JP6742165B2 - 窒化珪素膜の処理方法および窒化珪素膜の形成方法 - Google Patents
窒化珪素膜の処理方法および窒化珪素膜の形成方法 Download PDFInfo
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- JP6742165B2 JP6742165B2 JP2016117832A JP2016117832A JP6742165B2 JP 6742165 B2 JP6742165 B2 JP 6742165B2 JP 2016117832 A JP2016117832 A JP 2016117832A JP 2016117832 A JP2016117832 A JP 2016117832A JP 6742165 B2 JP6742165 B2 JP 6742165B2
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- 229910052581 Si3N4 Inorganic materials 0.000 title claims description 46
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 title claims description 46
- 238000000034 method Methods 0.000 title claims description 30
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims description 56
- 229910052739 hydrogen Inorganic materials 0.000 claims description 56
- 239000001257 hydrogen Substances 0.000 claims description 55
- 239000000758 substrate Substances 0.000 claims description 20
- 238000005268 plasma chemical vapour deposition Methods 0.000 claims description 19
- 229910007991 Si-N Inorganic materials 0.000 claims description 11
- 229910006294 Si—N Inorganic materials 0.000 claims description 11
- 230000001678 irradiating effect Effects 0.000 claims description 8
- 229910052710 silicon Inorganic materials 0.000 claims description 7
- 239000010703 silicon Substances 0.000 claims description 7
- YZCKVEUIGOORGS-UHFFFAOYSA-N Hydrogen atom Chemical compound [H] YZCKVEUIGOORGS-UHFFFAOYSA-N 0.000 claims description 5
- 238000003672 processing method Methods 0.000 claims description 4
- 239000011261 inert gas Substances 0.000 claims description 2
- 239000007789 gas Substances 0.000 description 93
- 239000000523 sample Substances 0.000 description 15
- 230000004048 modification Effects 0.000 description 13
- 238000012986 modification Methods 0.000 description 13
- 150000002500 ions Chemical class 0.000 description 12
- 238000001039 wet etching Methods 0.000 description 12
- 230000015572 biosynthetic process Effects 0.000 description 11
- 230000005540 biological transmission Effects 0.000 description 9
- 239000000463 material Substances 0.000 description 9
- 238000005530 etching Methods 0.000 description 8
- QJGQUHMNIGDVPM-UHFFFAOYSA-N nitrogen group Chemical group [N] QJGQUHMNIGDVPM-UHFFFAOYSA-N 0.000 description 7
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 6
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 6
- 238000001312 dry etching Methods 0.000 description 6
- 238000009616 inductively coupled plasma Methods 0.000 description 6
- 238000003860 storage Methods 0.000 description 6
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 5
- 238000009832 plasma treatment Methods 0.000 description 5
- 230000005855 radiation Effects 0.000 description 5
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 4
- 239000000919 ceramic Substances 0.000 description 4
- 239000004020 conductor Substances 0.000 description 4
- 229910001873 dinitrogen Inorganic materials 0.000 description 4
- PZPGRFITIJYNEJ-UHFFFAOYSA-N disilane Chemical compound [SiH3][SiH3] PZPGRFITIJYNEJ-UHFFFAOYSA-N 0.000 description 4
- 230000000644 propagated effect Effects 0.000 description 4
- 239000004065 semiconductor Substances 0.000 description 4
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 229910021529 ammonia Inorganic materials 0.000 description 2
- 239000000498 cooling water Substances 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 239000010949 copper Substances 0.000 description 2
- 239000003989 dielectric material Substances 0.000 description 2
- 150000002431 hydrogen Chemical class 0.000 description 2
- 230000010354 integration Effects 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 239000010453 quartz Substances 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 1
- 239000004642 Polyimide Substances 0.000 description 1
- 235000010724 Wisteria floribunda Nutrition 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000010494 dissociation reaction Methods 0.000 description 1
- 230000005593 dissociations Effects 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- -1 polytetrafluoroethylene Polymers 0.000 description 1
- 229920001343 polytetrafluoroethylene Polymers 0.000 description 1
- 239000004810 polytetrafluoroethylene Substances 0.000 description 1
- 230000001902 propagating effect Effects 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 238000010926 purge Methods 0.000 description 1
- 238000007348 radical reaction Methods 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 229910000077 silane Inorganic materials 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
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Description
最初に、窒化珪素膜の処理方法の実施形態について説明する。
プラズマCVDにより窒化珪素膜(以下SiN膜と表記する)を成膜する場合、通常、シリコン原料ガスとしてSiH4ガス等のシラン系ガスが用いられ、原料中に水素が含まれている。また、窒素含有ガスとして、水素を含むNH3ガスが用いられることもある。このため、プラズマCVDにより成膜されたSiN膜は、膜中に不可避的に水素(H)が含まれる。
次に、SiN膜の形成方法の実施形態について説明する。
上記SiN膜の処理方法は、プラズマCVDにより成膜した後のSiN膜をマイクロ波水素プラズマにより処理して膜中の水素を除去するものであるが、マイクロ波プラズマは、低電子温度で高密度のプラズマであり、ラジカル反応により低温でSiN膜を成膜することができる。
次に、以上のSiN膜の処理方法またはSiN膜の形成方法に好適なマイクロ波プラズマ処理装置の一例について説明する。
図4は、本発明の実施形態に係るSiN膜の処理方法またはSiN膜の形成方法に好適なマイクロ波プラズマ処理装置を示す断面図である。図4のマイクロ波プラズマ処理装置は、RLSA(登録商標)マイクロ波プラズマ処理装置として構成されている。
処理温度(サセプタ2表面の温度):200〜500℃
処理圧力:10〜100Pa(75〜750mTorr)
Arガス流量:0〜1000mL/min(sccm)
SiH4ガス流量:10〜200mL/min(sccm)
N2ガス流量:10〜200mL/min(sccm)
マイクロ波パワー密度:0.01〜0.04W/cm2
処理温度(サセプタ2表面の温度):200〜500℃
処理圧力:10〜100Pa(75〜750mTorr)
Arガス流量:0〜1000mL/min(sccm)
H2ガス流量:100〜1000mL/min(sccm)
Arガス流量/H2ガス流量=0〜0.9
マイクロ波のパワー密度:0.01〜0.04W/cm2
処理時間:30〜600sec
表面改質部分の厚さ:10nm以上
次に、実験例について説明する。
ここでは、シリコンウエハ上にプラズマCVDでSiN膜を成膜したままのサンプルA(H2プラズマ処理なし)と、SiN膜にマイクロ波水素プラズマを照射して表面改質処理を行った後のサンプルB(H2プラズマ処理あり)について、SiN膜の深さ方向の各元素の濃度と密度をRBSにより測定した。その結果を図5に示す。
(i)SiN膜成膜
Arガス流量:600sccm
SiH4ガス流量:50sccm
N2ガス流量:50sccm
マイクロ波パワー密度:0.02W/cm2
処理時間:60sec
(ii)表面改質処理
処理温度:320℃
処理圧力:20Pa
H2ガス流量:400sccm
時間:300sec
以上、添付図面を参照して本発明の実施形態について説明したが、本発明は、上記の実施の形態に限定されることなく、本発明の思想の範囲内において種々変形可能である。例えば、上記実施形態では、マイクロ波プラズマによるプラズマCVDにより成膜したSiN膜に表面改質処理を施した場合について示したが、SiN膜はICP等、他のプラズマを用いたCVDで成膜したものであってもよい。
2;サセプタ
5;ヒーター
15;ガス導入部
16;ガス供給機構
24;排気機構
28;マイクロ波透過板
31;平面アンテナ
32;スロット
33;遅波材
37;導波管
38;マッチング回路
39;マイクロ波発生装置
40;モード変換器
50;制御部
100;マイクロ波プラズマ処理装置
W;半導体ウエハ(基板)
Claims (11)
- 基板上にマイクロ波プラズマCVDにより成膜された窒化珪素膜の処理方法であって、
前記窒化珪素膜に、水素ガス、または水素ガスおよび不活性ガスをマイクロ波により励起することにより生成された、イオンエネルギーが前記窒化珪素膜のSi−N結合エネルギーより小さいマイクロ波水素プラズマを照射して、前記マイクロ波水素プラズマ中の原子状水素により前記窒化珪素膜の表面部分のSi−H結合からSi−N結合を破壊することなく水素をH 2 として除去し、該表面部分を水素含有量の少ない状態に改質することを特徴とする窒化珪素膜の処理方法。 - 前記マイクロ波水素プラズマを照射する際の処理温度は、200〜500℃であることを特徴とする請求項1に記載の窒化珪素膜の処理方法。
- 前記マイクロ波水素プラズマを照射する際の処理圧力は、10〜100Paであることを特徴とする請求項1または請求項2に記載の窒化珪素膜の処理方法。
- 前記窒化珪素膜の表面部分の改質部分の深さが、10nm以上であることを特徴とする請求項1から請求項3のいずれか1項に記載の窒化珪素膜の処理方法。
- 前記マイクロ波水素プラズマの照射は、RLSA(登録商標)マイクロ波プラズマ処理装置により行われることを特徴とする請求項1から請求項4のいずれか1項に記載の窒化珪素膜の処理方法。
- 基板上にマイクロ波プラズマCVDにより窒化珪素膜を成膜する第1工程と、
成膜された前記窒化珪素膜に請求項1から請求項4のいずれか1項に記載された処理を施す第2工程と
を有することを特徴とする窒化珪素膜の形成方法。 - 前記第1工程と前記第2工程は、同一のマイクロ波プラズマ処理装置内で連続して行われることを特徴とする請求項6に記載の窒化珪素膜の形成方法。
- 前記マイクロ波プラズマ処理装置は、RLSA(登録商標)マイクロ波プラズマ処理装置であることを特徴とする請求項7に記載の窒化珪素膜の形成方法。
- 前記第1工程と前記第2工程とを同じ処理温度で行うことを特徴とする請求項7または請求項8に記載の窒化珪素膜の形成方法。
- 前記第1工程の処理温度は、200〜500℃であることを特徴とする請求項6から請求項9のいずれか1項に記載の窒化珪素膜の形成方法。
- 前記第1工程の処理圧力は、10〜100Paであることを特徴とする請求項6から請求項10のいずれか1項に記載の窒化珪素膜の形成方法。
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