JP6724308B2 - 発振モジュール、振動デバイス、電子機器、および移動体 - Google Patents

発振モジュール、振動デバイス、電子機器、および移動体 Download PDF

Info

Publication number
JP6724308B2
JP6724308B2 JP2015156786A JP2015156786A JP6724308B2 JP 6724308 B2 JP6724308 B2 JP 6724308B2 JP 2015156786 A JP2015156786 A JP 2015156786A JP 2015156786 A JP2015156786 A JP 2015156786A JP 6724308 B2 JP6724308 B2 JP 6724308B2
Authority
JP
Japan
Prior art keywords
circuit
semiconductor
thin film
inductance
oscillation module
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2015156786A
Other languages
English (en)
Japanese (ja)
Other versions
JP2017038125A5 (enExample
JP2017038125A (ja
Inventor
昌生 野村
昌生 野村
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Original Assignee
Seiko Epson Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp
Priority to JP2015156786A priority Critical patent/JP6724308B2/ja
Publication of JP2017038125A publication Critical patent/JP2017038125A/ja
Publication of JP2017038125A5 publication Critical patent/JP2017038125A5/ja
Application granted granted Critical
Publication of JP6724308B2 publication Critical patent/JP6724308B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Landscapes

  • Oscillators With Electromechanical Resonators (AREA)
  • Inductance-Capacitance Distribution Constants And Capacitance-Resistance Oscillators (AREA)
JP2015156786A 2015-08-07 2015-08-07 発振モジュール、振動デバイス、電子機器、および移動体 Expired - Fee Related JP6724308B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2015156786A JP6724308B2 (ja) 2015-08-07 2015-08-07 発振モジュール、振動デバイス、電子機器、および移動体

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2015156786A JP6724308B2 (ja) 2015-08-07 2015-08-07 発振モジュール、振動デバイス、電子機器、および移動体

Publications (3)

Publication Number Publication Date
JP2017038125A JP2017038125A (ja) 2017-02-16
JP2017038125A5 JP2017038125A5 (enExample) 2018-09-06
JP6724308B2 true JP6724308B2 (ja) 2020-07-15

Family

ID=58047522

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2015156786A Expired - Fee Related JP6724308B2 (ja) 2015-08-07 2015-08-07 発振モジュール、振動デバイス、電子機器、および移動体

Country Status (1)

Country Link
JP (1) JP6724308B2 (enExample)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6942983B2 (ja) * 2017-03-17 2021-09-29 セイコーエプソン株式会社 発振器、電子機器および移動体
JP7183699B2 (ja) * 2018-10-29 2022-12-06 セイコーエプソン株式会社 発振器、電子機器及び移動体
JP2021057744A (ja) * 2019-09-30 2021-04-08 セイコーエプソン株式会社 振動デバイス、電子機器および移動体
JP7419877B2 (ja) 2020-02-28 2024-01-23 セイコーエプソン株式会社 振動デバイス、電子機器および移動体
JP2021150699A (ja) * 2020-03-17 2021-09-27 セイコーエプソン株式会社 振動デバイス、電子機器および移動体

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001044754A (ja) * 1999-07-26 2001-02-16 Niigata Seimitsu Kk Ｌｃ発振器
JP3982182B2 (ja) * 2001-02-01 2007-09-26 セイコーエプソン株式会社 弾性表面波装置及びその製造方法
JP2003258633A (ja) * 2002-03-01 2003-09-12 Kyocera Corp Ｐｌｌモジュール
JP2005006153A (ja) * 2003-06-13 2005-01-06 Nec Electronics Corp 電圧制御発振器
WO2008090995A1 (ja) * 2007-01-24 2008-07-31 Nec Corporation インダクタ
JP2009267212A (ja) * 2008-04-28 2009-11-12 Fujikura Ltd 半導体装置
JP6137442B2 (ja) * 2012-07-31 2017-05-31 株式会社大真空 圧電発振器
JP6091206B2 (ja) * 2012-12-21 2017-03-08 ルネサスエレクトロニクス株式会社 半導体装置および半導体装置の製造方法

Also Published As

Publication number Publication date
JP2017038125A (ja) 2017-02-16

Similar Documents

Publication Publication Date Title
US9893733B2 (en) Oscillator, electronic apparatus, and moving object
JP6098377B2 (ja) 発振装置、電子機器、および移動体
CN105391418B (zh) 电子部件、振荡器、电子设备以及移动体
US10122343B2 (en) Resonator device, oscillator, electronic apparatus, and vehicle
JP6241329B2 (ja) 電子デバイス、電子機器および移動体
CN111510101B (zh) 振荡器、振荡器的制造方法、电子设备以及移动体
JP2017038125A (ja) 発振モジュール、振動デバイス、電子機器、および移動体
CN105306001B (zh) 电子部件、电子部件的制造方法、电子设备以及移动体
US20150256127A1 (en) Electronic device, electronic apparatus and moving object
JP2014053663A (ja) 電子デバイス、電子機器、及び移動体
US11431343B2 (en) Oscillator, electronic apparatus, and vehicle
JP2016131266A (ja) 振動デバイス、発振器、電子機器、および移動体
JP6364829B2 (ja) 電子デバイス、電子機器および移動体
JP6405680B2 (ja) 電子デバイス、電子機器および移動体
JP6866588B2 (ja) 電子デバイス、電子デバイスの製造方法、電子機器および移動体
JP6729643B2 (ja) 発振器、電子機器および移動体
CN105305965B (zh) 半导体电路元件、电子设备以及移动体

Legal Events

Date Code Title Description
A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20180727

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20180727

RD05 Notification of revocation of power of attorney

Free format text: JAPANESE INTERMEDIATE CODE: A7425

Effective date: 20180906

RD03 Notification of appointment of power of attorney

Free format text: JAPANESE INTERMEDIATE CODE: A7423

Effective date: 20181116

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20190530

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20190611

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20190801

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20191203

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20200116

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20200526

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20200608

R150 Certificate of patent or registration of utility model

Ref document number: 6724308

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150

LAPS Cancellation because of no payment of annual fees