JP6841367B1 - 半導体モジュール、電力変換装置及び半導体モジュールの製造方法 - Google Patents
半導体モジュール、電力変換装置及び半導体モジュールの製造方法 Download PDFInfo
- Publication number
- JP6841367B1 JP6841367B1 JP2020120968A JP2020120968A JP6841367B1 JP 6841367 B1 JP6841367 B1 JP 6841367B1 JP 2020120968 A JP2020120968 A JP 2020120968A JP 2020120968 A JP2020120968 A JP 2020120968A JP 6841367 B1 JP6841367 B1 JP 6841367B1
- Authority
- JP
- Japan
- Prior art keywords
- grease
- semiconductor module
- cooler
- opening
- semiconductor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 239000004065 semiconductor Substances 0.000 title claims abstract description 141
- 238000004519 manufacturing process Methods 0.000 title claims description 12
- 239000004519 grease Substances 0.000 claims abstract description 125
- 239000000758 substrate Substances 0.000 claims abstract description 52
- 238000000034 method Methods 0.000 claims description 13
- 230000002093 peripheral effect Effects 0.000 claims description 9
- 238000001816 cooling Methods 0.000 claims description 7
- 238000006243 chemical reaction Methods 0.000 claims description 6
- 230000017525 heat dissipation Effects 0.000 abstract description 6
- 238000010586 diagram Methods 0.000 abstract 1
- 238000005086 pumping Methods 0.000 abstract 1
- 239000000463 material Substances 0.000 description 20
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 14
- 230000005484 gravity Effects 0.000 description 14
- 229910052799 carbon Inorganic materials 0.000 description 13
- 229920005989 resin Polymers 0.000 description 13
- 239000011347 resin Substances 0.000 description 13
- 239000010949 copper Substances 0.000 description 9
- 229910052751 metal Inorganic materials 0.000 description 8
- 239000002184 metal Substances 0.000 description 8
- 229910052581 Si3N4 Inorganic materials 0.000 description 6
- 229910052802 copper Inorganic materials 0.000 description 6
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 6
- 229910052782 aluminium Inorganic materials 0.000 description 5
- 239000011231 conductive filler Substances 0.000 description 4
- 239000007787 solid Substances 0.000 description 4
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 3
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 3
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 description 3
- 239000011888 foil Substances 0.000 description 3
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical class C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 3
- 229920002050 silicone resin Polymers 0.000 description 3
- 229920000049 Carbon (fiber) Polymers 0.000 description 2
- PEEHTFAAVSWFBL-UHFFFAOYSA-N Maleimide Chemical compound O=C1NC(=O)C=C1 PEEHTFAAVSWFBL-UHFFFAOYSA-N 0.000 description 2
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 2
- 238000005219 brazing Methods 0.000 description 2
- 239000004917 carbon fiber Substances 0.000 description 2
- 239000002134 carbon nanofiber Substances 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 239000011889 copper foil Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000010292 electrical insulation Methods 0.000 description 2
- 239000003822 epoxy resin Substances 0.000 description 2
- 238000002156 mixing Methods 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 239000005011 phenolic resin Substances 0.000 description 2
- 229920000647 polyepoxide Polymers 0.000 description 2
- 239000004925 Acrylic resin Substances 0.000 description 1
- 229920000178 Acrylic resin Polymers 0.000 description 1
- -1 Al N Inorganic materials 0.000 description 1
- PIGFYZPCRLYGLF-UHFFFAOYSA-N Aluminum nitride Chemical compound [Al]#N PIGFYZPCRLYGLF-UHFFFAOYSA-N 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 239000000945 filler Substances 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 229910021397 glassy carbon Inorganic materials 0.000 description 1
- 229910002804 graphite Inorganic materials 0.000 description 1
- 239000010439 graphite Substances 0.000 description 1
- 230000001771 impaired effect Effects 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 229910010272 inorganic material Inorganic materials 0.000 description 1
- 239000011147 inorganic material Substances 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- JEIPFZHSYJVQDO-UHFFFAOYSA-N iron(III) oxide Inorganic materials O=[Fe]O[Fe]=O JEIPFZHSYJVQDO-UHFFFAOYSA-N 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 239000002923 metal particle Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 238000004382 potting Methods 0.000 description 1
- 229910000679 solder Inorganic materials 0.000 description 1
- 238000005476 soldering Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
- H01L23/42—Fillings or auxiliary members in containers or encapsulations selected or arranged to facilitate heating or cooling
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
- H01L23/36—Selection of materials, or shaping, to facilitate cooling or heating, e.g. heatsinks
- H01L23/367—Cooling facilitated by shape of device
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/50—Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the subgroups H01L21/06 - H01L21/326, e.g. sealing of a cap to a base of a container
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/50—Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the subgroups H01L21/06 - H01L21/326, e.g. sealing of a cap to a base of a container
- H01L21/56—Encapsulations, e.g. encapsulation layers, coatings
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/28—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
- H01L23/31—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape
- H01L23/3107—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape the device being completely enclosed
- H01L23/3121—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape the device being completely enclosed a substrate forming part of the encapsulation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
- H01L23/36—Selection of materials, or shaping, to facilitate cooling or heating, e.g. heatsinks
- H01L23/373—Cooling facilitated by selection of materials for the device or materials for thermal expansion adaptation, e.g. carbon
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
- H01L23/36—Selection of materials, or shaping, to facilitate cooling or heating, e.g. heatsinks
- H01L23/373—Cooling facilitated by selection of materials for the device or materials for thermal expansion adaptation, e.g. carbon
- H01L23/3737—Organic materials with or without a thermoconductive filler
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K7/00—Constructional details common to different types of electric apparatus
- H05K7/20—Modifications to facilitate cooling, ventilating, or heating
- H05K7/2089—Modifications to facilitate cooling, ventilating, or heating for power electronics, e.g. for inverters for controlling motor
- H05K7/209—Heat transfer by conduction from internal heat source to heat radiating structure
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
- H01L23/36—Selection of materials, or shaping, to facilitate cooling or heating, e.g. heatsinks
- H01L23/373—Cooling facilitated by selection of materials for the device or materials for thermal expansion adaptation, e.g. carbon
- H01L23/3731—Ceramic materials or glass
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
- H01L23/36—Selection of materials, or shaping, to facilitate cooling or heating, e.g. heatsinks
- H01L23/373—Cooling facilitated by selection of materials for the device or materials for thermal expansion adaptation, e.g. carbon
- H01L23/3735—Laminates or multilayers, e.g. direct bond copper ceramic substrates
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
- H01L23/36—Selection of materials, or shaping, to facilitate cooling or heating, e.g. heatsinks
- H01L23/373—Cooling facilitated by selection of materials for the device or materials for thermal expansion adaptation, e.g. carbon
- H01L23/3736—Metallic materials
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
- H01L23/40—Mountings or securing means for detachable cooling or heating arrangements ; fixed by friction, plugs or springs
- H01L23/4006—Mountings or securing means for detachable cooling or heating arrangements ; fixed by friction, plugs or springs with bolts or screws
Abstract
Description
2 配線基板
4 ピン
5 積層基板
8 ケース
9 ねじ
10 モジュール部
11 樹脂部
20,25 熱伝導部
21 枠体
22 開口部
22a グリース部
22b 空間部
23 櫛状部
24 空気層
30 冷却器
51 第1導電性板
52 絶縁基板
53 第2導電性板
100 半導体モジュール
Claims (11)
- 半導体素子が設けられた積層基板と、前記積層基板を冷却する冷却器とからなる半導体モジュールであって、
前記積層基板と前記冷却器との間に設けられた熱伝導部を備え、
前記熱伝導部は、枠体と開口部とを備え、
前記開口部は、前記開口部内に部分的に設けられ、前記積層基板と前記冷却器との間を充填するグリース部と、前記グリース部と前記枠体との間に部分的かつ帯状に設けられた空間部を有していることを特徴とする半導体モジュール。 - 前記開口部は、対向する二辺を有し、
前記空間部は、前記二辺のうちの一辺に接し、前記一辺の一端から他端に亘って設けられていることを特徴とする請求項1に記載の半導体モジュール。 - 前記半導体素子は、上面視において、前記空間部に隣接する前記グリース部の端部から前記グリース部の中心方向に離間して配置されていることを特徴とする請求項1又は2に記載の半導体モジュール。
- 前記空間部は、前記開口部の5〜10%の領域を占めることを特徴とする請求項1から3の何れか1項に記載の半導体モジュール。
- 前記熱伝導部は、前記開口部の前記空間部が設けられている側の周縁から前記グリース部に向けて突出する櫛状部を備える枠体を有していることを特徴とする請求項1から4の何れか1項に記載の半導体モジュール。
- 前記枠体のヤング率Y1は、前記グリース部のヤング率Y2よりも高いことを特徴とする請求項1から5の何れか1項に記載の半導体モジュール。
- 前記ヤング率Y1は、5GPa≦Y1≦15GPaの条件を満たすことを特徴とする請求項6に記載の半導体モジュール。
- 前記ヤング率Y2は、1Pa≦Y2≦200Paの条件を満たすことを特徴とする請求項6又は7に記載の半導体モジュール。
- 前記グリース部の粘度Gは、60Pa・s≦G≦500Pa・sの条件を満たすことを特徴とする請求項1から8の何れか1項に記載の半導体モジュール。
- 請求項1から9の何れか1項に記載の半導体モジュールを、前記空間部が上方となるように立てて設置したことを特徴とする電力変換装置。
- 半導体素子が設けられた積層基板と、前記積層基板を冷却する冷却器とからなる半導体モジュールの製造方法であって、
前記積層基板と前記冷却器との間に設けられる熱伝導部を作製する工程と、
前記熱伝導部が有する枠体の開口部内に部分的に設けられ、前記積層基板と前記冷却器との間を充填するグリース部を形成する工程と、
前記グリース部と前記枠体との間に部分的かつ帯状に設けられた空間部を形成する工程と、
を少なくとも備えていることを特徴とする半導体モジュールの製造方法。
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2020120968A JP6841367B1 (ja) | 2020-07-14 | 2020-07-14 | 半導体モジュール、電力変換装置及び半導体モジュールの製造方法 |
US17/365,053 US20220022340A1 (en) | 2020-07-14 | 2021-07-01 | Semiconductor module, power conversion device, and manufacturing method of semiconductor module |
CN202110742999.7A CN113937080A (zh) | 2020-07-14 | 2021-07-01 | 半导体模块、电力转换装置以及半导体模块的制造方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2020120968A JP6841367B1 (ja) | 2020-07-14 | 2020-07-14 | 半導体モジュール、電力変換装置及び半導体モジュールの製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP6841367B1 true JP6841367B1 (ja) | 2021-03-10 |
JP2022018033A JP2022018033A (ja) | 2022-01-26 |
Family
ID=74845325
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2020120968A Active JP6841367B1 (ja) | 2020-07-14 | 2020-07-14 | 半導体モジュール、電力変換装置及び半導体モジュールの製造方法 |
Country Status (3)
Country | Link |
---|---|
US (1) | US20220022340A1 (ja) |
JP (1) | JP6841367B1 (ja) |
CN (1) | CN113937080A (ja) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102021201263A1 (de) * | 2021-02-10 | 2022-08-11 | Zf Friedrichshafen Ag | Leistungsmodul zum Betreiben eines Elektrofahrzeugantriebs mit einer Direktkühlung der Leistungshalbleiter |
Family Cites Families (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20060238984A1 (en) * | 2005-04-20 | 2006-10-26 | Belady Christian L | Thermal dissipation device with thermal compound recesses |
JP4617209B2 (ja) * | 2005-07-07 | 2011-01-19 | 株式会社豊田自動織機 | 放熱装置 |
US8564114B1 (en) * | 2010-03-23 | 2013-10-22 | Amkor Technology, Inc. | Semiconductor package thermal tape window frame for heat sink attachment |
US8574965B2 (en) * | 2010-10-22 | 2013-11-05 | Ati Technologies Ulc | Semiconductor chip device with liquid thermal interface material |
JP5588956B2 (ja) * | 2011-11-30 | 2014-09-10 | 株式会社 日立パワーデバイス | パワー半導体装置 |
JP5875467B2 (ja) * | 2012-06-04 | 2016-03-02 | 三菱電機株式会社 | 電力用半導体装置 |
US9373558B2 (en) * | 2013-02-22 | 2016-06-21 | Hitachi, Ltd. | Resin-sealed electronic control device |
JP6055698B2 (ja) * | 2013-03-05 | 2016-12-27 | 日立オートモティブシステムズ株式会社 | 電子制御装置及びその放熱構造、並びにその電子制御装置を搭載した電子機器 |
DE112013007390B4 (de) * | 2013-08-29 | 2020-06-25 | Mitsubishi Electric Corporation | Halbleitermodul, Halbleitervorrichtung und Fahrzeug |
US9502269B2 (en) * | 2014-04-03 | 2016-11-22 | Bae Systems Information And Electronic Systems Integration Inc. | Method and apparatus for cooling electonic components |
JP6719569B2 (ja) * | 2016-09-21 | 2020-07-08 | 三菱電機株式会社 | 半導体装置および電力変換装置 |
JP6972622B2 (ja) * | 2017-04-03 | 2021-11-24 | 富士電機株式会社 | 半導体装置および半導体装置の製造方法 |
JP7172065B2 (ja) * | 2018-03-08 | 2022-11-16 | 富士電機株式会社 | 半導体装置 |
JP7170614B2 (ja) * | 2019-09-18 | 2022-11-14 | 株式会社東芝 | 半導体装置 |
-
2020
- 2020-07-14 JP JP2020120968A patent/JP6841367B1/ja active Active
-
2021
- 2021-07-01 CN CN202110742999.7A patent/CN113937080A/zh active Pending
- 2021-07-01 US US17/365,053 patent/US20220022340A1/en active Pending
Also Published As
Publication number | Publication date |
---|---|
CN113937080A (zh) | 2022-01-14 |
US20220022340A1 (en) | 2022-01-20 |
JP2022018033A (ja) | 2022-01-26 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US20190229033A1 (en) | Power module and method for manufacturing the same | |
US10978371B2 (en) | Semiconductor device and method for manufacturing semiconductor device | |
JP2011134769A (ja) | 放熱部品及び電子部品装置 | |
CN109637983B (zh) | 芯片封装 | |
CN111261598B (zh) | 封装结构及其适用的电源模块 | |
JP2007305702A (ja) | 半導体装置およびその製造方法 | |
US20160316589A1 (en) | Semiconductor assembly | |
JP5222838B2 (ja) | 制御装置 | |
JP2009246063A (ja) | パワーモジュールの冷却構造、及びそれを用いた半導体装置 | |
WO2012081434A1 (ja) | 半導体装置 | |
JP6841367B1 (ja) | 半導体モジュール、電力変換装置及び半導体モジュールの製造方法 | |
CN111615746A (zh) | 电力电子模块及制造电力电子模块的方法 | |
JP2019054069A (ja) | 半導体装置 | |
JP2016054249A (ja) | 半導体装置 | |
US11637052B2 (en) | Semiconductor device and semiconductor device manufacturing method | |
JP7170614B2 (ja) | 半導体装置 | |
JP4046623B2 (ja) | パワー半導体モジュールおよびその固定方法 | |
JP2020129605A (ja) | 半導体モジュール、半導体装置及び半導体装置の製造方法 | |
TWI660471B (zh) | 晶片封裝 | |
JP2013120866A (ja) | 半導体装置 | |
JP5092274B2 (ja) | 半導体装置 | |
JP2020087966A (ja) | 半導体モジュールおよびそれを用いた半導体装置 | |
CN110098153B (zh) | 电力电子模块及制造电力电子模块的方法 | |
JP2013229535A (ja) | 半導体装置 | |
JP2013229534A (ja) | 半導体装置 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20200803 |
|
A871 | Explanation of circumstances concerning accelerated examination |
Free format text: JAPANESE INTERMEDIATE CODE: A871 Effective date: 20200803 |
|
A975 | Report on accelerated examination |
Free format text: JAPANESE INTERMEDIATE CODE: A971005 Effective date: 20201030 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20201104 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20210119 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20210201 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 6841367 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |