JP6763090B1 - 超音波振動接合装置 - Google Patents
超音波振動接合装置 Download PDFInfo
- Publication number
- JP6763090B1 JP6763090B1 JP2019528945A JP2019528945A JP6763090B1 JP 6763090 B1 JP6763090 B1 JP 6763090B1 JP 2019528945 A JP2019528945 A JP 2019528945A JP 2019528945 A JP2019528945 A JP 2019528945A JP 6763090 B1 JP6763090 B1 JP 6763090B1
- Authority
- JP
- Japan
- Prior art keywords
- ultrasonic
- pressurizing
- ultrasonic bonding
- bonding
- lowering
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000003825 pressing Methods 0.000 claims description 54
- 230000007246 mechanism Effects 0.000 claims description 49
- 239000000758 substrate Substances 0.000 claims description 22
- 239000011521 glass Substances 0.000 claims description 16
- 238000001514 detection method Methods 0.000 claims description 11
- 230000003028 elevating effect Effects 0.000 abstract description 74
- 238000000034 method Methods 0.000 description 21
- 230000008569 process Effects 0.000 description 21
- 230000001174 ascending effect Effects 0.000 description 9
- 238000010586 diagram Methods 0.000 description 9
- 230000000694 effects Effects 0.000 description 5
- 230000015572 biosynthetic process Effects 0.000 description 2
- 230000005611 electricity Effects 0.000 description 1
- 238000004904 shortening Methods 0.000 description 1
- 230000008685 targeting Effects 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 230000001960 triggered effect Effects 0.000 description 1
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C66/00—General aspects of processes or apparatus for joining preformed parts
- B29C66/80—General aspects of machine operations or constructions and parts thereof
- B29C66/83—General aspects of machine operations or constructions and parts thereof characterised by the movement of the joining or pressing tools
- B29C66/832—Reciprocating joining or pressing tools
- B29C66/8322—Joining or pressing tools reciprocating along one axis
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67138—Apparatus for wiring semiconductor or solid state device
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K20/00—Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating
- B23K20/10—Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating making use of vibrations, e.g. ultrasonic welding
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C65/00—Joining or sealing of preformed parts, e.g. welding of plastics materials; Apparatus therefor
- B29C65/02—Joining or sealing of preformed parts, e.g. welding of plastics materials; Apparatus therefor by heating, with or without pressure
- B29C65/08—Joining or sealing of preformed parts, e.g. welding of plastics materials; Apparatus therefor by heating, with or without pressure using ultrasonic vibrations
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C66/00—General aspects of processes or apparatus for joining preformed parts
- B29C66/70—General aspects of processes or apparatus for joining preformed parts characterised by the composition, physical properties or the structure of the material of the parts to be joined; Joining with non-plastics material
- B29C66/74—Joining plastics material to non-plastics material
- B29C66/746—Joining plastics material to non-plastics material to inorganic materials not provided for in groups B29C66/742 - B29C66/744
- B29C66/7465—Glass
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C66/00—General aspects of processes or apparatus for joining preformed parts
- B29C66/90—Measuring or controlling the joining process
- B29C66/92—Measuring or controlling the joining process by measuring or controlling the pressure, the force, the mechanical power or the displacement of the joining tools
- B29C66/924—Measuring or controlling the joining process by measuring or controlling the pressure, the force, the mechanical power or the displacement of the joining tools by controlling or regulating the pressure, the force, the mechanical power or the displacement of the joining tools
- B29C66/9241—Measuring or controlling the joining process by measuring or controlling the pressure, the force, the mechanical power or the displacement of the joining tools by controlling or regulating the pressure, the force, the mechanical power or the displacement of the joining tools by controlling or regulating the pressure, the force or the mechanical power
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/50—Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the subgroups H01L21/06 - H01L21/326, e.g. sealing of a cap to a base of a container
- H01L21/60—Attaching or detaching leads or other conductive members, to be used for carrying current to or from the device in operation
- H01L21/607—Attaching or detaching leads or other conductive members, to be used for carrying current to or from the device in operation involving the application of mechanical vibrations, e.g. ultrasonic vibrations
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/02—Details
- H01L31/02002—Arrangements for conducting electric current to or from the device in operations
- H01L31/02005—Arrangements for conducting electric current to or from the device in operations for device characterised by at least one potential jump barrier or surface barrier
- H01L31/02008—Arrangements for conducting electric current to or from the device in operations for device characterised by at least one potential jump barrier or surface barrier for solar cells or solar cell modules
- H01L31/02013—Arrangements for conducting electric current to or from the device in operations for device characterised by at least one potential jump barrier or surface barrier for solar cells or solar cell modules comprising output lead wires elements
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/10—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern
- H05K3/20—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern by affixing prefabricated conductor pattern
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C66/00—General aspects of processes or apparatus for joining preformed parts
- B29C66/90—Measuring or controlling the joining process
- B29C66/92—Measuring or controlling the joining process by measuring or controlling the pressure, the force, the mechanical power or the displacement of the joining tools
- B29C66/922—Measuring or controlling the joining process by measuring or controlling the pressure, the force, the mechanical power or the displacement of the joining tools by measuring the pressure, the force, the mechanical power or the displacement of the joining tools
- B29C66/9221—Measuring or controlling the joining process by measuring or controlling the pressure, the force, the mechanical power or the displacement of the joining tools by measuring the pressure, the force, the mechanical power or the displacement of the joining tools by measuring the pressure, the force or the mechanical power
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Manufacturing & Machinery (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Computer Hardware Design (AREA)
- General Physics & Mathematics (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Inorganic Chemistry (AREA)
- Sustainable Energy (AREA)
- Electromagnetism (AREA)
- Sustainable Development (AREA)
- Life Sciences & Earth Sciences (AREA)
- Pressure Welding/Diffusion-Bonding (AREA)
- Wire Bonding (AREA)
- Lining Or Joining Of Plastics Or The Like (AREA)
Abstract
Description
(基本構成)
図1はこの発明の実施の形態1である超音波振動接合装置の構造を模式的に示す説明図である。図2は実施の形態1の超音波振動接合装置の構造の一部を模式的に示す説明図である。図1及び図2それぞれにXYZ直交座標系を記している。図1はXZ平面から視た正面図に相当し、図2はYZ平面から視た側面図に相当する。
図3は実施の形態1の超音波振動接合装置の制御系を模式的に示すブロック図である。同図に示すように、実施の形態1の超音波振動接合装置は制御部15をさらに有している。制御部15は、昇降用サーボモータ2、エアシリンダ4、超音波接合用ヘッド部6内の超音波振動子17及び駆動部19の駆動を制御する制御動作を実行する。
このように、実施の形態1の超音波振動接合装置は、エアシリンダ4内におけるピストン25の高さ方向(Z方向)における高さ位置が、所定位置であるか所定位置より高い位置にあるかを検出可能な位置検出部7を設けることにより、ステップS3の実行後において上記接合部接触状態の有無を迅速、かつ正確に認識することができる。
(基本構成)
図6はこの発明の実施の形態2である超音波振動接合装置の構造を模式的に示す説明図である。図6にXYZ直交座標系を記している。
図7は実施の形態2の超音波振動接合装置の制御系を模式的に示すブロック図である。図7に示すように、実施の形態2において、制御部15Xは、昇降用サーボモータ2X、エアシリンダ41〜43、超音波接合用ヘッド部61〜63それぞれ内の超音波振動子17及び駆動部19Xの駆動を制御する制御動作を実行している。
このように、実施の形態2の超音波振動接合装置は、エアシリンダ41〜43それぞれに位置検出部7を設けることにより、ステップS13の実行後において上記全体接合部接触状態を迅速、かつ正確に認識することができる。
この発明は詳細に説明されたが、上記した説明は、すべての局面において、例示であって、この発明がそれに限定されるものではない。例示されていない無数の変形例が、この発明の範囲から外れることなく想定され得るものと解される。
2,2X 昇降用サーボモータ
3 昇降用スライダ
4,41〜43 エアシリンダ
5,51〜53 加圧用スライダ
6,61〜63 超音波接合用ヘッド部
7 位置検出部
11 3ヘッド走行フレーム
13 共通昇降用スライダ
16 超音波ホーン
16a 超音波接合部
17 超音波振動子
30 テーブル
31 ガラス基板
33 電極
Claims (5)
- 接合対象物(31,33)を載置するテーブル(30)と、
超音波接合部(16a)から超音波振動を印加する超音波振動動作を実行する超音波接合用ヘッド部(6,61〜63)と、
前記超音波接合用ヘッド部に連結され、前記超音波接合用ヘッド部に対し前記テーブル側に向けて加圧する加圧動作を実行する加圧機構(4,41〜43)と、
前記超音波接合用ヘッド部及び前記加圧機構を一括して下降させる下降動作を実行する下降機構(2,2X)と、
前記超音波接合用ヘッド部による前記超音波振動動作、前記加圧機構による前記加圧動作、及び前記下降機構による前記下降動作を制御する制御動作を実行する制御部(15)とを備え、
前記超音波接合用ヘッド部は複数の超音波接合用ヘッド部(61〜63)を含み、
前記加圧機構は、前記複数の超音波接合用ヘッド部に対応して設けられる、複数の加圧機構(41〜43)を含み、前記複数の加圧機構はそれぞれ前記複数の超音波接合用ヘッド部のうち対応する超音波接合用ヘッド部に対し前記加圧動作を実行し、
前記下降機構(2X)が実行する前記下降動作は、前記複数の超音波接合用ヘッド部及び前記複数の加圧機構を一括して下降させる複数一括下降動作を含む、
超音波振動接合装置。 - 請求項1記載の超音波振動接合装置であって、
前記加圧機構はエアシリンダを含み、前記エアシリンダはピストンロッドを介して前記超音波接合用ヘッド部に連結され、
前記エアシリンダのピストンロッドから前記超音波接合用ヘッド部に加圧用押圧力が付与される、
超音波振動接合装置。 - 請求項2記載の超音波振動接合装置であって、
前記制御部は、
前記下降機構は下降用押圧力(F1)で前記下降動作を実行し、
前記加圧機構は前記加圧用押圧力(F2,F21〜F23)で前記加圧動作を実行し、
前記下降用押圧力は前記加圧用押圧力よりも大きくなるように設定され、
前記制御部が実行する前記制御動作は、
(a) 前記超音波接合用ヘッド部の前記超音波接合部が前記接合対象物の印加部の上方に位置するように配置するステップと、
(b) 前記加圧機構に前記加圧動作を実行させるステップと、
(c) 前記下降機構に前記下降動作を実行させるステップと、
(d) 前記接合対象物の印加部に前記超音波接合部が接触する接合部接触状態の認識をトリガとして、前記超音波接合用ヘッド部に前記超音波振動動作を実行させるステップとを含む、
超音波振動接合装置。 - 請求項3記載の超音波振動接合装置であって、
前記エアシリンダは、内部のピストンの位置を検知する位置検出部(7)をさらに有する、
超音波振動接合装置。 - 請求項1から請求項4のうち、いずれか1項に記載の超音波振動接合装置であって、
前記接合対象物は、
ガラス基板(31)と、
前記ガラス基板上に配置される電極(33)とを含む、
超音波振動接合装置。
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
PCT/JP2018/034713 WO2020059061A1 (ja) | 2018-09-20 | 2018-09-20 | 超音波振動接合装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP6763090B1 true JP6763090B1 (ja) | 2020-09-30 |
JPWO2020059061A1 JPWO2020059061A1 (ja) | 2020-12-17 |
Family
ID=69887024
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2019528945A Active JP6763090B1 (ja) | 2018-09-20 | 2018-09-20 | 超音波振動接合装置 |
Country Status (8)
Country | Link |
---|---|
US (1) | US11214017B2 (ja) |
EP (1) | EP3654368A4 (ja) |
JP (1) | JP6763090B1 (ja) |
KR (1) | KR102397667B1 (ja) |
CN (1) | CN111201591B (ja) |
AU (1) | AU2018422116B2 (ja) |
TW (1) | TWI741293B (ja) |
WO (1) | WO2020059061A1 (ja) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN114178671A (zh) * | 2021-12-21 | 2022-03-15 | 上海骄成超声波技术股份有限公司 | 一种晶体管超声波焊接方法及焊接装置 |
Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5976314A (en) * | 1997-07-29 | 1999-11-02 | Maschinenfabrik Spaichingen Gmbh | Device for ultrasonic treatment of workpieces background of the invention |
JP2001001162A (ja) * | 1999-06-16 | 2001-01-09 | Arutekusu:Kk | 超音波振動接合装置 |
US20020053405A1 (en) * | 2000-11-08 | 2002-05-09 | Manfred Sans | Apparatus for ultrasonic processing of workpieces |
JP2006086345A (ja) * | 2004-09-16 | 2006-03-30 | Murata Mfg Co Ltd | 超音波接合方法および超音波接合装置 |
JP2007141972A (ja) * | 2005-11-15 | 2007-06-07 | Bondtech Inc | 加圧方法およびこの方法を用いた接合方法並びにこの接合方法により作成されるデバイス並びに加圧装置およびこの装置を用いた接合装置 |
JP2009246185A (ja) * | 2008-03-31 | 2009-10-22 | Toray Eng Co Ltd | 超音波接合装置および超音波接合方法 |
JP2011009261A (ja) * | 2009-06-23 | 2011-01-13 | Toshiba Mitsubishi-Electric Industrial System Corp | 加圧式超音波振動接合方法および加圧式超音波振動接合装置 |
JP2011077093A (ja) * | 2009-09-29 | 2011-04-14 | Texas Instr Japan Ltd | 超音波フリップチップ実装方法および超音波実装装置 |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
ZA775779B (en) * | 1976-10-08 | 1978-05-30 | Ex Cell O Corp | Carton sealing method and apparatus |
US9550323B2 (en) * | 2013-09-06 | 2017-01-24 | GM Global Technology Operations LLC | Systems and methods for adaptive process control using a target kinematics profile in welding together multiple polymeric workpieces |
CN105172128B (zh) * | 2015-08-28 | 2018-02-09 | 武汉泰宇汽车零部件有限公司 | 多焊头超声波焊接机 |
DE112015006985B4 (de) * | 2015-09-29 | 2023-10-12 | Toshiba Mitsubishi-Electric Industrial Systems Corporation | Ultraschallvibrationsverbindungsgerät |
CN108000909B (zh) * | 2017-12-13 | 2024-02-09 | 广州明森科技股份有限公司 | 一种非接触智能卡制造生产线 |
-
2018
- 2018-09-20 KR KR1020207009721A patent/KR102397667B1/ko active IP Right Grant
- 2018-09-20 CN CN201880063096.2A patent/CN111201591B/zh active Active
- 2018-09-20 US US16/610,139 patent/US11214017B2/en active Active
- 2018-09-20 EP EP18925053.3A patent/EP3654368A4/en active Pending
- 2018-09-20 WO PCT/JP2018/034713 patent/WO2020059061A1/ja unknown
- 2018-09-20 AU AU2018422116A patent/AU2018422116B2/en active Active
- 2018-09-20 JP JP2019528945A patent/JP6763090B1/ja active Active
-
2019
- 2019-05-10 TW TW108116233A patent/TWI741293B/zh active
Patent Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5976314A (en) * | 1997-07-29 | 1999-11-02 | Maschinenfabrik Spaichingen Gmbh | Device for ultrasonic treatment of workpieces background of the invention |
JP2001001162A (ja) * | 1999-06-16 | 2001-01-09 | Arutekusu:Kk | 超音波振動接合装置 |
US20020053405A1 (en) * | 2000-11-08 | 2002-05-09 | Manfred Sans | Apparatus for ultrasonic processing of workpieces |
JP2006086345A (ja) * | 2004-09-16 | 2006-03-30 | Murata Mfg Co Ltd | 超音波接合方法および超音波接合装置 |
JP2007141972A (ja) * | 2005-11-15 | 2007-06-07 | Bondtech Inc | 加圧方法およびこの方法を用いた接合方法並びにこの接合方法により作成されるデバイス並びに加圧装置およびこの装置を用いた接合装置 |
JP2009246185A (ja) * | 2008-03-31 | 2009-10-22 | Toray Eng Co Ltd | 超音波接合装置および超音波接合方法 |
JP2011009261A (ja) * | 2009-06-23 | 2011-01-13 | Toshiba Mitsubishi-Electric Industrial System Corp | 加圧式超音波振動接合方法および加圧式超音波振動接合装置 |
JP2011077093A (ja) * | 2009-09-29 | 2011-04-14 | Texas Instr Japan Ltd | 超音波フリップチップ実装方法および超音波実装装置 |
Also Published As
Publication number | Publication date |
---|---|
CN111201591A (zh) | 2020-05-26 |
AU2018422116B2 (en) | 2021-05-27 |
KR20200044954A (ko) | 2020-04-29 |
TWI741293B (zh) | 2021-10-01 |
EP3654368A4 (en) | 2021-03-17 |
KR102397667B1 (ko) | 2022-05-16 |
US20200156328A1 (en) | 2020-05-21 |
JPWO2020059061A1 (ja) | 2020-12-17 |
EP3654368A1 (en) | 2020-05-20 |
AU2018422116A1 (en) | 2020-04-09 |
US11214017B2 (en) | 2022-01-04 |
TW202012087A (zh) | 2020-04-01 |
WO2020059061A1 (ja) | 2020-03-26 |
CN111201591B (zh) | 2023-02-21 |
AU2018422116A9 (en) | 2021-05-13 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US20170154865A1 (en) | Electronic component mounting apparatus | |
JP6763090B1 (ja) | 超音波振動接合装置 | |
JP2017168693A5 (ja) | ||
CN108140584B (zh) | 超声波振动接合装置 | |
JP5856225B2 (ja) | スポット溶接システムおよびスポット溶接方法 | |
JP5275917B2 (ja) | 加圧式超音波振動接合方法および加圧式超音波振動接合装置 | |
JPH1094882A (ja) | 溶接ガンの加圧力検出・制御方法および装置 | |
JP2005138110A (ja) | サーボプレス | |
JP6779591B1 (ja) | 超音波接合方法 | |
JP4431020B2 (ja) | 超音波振動接合方法及び装置 | |
JP2002307266A (ja) | 超音波加工方法及び超音波加工装置 | |
KR102536694B1 (ko) | 와이어 본딩 장치 및 와이어 본딩 방법 | |
JP7026406B2 (ja) | ワイヤボンディング装置 | |
JP3661008B2 (ja) | 電動サーボ式抵抗溶接装置の制御方法および制御装置 | |
JP2980275B2 (ja) | ワイヤボンディング装置 | |
JP4444671B2 (ja) | プレスブレーキによる折曲げ加工方法及びプレスブレーキ | |
JP3590196B2 (ja) | ペレットボンディング方法及び装置 | |
KR20070094455A (ko) | 디스펜서 헤드 | |
CN115931189A (zh) | 一种液态金属柔性传感器的制备装置及方法 | |
JPH0793339B2 (ja) | ワイヤボンデイング方法 | |
CN113747678A (zh) | 绑定装置 | |
CN112172160A (zh) | 一种超声波焊接监测装置 | |
JPH03155496A (ja) | モータプレス機 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20190529 |
|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20190529 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20200121 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20200312 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20200908 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20200909 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 6763090 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |