JP6722246B2 - 加熱装置および加熱方法 - Google Patents
加熱装置および加熱方法 Download PDFInfo
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- JP6722246B2 JP6722246B2 JP2018176048A JP2018176048A JP6722246B2 JP 6722246 B2 JP6722246 B2 JP 6722246B2 JP 2018176048 A JP2018176048 A JP 2018176048A JP 2018176048 A JP2018176048 A JP 2018176048A JP 6722246 B2 JP6722246 B2 JP 6722246B2
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
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- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67098—Apparatus for thermal treatment
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- H—ELECTRICITY
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- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/324—Thermal treatment for modifying the properties of semiconductor bodies, e.g. annealing, sintering
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67098—Apparatus for thermal treatment
- H01L21/67103—Apparatus for thermal treatment mainly by conduction
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67259—Position monitoring, e.g. misposition detection or presence detection
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
- H01L21/682—Mask-wafer alignment
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
- H01L21/68742—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by a lifting arrangement, e.g. lift pins
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Heating, Cooling, Or Curing Plastics Or The Like In General (AREA)
- General Induction Heating (AREA)
Description
20…ホットプレート
30…昇降機構
32…リフトピン
33,46…昇降部材
34…リフトピン駆動部
40…矯正機構
43…リフト柱
44…連結金具
45…支持部
45A〜45D…支持部材
47…リフト柱駆動部
48,48a…矯正ピン(矯正部材)
49…矯正ブロック(矯正部材)
P1…本加熱位置(加熱位置)
P2…予備加熱位置(加熱位置)
S…基板
Z…鉛直方向
Claims (9)
- 加熱位置に位置決めされる矩形状の基板を下方から加熱するホットプレートと、
前記ホットプレートに対して前記基板を鉛直方向において前記加熱位置よりも高い待機位置と前記加熱位置との間で昇降させる昇降機構と、
前記基板の上面の周縁部に対して当接可能な矯正部材を有する矯正機構とを備え、
前記矯正機構は、前記加熱位置に位置決めされた前記基板の四辺の近傍で前記矯正部材を前記加熱位置に位置させることで、前記ホットプレートによる前記基板の加熱前に前記基板のうち上方へ反っている前記周縁部を前記加熱位置に矯正し、前記基板の加熱中に前記基板の周縁部が前記加熱位置よりも上方に反るのを規制して前記ホットプレートにより加熱される前記基板の姿勢を制御し、
前記矯正部材は下端部を前記基板の上面と接触可能に仕上げられ、
前記矯正機構は、前記矯正部材を複数個有するとともに前記複数の矯正部材の上端部を支持する支持部を有し、
前記複数の矯正部材はそれぞれ独立して前記支持部に対して着脱自在である
ことを特徴とする加熱装置。 - 請求項1に記載の加熱装置であって、
前記矯正部材は下端部を先細り形状に仕上げた矯正ピンであり、
前記矯正機構は、前記矯正ピンを複数個有し、各矯正ピンの前記下端部を前記基板の上面の周縁部に点接触させて前記基板の姿勢を制御する加熱装置。 - 請求項2に記載の加熱装置であって、
前記複数の矯正ピンのうちの4本はそれぞれ前記基板の上面の四隅と点接触可能に設けられたコーナーピンである加熱装置。 - 請求項2に記載の加熱装置であって、
前記矯正機構は、前記複数の矯正ピンの上端部を支持する支持部を有し、前記加熱位置に位置決めされた前記基板を前記ホットプレートにより加熱する前に前記複数の矯正ピンを支持したまま前記支持部を前記鉛直方向に移動させて各矯正ピンの前記下端部を前記加熱位置に位置させる加熱装置。 - 請求項4に記載の加熱装置であって、
前記基板の昇降から独立して、各矯正ピンの前記下端部を前記加熱位置に位置させる下方位置と、各矯正ピンの前記下端部を前記加熱位置よりも高い位置に引き上げた上方位置との間で前記支持部を移動させる移動機構を備える加熱装置。 - 請求項4に記載の加熱装置であって、
前記昇降機構は、前記基板の昇降と同期して、各矯正ピンの前記下端部を前記加熱位置に位置させる下方位置と、各矯正ピンの前記下端部を前記加熱位置よりも高い位置に引き上げた上方位置との間で移動させる加熱装置。 - 請求項4ないし6のいずれか一項に記載の加熱装置であって、
前記複数の矯正ピンはそれぞれ独立して前記支持部に対して着脱自在である加熱装置。 - 請求項7に記載の加熱装置であって、
前記矯正ピン毎に鉛直方向における前記支持部への前記矯正ピンの装着を調整可能である加熱装置。 - ホットプレートに対して矩形状の基板を所定の加熱位置に位置決めする工程と、
前記基板の上面の周縁部に対して当接可能な矯正部材を前記加熱位置よりも高い位置から前記加熱位置に位置決めされた前記基板に向けて下降させ、前記基板の四辺の近傍で前記矯正部材を前記加熱位置に位置決めし、前記矯正部材の下降中に前記基板のうち上方へ反っている前記周縁部を前記加熱位置に矯正する工程と、
前記矯正部材を前記加熱位置に位置決めした状態のまま前記ホットプレートにより前記基板を加熱するとともに前記基板の加熱中に前記基板の周縁部が前記加熱位置よりも上方に反るのを規制する工程と
を備えることを特徴とする加熱方法。
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
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JP2018176048A JP6722246B2 (ja) | 2018-09-20 | 2018-09-20 | 加熱装置および加熱方法 |
TW108121777A TWI786302B (zh) | 2018-09-20 | 2019-06-21 | 加熱裝置及加熱方法 |
KR1020190075726A KR102471557B1 (ko) | 2018-09-20 | 2019-06-25 | 가열 장치 및 가열 방법 |
CN201910757163.7A CN110931385A (zh) | 2018-09-20 | 2019-08-15 | 加热装置以及加热方法 |
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JP2018176048A JP6722246B2 (ja) | 2018-09-20 | 2018-09-20 | 加熱装置および加熱方法 |
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JP6722246B2 true JP6722246B2 (ja) | 2020-07-15 |
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KR (1) | KR102471557B1 (ja) |
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JP4513960B2 (ja) * | 2004-10-22 | 2010-07-28 | セイコーエプソン株式会社 | スリットコート式塗布装置及びスリットコート式塗布方法 |
JP2006339485A (ja) * | 2005-06-03 | 2006-12-14 | Dainippon Screen Mfg Co Ltd | 基板熱処理装置 |
US8159654B2 (en) * | 2009-06-03 | 2012-04-17 | Matsushita Seiki Co., Ltd. | Pressure body and pellicle mounting apparatus |
JP6296299B2 (ja) * | 2014-09-02 | 2018-03-20 | パナソニックIpマネジメント株式会社 | プラズマ処理装置およびプラズマ処理方法 |
JP6284996B1 (ja) * | 2016-11-04 | 2018-02-28 | Towa株式会社 | 検査方法、樹脂封止装置、樹脂封止方法及び樹脂封止品の製造方法 |
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- 2019-06-25 KR KR1020190075726A patent/KR102471557B1/ko active IP Right Grant
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Publication number | Publication date |
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CN110931385A (zh) | 2020-03-27 |
KR20200033721A (ko) | 2020-03-30 |
TWI786302B (zh) | 2022-12-11 |
TW202021070A (zh) | 2020-06-01 |
JP2020047829A (ja) | 2020-03-26 |
KR102471557B1 (ko) | 2022-11-25 |
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