JP6697366B2 - 超格子メモリ及びクロスポイント型メモリ装置 - Google Patents
超格子メモリ及びクロスポイント型メモリ装置 Download PDFInfo
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- 229910005900 GeTe Inorganic materials 0.000 claims description 40
- 150000001786 chalcogen compounds Chemical class 0.000 claims description 40
- 239000000758 substrate Substances 0.000 claims description 14
- 229910021417 amorphous silicon Inorganic materials 0.000 claims description 12
- 229910052760 oxygen Inorganic materials 0.000 claims description 6
- 229910052757 nitrogen Inorganic materials 0.000 claims description 5
- 229910052796 boron Inorganic materials 0.000 claims description 3
- 229910052799 carbon Inorganic materials 0.000 claims description 3
- 239000000203 mixture Substances 0.000 claims description 3
- 229910052732 germanium Inorganic materials 0.000 claims description 2
- 238000010030 laminating Methods 0.000 claims description 2
- 150000004770 chalcogenides Chemical class 0.000 claims 1
- 239000010410 layer Substances 0.000 description 205
- 238000009792 diffusion process Methods 0.000 description 24
- 238000010586 diagram Methods 0.000 description 15
- 238000004544 sputter deposition Methods 0.000 description 14
- 239000002184 metal Substances 0.000 description 11
- 229910052751 metal Inorganic materials 0.000 description 11
- 239000007789 gas Substances 0.000 description 10
- 230000008859 change Effects 0.000 description 6
- 239000013078 crystal Substances 0.000 description 6
- 239000000463 material Substances 0.000 description 6
- 238000002441 X-ray diffraction Methods 0.000 description 5
- 230000002776 aggregation Effects 0.000 description 5
- 238000004220 aggregation Methods 0.000 description 5
- 125000004429 atom Chemical group 0.000 description 5
- 238000000034 method Methods 0.000 description 5
- 239000004065 semiconductor Substances 0.000 description 5
- 230000000694 effects Effects 0.000 description 4
- 230000006870 function Effects 0.000 description 4
- 239000011229 interlayer Substances 0.000 description 4
- 230000004048 modification Effects 0.000 description 4
- 238000012986 modification Methods 0.000 description 4
- 230000008901 benefit Effects 0.000 description 3
- 238000001004 secondary ion mass spectrometry Methods 0.000 description 3
- 229910052714 tellurium Inorganic materials 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 229910004298 SiO 2 Inorganic materials 0.000 description 2
- 230000004931 aggregating effect Effects 0.000 description 2
- 238000005229 chemical vapour deposition Methods 0.000 description 2
- 150000001875 compounds Chemical class 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 229910052731 fluorine Inorganic materials 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 229910052711 selenium Inorganic materials 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 229910052717 sulfur Inorganic materials 0.000 description 2
- 229910017629 Sb2Te3 Inorganic materials 0.000 description 1
- 229910018321 SbTe Inorganic materials 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 229910006404 SnO 2 Inorganic materials 0.000 description 1
- 229910007709 ZnTe Inorganic materials 0.000 description 1
- 229910052785 arsenic Inorganic materials 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 230000004888 barrier function Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 229910052797 bismuth Inorganic materials 0.000 description 1
- -1 but SiTe Inorganic materials 0.000 description 1
- 229910052798 chalcogen Inorganic materials 0.000 description 1
- 150000001787 chalcogens Chemical class 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
- 230000037431 insertion Effects 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 239000011533 mixed conductor Substances 0.000 description 1
- 125000004433 nitrogen atom Chemical group N* 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 239000012782 phase change material Substances 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 230000001629 suppression Effects 0.000 description 1
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B63/00—Resistance change memory devices, e.g. resistive RAM [ReRAM] devices
- H10B63/20—Resistance change memory devices, e.g. resistive RAM [ReRAM] devices comprising selection components having two electrodes, e.g. diodes
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B63/00—Resistance change memory devices, e.g. resistive RAM [ReRAM] devices
- H10B63/20—Resistance change memory devices, e.g. resistive RAM [ReRAM] devices comprising selection components having two electrodes, e.g. diodes
- H10B63/24—Resistance change memory devices, e.g. resistive RAM [ReRAM] devices comprising selection components having two electrodes, e.g. diodes of the Ovonic threshold switching type
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B63/00—Resistance change memory devices, e.g. resistive RAM [ReRAM] devices
- H10B63/80—Arrangements comprising multiple bistable or multi-stable switching components of the same type on a plane parallel to the substrate, e.g. cross-point arrays
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N70/00—Solid-state devices having no potential barriers, and specially adapted for rectifying, amplifying, oscillating or switching
- H10N70/20—Multistable switching devices, e.g. memristors
- H10N70/231—Multistable switching devices, e.g. memristors based on solid-state phase change, e.g. between amorphous and crystalline phases, Ovshinsky effect
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N70/00—Solid-state devices having no potential barriers, and specially adapted for rectifying, amplifying, oscillating or switching
- H10N70/20—Multistable switching devices, e.g. memristors
- H10N70/231—Multistable switching devices, e.g. memristors based on solid-state phase change, e.g. between amorphous and crystalline phases, Ovshinsky effect
- H10N70/235—Multistable switching devices, e.g. memristors based on solid-state phase change, e.g. between amorphous and crystalline phases, Ovshinsky effect between different crystalline phases, e.g. cubic and hexagonal
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N70/00—Solid-state devices having no potential barriers, and specially adapted for rectifying, amplifying, oscillating or switching
- H10N70/20—Multistable switching devices, e.g. memristors
- H10N70/24—Multistable switching devices, e.g. memristors based on migration or redistribution of ionic species, e.g. anions, vacancies
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N70/00—Solid-state devices having no potential barriers, and specially adapted for rectifying, amplifying, oscillating or switching
- H10N70/801—Constructional details of multistable switching devices
- H10N70/821—Device geometry
- H10N70/826—Device geometry adapted for essentially vertical current flow, e.g. sandwich or pillar type devices
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N70/00—Solid-state devices having no potential barriers, and specially adapted for rectifying, amplifying, oscillating or switching
- H10N70/801—Constructional details of multistable switching devices
- H10N70/881—Switching materials
- H10N70/882—Compounds of sulfur, selenium or tellurium, e.g. chalcogenides
- H10N70/8828—Tellurides, e.g. GeSbTe
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/12—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
- H01L29/15—Structures with periodic or quasi periodic potential variation, e.g. multiple quantum wells, superlattices
- H01L29/151—Compositional structures
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Description
図1及び図2は、第1の実施形態に係わるクロスポイント型メモリ装置の概略構成を説明するためのもので、図1は斜視図、図2は等価回路図である。
図15及び図16は、第2の実施形態に係わるクロスポイント型メモリ装置を説明するためのもので、図15はクロスポイント型メモリ装置の概略構成を示す斜視図、図16は超格子メモリの素子構造を示す断面図である。なお、図1及び図3と同一部分には同一符号を付して、その詳しい説明は省略する。
図17は、第3の実施形態に係わるクロスポイント型メモリ装置に用いた超格子メモリの素子構造を示す断面図である。なお、図3と同一部分には同一符号を付して、その詳しい説明は省略する。
図18は、第4の実施形態に係わるクロスポイント型メモリ装置に用いた超格子メモリの素子構造を示す断面図である。なお、図3と同一部分には同一符号を付して、その詳しい説明は省略する。
なお、本発明は上述した各実施形態に限定されるものではない。
WL…ワード線
10…基板
11…下部電極(第1の電極)
12…埋め込み絶縁膜
13…金属層
14…セレクタ材料層
15…金属層
16…a−Si層
17…層間絶縁膜
18…上部電極(第2の電極)
20…超格子メモリセル
21…Sb2Te3 層(第1のカルコゲン化合物層)
22…GeTe層(第2のカルコゲン化合物層)
23…Sb2Te3:N層(第3のカルコゲン化合物層)
30…セレクタ
41…n型Si層
42…p型Si層
43…金属層
50…超格子構造部
Claims (6)
- 基板上に設けられた第1の電極と、
前記第1の電極に対向配置された第2の電極と、
前記第1及び第2の電極間に設けられた超格子構造部と、
を具備し、
前記超格子構造部は、第1のカルコゲン化合物層と、前記第1のカルコゲン化合物とは組成が異なりGeを含む第2のカルコゲン化合物層と、前記第1のカルコゲン化合物にN,B,C,O,Fの何れかを添加した第3のカルコゲン化合物層と、を積層した構造であり、
前記第1のカルコゲン化合物層と前記第2のカルコゲン化合物層は交互に積層され、前記第3のカルコゲン化合物層は、前記第1のカルコゲン化合物層と前記第2のカルコゲン化合物層との間にそれぞれ設けられている超格子メモリ。 - 前記第1のカルコゲン化合物層はSb2Te3層であり、前記第2のカルコゲン化合物層はGeTe層であり、前記第3のカルコゲン化合物層はSb2Te3にNを添加したSb2Te3:N層である請求項1に記載の超格子メモリ。
- 前記第1の電極上に非晶質Siのシード層が設けられ、前記シード層上に前記超格子構造部が設けられている請求項1又は2に記載の超格子メモリ。
- 互いに平行配置された複数のビット線と、
前記ビット線に交差するように、互いに平行配置された複数のワード線と、
前記ビット線と前記ワード線との各交差部にそれぞれ配置された請求項1に記載の超格子メモリセルと、
前記ビット線又は前記ワード線と前記超格子メモリセルとの間にそれぞれ設けられたセレクタ素子と、
を具備するクロスポイント型メモリ装置。 - 前記セレクタ素子は、オボニック素子又はダイオード素子である請求項4に記載のクロスポイント型メモリ装置。
- 前記第1のカルコゲン化合物層はSb2Te3層であり、前記第2のカルコゲン化合物層はGeTe層であり、前記第3のカルコゲン化合物層はSb2Te3にNを添加したSb2Te3:N層である請求項4に記載のクロスポイント型メモリ装置。
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US15/457,479 US10283707B2 (en) | 2016-10-20 | 2017-03-13 | Superlattice memory having GeTe layer and nitrogen-doped Sb2Te3 layer and memory device having the same |
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CN106992251B (zh) * | 2017-05-12 | 2019-08-30 | 华中科技大学 | 一种基于VOx选通管的相变存储单元 |
US10672833B2 (en) | 2017-07-26 | 2020-06-02 | Micron Technology, Inc. | Semiconductor devices including a passive material between memory cells and conductive access lines, and related electronic devices |
CN112292758A (zh) * | 2018-07-10 | 2021-01-29 | 国立研究开发法人产业技术综合研究所 | 积层构造体及积层构造体的制造方法以及半导体装置 |
US11631717B2 (en) * | 2018-09-28 | 2023-04-18 | Intel Corporation | 3D memory array with memory cells having a 3D selector and a storage component |
JP2020150082A (ja) | 2019-03-12 | 2020-09-17 | キオクシア株式会社 | 記憶装置 |
KR20210081783A (ko) | 2019-12-24 | 2021-07-02 | 삼성전자주식회사 | 가변 저항 메모리 장치 |
JP2021150316A (ja) | 2020-03-16 | 2021-09-27 | キオクシア株式会社 | セレクタ及び不揮発性記憶装置 |
JP2021150522A (ja) | 2020-03-19 | 2021-09-27 | キオクシア株式会社 | 記憶装置 |
US11744167B2 (en) * | 2020-11-27 | 2023-08-29 | Samsung Electronics Co., Ltd. | Semiconductor apparatus including a phase change material layer having a first and a second chalcogen layer |
JP2022147390A (ja) * | 2021-03-23 | 2022-10-06 | キオクシア株式会社 | 記憶装置 |
US20230077912A1 (en) * | 2021-09-15 | 2023-03-16 | International Business Machines Corporation | Phase change memory cell with superlattice based thermal barrier |
US20240196766A1 (en) * | 2022-12-08 | 2024-06-13 | International Business Machines Corporation | Phase-change memory cell with mixed-material switchable region |
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JP2013175570A (ja) * | 2012-02-24 | 2013-09-05 | National Institute Of Advanced Industrial & Technology | 半導体記憶装置およびその製造方法 |
JP5957375B2 (ja) * | 2012-11-30 | 2016-07-27 | 株式会社日立製作所 | 相変化メモリ |
JP5934086B2 (ja) * | 2012-12-27 | 2016-06-15 | 株式会社東芝 | 記憶装置 |
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