JP6819565B2 - 物品収納設備 - Google Patents
物品収納設備 Download PDFInfo
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- JP6819565B2 JP6819565B2 JP2017245292A JP2017245292A JP6819565B2 JP 6819565 B2 JP6819565 B2 JP 6819565B2 JP 2017245292 A JP2017245292 A JP 2017245292A JP 2017245292 A JP2017245292 A JP 2017245292A JP 6819565 B2 JP6819565 B2 JP 6819565B2
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- 230000007246 mechanism Effects 0.000 claims description 50
- 238000000926 separation method Methods 0.000 claims description 33
- 230000003028 elevating effect Effects 0.000 description 33
- 230000032258 transport Effects 0.000 description 15
- 230000001105 regulatory effect Effects 0.000 description 7
- 238000004904 shortening Methods 0.000 description 4
- 239000004065 semiconductor Substances 0.000 description 3
- 230000009471 action Effects 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000012447 hatching Effects 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
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Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
- H01L21/67769—Storage means
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
- B65G1/02—Storage devices
- B65G1/04—Storage devices mechanical
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
- B65G1/02—Storage devices
- B65G1/04—Storage devices mechanical
- B65G1/0407—Storage devices mechanical using stacker cranes
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/6735—Closed carriers
- H01L21/67379—Closed carriers characterised by coupling elements, kinematic members, handles or elements to be externally gripped
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/6773—Conveying cassettes, containers or carriers
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
- H01L21/67766—Mechanical parts of transfer devices
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
- H01L21/67775—Docking arrangements
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Mechanical Engineering (AREA)
- Robotics (AREA)
- Warehouses Or Storage Devices (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Description
次に、物品収納設備のその他の実施形態について説明する。
以下、上記において説明した物品収納設備の概要について説明する。
2:移載装置
3:収納棚
10:支持体
20:出退機構
20a:第1連結部
20b:第2連結部
21:第1アーム
22:第2アーム
30:棚体
31:第1支持部
32:第2支持部
60:物品
A1:第1領域
A2:第2領域
C:幅方向中心
D:離間空間
L1:第1距離(幅方向中心から第1支持部までの距離)
L2:第2距離(幅方向中心から第2支持部までの距離)
M1:第1軸心
M2:第2軸心
P1:第1突出位置(特定位置)
S1:第1収納箇所(特定収納箇所)
X:横幅方向
X1:第1側
X2:第2側
Y:奥行方向
Y1:前面側
Y2:背面側
Z:上下方向
Claims (3)
- 物品を収納する収納棚と、前記収納棚の前面側から前記収納棚に対して物品を移載する移載装置と、を備えた物品収納設備であって、
前記収納棚は、物品を下方から支持する棚体を備え、
水平面内で前記収納棚の奥行方向に直交する方向を横幅方向とし、前記横幅方向の一方側を第1側とし、前記横幅方向の他方側を第2側として、
前記棚体は、前記棚体における前記横幅方向の中心である幅方向中心に対して前記第1側に、前記奥行方向に延びるように形成された第1支持部を備えると共に、前記幅方向中心に対して前記第2側に、前記奥行方向に延びるように形成された第2支持部を備え、前記第1支持部と前記第2支持部とにより、前記奥行方向に並ぶ状態の複数の物品を前記横幅方向の両側で支持可能に構成され、
前記移載装置は、物品を下方から支持する支持体と、前記支持体を前記奥行方向に沿って出退移動させる出退機構と、を備え、前記出退機構により前記支持体が前記収納棚の背面側に突出した状態で、前記支持体が前記第1支持部と前記第2支持部との間の離間空間を上下方向に通過することで、前記支持体と前記棚体との間で物品が移載されるように構成され、
前記出退機構は、第1アームと、第2アームと、前記第1アームと前記第2アームとを前記上下方向に沿う第1軸心周りに回動可能に連結する第1連結部と、前記第1アームにおける前記第1連結部とは異なる位置で前記支持体と前記第1アームとを前記上下方向に沿う第2軸心周りに回動可能に連結する第2連結部と、を備え、
前記移載装置は、前記第1アームと前記第2アームとを前記第1軸心周りに互いに反対側に回動させることで、前記第1連結部が前記第2連結部よりも前記第1側に位置する状態で、前記支持体を出退移動させるように構成され、
前記棚体の前記前面側の端部を含む前記奥行方向の領域である第1領域で、前記幅方向中心から前記第1支持部までの距離が、前記幅方向中心から前記第2支持部までの距離よりも長い物品収納設備。 - 前記棚体における前記奥行方向で最も前記背面側の物品の収納箇所を特定収納箇所として、前記支持体と前記特定収納箇所との間で物品を移載する場合に、前記出退機構は、前記支持体を前記奥行方向の特定位置まで突出させ、
前記支持体が前記特定位置に位置する特定状態で、前記第1アームが、前記上下方向視で、前記離間空間の内部において、前記前面側に向かうに従って前記第1側に向かうように傾斜して配置され、
前記第1領域における前記第1支持部の前記幅方向中心側の外縁の形状が、前記上下方向視で、前記特定状態での前記第1アームの外縁に沿うように形成されている請求項1に記載の物品収納設備。 - 前記第1領域よりも前記背面側の前記奥行方向の領域である第2領域で、前記幅方向中心から前記第1支持部までの距離が、前記幅方向中心から前記第2支持部までの距離と等しい請求項1又は2に記載の物品収納設備。
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2017245292A JP6819565B2 (ja) | 2017-12-21 | 2017-12-21 | 物品収納設備 |
US16/221,935 US10957570B2 (en) | 2017-12-21 | 2018-12-17 | Article storage facility |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2017245292A JP6819565B2 (ja) | 2017-12-21 | 2017-12-21 | 物品収納設備 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2019112160A JP2019112160A (ja) | 2019-07-11 |
JP6819565B2 true JP6819565B2 (ja) | 2021-01-27 |
Family
ID=66951471
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Application Number | Title | Priority Date | Filing Date |
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JP2017245292A Active JP6819565B2 (ja) | 2017-12-21 | 2017-12-21 | 物品収納設備 |
Country Status (2)
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US (1) | US10957570B2 (ja) |
JP (1) | JP6819565B2 (ja) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
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KR102648735B1 (ko) * | 2017-04-20 | 2024-04-03 | 다이후쿠 클린룸 아메리카 코퍼레이션 | 고밀도 스토커 |
JP6801640B2 (ja) * | 2017-12-21 | 2020-12-16 | 株式会社ダイフク | 収納棚及び物品収納設備 |
US10913641B2 (en) * | 2018-06-08 | 2021-02-09 | Attabotics Inc. | Storage units and robotic storage/retrieval vehicles for a three-dimensional storage system |
US20220415689A1 (en) * | 2019-11-12 | 2022-12-29 | Murata Machinery, Ltd. | Storage device |
Family Cites Families (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0912108A (ja) * | 1995-06-30 | 1997-01-14 | Tsubakimoto Chain Co | 移載装置 |
JP3372019B2 (ja) * | 1997-04-01 | 2003-01-27 | 村田機械株式会社 | 移載装置 |
US6641350B2 (en) * | 2000-04-17 | 2003-11-04 | Hitachi Kokusai Electric Inc. | Dual loading port semiconductor processing equipment |
JP3823720B2 (ja) * | 2000-11-24 | 2006-09-20 | 株式会社ダイフク | 物品収納設備 |
JP3971601B2 (ja) * | 2000-11-28 | 2007-09-05 | 大日本スクリーン製造株式会社 | 基板受渡装置および基板処理装置 |
US7134826B2 (en) * | 2001-11-28 | 2006-11-14 | Dainippon Screen Mfg. Co., Ltd. | Substrate transfer apparatus, substrate processing apparatus and holding table |
JP2007230739A (ja) * | 2006-03-02 | 2007-09-13 | Asyst Shinko Inc | ストッカ |
JP4904995B2 (ja) * | 2006-08-28 | 2012-03-28 | シンフォニアテクノロジー株式会社 | ロードポート装置 |
JP4973209B2 (ja) * | 2007-01-17 | 2012-07-11 | ムラテックオートメーション株式会社 | ストッカ及びスタッカ装置の制御方法 |
JP5321913B2 (ja) * | 2009-12-07 | 2013-10-23 | 株式会社ダイフク | 物品保管設備 |
JP6435795B2 (ja) * | 2014-11-12 | 2018-12-12 | 株式会社ダイフク | 物品搬送設備 |
JP6304107B2 (ja) * | 2015-04-06 | 2018-04-04 | 株式会社ダイフク | 物品搬送設備 |
JP6681646B2 (ja) * | 2015-11-27 | 2020-04-15 | 株式会社Kokusai Electric | 基板処理装置、半導体装置の製造方法及びプログラム |
US10703563B2 (en) * | 2017-11-10 | 2020-07-07 | Taiwan Semiconductor Manufacturing Co., Ltd. | Stocker |
-
2017
- 2017-12-21 JP JP2017245292A patent/JP6819565B2/ja active Active
-
2018
- 2018-12-17 US US16/221,935 patent/US10957570B2/en active Active
Also Published As
Publication number | Publication date |
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JP2019112160A (ja) | 2019-07-11 |
US10957570B2 (en) | 2021-03-23 |
US20190198370A1 (en) | 2019-06-27 |
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