JP6800129B2 - フィルム状接着剤、フィルム状接着剤を用いた半導体パッケージの製造方法 - Google Patents
フィルム状接着剤、フィルム状接着剤を用いた半導体パッケージの製造方法 Download PDFInfo
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- JP6800129B2 JP6800129B2 JP2017214389A JP2017214389A JP6800129B2 JP 6800129 B2 JP6800129 B2 JP 6800129B2 JP 2017214389 A JP2017214389 A JP 2017214389A JP 2017214389 A JP2017214389 A JP 2017214389A JP 6800129 B2 JP6800129 B2 JP 6800129B2
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- film
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- conductive filler
- epoxy resin
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- C09J11/00—Features of adhesives not provided for in group C09J9/00, e.g. additives
- C09J11/08—Macromolecular additives
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- H01L24/32—Structure, shape, material or disposition of the layer connectors after the connecting process of an individual layer connector
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- C08L—COMPOSITIONS OF MACROMOLECULAR COMPOUNDS
- C08L83/00—Compositions of macromolecular compounds obtained by reactions forming in the main chain of the macromolecule a linkage containing silicon with or without sulfur, nitrogen, oxygen or carbon only; Compositions of derivatives of such polymers
- C08L83/04—Polysiloxanes
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Description
本発明に係る接着フィルムに含まれているエポキシ樹脂(A)は、エポキシ基を有するものであれば特に限定されない。
本発明に使用するエポキシ樹脂硬化剤(B)としては、アミン類、酸無水物類、多価フェノール類等の公知の硬化剤を用いることができるが、好ましくは常温以上の所定の温度、例えばエポキシ樹脂(A)が必要な粘着性を示す温度以上で硬化性を発揮し、しかも速硬化性を発揮する潜在性硬化剤である。潜在性硬化剤には、ジシアンジアミド、イミダゾール類、ヒドラジド類、三弗化ホウ素−アミン錯体、アミンイミド、ポリアミン塩及びこれらの変性物、更にマイクロカプセル型のものも使用可能である。これらは、単独あるいは2種以上混ぜて使用できる。潜在性硬化剤を使用することで室温での長期保存も可能な保存安定性の高いフィルム状接着剤用組成物を提供できる。エポキシ樹脂硬化剤(B)の使用量は、通常、エポキシ樹脂(A)に対して0.5〜50質量%の範囲である。また、硬化剤としてジシアンジアミド等を用いる場合は触媒としてイミダゾールを用いることが好ましい。
本発明に使用するフェノキシ樹脂(C)としては、フィルム状接着剤に十分な接着性および造膜性(フィルム形成性)を付与するために用いる。フェノキシ樹脂は、エポキシ樹脂と構造が類似していることから相溶性がよく、樹脂溶融粘度も低く、接着性もよい。フェノキシ樹脂は、ビスフェノールAのようなビスフェノールとエピクロロヒドリンとから得られる通常、分子量が10000以上の熱可塑性樹脂である。フェノキシ樹脂を配合することにより、常温でのタック性、脆さなどを解消するのに効果がある。好ましいフェノキシ樹脂は、1256(ビスフェノールA型フェノキシ樹脂、三菱化学株式会社製)、YP−70(ビスフェノールA/F型フェノキシ樹脂、新日化エポキシ製造株式会社製)、FX−316(ビスフェノールF型フェノキシ樹脂、新日化エポキシ製造株式会社製)、及び、FX−280S(カルド骨格型フェノキシ樹脂、新日化エポキシ製造株式会社製)等の市販のフェノキシ樹脂をフェノキシ樹脂(C)として用いてもよい。
本発明に使用する熱伝導性充填材(D)は、平均粒径が0.1〜10.0μmである。 熱伝導性充填材の平均粒径が0.1μm未満であると、熱伝導性充填材の比表面積が大きくなるため、フィルム状接着剤内部の熱伝導性充填剤(D)による放熱ルートが長くなり、放熱効率が悪くなる。熱伝導性充填材の平均粒径が10.0μm超であると、ロールナイフコーター等の塗工機で薄型のフィルム状接着剤を作製する際に、フィラーがきっかけとなりフィルム状接着剤表面にスジを発生しやすくなる。
破壊時圧縮率=破壊時変位量÷試料の平均粒径 (1)
破壊強度=(2.8×破壊荷重)÷π(円周率)×試料の平均粒径2 (2)
先ず、トリフェニルメタン型エポキシ樹脂(商品名:EPPN−501H、重量平均分子量:1000、軟化点:55℃、固体、エポキシ当量:167、日本化薬株式会社製)58質量部、ビスフェノールA型エポキシ樹脂(商品名:YD−128、重量平均分子量:400、軟化点:25℃以下、液体、エポキシ当量:190、新日化エポキシ製造株式会社製)26質量部、及び、ビスフェノールA型フェノキシ樹脂(商品名:YP−50、重量平均分子量:70000、Tg:84℃、新日化エポキシ製造株式会社製)15質量部、80質量部のメチルエチルケトンを溶媒として500mlのセパラブルフラスコ中において温度110℃で2時間加熱攪拌し、樹脂ワニスを得た。
銀被覆シリコーン樹脂フィラー(商品名:SC0280−SF、平均粒径2.0μm、銀被覆量80質量%、比重4.3g/cm3、熱伝導率400W/m・K、破壊時変位0.8μm(破壊時圧縮率40%)、破壊強度0.24GPa、三菱マテリアル株式会社製)362質量部を用いたこと以外は実施例1と同様にして実施例2に係るフィルム状接着剤を得た。
銀被覆シリコーン樹脂フィラー(商品名:SC0280−SF、平均粒径2.0μm、銀被覆量80質量%、比重4.3g/cm3、熱伝導率400W/m・K、破壊時変位0.8μm(破壊時圧縮率40%)、破壊強度0.24GPa、三菱マテリアル株式会社製)550質量部を用いたこと以外は実施例1と同様にして実施例3に係るフィルム状接着剤を得た。
熱伝導性充填材(D)として銀被覆シリコーン樹脂フィラー(商品名:SC0475-SF、平均粒径4.0μm、銀被覆量75質量%、比重4.1g/cm3、熱伝導率400W/m・K、破壊時変位1.4μm(破壊時圧縮率35%)、破壊強度0.26GPa、三菱マテリアル株式会社製)240質量部を用いたこと以外は実施例1と同様にして実施例4に係るフィルム状接着剤を得た。
熱伝導性充填材(D)として銀被覆シリコーン樹脂フィラー(商品名:SC0475-SF、平均粒径4.0μm、銀被覆量75質量%、比重4.1g/cm3、熱伝導率400W/m・K、破壊時変位1.4μm(破壊時圧縮率35%)、破壊強度0.26GPa、三菱マテリアル株式会社製)240質量部を用いたこと以外は実施例1と同様にして実施例5に係るフィルム状接着剤を得た。
熱伝導性充填材(D)として金-ニッケル被覆樹脂フィラー(商品名:AU203A、平均粒径3.0μm、比重6.0g/cm3、熱伝導率300W/m・K、破壊時変位1.5μm(破壊時圧縮率50%)、破壊強度0.35GPa、積水化学工業株式会社製)330質量部を用いたこと以外は実施例1と同様にして実施例6に係るフィルム状接着剤を得た。
熱伝導性充填材(D)として銀被覆シリコーン樹脂フィラー(商品名:SC0475-SF、平均粒径4.0μm、銀被覆量75質量%、比重4.1g/cm3、熱伝導率400W/m・K、破壊時変位1.4μm(破壊時圧縮率35%)、破壊強度0.26GPa、三菱マテリアル株式会社製)1060質量部を用いたこと以外は実施例1と同様にして比較例1に係るフィルム状接着剤を得た。
熱伝導性充填材(D)として銀被覆シリコーン樹脂フィラー(商品名:SC0475-SF、平均粒径4.0μm、銀被覆量75質量%、比重4.1g/cm3、熱伝導率400W/m・K、破壊時変位1.4μm(破壊時圧縮率35%)、破壊強度0.26GPa、三菱マテリアル株式会社製)30質量部を用いたこと以外は実施例1と同様にして比較例2に係るフィルム状接着剤を得た。
シリカフィラー(商品名:FB−3SDX、平均粒径3.0μm、比重2.2g/cm3、熱伝導率1.0W/m・K、破壊時変位0.1μm(破壊時圧縮率3%)、破壊強度2.4GPa、デンカ株式会社製)185質量部を用いたこと以外は実施例1と同様にして比較例3に係るフィルム状接着剤を得た。
シリコーンフィラー(商品名:MSP−SN05、平均粒径0.5μm、比重1.2g/cm3、熱伝導率0.2W/m・K、破壊時変位1.5μm(破壊時圧縮率38%)、破壊強度0.28GPa、日興リカ株式会社製)100質量部を用いたこと以外は実施例1と同様にして比較例4フィルム状接着剤を得た。
銀フィラー(商品名:Ag−4−8F、平均粒径2.0μm、比重10.5g/cm3、熱伝導率429W/m・K、破壊時変位0.4μm(破壊時圧縮率20%)、破壊強度2.1GPa、三菱マテリアル株式会社製)600質量部を用いたこと以外は実施例1と同様にして比較例5に係るフィルム状接着剤を得た。
窒化アルミフィラー(商品名:HF−01、平均粒径1.0μm、比重3.3g/cm3、熱伝導率200W/m・K、破壊時変位0.1μm(破壊時圧縮率10%)、破壊強度3.0GPa、株式会社トクヤマ製)280質量部を用いたこと以外は実施例1と同様にして比較例6フィルム状接着剤を得た。
破壊時圧縮率=破壊時変位量÷試料の平均粒径 (1)
破壊強度=(2.8×破壊荷重)÷π(円周率)×試料の平均粒径2 (2)
各実施例及び比較例に係るフィルム状接着剤を5.0cm×5.0cmのサイズに切り取って積層し、ステージである70℃の熱板上で、ハンドローラーにて貼り合わせて、厚さが約1.0mmである試験片を得た。この試験片について、レオメーター(RS6000、Haake社製)を用い、温度範囲20〜250℃、昇温速度5℃/minでの粘性抵抗の変化を測定し、得られた温度−粘性抵抗曲線から最低溶融粘度到達温度と最低溶融粘度(Pa・s)を算出した。
各実施例及び比較例に係るフィルム状接着剤を一辺50mm以上の四角片に切り取り、厚みが5mm以上になるように切り取った試料を重ねあわせ、直径50mm、厚さ5mmの円盤状金型の上に置き、圧縮プレス成型機を用いて温度150℃、圧力2MPaにおいて10分間加熱して取り出した後、さらに乾燥機中において温度180℃で1時間加熱することによりフィルム状接着剤を熱硬化させ、直径50mm、厚さ5mmの円盤状試験片を得た。この試験片について、熱伝導率測定装置(商品名:HC−110、英弘精機株式会社製)を用いて、熱流計法(JIS−A1412に準拠)により熱伝導率(W/m・K)を測定した。
先ず、ダミーシリコンウェハ(8inchサイズ、厚さ625μm)にダイシングテープ(商品名:K−13、古河電気工業株式会社製)及びダイシングフレーム(商品名:DTF2−8−1H001、DISCO社製)を貼り合わせて、2軸のダイシングブレード(Z1:NBC−ZH2030−SE(DD)、DISCO社製/Z2:NBC−ZH127F−SE(BB)、DISCO社製)が設置されたダイシング装置(商品名:DFD−6340、DISCO社製)にて2.0×2.0mmサイズにダイシングを実施した。このダミーシリコンチップ表面を走査電子顕微鏡(日本電子製 JSM−7900F)にて観察し、表面に傷がないことを確認した。
実施例及び比較例に係るフィルム状接着剤をマニュアルラミネーター(商品名:FM−114、株式会社テクノビジョン社製)を用いて温度70℃、圧力0.3MPaにおいてダミーシリコンウェハ(8inchサイズ、厚さ100μm)に貼り合わせ、次いで、同マニュアルラミネーターを用いて室温、圧力0.3MPaにおいてフィルム状接着剤のダミーシリコンウェハと反対の面側にダイシングテープ(商品名:K−13、古河電気工業株式会社製)及びダイシングフレーム(商品名:DTF2−8−1H001、DISCO社製)を貼り合わせて試験片とした。この試験片について、2軸のダイシングブレード(Z1:NBC−ZH2030−SE(DD)、DISCO社製/Z2:NBC−ZH127F−SE(BB)、DISCO社製)が設置されたダイシング装置(商品名:DFD−6340、DISCO社製)にて5.0×5.0mmサイズにダイシングを実施しフィルム状接着剤付き半導体チップを作製した。
2:接着剤層
3:ダイシングテープ
4:半導体チップ
5:接着剤層付き半導体チップ
6:配線基板
7:ボンディングワイヤー
8:封止樹脂
9:半導体パッケージ
14:ヒートシンク
15:フィルム状接着剤
Claims (4)
- エポキシ樹脂(A)、エポキシ樹脂硬化剤(B)、フェノキシ樹脂(C)、熱伝導性充填材(D)を含有しており、
前記熱伝導性充填剤(D)は、平均粒径が0.1〜10.0μmであり、微小圧縮試験における破壊時圧縮率が試料の平均粒径の5〜50%であり、微小圧縮試験における破壊強度が0.01〜2.0GPaであり、熱伝導率が30W/m・K以上であり、
前記熱伝導性充填材(D)の含有量は、前記エポキシ樹脂(A)、前記エポキシ樹脂硬化剤(B)、前記フェノキシ樹脂(C)及び前記熱伝導性充填材(D)の全量に対して10〜70体積%であり、
前記熱伝導性充填剤(D)は、コア材の表面に銀が被覆されてなり、前記銀の被覆量が前記熱伝導性充填剤(D)の全量に対して10〜95重量%であり、
前記コア材がシリコーン樹脂であり、
熱硬化後に熱伝導率1.0W/m・K以上であることを特徴とするフィルム状接着剤。 - 室温から5℃/分の昇温速度で昇温したとき、80℃以上において200〜10000Pa・sの範囲の最低溶融粘度に達することを特徴とする請求項1に記載のフィルム状接着剤。
- 厚みが1〜100μmであることを特徴とする請求項1または請求項2のいずれか一項に記載のフィルム状接着剤。
- 表面に少なくとも1つの半導体回路が形成されたウェハの裏面に、請求項1から請求項3に記載のフィルム状接着剤及びダイシングテープを熱圧着して、前記ウェハの裏面に接着剤層及びダイシングテープを設ける第1の工程と、
前記ウェハと前記接着剤層とを同時にダイシングすることにより前記ウェハ及び前記接着剤層を備える接着剤層付き半導体チップを得る第2の工程と、
前記接着剤層から前記ダイシングテープを脱離し、前記接着剤層付き半導体チップと配線基板とを前記接着剤層を介して熱圧着せしめる第3の工程と、
前記接着剤層を熱硬化せしめる第4の工程と、
を含むことを特徴とする半導体パッケージの製造方法。
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CN201880003308.8A CN110023444B (zh) | 2017-11-07 | 2018-07-25 | 膜状粘接剂、使用了膜状粘接剂的半导体封装体的制造方法 |
MYPI2019000173A MY193095A (en) | 2017-11-07 | 2018-07-25 | Film-like adhesive and method for producing semiconductor package using film-like adhesive |
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PCT/JP2018/027863 WO2019092933A1 (ja) | 2017-11-07 | 2018-07-25 | フィルム状接着剤、フィルム状接着剤を用いた半導体パッケージの製造方法 |
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US16/267,403 US11139261B2 (en) | 2017-11-07 | 2019-02-05 | Film-like adhesive and method for producing semiconductor package using film-like adhesive |
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JP7134111B2 (ja) * | 2019-02-08 | 2022-09-09 | 三菱電機株式会社 | 半導体モジュールおよび半導体モジュールの評価方法 |
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CN113165364A (zh) * | 2019-08-22 | 2021-07-23 | 古河电气工业株式会社 | 粘接剂用组合物、膜状粘接剂及其制造方法、以及使用了膜状粘接剂的半导体封装及其制造方法 |
KR102576953B1 (ko) * | 2019-09-05 | 2023-09-11 | 스미또모 베이크라이트 가부시키가이샤 | 열전도성 조성물 및 반도체 장치 |
JP2021077698A (ja) * | 2019-11-06 | 2021-05-20 | キオクシア株式会社 | 半導体パッケージ |
CN111128897B (zh) * | 2019-12-30 | 2021-11-05 | 江苏大摩半导体科技有限公司 | 一种光电探测器 |
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US20190181113A1 (en) | 2019-06-13 |
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