JP6811340B2 - 表示装置及びそのgoa回路 - Google Patents
表示装置及びそのgoa回路 Download PDFInfo
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- JP6811340B2 JP6811340B2 JP2019554874A JP2019554874A JP6811340B2 JP 6811340 B2 JP6811340 B2 JP 6811340B2 JP 2019554874 A JP2019554874 A JP 2019554874A JP 2019554874 A JP2019554874 A JP 2019554874A JP 6811340 B2 JP6811340 B2 JP 6811340B2
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- 239000010409 thin film Substances 0.000 claims description 309
- 239000010410 layer Substances 0.000 claims description 178
- 229910052751 metal Inorganic materials 0.000 claims description 53
- 239000002184 metal Substances 0.000 claims description 53
- 239000000758 substrate Substances 0.000 claims description 25
- 239000004065 semiconductor Substances 0.000 claims description 22
- 239000011229 interlayer Substances 0.000 claims description 14
- 239000003990 capacitor Substances 0.000 claims description 8
- 238000010586 diagram Methods 0.000 description 8
- 230000001808 coupling effect Effects 0.000 description 5
- 230000007547 defect Effects 0.000 description 5
- 238000009413 insulation Methods 0.000 description 3
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 description 2
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 229910052733 gallium Inorganic materials 0.000 description 1
- 229910052738 indium Inorganic materials 0.000 description 1
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000003071 parasitic effect Effects 0.000 description 1
- 239000011787 zinc oxide Substances 0.000 description 1
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- G—PHYSICS
- G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
- G09G—ARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
- G09G3/00—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes
- G09G3/20—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters
- G09G3/34—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters by control of light from an independent source
- G09G3/36—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters by control of light from an independent source using liquid crystals
- G09G3/3611—Control of matrices with row and column drivers
- G09G3/3674—Details of drivers for scan electrodes
- G09G3/3677—Details of drivers for scan electrodes suitable for active matrices only
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body
- H01L27/1214—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs
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- G—PHYSICS
- G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
- G09G—ARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
- G09G3/00—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes
- G09G3/20—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1345—Conductors connecting electrodes to cell terminals
- G02F1/13454—Drivers integrated on the active matrix substrate
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
- G02F1/1362—Active matrix addressed cells
- G02F1/136209—Light shielding layers, e.g. black matrix, incorporated in the active matrix substrate, e.g. structurally associated with the switching element
-
- G—PHYSICS
- G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
- G09G—ARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
- G09G3/00—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes
- G09G3/20—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters
- G09G3/34—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters by control of light from an independent source
- G09G3/36—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters by control of light from an independent source using liquid crystals
- G09G3/3611—Control of matrices with row and column drivers
- G09G3/3674—Details of drivers for scan electrodes
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C19/00—Digital stores in which the information is moved stepwise, e.g. shift registers
- G11C19/28—Digital stores in which the information is moved stepwise, e.g. shift registers using semiconductor elements
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body
- H01L27/1214—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs
- H01L27/1222—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs with a particular composition, shape or crystalline structure of the active layer
- H01L27/1225—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs with a particular composition, shape or crystalline structure of the active layer with semiconductor materials not belonging to the group IV of the periodic table, e.g. InGaZnO
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body
- H01L27/1214—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs
- H01L27/124—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs with a particular composition, shape or layout of the wiring layers specially adapted to the circuit arrangement, e.g. scanning lines in LCD pixel circuits
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/786—Thin film transistors, i.e. transistors with a channel being at least partly a thin film
- H01L29/78606—Thin film transistors, i.e. transistors with a channel being at least partly a thin film with supplementary region or layer in the thin film or in the insulated bulk substrate supporting it for controlling or increasing the safety of the device
- H01L29/78633—Thin film transistors, i.e. transistors with a channel being at least partly a thin film with supplementary region or layer in the thin film or in the insulated bulk substrate supporting it for controlling or increasing the safety of the device with a light shield
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/786—Thin film transistors, i.e. transistors with a channel being at least partly a thin film
- H01L29/7869—Thin film transistors, i.e. transistors with a channel being at least partly a thin film having a semiconductor body comprising an oxide semiconductor material, e.g. zinc oxide, copper aluminium oxide, cadmium stannate
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- G—PHYSICS
- G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
- G09G—ARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
- G09G2310/00—Command of the display device
- G09G2310/02—Addressing, scanning or driving the display screen or processing steps related thereto
- G09G2310/0264—Details of driving circuits
-
- G—PHYSICS
- G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
- G09G—ARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
- G09G2310/00—Command of the display device
- G09G2310/02—Addressing, scanning or driving the display screen or processing steps related thereto
- G09G2310/0264—Details of driving circuits
- G09G2310/0286—Details of a shift registers arranged for use in a driving circuit
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- Engineering & Computer Science (AREA)
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- Physics & Mathematics (AREA)
- Microelectronics & Electronic Packaging (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Crystallography & Structural Chemistry (AREA)
- Chemical & Material Sciences (AREA)
- Ceramic Engineering (AREA)
- Theoretical Computer Science (AREA)
- Nonlinear Science (AREA)
- Mathematical Physics (AREA)
- Optics & Photonics (AREA)
- Control Of Indicators Other Than Cathode Ray Tubes (AREA)
- Liquid Crystal Display Device Control (AREA)
- Devices For Indicating Variable Information By Combining Individual Elements (AREA)
- Thin Film Transistor (AREA)
- Shift Register Type Memory (AREA)
- Liquid Crystal (AREA)
Description
21 基板
22 金属遮光層
23 半導体層
24 絶縁層
25 ゲート層
26 層間媒質層
27 ソース層
28 ドレイン層
50 表示装置
51 表示領域
52 GOA回路
261 第1ビア
262 第2ビア
Claims (13)
- GOA回路であって、複数の薄膜トランジスタを含み、前記薄膜トランジスタは、基板上に設置され、前記薄膜トランジスタは、前記基板上に順に設置される金属遮光層及び半導体層を少なくとも含み、前記複数の薄膜トランジスタの金属遮光層がいずれもグランド信号を入力し、前記複数の薄膜トランジスタの金属遮光層は一体に接続され、
前記半導体層は、IGZO層であり、前記薄膜トランジスタは、
前記基板、前記金属遮光層及び前記IGZO層上に設置される絶縁層と、
前記絶縁層上に設置されるゲート層と、
前記ゲート層及び前記絶縁層上に設置される層間媒質層と、をさらに含み、
ソース層及びドレイン層は、前記層間媒質層上に設置され、
前記層間媒質層と前記絶縁層には、第1ビアと第2ビアが設置され、前記ソース層が前記第1ビアを介して前記IGZO層に接続され、前記ドレイン層が前記第2ビアを介して前記IGZO層に接続されるGOA回路。 - 前記GOA回路が、第1薄膜トランジスタ、第2薄膜トランジスタ、第3薄膜トランジスタ、第4薄膜トランジスタ、第5薄膜トランジスタ、第6薄膜トランジスタ、第7薄膜トランジスタ、第8薄膜トランジスタ、第9薄膜トランジスタ、第10薄膜トランジスタ、第11薄膜トランジスタ、第12薄膜トランジスタ、第13薄膜トランジスタ、第14薄膜トランジスタ、第15薄膜トランジスタ及びコンデンサを含み、
前記第1薄膜トランジスタの第1端子が第1制御信号を入力し、前記第1薄膜トランジスタの第2端子が第2制御信号を入力し、前記第1薄膜トランジスタの第3端子がそれぞれ前記第2薄膜トランジスタの第1端子と第2端子、前記第3薄膜トランジスタの第2端子、前記第4薄膜トランジスタの第2端子及び前記コンデンサの一端に接続され、
前記第2薄膜トランジスタの第3端子が前記第5薄膜トランジスタの第1端子に接続され、
前記第3薄膜トランジスタの第1端子及び前記第4薄膜トランジスタの第1端子が第1クロック信号を入力し、前記第3薄膜トランジスタの第3端子が次段のGOA回路に接続され、
前記第4薄膜トランジスタの第3端子が走査信号を出力し、
前記第5薄膜トランジスタの第2端子が第2クロック信号を入力し、前記第5薄膜トランジスタの第3端子が前記コンデンサの他端及び前記第4薄膜トランジスタの第3端子に接続され、
前記第6薄膜トランジスタの第1端子及び第2端子が前記第1制御信号を入力し、前記第6薄膜トランジスタの第3端子が前記第7薄膜トランジスタの第1端子、前記第8薄膜トランジスタの第2端子及び前記第10薄膜トランジスタの第2端子に接続され、
前記第7薄膜トランジスタの第2端子及び前記第9薄膜トランジスタの第2端子が前記第3薄膜トランジスタの第2端子に接続され、前記第7薄膜トランジスタの第3端子が第1参照電圧を入力し、
前記第8薄膜トランジスタの第1端子、前記第10薄膜トランジスタの第1端子及び前記第12薄膜トランジスタの第1端子が前記第6薄膜トランジスタの第1端子に接続され、前記第8薄膜トランジスタの第3端子が前記第9薄膜トランジスタの第1端子、前記第13薄膜トランジスタの第2端子、前記第14薄膜トランジスタの第2端子及び前記第15薄膜トランジスタの第2端子に接続され、
前記第9薄膜トランジスタの第3端子が前記第10薄膜トランジスタの第3端子及び前記第11薄膜トランジスタの第1端子に接続され、
前記第11薄膜トランジスタの第2端子が前記第12薄膜トランジスタの第2端子及び前記第3薄膜トランジスタの第2端子に接続され、前記第11薄膜トランジスタの第3端子及び前記第14薄膜トランジスタの第3端子が第2参照電圧を入力し、
前記第12薄膜トランジスタの第3端子が前記第13薄膜トランジスタの第3端子及び前記第14薄膜トランジスタの第1端子に接続され、
前記第13薄膜トランジスタの第1端子が前記第1薄膜トランジスタの第3端子に接続され、
前記第15薄膜トランジスタの第1端子が前記第5薄膜トランジスタの第3端子に接続され、前記第15薄膜トランジスタの第3端子が前記第1参照電圧を入力する請求項1に記載のGOA回路。 - 前記第1〜第15薄膜トランジスタの金属遮光層がいずれも接地している請求項2に記載のGOA回路。
- 前記第1〜第15薄膜トランジスタは、いずれもP型薄膜トランジスタであり、前記第1端子がソースであり、前記第2端子がゲートであり、前記第3端子がドレインである請求項2に記載のGOA回路。
- 前記第1〜第15薄膜トランジスタは、いずれもN型薄膜トランジスタである請求項2に記載のGOA回路。
- GOA回路であって、複数の薄膜トランジスタを含み、前記薄膜トランジスタは、基板上に設置され、前記薄膜トランジスタは、前記基板上に順に設置される金属遮光層及び半導体層を少なくとも含み、前記複数の薄膜トランジスタの金属遮光層がいずれもグランド信号を入力し、
前記複数の薄膜トランジスタの金属遮光層は一体に接続されるGOA回路。 - 前記半導体層は、IGZO層であり、前記薄膜トランジスタは、
前記基板、前記金属遮光層及び前記IGZO層上に設置される絶縁層と、
前記絶縁層上に設置されるゲート層と、
前記ゲート層及び前記絶縁層上に設置される層間媒質層と、をさらに含み、
ソース層及びドレイン層は、前記層間媒質層上に設置され、
前記層間媒質層と前記絶縁層には、第1ビアと第2ビアが設置され、前記ソース層が前記第1ビアを介して前記IGZO層に接続され、前記ドレイン層が前記第2ビアを介して前記IGZO層に接続される請求項6に記載のGOA回路。 - 前記GOA回路が、第1薄膜トランジスタ、第2薄膜トランジスタ、第3薄膜トランジスタ、第4薄膜トランジスタ、第5薄膜トランジスタ、第6薄膜トランジスタ、第7薄膜トランジスタ、第8薄膜トランジスタ、第9薄膜トランジスタ、第10薄膜トランジスタ、第11薄膜トランジスタ、第12薄膜トランジスタ、第13薄膜トランジスタ、第14薄膜トランジスタ、第15薄膜トランジスタ及びコンデンサを含み、
前記第1薄膜トランジスタの第1端子が第1制御信号を入力し、前記第1薄膜トランジスタの第2端子が第2制御信号を入力し、前記第1薄膜トランジスタの第3端子がそれぞれ前記第2薄膜トランジスタの第1端子と第2端子、前記第3薄膜トランジスタの第2端子、前記第4薄膜トランジスタの第2端子及び前記コンデンサの一端に接続され、
前記第2薄膜トランジスタの第3端子が前記第5薄膜トランジスタの第1端子に接続され、
前記第3薄膜トランジスタの第1端子及び前記第4薄膜トランジスタの第1端子が第1クロック信号を入力し、前記第3薄膜トランジスタの第3端子が次段のGOA回路に接続され、
前記第4薄膜トランジスタの第3端子が走査信号を出力し、
前記第5薄膜トランジスタの第2端子が第2クロック信号を入力し、前記第5薄膜トランジスタの第3端子が前記コンデンサの他端及び前記第4薄膜トランジスタの第3端子に接続され、
前記第6薄膜トランジスタの第1端子及び第2端子が前記第1制御信号を入力し、前記第6薄膜トランジスタの第3端子が前記第7薄膜トランジスタの第1端子、前記第8薄膜トランジスタの第2端子及び前記第10薄膜トランジスタの第2端子に接続され、
前記第7薄膜トランジスタの第2端子及び前記第9薄膜トランジスタの第2端子が前記第3薄膜トランジスタの第2端子に接続され、前記第7薄膜トランジスタの第3端子が第1参照電圧を入力し、
前記第8薄膜トランジスタの第1端子、前記第10薄膜トランジスタの第1端子及び前記第12薄膜トランジスタの第1端子が前記第6薄膜トランジスタの第1端子に接続され、前記第8薄膜トランジスタの第3端子が前記第9薄膜トランジスタの第1端子、前記第13薄膜トランジスタの第2端子、前記第14薄膜トランジスタの第2端子及び前記第15薄膜トランジスタの第2端子に接続され、
前記第9薄膜トランジスタの第3端子が前記第10薄膜トランジスタの第3端子及び前記第11薄膜トランジスタの第1端子に接続され、
前記第11薄膜トランジスタの第2端子が前記第12薄膜トランジスタの第2端子及び前記第3薄膜トランジスタの第2端子に接続され、前記第11薄膜トランジスタの第3端子及び前記第14薄膜トランジスタの第3端子が第2参照電圧を入力し、
前記第12薄膜トランジスタの第3端子が前記第13薄膜トランジスタの第3端子及び前記第14薄膜トランジスタの第1端子に接続され、
前記第13薄膜トランジスタの第1端子が前記第1薄膜トランジスタの第3端子に接続され、
前記第15薄膜トランジスタの第1端子が前記第5薄膜トランジスタの第3端子に接続され、前記第15薄膜トランジスタの第3端子が前記第1参照電圧を入力する請求項7に記載のGOA回路。 - 前記第1〜第15薄膜トランジスタの金属遮光層がいずれも接地している請求項8に記載のGOA回路。
- 前記第1〜第15薄膜トランジスタは、いずれもP型薄膜トランジスタであり、前記第1端子がソースであり、前記第2端子がゲートであり、前記第3端子がドレインである請求項8に記載のGOA回路。
- 前記第1〜第15薄膜トランジスタは、いずれもN型薄膜トランジスタである請求項8に記載のGOA回路。
- 表示装置であって、前記表示装置は、駆動信号を発生するためのGOA回路を含み、前記GOA回路は、複数の薄膜トランジスタを含み、前記薄膜トランジスタは、基板上に設置され、前記薄膜トランジスタは、前記基板上に順に設置される金属遮光層及び半導体層を少なくとも含み、前記複数の薄膜トランジスタの金属遮光層がいずれもグランド信号を入力し、
前記複数の薄膜トランジスタの金属遮光層は一体に接続される表示装置。 - 前記半導体層は、IGZO層であり、前記薄膜トランジスタは、
前記基板、前記金属遮光層及び前記IGZO層上に設置される絶縁層と、
前記絶縁層上に設置されるゲート層と、
前記ゲート層及び前記絶縁層上に設置される層間媒質層と、をさらに含み、
ソース層及びドレイン層は、前記層間媒質層上に設置され、
前記層間媒質層と前記絶縁層には、第1ビアと第2ビアが設置され、前記ソース層が前記第1ビアを介して前記IGZO層に接続され、前記ドレイン層が前記第2ビアを介して前記IGZO層に接続される請求項12に記載の表示装置。
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