JP2018200986A - Separation device and separation method - Google Patents

Abstract

To provide a separation device and a separation method that are able to cause separation holding means to securely hold an end of an adhesive sheet.SOLUTION: A separation device comprises: separation holding means 20 that holds an end part AE1 of an adhesive sheet of an integrated object WK to which a plurality of stuck bodies CP or divided stuck bodies are attached to at least one surface AS1 or the other surface AS2 of an adhesive sheet AS; and separating means 30 that relatively moves the separation holding means holding an end of the adhesive sheet and broadens an interval between the stuck bodies while applying tension to the adhesive sheet. The separation device has transfer means 40 that holds the integrated object and transfers to the separation holding means. The transfer means comprises: transfer holding means 41 that holds the other end AE2 of the adhesive sheet of the integrated object; tension applying means 42 that applies predetermined tension to an outer edge part of the adhesive sheet by relatively moving the transfer holding means holding the other end of the adhesive sheet; and conveying means 43 that conveys the integrated object held by the transfer holding means.SELECTED DRAWING: Figure 1

Description

  The present invention relates to a separation device and a separation method.

  2. Description of the Related Art Conventionally, a separation device that increases the interval between a plurality of adherends attached to an adhesive sheet is known (see, for example, Patent Document 1).

JP 2014-2322843 A

  However, in the conventional separation apparatus described in Patent Document 1, the dicing tape S (adhesive sheet) to which the wafer W (adhered body) is attached is attached to a frame-like member such as the frame F and pulled. Since the transfer to the means 26 (the holding means for separation) is performed, when such a frame-like member is removed, the end of the adhesive sheet hangs down or shakes, so that the end of the adhesive sheet is surely secured. Inconveniently, it cannot be delivered to the holding means for separation.

  An object of the present invention is to provide a separation device and a separation method capable of reliably holding an end portion of an adhesive sheet on a separation holding means.

  The present invention employs the configurations described in the claims.

  According to the present invention, a predetermined tension is applied to the outer edge portion of the adhesive sheet including the end portion held by the separation holding means, and the monolith is transferred to the separation holding means, so that the end portion of the adhesive sheet hangs down. The end of the adhesive sheet can be reliably held by the separating holding means without shaking.

(A) is a top view of the separation apparatus which concerns on embodiment of this invention. (B), (C) is the side view of (A), and its operation | movement explanatory drawing. (A), (B) is explanatory drawing of the other example of this invention.

Hereinafter, embodiments of the present invention will be described with reference to the drawings.
In this embodiment, the X axis, the Y axis, and the Z axis are orthogonal to each other, the X axis and the Y axis are axes in a predetermined plane, and the Z axis is an axis that is orthogonal to the predetermined plane. To do. Furthermore, in this embodiment, when viewed from the direction of the arrow BD parallel to the Y axis, and when the direction is indicated without giving a reference figure, “up” is the “down” direction of the Z axis. Is the opposite direction, “left” is the arrow direction of the X axis, “right” is the opposite direction, “front” is the arrow direction of the Y axis, and “rear” is the opposite direction.

  The separation device 10 of the present invention has a plurality of separation holding means 20 for holding the end portions AE1 of the adhesive sheet AS in the integrated object WK having a plurality of adherends CP affixed to one surface AS1 of the adhesive sheet AS. And the separation means 30 for holding the end portion AE1 of the adhesive sheet AS are relatively moved, tension is applied to the adhesive sheet AS and the mutual distance between the adherends CP is increased, and the integrated object WK is held. Then, a delivery means 40 for delivering the integrated object WK to the plurality of separation holding means 20, an imaging means such as a camera and a projector, and a detection means 50 such as various sensors such as an optical sensor and an ultrasonic sensor are provided. ing. In addition, the integrated object WK of this embodiment has a plurality of adherends CP attached to the center of a square-shaped adhesive sheet AS in plan view.

  The separation holding means 20 includes a lower holding member 21 supported by the separation means 30, a rotation motor 22 as a driving device supported by the lower holding member 21, and an upper holding member 23 supported by the output shaft 22A. And.

  The separation means 30 includes a linear motor 31 as a driving device and a holding arm 32 supported by the slider 31A and supporting the lower holding member 21 on the upper surface side.

The delivery means 40 relatively moves a plurality of delivery holding means 41 for holding another end portion AE2 of the adhesive sheet AS in the integrated object WK and a delivery holding means 41 for holding another end portion AE2 of the adhesive sheet AS. Tension applying means 42 for applying a predetermined tension to the outer edge portion of the adhesive sheet AS including the end portion AE1 held by the separation holding means 20, and a conveying means for conveying the integrated object WK held by the delivery holding means 41. 43.
The delivery holding means 41 includes four suction pads 41A that can be sucked and held by a decompression means (not shown) such as a vacuum pump or a vacuum ejector, and a support arm 41B that supports each suction pad 41A.
The tension applying means 42 includes four XY tables 42A as drive devices including sliders 42B that can move in two axial directions, ie, the X-axis direction and the Y-axis direction, and a support arm 41B is supported by each slider 42B. ing.
The transport means 43 includes an articulated robot 43A as a driving device constituted by a plurality of arms, and a base frame 43C supported by a tip arm 43B which is a working unit thereof and supporting four XY tables 42A. Yes. The articulated robot 43A may be a so-called six-axis robot or the like that can be displaced at any position and at any angle within the work range. For example, Japanese Patent Laid-Open No. 2006-81974 The articulated robot 111 etc. which are illustrated can be illustrated.

The operation of the above separating apparatus 10 will be described.
First, a user (hereinafter, simply referred to as “user”) of the separation device 10 operates with respect to the separation device 10 in which each member stands by at an initial position indicated by a solid line in FIGS. An automatic operation start signal is input via an operating means (not shown) such as a panel or a personal computer. Then, after the delivery means 40 drives the articulated robot 43A to bring the suction pad 41A into contact with the other end AE2 of the adhesive sheet AS of the integrated object WK supplied to a predetermined integrated object supply position (not shown), A decompression unit (not shown) is driven to start holding the adhesive sheet AS by suction. Next, the delivery means 40 drives the articulated robot 43A, and as shown by a solid line in FIG. 1B, the one-piece object WK sucked and held by the suction pad 41A is transported above each separation holding means 20, The XY table 42A is driven, the suction pad 41A is moved in the diagonal direction of the adhesive sheet AS with a predetermined torque, and a predetermined tension is applied to the outer edge portion of the adhesive sheet AS including the end AE1 held by the separation holding means 20. To do.

  At this time, the detection means 50 drives a camera or the like to detect the adherend CP, and the delivery means 40 drives the articulated robot 43A. Based on the detection result of the detection means 50, the adherend While positioning the CP, the end portion AE1 of the adhesive sheet AS in a state where a predetermined tension is applied to the outer edge portion is placed on the lower holding member 21 as indicated by a two-dot chain line in FIG. For example, the delivery means 40 is configured so that the center position of the entire adherend CP does not deviate from a predetermined position of the separation device 10 (for example, the center position of the separation device 10) or the entire adherend CP. The adherend CP is positioned so that the outer sides and the outer sides of the adherends CP are parallel to the X axis and the Y axis, respectively.

  Thereafter, when the holding means 20 for separation drives each rotation motor 22 and the end part AE1 of the adhesive sheet AS is held by the lower holding member 21 and the upper holding member 23, the delivery means 40 stops driving the decompression means (not shown). After releasing the suction and holding of the adhesive sheet AS, the articulated robot 43A is driven to return the suction pad 41A to the initial position. Next, the separating means 30 drives each linear motor 31, and as shown in FIG. 1C, the separating holding means 20 are separated from each other, and tension is applied to the adhesive sheet AS to form the adherend CP. Increase the distance between each other. At this time, the adherends CP may not be spread at a predetermined interval due to distortion of the adhesive sheet AS or the like. Therefore, based on the detection result of the detection means 50, the separation means 30 drives each linear motor 31, and each separation holding means 20 is individually set so that the mutual interval between the adherends CP becomes a predetermined distance. Move.

  When all the adherend CP or a predetermined amount of the adherend CP are removed from the adhesive sheet AS by an adherend takeout means (not shown) such as a pickup device or a conveyance device, the separating means 30 causes each linear motor 31 to move. After driving and returning the respective sliders 31A to the initial positions, the separation holding means 20 drives the rotation motor 22 to return the upper holding member 23 to the initial position. Next, the operator or a conveying means (not shown) removes the adhesive sheet AS left on the lower holding member 21, and thereafter the same operation as described above is repeated.

  According to the separation device 10 as described above, a predetermined tension is applied to the outer edge portion of the adhesive sheet AS including the end portion AE1 held by the separation holding unit 20, and the monolith WK is delivered to the separation holding unit 20. Therefore, the end portion AE1 of the adhesive sheet AS does not hang down or shakes, and the end portion AE1 of the adhesive sheet AS can be reliably held by the separation holding means 20.

  The means and steps in the present invention are not limited in any way as long as they can perform the operations, functions, or steps described with respect to those means and steps. The process is not limited at all. For example, the separation holding means is composed of a plurality or a single piece, and a plurality of adherends or divided adherends are attached to at least one of one surface and the other surface of the adhesive sheet. There is no limitation as long as it can hold the edge portion of the adhesive sheet in the one-piece, within the technical scope of the application, as long as it is within the technical scope (other means and processes are also included). the same).

As shown in FIG. 2 (A), the separation device of the present invention is outside the adherend adhesion region CE where the separation holding means 20 and a plurality of adherends CP on the adhesive sheet AS are affixed. The contact means 60 that comes into contact with the adhesive sheet AS inside the held area HE held by the separation holding means 20, and the separation holding means 20 and the contact means 60 that hold the end portion AE 1 of the adhesive sheet AS are provided. The separating device 10A may include a separating unit 30A that relatively moves and applies tension to the adhesive sheet AS to widen the interval between the adherends CP, and a delivery unit 40.
In addition, in the separation device 10A, components having the same configuration and the same function as the separation device 10 are denoted by the same reference numerals as those of the separation device 10, and the description of the configuration is omitted, and the operation description is simplified.

The separation means 30A includes a linear motion motor 33 as a drive device supported on the base plate BP, and supports the lower holding member 21 with its output shaft 33A.
The contact means 60 includes a cylindrical contact member 61 supported on the base plate BP.

  In such a separation device 10A, as in the separation device 10, the delivery means 40 drives the articulated robot 43A, the decompression means (not shown) and the XY table 42A, as shown by the two-dot chain line in FIG. The end portion AE1 of the adhesive sheet AS is placed on the lower holding member 21 while applying a predetermined tension to the outer edge portion of the adhesive sheet AS sucked and held by the suction pad 41A. After that, the separation holding means 20 drives each rotation motor 22, and as shown in FIG. 2 (B), the lower holding member 21 and the upper holding member 23 hold the end AE <b> 1 of the adhesive sheet AS, and then the separation is performed. The means 30A drives each linear motion motor 33, lowers the separation holding means 20 and moves the separation holding means 20 and the contact means 60 relative to each other, and applies tension to the adhesive sheet AS to thereby adhere the adherend CP. Increase the distance between each other. Thereafter, when the adherend CP is removed from the adhesive sheet AS by the adherend takeout means (not shown), each means drives the respective driving device to return each member to the initial position, and then the lower holding member 21. The adhesive sheet AS left above is removed, and thereafter the same operation as described above is repeated.

  The effect similar to the separation apparatus 10 can be acquired also by such a separation apparatus 10A.

The separation holding means 20 may be configured to hold the end portion AE1 of the adhesive sheet AS in which a plurality of adherends CP are attached to the other surface AS2, or both the one surface AS1 and the other surface AS2. In addition, the end portion AE1 of the adhesive sheet AS may be held by gripping means such as a mechanical chuck or a chuck cylinder, Coulomb force, adhesive, adhesive, magnetic force, Bernoulli adsorption, or a driving device.
In the case of the separation device 10, the separation holding means 20 is, for example, two bodies including the separation holding means 20 that moves to the right as one body and the separation holding means 20 that moves to the left as one body. You may comprise, for example, you may comprise in 3 or more bodies which move rightward, leftward, and another direction.
In the case of the separation device 10A, the separation holding means 20 may be one or two or more.

The separation means 30 and 30A may be a single number instead of a plurality. In this case, for example, the separation device 10 supports the separation holding means 20 one by one with two sliders of one linear motor, and adheres to it. A configuration may be adopted in which the mutual interval between the bodies CP is increased, and the mutual interval between the adherends CP is increased only in one axial direction (for example, the X-axis direction or the Y-axis direction).
The separation means 30 may be configured to widen the mutual interval in directions of three or more axes (for example, the X-axis direction, the Y-axis direction, and other axial directions), for example, a plurality of separation holdings moved in the X-axis direction. The means 20 may be configured to move in the Y-axis direction (the structure in which the plurality of separation holding means 20 moved in the Y-axis direction are moved in the X-axis direction), respectively, and the mutual interval between the adherends CP may be increased. And the structure which cannot operate | move so that the mutual space | interval of the to-be-adhered body CP may become a predetermined space | interval may be sufficient.
The separation means 30A moves the contact means 60 while stopping or moving the separation holding means 20, thereby moving the separation holding means 20 and the contact means 60 relative to each other and applying tension to the adhesive sheet AS. Thus, the interval between the adherends CP may be increased.
The separation means 30 and 30A may be driven by an operator operating buttons and levers to drive the linear motor 31 and the linear motion motor 33. In this case, for example, the detection result by the detection means 50 is monitored or detected by a detector. And so that the mutual distance between the adherends CP becomes a predetermined distance according to the detection result displayed on the display, or the overall collective shape of each adherend CP However, the operator may drive the linear motor 31 and the linear motor 33 so as to have a similar relationship with the overall collective shape of the base.

The delivery means 40 may place the end portion AE1 of the adhesive sheet AS with a predetermined tension applied to the outer edge portion on the lower holding member 21 without positioning the adherend CP.
The tension applying means 42 may apply a predetermined tension only to the outer edge portion of the adhesive sheet AS in the X-axis direction, the Y-axis direction, or other directions, or may apply the suction pad 41A instead of a predetermined torque. A predetermined tension may be applied to the outer edge of the adhesive sheet AS by moving the distance, or the suction pad 41A may be moved in a direction shifted from the diagonal direction of the adhesive sheet AS. In this case, for example, one set of the holding means 41 for delivery is supported by two sliders of one linear motor, and a predetermined tension is applied to the outer edge portion of the adhesive sheet AS. It is good also as a structure which expands the mutual space | interval only to 1 axial direction (for example, X-axis direction or Y-axis direction etc.).
The delivery holding means 41 may be configured to hold the other end AE2 of the adhesive sheet AS by a gripping means such as a mechanical chuck or a chuck cylinder, a Coulomb force, an adhesive, an adhesive, a magnetic force, Bernoulli adsorption, a driving device, or the like. .
The tension applying means 42 may drive the XY table 42A by an operator operating a button or lever. In this case, for example, the torque output from the XY table 42A is displayed on a display such as a monitor or a detector. The display is configured so that the torque value displayed on the display unit becomes a predetermined value, or the movement amount of the slider 42B of the XY table 42A is configured to be displayed on the display unit. An operator may drive the XY table 42A so that the displayed movement amount becomes a predetermined movement amount.
The predetermined tension applied to the outer edge portion of the adhesive sheet AS by the delivery means 40 can be arbitrarily determined by the user as long as the tension is equal to or greater than the degree at which the outer edge portion of the adhesive sheet AS is not loosened.

  The detection means 50 may be, for example, visually observed by an operator. In this case, a predetermined tension is applied to the outer edge portion of the adhesive sheet AS by the operator's visual observation, or the position of the adherend CP and the separation device 10 are determined. Alignment is performed, the mutual interval between the adherends CP is a predetermined interval, or the overall aggregate shape of each adherend CP is similar to the overall aggregate shape of the base For example, the XY table 42A, the linear motor 31 and the linear motor 33 may be driven by operating buttons and levers, or the separation devices 10 and 10A of the present invention are provided. It does not have to be.

  The abutting means 60 may employ an abutting member 61 having other shapes such as a cylinder, a prism, an ellipse, etc., in addition to a rectangular tube shape, an elliptic cylinder shape, and the like.

In the separation device 10, first, after the delivery means 40 drives the XY table 42 </ b> A and applies a predetermined tension only to the outer edge portion of the adhesive sheet AS in the X-axis direction, the separation holding means 20 is turned into the rotation motor 22. And the end portion AE1 of the adhesive sheet AS is held only by the separation holding means 20 arranged in the X-axis direction, and thereafter, in a similar manner, a predetermined value is provided only in the Y-axis direction with respect to the outer edge portion of the adhesive sheet AS. After applying the tension, the end portion AE1 of the adhesive sheet AS may be held only by the separation holding means 20 arranged in the Y-axis direction (in this case, X and Y may be reversed).
In the case where the adhesive strength of the adhesive sheet AS is reduced by a predetermined energy, the adhesive sheet AS is bonded by an energy applying means capable of applying predetermined energy before the adherend CP is removed from the adhesive sheet AS by an adherend take-out means not shown. You may reduce the adhesive force of sheet | seat AS. Such energy applying means may apply electromagnetic waves of any wavelength (such as X-rays or infrared rays), heated or cooled fluids such as gas or liquid, etc., to the adhesive sheet AS as energy. Any material can be used as long as it can impart energy capable of reducing the adhesive strength of the adhesive sheet AS according to the configuration of the AS.

The material, type, shape and the like of the adhesive sheet AS and the adherend CP in the present invention are not particularly limited. For example, the adhesive sheet AS and the adherend CP may be a circle, an ellipse, a polygon such as a triangle or a quadrangle, and other shapes. The adhesive sheet AS may be a pressure sensitive adhesive, a heat sensitive adhesive, or the like. It may be in an adhesive form. Also, the adhesive sheet AS is, for example, a single layer having only an adhesive layer, having an intermediate layer between the base material and the adhesive layer, or having a cover layer on the upper surface of the base material. Further, it may be a so-called double-sided adhesive sheet that can peel the substrate from the adhesive layer. Such a double-sided adhesive sheet has a single-layer or multi-layer intermediate layer, It may be a single layer or multiple layers without an intermediate layer. Examples of the adherend CP include, for example, foods, resin containers, semiconductor wafers such as silicon semiconductor wafers and compound semiconductor wafers, semiconductor chip, circuit board, information recording substrates such as optical disks, glass plates, steel plates, ceramics, wooden plates, It may be a single substance such as a resin, or may be a composite formed by two or more of them, and can be a target of a member or an article in any form. Note that the adhesive sheet AS can be read in a functional or application manner, and can be any information such as an information description label, a decorative label, a protective sheet, a dicing tape, a die attach film, a die bonding tape, and a recording layer forming resin sheet. Sheets, films, tapes, etc. may be used.
A plurality of adherends CP may exist in advance on the adhesive sheet AS, or may be divided into a plurality of parts when the external force is applied by the separating means 30, 30A, other mechanisms, or by hand, and the like on the adhesive sheet AS. It is also possible to divide into a plurality such that there are a plurality. As the adherend CP which is divided into a plurality of parts, for example, a semiconductor wafer, a substrate or the like is irradiated with a laser to form a fragile weak layer such as a line or lattice on the semiconductor wafer or the substrate. In addition, when the tension is applied to the adhesive sheet AS, or when an external force is applied directly or indirectly to the semiconductor wafer, the substrate, or the like, the adhesive sheet AS becomes a plurality of adherends CP, for example, Cut the resin or glass plate with a cutter blade, and form a cut or perforation line that does not penetrate the front or back of the resin or glass plate, etc. It is not limited at all, such as the one that becomes a plurality of adherends CP by applying tension to AS or applying external force directly or indirectly to resin or glass plate. .

  The drive device in the embodiment employs an electric device such as a rotation motor, a linear motion motor, a linear motor, a single-axis robot, and an articulated robot, an actuator such as an air cylinder, a hydraulic cylinder, a rodless cylinder, and a rotary cylinder. In addition, a combination of them directly or indirectly can be adopted.

DESCRIPTION OF SYMBOLS 10, 10A ... Separating device 20 ... Separating holding means 30, 30A ... Separating means 40 ... Delivery means 41 ... Delivery holding means 42 ... Tension applying means 43 ... Conveying means 60 ... Contact means AE1 ... End part AE2 ... Another End AS ... Adhesive sheet AS1 ... One surface AS2 ... Other surface CE ... Adherence adherence area CP ... Adherence HE ... Holding area WK ... Integral object

Claims (4)

A plurality of gaps for holding an end portion of the adhesive sheet in an integrated body in which a plurality of adherends or a plurality of adherends to be divided are attached to at least one of one surface and the other surface of the adhesive sheet Holding means,
A separation unit that relatively moves the separation holding unit that holds the end of the adhesive sheet, and applies tension to the adhesion sheet to widen the interval between the adherends;
Delivery means for holding the one-piece and delivering the one-piece to the plurality of separation holding means;
The delivery means relatively moves a plurality of delivery holding means for holding another end portion of the adhesive sheet in the one-piece and the delivery holding means for holding another end portion of the adhesive sheet, and the separation means A tension applying unit that applies a predetermined tension to the outer edge of the adhesive sheet including an end held by the holding unit; and a conveying unit that conveys the integrated object held by the holding unit for delivery. A separation device characterized by the above. Separation holding for holding an end portion of the adhesive sheet in a single body in which a plurality of adherends or a plurality of adherends to be divided are attached to at least one of one surface and the other surface of the adhesive sheet Means,
A contact means for contacting the adhesive sheet outside the adherend adhesion region to which the plurality of adherends in the adhesive sheet are affixed, and inside the holding region held by the separation holding means;
A separation unit that relatively moves the holding unit for separation and the contact unit that hold the end portion of the adhesive sheet, and applies tension to the adhesive sheet to widen the interval between the adherends, and
Delivery means for holding the one-piece and delivering the one-piece to the holding means for separation;
The delivery means relatively moves a plurality of delivery holding means for holding another end portion of the adhesive sheet in the one-piece and the delivery holding means for holding another end portion of the adhesive sheet, and the separation means A tension applying unit that applies a predetermined tension to the outer edge of the adhesive sheet including an end held by the holding unit; and a conveying unit that conveys the integrated object held by the holding unit for delivery. A separation device characterized by the above. A plurality of spaced-apart holdings of the end portions of the adhesive sheet in an integrated body in which a plurality of adherends or a plurality of adherends that are divided into a plurality are attached to at least one of the one surface and the other surface of the adhesive sheet A holding process for separation which is held by means;
A separation step of relatively moving the separation holding means holding the end portion of the adhesive sheet, and applying tension to the adhesive sheet to widen the interval between the adherends,
A delivery step of holding the integral object and delivering the integral object to the plurality of separation holding means;
In the delivery step, the delivery holding step of holding another end of the adhesive sheet in the integrated object by a plurality of delivery holding means and the delivery holding means holding the other end of the adhesive sheet are relative to each other. A tension applying step of moving and applying a predetermined tension to an outer edge portion of the adhesive sheet including an end portion held by the separation holding means; and a conveying step of conveying the integrated object held by the delivery holding means; A separation method characterized by comprising: At least one of the one surface and the other surface of the adhesive sheet is attached with a plurality of adherends or an integrated object in which a plurality of adherends that are divided are pasted. Holding step for holding to hold,
An abutting means that abuts the adhesive sheet outside the adherend adhesion region to which the plurality of adherends are affixed in the adhesive sheet, and inside the holding region held by the separation holding means; and A separation step of relatively moving the separation holding means holding the end portion of the adhesive sheet, and applying tension to the adhesive sheet to widen the interval between the adherends,
A delivery step of holding the one-piece and delivering the one-piece to the separation holding means;
In the delivery step, the delivery holding step of holding another end of the adhesive sheet in the integrated object by a plurality of delivery holding means and the delivery holding means holding the other end of the adhesive sheet are relative to each other. A tension applying step of moving and applying a predetermined tension to an outer edge portion of the adhesive sheet including an end portion held by the separation holding means; and a conveying step of conveying the integrated object held by the delivery holding means; A separation method characterized by comprising:

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