JP6724308B2 - 発振モジュール、振動デバイス、電子機器、および移動体 - Google Patents
発振モジュール、振動デバイス、電子機器、および移動体 Download PDFInfo
- Publication number
- JP6724308B2 JP6724308B2 JP2015156786A JP2015156786A JP6724308B2 JP 6724308 B2 JP6724308 B2 JP 6724308B2 JP 2015156786 A JP2015156786 A JP 2015156786A JP 2015156786 A JP2015156786 A JP 2015156786A JP 6724308 B2 JP6724308 B2 JP 6724308B2
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- JP
- Japan
- Prior art keywords
- circuit
- semiconductor
- thin film
- inductance
- oscillation module
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 230000010355 oscillation Effects 0.000 title claims description 150
- 239000004065 semiconductor Substances 0.000 claims description 250
- 239000010409 thin film Substances 0.000 claims description 122
- 239000000758 substrate Substances 0.000 claims description 70
- 239000010408 film Substances 0.000 claims description 47
- 230000002093 peripheral effect Effects 0.000 claims description 16
- 230000008878 coupling Effects 0.000 description 22
- 238000010168 coupling process Methods 0.000 description 22
- 238000005859 coupling reaction Methods 0.000 description 22
- 239000000463 material Substances 0.000 description 14
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 12
- 239000000919 ceramic Substances 0.000 description 9
- 229910052709 silver Inorganic materials 0.000 description 8
- 239000004332 silver Substances 0.000 description 8
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 7
- 239000013078 crystal Substances 0.000 description 7
- 239000010931 gold Substances 0.000 description 7
- 238000010586 diagram Methods 0.000 description 6
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 6
- 229910052751 metal Inorganic materials 0.000 description 6
- 239000002184 metal Substances 0.000 description 6
- 230000000149 penetrating effect Effects 0.000 description 6
- 229910000679 solder Inorganic materials 0.000 description 6
- 238000010897 surface acoustic wave method Methods 0.000 description 6
- 239000010949 copper Substances 0.000 description 5
- 230000004907 flux Effects 0.000 description 5
- 230000006870 function Effects 0.000 description 5
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 5
- 229910052737 gold Inorganic materials 0.000 description 5
- 229910000833 kovar Inorganic materials 0.000 description 5
- 239000010410 layer Substances 0.000 description 5
- 229910052759 nickel Inorganic materials 0.000 description 5
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 description 4
- 230000002159 abnormal effect Effects 0.000 description 4
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 3
- 238000004891 communication Methods 0.000 description 3
- 229910052802 copper Inorganic materials 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000000605 extraction Methods 0.000 description 3
- 150000002739 metals Chemical class 0.000 description 3
- 238000007747 plating Methods 0.000 description 3
- 239000002356 single layer Substances 0.000 description 3
- 239000002344 surface layer Substances 0.000 description 3
- WSMQKESQZFQMFW-UHFFFAOYSA-N 5-methyl-pyrazole-3-carboxylic acid Chemical compound CC1=CC(C(O)=O)=NN1 WSMQKESQZFQMFW-UHFFFAOYSA-N 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 230000001133 acceleration Effects 0.000 description 2
- 239000000956 alloy Substances 0.000 description 2
- 229910001873 dinitrogen Inorganic materials 0.000 description 2
- 238000010292 electrical insulation Methods 0.000 description 2
- 239000007789 gas Substances 0.000 description 2
- GQYHUHYESMUTHG-UHFFFAOYSA-N lithium niobate Chemical compound [Li+].[O-][Nb](=O)=O GQYHUHYESMUTHG-UHFFFAOYSA-N 0.000 description 2
- 238000012544 monitoring process Methods 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 229910052763 palladium Inorganic materials 0.000 description 2
- 239000010453 quartz Substances 0.000 description 2
- 238000007789 sealing Methods 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 241000251468 Actinopterygii Species 0.000 description 1
- 229910000851 Alloy steel Inorganic materials 0.000 description 1
- WQZGKKKJIJFFOK-GASJEMHNSA-N Glucose Natural products OC[C@H]1OC(O)[C@H](O)[C@@H](O)[C@@H]1O WQZGKKKJIJFFOK-GASJEMHNSA-N 0.000 description 1
- 244000126211 Hericium coralloides Species 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000011230 binding agent Substances 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000008280 blood Substances 0.000 description 1
- 210000004369 blood Anatomy 0.000 description 1
- 230000036772 blood pressure Effects 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 239000003822 epoxy resin Substances 0.000 description 1
- 230000005284 excitation Effects 0.000 description 1
- 238000010304 firing Methods 0.000 description 1
- 239000008103 glucose Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000003384 imaging method Methods 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- HFGPZNIAWCZYJU-UHFFFAOYSA-N lead zirconate titanate Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ti+4].[Zr+4].[Pb+2] HFGPZNIAWCZYJU-UHFFFAOYSA-N 0.000 description 1
- 229910052451 lead zirconate titanate Inorganic materials 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 238000001465 metallisation Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 239000012778 molding material Substances 0.000 description 1
- 230000035515 penetration Effects 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 238000007650 screen-printing Methods 0.000 description 1
- -1 silver halide Chemical class 0.000 description 1
- 238000005245 sintering Methods 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
- 229910052845 zircon Inorganic materials 0.000 description 1
- GFQYVLUOOAAOGM-UHFFFAOYSA-N zirconium(iv) silicate Chemical compound [Zr+4].[O-][Si]([O-])([O-])[O-] GFQYVLUOOAAOGM-UHFFFAOYSA-N 0.000 description 1
Images
Landscapes
- Oscillators With Electromechanical Resonators (AREA)
- Inductance-Capacitance Distribution Constants And Capacitance-Resistance Oscillators (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2015156786A JP6724308B2 (ja) | 2015-08-07 | 2015-08-07 | 発振モジュール、振動デバイス、電子機器、および移動体 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2015156786A JP6724308B2 (ja) | 2015-08-07 | 2015-08-07 | 発振モジュール、振動デバイス、電子機器、および移動体 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2017038125A JP2017038125A (ja) | 2017-02-16 |
| JP2017038125A5 JP2017038125A5 (enExample) | 2018-09-06 |
| JP6724308B2 true JP6724308B2 (ja) | 2020-07-15 |
Family
ID=58047522
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2015156786A Expired - Fee Related JP6724308B2 (ja) | 2015-08-07 | 2015-08-07 | 発振モジュール、振動デバイス、電子機器、および移動体 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP6724308B2 (enExample) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6942983B2 (ja) * | 2017-03-17 | 2021-09-29 | セイコーエプソン株式会社 | 発振器、電子機器および移動体 |
| JP7183699B2 (ja) * | 2018-10-29 | 2022-12-06 | セイコーエプソン株式会社 | 発振器、電子機器及び移動体 |
| JP2021057744A (ja) * | 2019-09-30 | 2021-04-08 | セイコーエプソン株式会社 | 振動デバイス、電子機器および移動体 |
| JP7419877B2 (ja) * | 2020-02-28 | 2024-01-23 | セイコーエプソン株式会社 | 振動デバイス、電子機器および移動体 |
| JP2021150699A (ja) * | 2020-03-17 | 2021-09-27 | セイコーエプソン株式会社 | 振動デバイス、電子機器および移動体 |
Family Cites Families (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001044754A (ja) * | 1999-07-26 | 2001-02-16 | Niigata Seimitsu Kk | Ｌｃ発振器 |
| JP3982182B2 (ja) * | 2001-02-01 | 2007-09-26 | セイコーエプソン株式会社 | 弾性表面波装置及びその製造方法 |
| JP2003258633A (ja) * | 2002-03-01 | 2003-09-12 | Kyocera Corp | Ｐｌｌモジュール |
| JP2005006153A (ja) * | 2003-06-13 | 2005-01-06 | Nec Electronics Corp | 電圧制御発振器 |
| US8143986B2 (en) * | 2007-01-24 | 2012-03-27 | Renesas Electronics Corporation | Inductor |
| JP2009267212A (ja) * | 2008-04-28 | 2009-11-12 | Fujikura Ltd | 半導体装置 |
| JP6137442B2 (ja) * | 2012-07-31 | 2017-05-31 | 株式会社大真空 | 圧電発振器 |
| JP6091206B2 (ja) * | 2012-12-21 | 2017-03-08 | ルネサスエレクトロニクス株式会社 | 半導体装置および半導体装置の製造方法 |
-
2015
- 2015-08-07 JP JP2015156786A patent/JP6724308B2/ja not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JP2017038125A (ja) | 2017-02-16 |
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