JP6743181B2 - 固体撮像素子 - Google Patents
固体撮像素子 Download PDFInfo
- Publication number
- JP6743181B2 JP6743181B2 JP2018556534A JP2018556534A JP6743181B2 JP 6743181 B2 JP6743181 B2 JP 6743181B2 JP 2018556534 A JP2018556534 A JP 2018556534A JP 2018556534 A JP2018556534 A JP 2018556534A JP 6743181 B2 JP6743181 B2 JP 6743181B2
- Authority
- JP
- Japan
- Prior art keywords
- charge holding
- solid
- light receiving
- charge
- trench
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 239000012535 impurity Substances 0.000 claims description 43
- 239000000758 substrate Substances 0.000 claims description 33
- 238000003384 imaging method Methods 0.000 claims description 31
- 239000004065 semiconductor Substances 0.000 claims description 31
- 238000006243 chemical reaction Methods 0.000 claims description 21
- 230000003071 parasitic effect Effects 0.000 description 21
- 238000010586 diagram Methods 0.000 description 15
- 206010047571 Visual impairment Diseases 0.000 description 14
- 238000000034 method Methods 0.000 description 12
- 238000005421 electrostatic potential Methods 0.000 description 11
- 230000004048 modification Effects 0.000 description 8
- 238000012986 modification Methods 0.000 description 8
- 230000003287 optical effect Effects 0.000 description 7
- 102100036285 25-hydroxyvitamin D-1 alpha hydroxylase, mitochondrial Human genes 0.000 description 6
- 101000875403 Homo sapiens 25-hydroxyvitamin D-1 alpha hydroxylase, mitochondrial Proteins 0.000 description 6
- 230000000694 effects Effects 0.000 description 6
- 238000004519 manufacturing process Methods 0.000 description 4
- 229910052751 metal Inorganic materials 0.000 description 4
- 239000002184 metal Substances 0.000 description 4
- 230000007423 decrease Effects 0.000 description 2
- 150000002500 ions Chemical class 0.000 description 2
- 230000001678 irradiating effect Effects 0.000 description 2
- 238000002955 isolation Methods 0.000 description 2
- 239000011159 matrix material Substances 0.000 description 2
- 238000003860 storage Methods 0.000 description 2
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 2
- 229910052721 tungsten Inorganic materials 0.000 description 2
- 239000010937 tungsten Substances 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 238000009825 accumulation Methods 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000005468 ion implantation Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 229920005591 polysilicon Polymers 0.000 description 1
- 238000005096 rolling process Methods 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 230000001629 suppression Effects 0.000 description 1
- 238000010408 sweeping Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14601—Structural or functional details thereof
- H01L27/14609—Pixel-elements with integrated switching, control, storage or amplification elements
- H01L27/14612—Pixel-elements with integrated switching, control, storage or amplification elements involving a transistor
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
- H04N25/00—Circuitry of solid-state image sensors [SSIS]; Control thereof
- H04N25/50—Control of the SSIS exposure
- H04N25/57—Control of the dynamic range
- H04N25/59—Control of the dynamic range by controlling the amount of charge storable in the pixel, e.g. modification of the charge conversion ratio of the floating node capacitance
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14601—Structural or functional details thereof
- H01L27/14603—Special geometry or disposition of pixel-elements, address-lines or gate-electrodes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14601—Structural or functional details thereof
- H01L27/1462—Coatings
- H01L27/14623—Optical shielding
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14601—Structural or functional details thereof
- H01L27/1463—Pixel isolation structures
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14643—Photodiode arrays; MOS imagers
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
- H04N23/00—Cameras or camera modules comprising electronic image sensors; Control thereof
- H04N23/50—Constructional details
- H04N23/55—Optical parts specially adapted for electronic image sensors; Mounting thereof
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
- H04N25/00—Circuitry of solid-state image sensors [SSIS]; Control thereof
- H04N25/40—Extracting pixel data from image sensors by controlling scanning circuits, e.g. by modifying the number of pixels sampled or to be sampled
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
- H04N25/00—Circuitry of solid-state image sensors [SSIS]; Control thereof
- H04N25/60—Noise processing, e.g. detecting, correcting, reducing or removing noise
- H04N25/62—Detection or reduction of noise due to excess charges produced by the exposure, e.g. smear, blooming, ghost image, crosstalk or leakage between pixels
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
- H04N25/00—Circuitry of solid-state image sensors [SSIS]; Control thereof
- H04N25/70—SSIS architectures; Circuits associated therewith
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
- H04N25/00—Circuitry of solid-state image sensors [SSIS]; Control thereof
- H04N25/70—SSIS architectures; Circuits associated therewith
- H04N25/76—Addressed sensors, e.g. MOS or CMOS sensors
Description
図1は、本開示の実施形態に係る固体撮像素子の画素回路の構成を示す回路図である。図2は、本実施形態の固体撮像素子を模式的に示す平面図である。図3は、本実施形態の固体撮像素子における画素の構成を示す平面図であり、図4は、図3に示す固体撮像素子のIV−IV線での断面を示す断面図であり、図5は、図3に示す固体撮像素子のV−V線での断面を示す断面図である。図3では、構成が理解しやすいように、遮光膜204の下に設けられた部材も示している。
101 電荷保持部
102 電荷電圧変換部
103 グローバルリセットトランジスタ
104 第1の電荷転送トランジスタ
105 第2の電荷転送トランジスタ
106 リセットトランジスタ
107 ソースフォロワートランジスタ
108 出力行セレクトトランジスタ
113、114、116、118 信号線
121、122、123 電源配線
150 第2の絶縁膜
160 第1の絶縁膜
170 第3の絶縁膜
200 第1のトレンチ
200a 第2のトレンチ
200b 第3のトレンチ
201 転送部
202、203 ゲート電極
204 遮光膜
300 第1の表面p型層
300a、304、305、312、313 p型層
301 第2の表面p型層
302、310、302a、303、310 n型層
Claims (5)
- 複数の画素が配置された撮像領域を備えた固体撮像素子であって、
前記画素の各々には、
半導体基板に設けられ、光電変換により電荷を発生させる受光部と、
前記半導体基板に設けられ、前記受光部で生じた電荷を蓄積する電荷保持部と、
前記電荷保持部上に設けられ、前記受光部で生じた電荷を前記電荷保持部へと転送させ るゲート電極と、
前記半導体基板のうち、前記受光部と前記電荷保持部との間の領域に形成された第1のトレンチと、
前記第1のトレンチ内に設けられた第1の絶縁膜と、
前記半導体基板のうち、互いに隣接する画素の受光部の間の領域に形成された第2のトレンチと、
前記第2のトレンチ内に設けられた第2の絶縁膜と、
前記受光部と前記電荷保持部との境界の端部に前記第1の絶縁膜に接して設けられ、前記受光部から前記電荷保持部への電荷の転送経路となる転送部と、
前記電荷保持部、前記転送部及び前記ゲート電極上を覆う遮光膜とが設けられており、
平面視において、前記受光部から前記電荷保持部へと向かう方向の、前記遮光膜の端から前記転送部を挟んで前記電荷保持部に至るまでの距離は、前記遮光膜の端から前記第1のトレンチを挟んで前記電荷保持部に至るまでの距離よりも長く、
前記電荷保持部のうち、前記受光部から前記電荷保持部へと向かう方向において、前記転送部に接する部分に含まれるn型不純物の濃度は、前記第1のトレンチに接する部分に含まれるn型不純物の濃度よりも高い固体撮像素子。 - 請求項1に記載の固体撮像素子において、
前記受光部のうち、前記転送部に接する部分は、前記電荷保持部に面した他の部分から突出していることを特徴とする固体撮像素子。 - 請求項1又は2に記載の固体撮像素子において、
前記遮光膜のうち、前記転送部の上方に設けられた部分は、前記第1のトレンチの上方に設けられた部分に比べて前記受光部側に突出していることを特徴とする固体撮像素子。 - 請求項1〜3のうちいずれか1つに記載の固体撮像素子において、
前記第1の絶縁膜及び前記第2の絶縁膜の屈折率は、前記半導体基板の屈折率よりも低いことを特徴とする固体撮像素子。 - 請求項1〜4のうちいずれか1つに記載の固体撮像素子において、
前記電荷保持部は、第1のp型不純物領域上に形成されたn型不純物領域により構成されており、
前記転送部は、前記第1のp型不純物領域よりもp型不純物濃度の低い第2のp型不純物領域により構成されていることを特徴とする固体撮像素子。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2016243353 | 2016-12-15 | ||
JP2016243353 | 2016-12-15 | ||
PCT/JP2017/042400 WO2018110258A1 (ja) | 2016-12-15 | 2017-11-27 | 固体撮像素子 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPWO2018110258A1 JPWO2018110258A1 (ja) | 2019-07-25 |
JP6743181B2 true JP6743181B2 (ja) | 2020-08-19 |
Family
ID=62558339
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2018556534A Active JP6743181B2 (ja) | 2016-12-15 | 2017-11-27 | 固体撮像素子 |
Country Status (5)
Country | Link |
---|---|
US (1) | US11012645B2 (ja) |
EP (1) | EP3557626A4 (ja) |
JP (1) | JP6743181B2 (ja) |
CN (1) | CN110073494A (ja) |
WO (1) | WO2018110258A1 (ja) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPWO2020203222A1 (ja) * | 2019-03-29 | 2020-10-08 | ||
TWI720682B (zh) * | 2019-11-08 | 2021-03-01 | 友達光電股份有限公司 | 畫素陣列基板 |
KR20220005697A (ko) * | 2020-07-07 | 2022-01-14 | 에스케이하이닉스 주식회사 | 이미지 센싱 장치 |
Family Cites Families (19)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3659122B2 (ja) | 2000-03-22 | 2005-06-15 | 日本電気株式会社 | 電荷転送装置 |
JP4942283B2 (ja) * | 2003-05-07 | 2012-05-30 | ソニー株式会社 | 固体撮像素子および固体撮像素子の製造方法 |
JP4496753B2 (ja) * | 2003-10-20 | 2010-07-07 | ソニー株式会社 | 固体撮像素子とその製造方法 |
JP2007294531A (ja) * | 2006-04-21 | 2007-11-08 | Nikon Corp | 固体撮像装置 |
JP4479759B2 (ja) | 2007-07-17 | 2010-06-09 | コニカミノルタビジネステクノロジーズ株式会社 | 画像形成装置 |
JP5335271B2 (ja) * | 2008-04-09 | 2013-11-06 | キヤノン株式会社 | 光電変換装置及びそれを用いた撮像システム |
JP5328224B2 (ja) | 2008-05-01 | 2013-10-30 | キヤノン株式会社 | 固体撮像装置 |
JP5651976B2 (ja) * | 2010-03-26 | 2015-01-14 | ソニー株式会社 | 固体撮像素子およびその製造方法、並びに電子機器 |
JP2011233589A (ja) | 2010-04-23 | 2011-11-17 | Sony Corp | 固体撮像デバイス及び電子機器 |
JP5637384B2 (ja) * | 2010-12-15 | 2014-12-10 | ソニー株式会社 | 固体撮像素子および駆動方法、並びに電子機器 |
JP5948837B2 (ja) * | 2011-03-29 | 2016-07-06 | ソニー株式会社 | 固体撮像素子及び電子機器 |
JP2013016676A (ja) * | 2011-07-05 | 2013-01-24 | Sony Corp | 固体撮像装置及びその製造方法、電子機器 |
JP2014150230A (ja) * | 2013-02-04 | 2014-08-21 | Toshiba Corp | 固体撮像装置の製造方法および固体撮像装置 |
JP2014165270A (ja) * | 2013-02-22 | 2014-09-08 | Sony Corp | イメージセンサおよび電子機器 |
JP2015023250A (ja) * | 2013-07-23 | 2015-02-02 | ソニー株式会社 | 固体撮像素子及びその駆動方法、並びに電子機器 |
JP2015053411A (ja) * | 2013-09-09 | 2015-03-19 | ソニー株式会社 | 固体撮像素子、固体撮像素子の製造方法、および電子機器 |
KR102174650B1 (ko) * | 2013-10-31 | 2020-11-05 | 삼성전자주식회사 | 이미지 센서 |
JP6274567B2 (ja) * | 2014-03-14 | 2018-02-07 | キヤノン株式会社 | 固体撮像装置及び撮像システム |
US9484370B2 (en) * | 2014-10-27 | 2016-11-01 | Omnivision Technologies, Inc. | Isolated global shutter pixel storage structure |
-
2017
- 2017-11-27 WO PCT/JP2017/042400 patent/WO2018110258A1/ja unknown
- 2017-11-27 CN CN201780077327.0A patent/CN110073494A/zh active Pending
- 2017-11-27 EP EP17880839.0A patent/EP3557626A4/en not_active Withdrawn
- 2017-11-27 JP JP2018556534A patent/JP6743181B2/ja active Active
-
2019
- 2019-06-14 US US16/441,489 patent/US11012645B2/en active Active
Also Published As
Publication number | Publication date |
---|---|
EP3557626A1 (en) | 2019-10-23 |
US11012645B2 (en) | 2021-05-18 |
WO2018110258A1 (ja) | 2018-06-21 |
CN110073494A (zh) | 2019-07-30 |
JPWO2018110258A1 (ja) | 2019-07-25 |
EP3557626A4 (en) | 2020-04-15 |
US20190297282A1 (en) | 2019-09-26 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
TWI479647B (zh) | A solid-state imaging device, a manufacturing method of a solid-state imaging device, and an electronic device | |
JP5335271B2 (ja) | 光電変換装置及びそれを用いた撮像システム | |
TWI479887B (zh) | 背向照明固態成像裝置及照相機 | |
US8692303B2 (en) | Solid-state imaging device, electronic device, and manufacturing method for solid-state imaging device | |
KR101683309B1 (ko) | 고체 촬상 장치 및 전자 기기 | |
US8395194B2 (en) | Solid-state imaging device | |
TWI478331B (zh) | 具有減少暈光及電遮光器之背側照射式影像感測器 | |
US7514733B2 (en) | CMOS image device and local impurity region and method of manufacturing the same | |
US9466641B2 (en) | Solid-state imaging device | |
TWI797451B (zh) | 影像感測器中全域快門之垂直傳輸閘儲存裝置 | |
JP2012084644A (ja) | 裏面照射型固体撮像装置 | |
JP2004186408A (ja) | 光電変換装置 | |
JP6743181B2 (ja) | 固体撮像素子 | |
TWI690073B (zh) | 具有低漏電流之影像感測器之浮動擴散 | |
JP5546198B2 (ja) | 固体撮像装置 | |
TWI464867B (zh) | 固態影像拾取器件及其製造方法,以及影像拾取裝置 | |
US7138671B2 (en) | Solid-state image sensor with photoelectric conversion units each having a first conductive-type impurity region boundary non-coplanar with second conductive-type impurity region boundaries | |
JP4751803B2 (ja) | 裏面照射型撮像素子 | |
TWI525801B (zh) | 具有經摻雜之傳輸閘極的影像感測器 | |
JP5896776B2 (ja) | 撮像装置、撮像システム、および撮像装置の製造方法。 | |
KR100833609B1 (ko) | 씨모스 이미지 센서 및 그 제조 방법 | |
JP6029698B2 (ja) | 光電変換装置及びそれを用いた撮像システム | |
JP5701344B2 (ja) | 光電変換装置及びそれを用いた撮像システム | |
US20100032734A1 (en) | Miniature image sensor | |
JP2003347537A (ja) | 固体撮像素子 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20190402 |
|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20190402 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20200114 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20200228 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20200714 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20200729 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 6743181 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |