JP6794526B2 - エピタキシリアクタにおける半導体ウェハを操作するための装置およびエピタシャル層を有する半導体上ウェハを製造するための方法 - Google Patents
エピタキシリアクタにおける半導体ウェハを操作するための装置およびエピタシャル層を有する半導体上ウェハを製造するための方法 Download PDFInfo
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- 239000004065 semiconductor Substances 0.000 title claims description 34
- 238000000407 epitaxy Methods 0.000 title claims description 11
- 238000000034 method Methods 0.000 title claims description 9
- 238000004519 manufacturing process Methods 0.000 title claims description 5
- 235000012431 wafers Nutrition 0.000 claims description 84
- 238000000151 deposition Methods 0.000 claims description 8
- 230000008021 deposition Effects 0.000 claims description 6
- 229910021421 monocrystalline silicon Inorganic materials 0.000 claims 1
- 229910052710 silicon Inorganic materials 0.000 claims 1
- 239000010703 silicon Substances 0.000 claims 1
- 239000002245 particle Substances 0.000 description 10
- 239000000463 material Substances 0.000 description 4
- 230000015572 biosynthetic process Effects 0.000 description 3
- 239000010453 quartz Substances 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 3
- 238000005229 chemical vapour deposition Methods 0.000 description 2
- 230000001174 ascending effect Effects 0.000 description 1
- 230000003028 elevating effect Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
- 229910010271 silicon carbide Inorganic materials 0.000 description 1
- 230000001629 suppression Effects 0.000 description 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
- H01L21/68742—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by a lifting arrangement, e.g. lift pins
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B25/00—Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour-deposition growth
- C30B25/02—Epitaxial-layer growth
- C30B25/12—Substrate holders or susceptors
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/02—Elements
- C30B29/06—Silicon
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
- H01L21/67742—Mechanical parts of transfer devices
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
- H01L21/68792—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by the construction of the shaft
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
- H01L21/68785—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by the mechanical construction of the susceptor, stage or support
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- Microelectronics & Electronic Packaging (AREA)
- Computer Hardware Design (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Organic Chemistry (AREA)
- Metallurgy (AREA)
- Materials Engineering (AREA)
- Crystallography & Structural Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Robotics (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Chemical Vapour Deposition (AREA)
Description
半導体ウェハ上へのエピタキシャル層の堆積は、従来、エピタキシリアクタで、しばしば単一ウェハリアクタで、CVD(chemical vapor deposition(化学蒸着))によって実行される。
サセプタと、
サセプタを通って延在する長手方向穴と、
ウェハ引上げシャフトと、
長手方向穴を通って案内されるウェハ引上げピンと、
サセプタ運搬シャフトと、
サセプタ運搬アームと、
サセプタ支持ピンと、
サセプタ運搬アームに固定されるガイドスリーブと、
ガイドスリーブから突出し、上端にウェハ引上げピンが挿入されるボアを有し、ウェハ引上げシャフトによってウェハ引上げピンとともに昇降可能であるガイド要素と、を備える、装置によって達成される。
エピタキシリアクタにおける本発明に係る装置の提供と、
ウェハ引上げピン上への半導体ウェハの配置と、
ウェハ引上げピンの下降による、サセプタ上への半導体ウェハの配置と、
半導体ウェハ上へのエピタキシャル層の堆積と、
ウェハ引上げピンの上昇による、サセプタからの結果として生じるエピタキシャル層を有する半導体ウェハの上昇と、
エピタキシリアクタからのエピタキシャル層を有する半導体ウェハの取出しと、を備える方法によって達成される。
図1に係る装置は、サセプタ運搬シャフト4とウェハ引上げシャフト2とを備える。互いから等距離にあるサセプタ運搬アーム5が、サセプタ運搬シャフト4の上端へねじ留めされる一片の星形状要素を形成するように組み合わされる。ウェハ引上げシャフト2は、径方向上側に突出するクロスメンバを備え、その端部上にはガイド要素8を支持するためにプラットフォームが備えられる。ガイド要素8は、サセプタ運搬アーム5に固定されるガイドスリーブ7を通り抜ける。ガイド要素8の上端は、ウェハ引上げピン3が挿入されるボアを有する。ウェハ引上げピン3は、サセプタ1の長手方向穴11を通って延在する。サセプタ1は、裏面に、細長い基面を有し、かつサセプタ支持ピン6の球状に丸みを帯びた頭部10上が当接する止まり穴12を有する。サセプタ支持ピン6は、直立要素9の上端の軸方向ボアの中へ挿入される。直立要素9は、サセプタ運搬アームの外側端部でサセプタ運搬アーム5上に高さ調整可能に固定される。
1 サセプタ
2 ウェハ引上げシャフト
3 ウェハ引上げピン
4 サセプタ運搬シャフト
5 サセプタ運搬アーム
6 サセプタ支持ピン
7 ガイドスリーブ
8 ガイド要素
9 直立要素
10 球状に丸みを帯びた頭部
11 長手方向穴
12 止まり穴
Claims (6)
- エピタキシリアクタにおける半導体ウェハを操作するための装置であって、
サセプタと、
前記サセプタを通って延在する長手方向穴と、
ウェハ引上げシャフトと、
前記長手方向穴を通って案内されるウェハ引上げピンと、
サセプタ運搬シャフトと、
サセプタ運搬アームと、
サセプタ支持ピンと、
前記サセプタ運搬アームに固定されるガイドスリーブと、
前記ガイドスリーブから突出し、上端に前記ウェハ引上げピンが挿入されるボアを有し、前記ウェハ引上げシャフトによって前記ウェハ引上げピンとともに昇降可能であるガイド要素と、を備え、
前記ガイド要素および前記ウェハ引上げピンは、異なる熱膨張率を有し、900℃より高い温度で前記ガイド要素と前記ウェハ引上げピンとの間にクランプ接続が形成されるように寸法決めされる公差を有して製造される、装置。 - 前記サセプタ運搬アームは、前記サセプタ運搬シャフトの上端へねじ留めされる一片の星形状要素を形成する、請求項1に記載の装置。
- 前記サセプタ運搬アームの外側端部で前記サセプタ運搬アームに高さ調整可能に接続され、かつ前記サセプタ支持ピンが挿入される軸方向ボアを有する、直立要素を備え、前記サセプタ支持ピンは、球状に丸みを帯びた頭部を有する、請求項1または請求項2に記載の装置。
- 前記サセプタ支持ピンの前記球状に丸みを帯びた頭部を受容するために、前記サセプタの裏面に細長い止まり穴を備え、前記止まり穴の長さおよび幅は、前記止まり穴の開口の方向に増加する、請求項3に記載の装置。
- エピタキシャル層を有する半導体ウェハを製造する方法であって、
エピタキシリアクタにおける請求項1から請求項4のいずれか1項に記載の装置の提供と、
前記ウェハ引上げピン上への半導体ウェハの配置と、
前記ウェハ引上げピンの下降による、前記サセプタ上への前記半導体ウェハの配置と、
前記半導体ウェハ上への前記エピタキシャル層の堆積と、
前記ウェハ引上げピンの上昇による、前記サセプタからの結果として生じる前記エピタキシャル層を有する半導体ウェハの引上げと、
前記エピタキシリアクタからの前記エピタキシャル層を有する前記半導体ウェハの取出しと、を備える、方法。 - 単結晶シリコンの半導体ウェハ上へのシリコンのエピタキシャル層の堆積を備える、請求項5に記載の方法。
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DE102016212780.2 | 2016-07-13 | ||
DE102016212780.2A DE102016212780A1 (de) | 2016-07-13 | 2016-07-13 | Vorrichtung zur Handhabung einer Halbleiterscheibe in einem Epitaxie-Reaktor und Verfahren zur Herstellung einer Halbleiterscheibe mit epitaktischer Schicht |
PCT/EP2017/066437 WO2018010986A1 (de) | 2016-07-13 | 2017-07-03 | Vorrichtung zur handhabung einer halbleiterscheibe in einem epitaxie-reaktor und verfahren zur herstellung einer halbleiterscheibe mit epitaktischer schicht |
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2016
- 2016-07-13 DE DE102016212780.2A patent/DE102016212780A1/de not_active Withdrawn
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2017
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- 2017-07-03 SG SG11201810783UA patent/SG11201810783UA/en unknown
- 2017-07-03 EP EP17739514.2A patent/EP3485508B1/de active Active
- 2017-07-03 US US16/309,014 patent/US11302565B2/en active Active
- 2017-07-03 WO PCT/EP2017/066437 patent/WO2018010986A1/de unknown
- 2017-07-03 JP JP2019501635A patent/JP6794526B2/ja active Active
- 2017-07-03 CN CN201780043117.XA patent/CN109478532B/zh active Active
- 2017-07-06 TW TW106122737A patent/TWI654035B/zh active
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CN109478532A (zh) | 2019-03-15 |
US20190311941A1 (en) | 2019-10-10 |
EP3485508B1 (de) | 2020-09-02 |
TW201801802A (zh) | 2018-01-16 |
KR102283740B1 (ko) | 2021-08-02 |
WO2018010986A1 (de) | 2018-01-18 |
US11302565B2 (en) | 2022-04-12 |
EP3485508A1 (de) | 2019-05-22 |
SG11201810783UA (en) | 2019-01-30 |
TWI654035B (zh) | 2019-03-21 |
CN109478532B (zh) | 2023-05-26 |
JP2019522904A (ja) | 2019-08-15 |
KR20190026898A (ko) | 2019-03-13 |
DE102016212780A1 (de) | 2018-01-18 |
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