JP6689777B2 - 荷電粒子検出器およびそれを用いた荷電粒子線装置 - Google Patents

荷電粒子検出器およびそれを用いた荷電粒子線装置 Download PDF

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Publication number
JP6689777B2
JP6689777B2 JP2017047453A JP2017047453A JP6689777B2 JP 6689777 B2 JP6689777 B2 JP 6689777B2 JP 2017047453 A JP2017047453 A JP 2017047453A JP 2017047453 A JP2017047453 A JP 2017047453A JP 6689777 B2 JP6689777 B2 JP 6689777B2
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Japan
Prior art keywords
charged particle
light
fluorescent film
scintillator
detector
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Active
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JP2017047453A
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English (en)
Japanese (ja)
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JP2018152232A (ja
JP2018152232A5 (enExample
Inventor
保宏 白崎
保宏 白崎
百代 圓山
百代 圓山
香織 白幡
香織 白幡
慎 榊原
慎 榊原
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Hitachi Ltd
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Hitachi Ltd
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Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP2017047453A priority Critical patent/JP6689777B2/ja
Priority to US15/918,464 priority patent/US10361063B2/en
Publication of JP2018152232A publication Critical patent/JP2018152232A/ja
Publication of JP2018152232A5 publication Critical patent/JP2018152232A5/ja
Application granted granted Critical
Publication of JP6689777B2 publication Critical patent/JP6689777B2/ja
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/244—Detectors; Associated components or circuits therefor
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/10—Lenses
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/20—Means for supporting or positioning the object or the material; Means for adjusting diaphragms or lenses associated with the support
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/244—Detection characterized by the detecting means
    • H01J2237/2443—Scintillation detectors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/244—Detection characterized by the detecting means
    • H01J2237/2446—Position sensitive detectors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/244—Detection characterized by the detecting means
    • H01J2237/2448—Secondary particle detectors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/26—Electron or ion microscopes
    • H01J2237/28—Scanning microscopes

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  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Measurement Of Radiation (AREA)
JP2017047453A 2017-03-13 2017-03-13 荷電粒子検出器およびそれを用いた荷電粒子線装置 Active JP6689777B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2017047453A JP6689777B2 (ja) 2017-03-13 2017-03-13 荷電粒子検出器およびそれを用いた荷電粒子線装置
US15/918,464 US10361063B2 (en) 2017-03-13 2018-03-12 Charged particle detector and charged particle beam device using the same

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2017047453A JP6689777B2 (ja) 2017-03-13 2017-03-13 荷電粒子検出器およびそれを用いた荷電粒子線装置

Publications (3)

Publication Number Publication Date
JP2018152232A JP2018152232A (ja) 2018-09-27
JP2018152232A5 JP2018152232A5 (enExample) 2019-05-30
JP6689777B2 true JP6689777B2 (ja) 2020-04-28

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ID=63445065

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2017047453A Active JP6689777B2 (ja) 2017-03-13 2017-03-13 荷電粒子検出器およびそれを用いた荷電粒子線装置

Country Status (2)

Country Link
US (1) US10361063B2 (enExample)
JP (1) JP6689777B2 (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10777379B1 (en) * 2019-03-19 2020-09-15 Hitachi High-Tech Corporation Holder and charged particle beam apparatus
JP7266745B2 (ja) 2020-03-02 2023-04-28 株式会社日立ハイテク 荷電粒子検出器、荷電粒子線装置、放射線検出器および放射線検出装置
WO2025191843A1 (ja) * 2024-03-15 2025-09-18 株式会社日立ハイテク 荷電粒子線装置

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000258539A (ja) * 1999-03-10 2000-09-22 Toshiba Corp 放射線検出装置及び方法
EP1987372A1 (en) * 2006-01-30 2008-11-05 The University of Sydney Fibre optic dosimeter
DE102014225541A1 (de) * 2014-12-11 2016-06-16 Siemens Healthcare Gmbh Detektionsschicht umfassend Perowskitkristalle

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Publication number Publication date
US10361063B2 (en) 2019-07-23
JP2018152232A (ja) 2018-09-27
US20180261425A1 (en) 2018-09-13

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