JP6747197B2 - 誘電体バリア放電イオン化検出器 - Google Patents

誘電体バリア放電イオン化検出器 Download PDF

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JP6747197B2
JP6747197B2 JP2016175502A JP2016175502A JP6747197B2 JP 6747197 B2 JP6747197 B2 JP 6747197B2 JP 2016175502 A JP2016175502 A JP 2016175502A JP 2016175502 A JP2016175502 A JP 2016175502A JP 6747197 B2 JP6747197 B2 JP 6747197B2
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electrode
dielectric
plasma
gas
voltage electrode
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JP2018040719A (ja
JP2018040719A5 (enExample
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品田　恵
恵 品田
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Shimadzu Corp
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Shimadzu Corp
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Priority to JP2016175502A priority Critical patent/JP6747197B2/ja
Priority to US15/698,391 priority patent/US10215732B2/en
Priority to CN201710798488.0A priority patent/CN107807195B/zh
Publication of JP2018040719A publication Critical patent/JP2018040719A/ja
Publication of JP2018040719A5 publication Critical patent/JP2018040719A5/ja
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/62—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating the ionisation of gases, e.g. aerosols; by investigating electric discharges, e.g. emission of cathode
    • G01N27/68—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating the ionisation of gases, e.g. aerosols; by investigating electric discharges, e.g. emission of cathode using electric discharge to ionise a gas
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/62—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating the ionisation of gases, e.g. aerosols; by investigating electric discharges, e.g. emission of cathode
    • G01N27/68—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating the ionisation of gases, e.g. aerosols; by investigating electric discharges, e.g. emission of cathode using electric discharge to ionise a gas
    • G01N27/70—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating the ionisation of gases, e.g. aerosols; by investigating electric discharges, e.g. emission of cathode using electric discharge to ionise a gas and measuring current or voltage
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N30/00—Investigating or analysing materials by separation into components using adsorption, absorption or similar phenomena or using ion-exchange, e.g. chromatography or field flow fractionation
    • G01N30/02—Column chromatography
    • G01N30/62—Detectors specially adapted therefor
    • G01N30/64—Electrical detectors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N30/00—Investigating or analysing materials by separation into components using adsorption, absorption or similar phenomena or using ion-exchange, e.g. chromatography or field flow fractionation
    • G01N30/02—Column chromatography
    • G01N2030/022—Column chromatography characterised by the kind of separation mechanism
    • G01N2030/025—Gas chromatography

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  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Electrochemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
  • Plasma Technology (AREA)
JP2016175502A 2016-09-08 2016-09-08 誘電体バリア放電イオン化検出器 Active JP6747197B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2016175502A JP6747197B2 (ja) 2016-09-08 2016-09-08 誘電体バリア放電イオン化検出器
US15/698,391 US10215732B2 (en) 2016-09-08 2017-09-07 Dielectric barrier discharge ionization detector
CN201710798488.0A CN107807195B (zh) 2016-09-08 2017-09-07 电介质阻挡放电离子化检测器

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JP2016175502A JP6747197B2 (ja) 2016-09-08 2016-09-08 誘電体バリア放電イオン化検出器

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JP2018040719A JP2018040719A (ja) 2018-03-15
JP2018040719A5 JP2018040719A5 (enExample) 2019-02-28
JP6747197B2 true JP6747197B2 (ja) 2020-08-26

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US (1) US10215732B2 (enExample)
JP (1) JP6747197B2 (enExample)
CN (1) CN107807195B (enExample)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6675709B2 (ja) 2016-09-08 2020-04-01 株式会社島津製作所 誘電体バリア放電イオン化検出器
JP6747198B2 (ja) 2016-09-08 2020-08-26 株式会社島津製作所 誘電体バリア放電イオン化検出器
JP6775141B2 (ja) 2016-09-08 2020-10-28 株式会社島津製作所 誘電体バリア放電イオン化検出器
JP6743599B2 (ja) 2016-09-08 2020-08-19 株式会社島津製作所 誘電体バリア放電イオン化検出器
JP7408097B2 (ja) * 2020-09-29 2024-01-05 株式会社島津製作所 放電イオン化検出器およびガスクロマトグラフ分析装置
CN121565765A (zh) * 2025-08-11 2026-02-24 上海创熠微材料科技有限公司 分体式的低温等离子体反应装置及其半导体处理设备

Family Cites Families (22)

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GB1597622A (en) * 1977-03-11 1981-09-09 Lovelock J E Solute switching systems incorporating corona discharge devices
US4282521A (en) * 1979-11-13 1981-08-04 Tif Instruments, Inc. Regulating circuit for gaseous impurity detector
US5109157A (en) * 1991-03-21 1992-04-28 Loen Andrew E Ion mobility detector
JP4527302B2 (ja) * 2001-02-27 2010-08-18 Ｎｅｃライティング株式会社 希ガス放電灯及びその製造方法
JP4206048B2 (ja) * 2004-03-05 2009-01-07 メタウォーター株式会社 オゾン化ガスの分解を抑制したオゾン発生装置
JP2007029896A (ja) * 2005-07-28 2007-02-08 Canon Inc プラズマリアクタ、ガス処理装置
JP5466951B2 (ja) 2008-01-18 2014-04-09 京セラ株式会社 プラズマ発生体、プラズマ発生体を用いた放電装置および反応装置
JP5136300B2 (ja) * 2008-09-02 2013-02-06 株式会社島津製作所 放電イオン化電流検出器
JP2011117854A (ja) * 2009-12-04 2011-06-16 Osaka Univ 放電イオン化電流検出器
JP5445353B2 (ja) * 2010-06-28 2014-03-19 株式会社島津製作所 放電イオン化電流検出器
US9791410B2 (en) 2011-06-07 2017-10-17 Shimadzu Corporation Discharge ionization current detector
JP5704065B2 (ja) * 2011-12-16 2015-04-22 株式会社島津製作所 放電イオン化電流検出器
US8841609B2 (en) * 2012-10-26 2014-09-23 Autoclear LLC Detection apparatus and methods utilizing ion mobility spectrometry
JP5987968B2 (ja) * 2013-02-15 2016-09-07 株式会社島津製作所 放電イオン化電流検出器及びその調整方法
JP6036573B2 (ja) * 2013-06-24 2016-11-30 株式会社島津製作所 放電イオン化電流検出器及びこれを備えた分析装置
CN203534972U (zh) * 2013-11-12 2014-04-09 四川大学 一种基于电热蒸发-介质阻挡放电的原子发射光谱分析装置
JP6303610B2 (ja) * 2014-03-04 2018-04-04 株式会社島津製作所 誘電体バリア放電イオン化検出器及びその調整方法
US9897529B2 (en) * 2015-09-23 2018-02-20 China University Of Petroleum (East China) Test system and test method for a simulation experiment of gas hydrate in a porous medium
JP6743599B2 (ja) 2016-09-08 2020-08-19 株式会社島津製作所 誘電体バリア放電イオン化検出器
JP6775141B2 (ja) 2016-09-08 2020-10-28 株式会社島津製作所 誘電体バリア放電イオン化検出器
JP6747198B2 (ja) 2016-09-08 2020-08-26 株式会社島津製作所 誘電体バリア放電イオン化検出器
JP6675709B2 (ja) 2016-09-08 2020-04-01 株式会社島津製作所 誘電体バリア放電イオン化検出器

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Publication number Publication date
US20180067081A1 (en) 2018-03-08
CN107807195A (zh) 2018-03-16
JP2018040719A (ja) 2018-03-15
US10215732B2 (en) 2019-02-26
CN107807195B (zh) 2020-03-31

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