are actuated to move the respective slide portions 135 in the recess 102b in the second direction so that the third holding means 10C and the fourth holding means 10D are separated from each other. The sheet 8 held by the rollers 113 of the lower holding parts 110 and the rollers 123 of the upper holding parts 120 is pulled outward. As the sheet 8 is further expanded, the interval between the adjacent chips C is expanded, and a sufficient interval can be formed between the chips C. This can prevent adjacent chips C from coming into contact with each other when the wafer W is transferred, as in the first direction expanding step. In the present embodiment, the second direction expansion step is performed after the first direction expansion step is performed, but the present invention is not limited to this case, and the first direction expansion step and the second direction expansion step are performed at the same time. Alternatively, the expansion in the second direction may be performed before the expansion in the first direction. The expansion amount of the seat 8 in the first direction and the expansion amount in the second direction may be the same or different.

(12) Undivided Area Dividing Step Here, of the wafer W expanded in the first direction expanding step and the second direction expanding step, an undivided area (not including the modified layer as a starting point) that is not divided into individual chips C. If there is a region which is not divided, the wafer W is divided into individual chips C by applying an external force to the wafer W by the dividing means 35 shown in FIG. For example, when there is an undivided area in the wafer W in the first direction, the extension direction of the squeegee 350 is adjusted to the first direction by rotating the rotary table 36, and the moving base is moved by the second direction feeding means 38. 383 is moved in the second direction to position the squeegee 350 at a position corresponding to the undivided area. Subsequently, the squeegee 350 is raised to contact the wafer W through the sheet 8 and suck the wafer W through the slit 351 to divide the undivided region into individual chips C. The undivided area dividing step is performed at least before the frame attaching step.

(13) Frame Positioning Step After performing the first direction expanding step and the second direction expanding step, the annular frame 2 is made to face the seat 8 by the frame holding means 60, as shown in FIG. First, the frame holding means 60 sucks and holds the annular frame 2 housed in the frame stocker 5 shown in FIG. 2 by the frame holding portion 61, carries it out, and moves it to the upper side of the sheet 8. Then, the sheet 8 is sandwiched by the first sandwiching means 10A, the second sandwiching means 10B, the third sandwiching means 10C and the fourth sandwiching means 10D shown in FIG. 26, and the annular frame 2 is attached to the adhesive surface 8a of the sheet 8. And the wafer W is positioned inside the opening 3 of the annular frame 2.

(14) Frame Adhering Step After the frame positioning step is performed, as shown in FIG. 28, the sheet 8 is adhered to the annular frame 2 positioned so as to face the adhesive surface 8a of the sheet 8. Specifically, the frame attaching rollers 33a, 33b are raised by the elevating mechanism, and the frame attaching rollers 33a, 33b are brought into contact with the lower surface of the sheet 8. Subsequently, the rotary table 36 shown in FIG. 3 is rotated at least once to roll the frame attaching rollers 33a and 33b along the annular frame 2 and press the lower surface of the sheet 8 upward, whereby the annular frame is pressed. The adhesive surface 8a of the sheet 8 is attached to the sheet 2. After the sheet 8 is attached to the annular frame 2, the frame attaching rollers 33a and 33b are lowered to retract from the sheet 8.

(15) Sheet Cutting Step After performing the frame attaching step, as shown in FIG. 29, the sheet 8 is cut along the annular frame 2. Specifically, the cutting mechanism 34 is lifted by the elevating mechanism to cut into the sheet 8 and the rotary table 36 shown in FIG. 3 is rotated at least once to make the cutting means 34 circular along the annular frame 2. The sheet 8 is cut by moving it.

(16) Carrying Out Step After carrying out the sheet cutting step, as shown in FIG. 30, the frame unit 9 in which the wafer W is attached to the annular frame 2 via the sheet 8 is formed. Then, the frame holding means 60 ascends while holding the frame unit 9 to carry out the frame unit 9 from the position P where the sheet 8 is cut, and transfers the frame unit 9 to the next step (for example, mounting step). .

As described above, in the expanding method according to the present invention, after the sheet feeding step and the workpiece facing step are performed, the first clamping means 10A and the second clamping means 10B that face each other with the wafer W in the first direction are opposed to each other. And the sheet 8 is sandwiched by the third sandwiching means 10C and the fourth sandwiching means 10D which face each other with the wafer W sandwiched therebetween in the second direction orthogonal to the first direction. From the step of adhering the sheet 8 to the wafer W, the wafer W is held by the holding means 40 and the first holding means 10A, the second holding means 10A, Since the upper and lower surfaces of the sheet 8 are sandwiched by the sandwiching means 10B, the third sandwiching means 10C, and the fourth sandwiching means 10D, it is possible to reduce the risk of the wafer W being damaged. In addition, the upper and lower surfaces of the sheet 8 are kept by the first pinching means 10A, the second pinching means 10B, the third pinching means 10C, and the fourth pinching means 10D until the sheet cutting step is completed after performing the attaching step. Since the sandwiched state is maintained, it is possible to reduce the risk of the wafer W being damaged when the seat 8 is expanded, and the frame unit 9 can be efficiently formed.
Further, in the expanding method according to the present invention, since the pre-first direction expanding step and the pre-second direction expanding step are performed before the sheet 8 is expanded to form the intervals between the chips, the bending of the sheet 8 is beforehand performed. Since the first direction expanding step and the second direction expanding step can be performed after the cancellation, it is possible to prevent the expansion amount of the seat 8 from becoming insufficient.

1: Expansion device 2: Ring frame 3: Opening 4: Annular frame supply unit 5: Frame stocker 6: Carriage 7: Casters 8: Sheet 8a: Adhesive surface 9: Frame unit 10: Expansion means 10A: First clamping means 10B: 2nd holding means 10C: 3rd holding means 10D: 4th holding means 11a, 11b: Lower holding mechanism 12a, 12b: Upper holding mechanism 13a, 13b: Movable base 14a: 1st direction moving means 14b: 2nd direction Moving means 15: Lower elevating means 16: Upper elevating means 20: Sending reel 21: Take-up reel 22: Sending rollers 23, 24: Pulling roller 30: Adhering roller 31: Release means 32: Fixed bases 33a, 33b: Frame sticking roller 34: Cutting means 35: Dividing means 36: Rotary table 37: First direction feeding means 38: Second direction feeding means 40: Holding means 41: Holding table 42: Rotating table 43: Base 44: Rotating shaft 45: Supporting Part 50: Peeling Unit 50A: Tape Holding Means 50B: Bending Roller Moving Means 50C: Peeling Starting Point Generating Means 51a: First Air Cylinder 51b: Second Air Cylinder 51c: Third Air Cylinder 51d: Fourth Air Cylinder 511, 512: Clamping piece 52: Holding base 53: Holding plate 54: Support frame 55: Bending roller 56: Arm member 57: Tip member 58: Tip needle member 59: Air nozzle 60: Frame holding means 61: Frame holding portion 70: Robot hand

Claims (3)

A sheet with an adhesive surface is attached to a work piece that has division start points formed along a plurality of intersecting division lines, or a work piece divided into individual chips along a plurality of intersecting division lines. An expanding device for forming a gap between adjacent chips by expanding the attached sheet while wearing
A delivery reel that delivers the sheet wound into a roll,
A take-up reel that winds up the fed sheet,
Expansion means for expanding the sheet between the delivery reel and the take-up reel;
Holding means for holding the sticking surface of the workpiece to which the sheet is stuck above the sheet expanded by the expanding means in a state of facing the adhesive surface of the sheet;
A sticking roller which is arranged below the sheet expanded by the expanding means, and which sticks the sheet to a workpiece held by the holding means;
Frame holding means for holding an annular frame having an opening at the center on the upper side of the sheet expanded by the expanding means so that the workpiece attached to the sheet is positioned in the opening;
A frame sticking roller for sticking the sheet to the annular frame held by the frame holding means, which is arranged below the sheet to which the workpiece is stuck,
Cutting means for cutting the sheet along the annular frame held by the frame holding means and arranged on the lower side of the sheet to which the workpiece is attached,
The expanding means are arranged so as to face each other with a workpiece to be adhered to the sheet sandwiched therebetween in the first direction, and each of the expanding means includes a first sandwiching means and a second sandwiching means for sandwiching the sheet, and Third sandwiching means and fourth sandwiching means, which are arranged to face each other with a workpiece to be stuck on the sheet sandwiched therebetween in a second direction orthogonal to one direction, and which sandwich the sheet, respectively. One clamping means and the second clamping means are movable in the first direction so as to move away from each other, and the third clamping means and the fourth clamping means move in the second direction away from each other. And a moving means that enables it ,
The sticking roller sticks the workpiece held by the holding means to the sheet held by the first holding means, the second holding means, the third holding means, and the fourth holding means. to <br/> expansion unit. A sheet with an adhesive surface is attached to a work piece that has division start points formed along a plurality of intersecting division lines, or a work piece divided into individual chips along a plurality of intersecting division lines. A method for expanding the sheet, which is attached and expanded to form a gap between adjacent chips,
A sheet feeding step of feeding the rolled sheet at one end and winding the fed sheet at the other end,
A workpiece facing step of holding the workpiece by holding means and facing the sticking surface of the workpiece to the adhesive surface of the sheet sent out in the sheet sending step,
After performing the workpiece facing step, the sheet is sandwiched by the first sandwiching means and the second sandwiching means, which are opposed to each other with the workpiece sandwiched in the first direction, and the second sheet orthogonal to the first direction. A sandwiching step of sandwiching the sheet by a third sandwiching means and a fourth sandwiching means that face each other with the work piece sandwiched in the direction;
After performing the sandwiching step, the first sandwiching means, the second sandwiching means, the third sandwiching means, and the fourth sandwiching means press the sheet from the opposite side of the adhesive surface of the sheet sandwiched. And a sticking step for sticking the sheet to the workpiece held by the holding means ,
A release step of releasing the workpiece attached to the sheet from the holding means after performing the attaching step,
After performing the release step, the first holding means and the second holding means move the first holding means and the second holding means so as to separate from each other with the sheet held by the first holding means and the second holding means. A first direction expanding step for expanding the first direction in the first direction,
After performing the release step, the third holding means and the fourth holding means move the third holding means and the fourth holding means so as to separate from each other in a state where the third holding means and the fourth holding means hold the sheet. A second direction expanding step for expanding the second direction,
A state in which the sheet is clamped by the first clamping means, the second clamping means, the third clamping means, and the fourth clamping means after performing the first direction expanding step and the second direction expanding step. At the adhesive surface of the sheet, a frame positioning step of facing an annular frame having an opening in the center and positioning a workpiece in the opening,
A frame attaching step of attaching the sheet to the annular frame positioned to face the adhesive surface in the frame positioning step;
A sheet cutting step of cutting the sheet along the annular frame after performing the frame attaching step,
After carrying out the sheet cutting step, a carrying-out step of carrying out a frame unit, in which a workpiece is attached to the annular frame via the sheet, from the sheet, the expanding method. After carrying out the sandwiching step and before carrying out the pasting step, the first sandwiching means and the second sandwiching means are held with the first sandwiching means and the second sandwiching means sandwiching the sheet. A pre-first direction expanding step of moving the sheets so as to separate from each other to expand the sheet in the first direction to eliminate the bending of the sheet in the first direction;
In a state where the third sandwiching means and the fourth sandwiching means sandwich the sheet, the third sandwiching means and the fourth sandwiching means are moved to be separated from each other to expand the sheet in the second direction. The expansion method according to claim 2, further comprising: a preliminary second direction expansion step of eliminating bending of the sheet in the second direction.

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