JP6726266B2 - 貫通チャンバ構造のシリコンチップの加工方法 - Google Patents
貫通チャンバ構造のシリコンチップの加工方法 Download PDFInfo
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- B81C1/00436—Shaping materials, i.e. techniques for structuring the substrate or the layers on the substrate
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- B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
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- B81C3/00—Assembling of devices or systems from individually processed components
- B81C3/001—Bonding of two components
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
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- B08B3/04—Cleaning involving contact with liquid
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- B32B38/00—Ancillary operations in connection with laminating processes
- B32B38/0012—Mechanical treatment, e.g. roughening, deforming, stretching
- B32B2038/0016—Abrading
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- B—PERFORMING OPERATIONS; TRANSPORTING
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- B32B2310/00—Treatment by energy or chemical effects
- B32B2310/14—Corona, ionisation, electrical discharge, plasma treatment
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
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- B32B2313/00—Elements other than metals
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- B—PERFORMING OPERATIONS; TRANSPORTING
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- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B2457/00—Electrical equipment
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- B—PERFORMING OPERATIONS; TRANSPORTING
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- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B37/00—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding
- B32B37/06—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding characterised by the heating method
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B43/00—Operations specially adapted for layered products and not otherwise provided for, e.g. repairing; Apparatus therefor
- B32B43/006—Delaminating
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2203/00—Basic microelectromechanical structures
- B81B2203/03—Static structures
- B81B2203/0315—Cavities
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2203/00—Basic microelectromechanical structures
- B81B2203/03—Static structures
- B81B2203/0353—Holes
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C2201/00—Manufacture or treatment of microstructural devices or systems
- B81C2201/01—Manufacture or treatment of microstructural devices or systems in or on a substrate
- B81C2201/0101—Shaping material; Structuring the bulk substrate or layers on the substrate; Film patterning
- B81C2201/0111—Bulk micromachining
- B81C2201/0116—Thermal treatment for structural rearrangement of substrate atoms, e.g. for making buried cavities
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C2201/00—Manufacture or treatment of microstructural devices or systems
- B81C2201/01—Manufacture or treatment of microstructural devices or systems in or on a substrate
- B81C2201/0101—Shaping material; Structuring the bulk substrate or layers on the substrate; Film patterning
- B81C2201/0118—Processes for the planarization of structures
- B81C2201/0125—Blanket removal, e.g. polishing
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C2201/00—Manufacture or treatment of microstructural devices or systems
- B81C2201/01—Manufacture or treatment of microstructural devices or systems in or on a substrate
- B81C2201/0174—Manufacture or treatment of microstructural devices or systems in or on a substrate for making multi-layered devices, film deposition or growing
- B81C2201/0176—Chemical vapour Deposition
- B81C2201/0178—Oxidation
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C2201/00—Manufacture or treatment of microstructural devices or systems
- B81C2201/01—Manufacture or treatment of microstructural devices or systems in or on a substrate
- B81C2201/0174—Manufacture or treatment of microstructural devices or systems in or on a substrate for making multi-layered devices, film deposition or growing
- B81C2201/019—Bonding or gluing multiple substrate layers
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C2201/00—Manufacture or treatment of microstructural devices or systems
- B81C2201/01—Manufacture or treatment of microstructural devices or systems in or on a substrate
- B81C2201/0174—Manufacture or treatment of microstructural devices or systems in or on a substrate for making multi-layered devices, film deposition or growing
- B81C2201/0191—Transfer of a layer from a carrier wafer to a device wafer
- B81C2201/0192—Transfer of a layer from a carrier wafer to a device wafer by cleaving the carrier wafer
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C2201/00—Manufacture or treatment of microstructural devices or systems
- B81C2201/01—Manufacture or treatment of microstructural devices or systems in or on a substrate
- B81C2201/0174—Manufacture or treatment of microstructural devices or systems in or on a substrate for making multi-layered devices, film deposition or growing
- B81C2201/0191—Transfer of a layer from a carrier wafer to a device wafer
- B81C2201/0194—Transfer of a layer from a carrier wafer to a device wafer the layer being structured
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- Physics & Mathematics (AREA)
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- Mechanical Treatment Of Semiconductor (AREA)
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- Pressure Welding/Diffusion-Bonding (AREA)
Description
仮底を剥離する際にボンディングチップに対してアニール処理を行う温度は、150〜450℃が要求される。
貫通チャンバ構造のシリコンチップの加工方法は、下記のステップをその順に実施する。
貫通チャンバ構造のシリコンチップの加工方法が提供される。当該方法は、下記のステップをその順に実施する。
ステップ8、貫通チャンバ構造を有するシリコンチップに対してHFで酸化層の洗浄・リンスを行って、分離インターフェースを除去し、表面状態が良好な表面を形成する。
Claims (5)
- 貫通チャンバ構造のシリコンチップの加工方法であって、
仮底となるシリコンチップ又はパターンチップに対してイオン注入を行うステップ1と、
前記仮底となるシリコンチップを前記パターンチップとボンディングするステップ2と、
機械研削方法及び/又は化学研磨方法により研削・研磨を行い、ボンディングされた前記仮底となるシリコンチップを仮底として当該仮底を基板とし、前記パターンチップを薄肉化し、パターンを露出させる深さまで研削し、もともと露出していないチャンバを露出させるステップ3と、
ステップ1とステップ2の両ステップを実施した2つの仮底となるシリコンチップ及びパターンチップに対して、露出させたパターン対パターンのボンディングを行うステップ4と、
保護の役割を果たした前記仮底を低温アニール及びマイクロ波ブレーク操作により剥離し、貫通チャンバ構造のシリコンチップを得るステップ5と、をこの順に実施することを特徴とする貫通チャンバ構造のシリコンチップの加工方法。 - 前記仮底となるシリコンチップ又はパターンチップに対してイオン注入を行う際に、注入深さは表面から1μm〜0.001μmの範囲内であり、水素イオン注入のパラメータは、10〜120Kevエネルギー、1E15〜9E16線量、1〜20mAビームであり、
前記仮底となるシリコンチップを前記パターンチップとボンディングする際には、前記仮底となるシリコンチップの粗さは5nm以下であり、前記仮底となるシリコンチップを前記パターンチップに直接接触させ、両者の表面の分子間作用力によって両者を一体に結合させることを特徴とする請求項1に記載の貫通チャンバ構造のシリコンチップの加工方法。 - 前記仮底となるシリコンチップと前記パターンチップとのボンディングには、プラズマ増強の直接ボンディング方法が用いられることを特徴とする請求項2に記載の貫通チャンバ構造のシリコンチップの加工方法。
- 前記仮底を剥離する時に、アニール処理を行う温度は、150〜450℃であることを特徴とする請求項3に記載の貫通チャンバ構造のシリコンチップの加工方法。
- 前記仮底となるシリコンチップ又はパターンチップに対してイオン注入を行う前に、
パターンチップに対して化学湿式洗浄を行い、汚れを除去することで、金属と有機物の汚染を減少させ、その後、酸化処理を行い、800〜1150℃でパターンチップの表裏面、縁とチャンバ内に0.1〜0.5μmの厚さの酸化層を均一に成長させ、
マイクロ波ブレーク技術を用いて両側の仮底を剥離した後、貫通チャンバ構造を有するシリコンチップに対してHFで酸化層の洗浄・リンスを行って、分離インターフェースを除去し、表面状態が良好な表面を形成することを特徴とする請求項1から4の何れか一項に記載の貫通チャンバ構造のシリコンチップの加工方法。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
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CN201810075852.5 | 2018-01-26 | ||
CN201810075852.5A CN110078017B (zh) | 2018-01-26 | 2018-01-26 | 一种贯穿空腔结构硅片的加工方法 |
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JP2019129314A JP2019129314A (ja) | 2019-08-01 |
JP6726266B2 true JP6726266B2 (ja) | 2020-07-22 |
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US (1) | US20190233280A1 (ja) |
JP (1) | JP6726266B2 (ja) |
CN (1) | CN110078017B (ja) |
DE (1) | DE102018131606B4 (ja) |
FR (1) | FR3077422B1 (ja) |
TW (1) | TWI675796B (ja) |
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Publication number | Priority date | Publication date | Assignee | Title |
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US6946314B2 (en) * | 2001-01-02 | 2005-09-20 | The Charles Stark Draper Laboratory, Inc. | Method for microfabricating structures using silicon-on-insulator material |
FR2855909B1 (fr) * | 2003-06-06 | 2005-08-26 | Soitec Silicon On Insulator | Procede d'obtention concomitante d'au moins une paire de structures comprenant au moins une couche utile reportee sur un substrat |
US7579621B2 (en) | 2004-09-17 | 2009-08-25 | Massachusetts Institute Of Technology | Integrated BST microwave tunable devices using buffer layer transfer method |
CN101401195B (zh) * | 2006-03-28 | 2010-11-03 | 夏普株式会社 | 半导体元件的转印方法和半导体装置的制造方法以及半导体装置 |
US7811900B2 (en) * | 2006-09-08 | 2010-10-12 | Silicon Genesis Corporation | Method and structure for fabricating solar cells using a thick layer transfer process |
US20100173437A1 (en) * | 2008-10-21 | 2010-07-08 | Wygant Ira O | Method of fabricating CMUTs that generate low-frequency and high-intensity ultrasound |
US8536629B2 (en) * | 2009-02-24 | 2013-09-17 | Nec Corporation | Semiconductor device and method for manufacturing the same |
US8129810B2 (en) | 2009-06-19 | 2012-03-06 | Carestream Health, Inc. | Continuous large area imaging and display arrays using readout arrays fabricated in silicon-on-glass substrates |
TWI614816B (zh) * | 2010-06-22 | 2018-02-11 | 美國亞德諾半導體公司 | 用以蝕刻及分割蓋晶圓之方法 |
SG177817A1 (en) * | 2010-07-19 | 2012-02-28 | Soitec Silicon On Insulator | Temporary semiconductor structure bonding methods and related bonded semiconductor structures |
CN105428301A (zh) * | 2014-09-17 | 2016-03-23 | 中国科学院上海微系统与信息技术研究所 | 利用微波退火技术低温制备goi的方法 |
JP2016063114A (ja) | 2014-09-19 | 2016-04-25 | 大日本印刷株式会社 | 貫通電極基板及びその製造方法 |
EP3229260A4 (en) * | 2014-12-05 | 2018-07-25 | Shin-Etsu Chemical Co., Ltd. | Composite substrate manufacturing method and composite substrate |
WO2017052653A1 (en) * | 2015-09-25 | 2017-03-30 | Intel Corporation | Selective die transfer using controlled de-bonding from a carrier wafer |
CN108022934A (zh) | 2016-11-01 | 2018-05-11 | 沈阳硅基科技有限公司 | 一种薄膜的制备方法 |
-
2018
- 2018-01-26 CN CN201810075852.5A patent/CN110078017B/zh active Active
- 2018-12-04 TW TW107143535A patent/TWI675796B/zh active
- 2018-12-07 US US16/213,019 patent/US20190233280A1/en not_active Abandoned
- 2018-12-10 DE DE102018131606.2A patent/DE102018131606B4/de active Active
- 2018-12-10 FR FR1872607A patent/FR3077422B1/fr active Active
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Also Published As
Publication number | Publication date |
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CN110078017A (zh) | 2019-08-02 |
FR3077422A1 (fr) | 2019-08-02 |
US20190233280A1 (en) | 2019-08-01 |
JP2019129314A (ja) | 2019-08-01 |
DE102018131606B4 (de) | 2021-09-30 |
DE102018131606A1 (de) | 2019-08-01 |
TWI675796B (zh) | 2019-11-01 |
FR3077422B1 (fr) | 2021-09-24 |
CN110078017B (zh) | 2021-11-05 |
TW201932402A (zh) | 2019-08-16 |
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