JP2018152232A5 - - Google Patents
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- Publication number
- JP2018152232A5 JP2018152232A5 JP2017047453A JP2017047453A JP2018152232A5 JP 2018152232 A5 JP2018152232 A5 JP 2018152232A5 JP 2017047453 A JP2017047453 A JP 2017047453A JP 2017047453 A JP2017047453 A JP 2017047453A JP 2018152232 A5 JP2018152232 A5 JP 2018152232A5
- Authority
- JP
- Japan
- Prior art keywords
- charged particle
- light
- fluorescent film
- regions
- scintillator
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000002245 particle Substances 0.000 claims 27
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 claims 3
- 230000003287 optical effect Effects 0.000 claims 3
- 239000011159 matrix material Substances 0.000 claims 2
- 238000005259 measurement Methods 0.000 claims 2
- 150000002894 organic compounds Chemical class 0.000 claims 2
- 239000002096 quantum dot Substances 0.000 claims 2
- 230000001678 irradiating effect Effects 0.000 claims 1
- 238000004020 luminiscence type Methods 0.000 claims 1
- 230000001902 propagating effect Effects 0.000 claims 1
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2017047453A JP6689777B2 (ja) | 2017-03-13 | 2017-03-13 | 荷電粒子検出器およびそれを用いた荷電粒子線装置 |
| US15/918,464 US10361063B2 (en) | 2017-03-13 | 2018-03-12 | Charged particle detector and charged particle beam device using the same |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2017047453A JP6689777B2 (ja) | 2017-03-13 | 2017-03-13 | 荷電粒子検出器およびそれを用いた荷電粒子線装置 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2018152232A JP2018152232A (ja) | 2018-09-27 |
| JP2018152232A5 true JP2018152232A5 (enExample) | 2019-05-30 |
| JP6689777B2 JP6689777B2 (ja) | 2020-04-28 |
Family
ID=63445065
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2017047453A Active JP6689777B2 (ja) | 2017-03-13 | 2017-03-13 | 荷電粒子検出器およびそれを用いた荷電粒子線装置 |
Country Status (2)
| Country | Link |
|---|---|
| US (1) | US10361063B2 (enExample) |
| JP (1) | JP6689777B2 (enExample) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US10777379B1 (en) * | 2019-03-19 | 2020-09-15 | Hitachi High-Tech Corporation | Holder and charged particle beam apparatus |
| US12385861B2 (en) | 2020-03-02 | 2025-08-12 | Hitachi High-Tech Corporation | Charged particle detector, charged particle ray device, radiation detector, and radiation detection device |
| WO2025191843A1 (ja) * | 2024-03-15 | 2025-09-18 | 株式会社日立ハイテク | 荷電粒子線装置 |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000258539A (ja) * | 1999-03-10 | 2000-09-22 | Toshiba Corp | 放射線検出装置及び方法 |
| AU2007209775B2 (en) * | 2006-01-30 | 2013-03-14 | The University Of Sydney | Fibre optic dosimeter |
| DE102014225541A1 (de) * | 2014-12-11 | 2016-06-16 | Siemens Healthcare Gmbh | Detektionsschicht umfassend Perowskitkristalle |
-
2017
- 2017-03-13 JP JP2017047453A patent/JP6689777B2/ja active Active
-
2018
- 2018-03-12 US US15/918,464 patent/US10361063B2/en active Active
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