JP6651167B2 - 半導体発光素子及びその製造方法 - Google Patents
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- 239000004065 semiconductor Substances 0.000 title claims description 144
- 238000004519 manufacturing process Methods 0.000 title claims description 8
- 239000010410 layer Substances 0.000 claims description 558
- 239000000203 mixture Substances 0.000 claims description 63
- 230000004888 barrier function Effects 0.000 claims description 33
- 239000000758 substrate Substances 0.000 claims description 25
- 229910002704 AlGaN Inorganic materials 0.000 claims description 20
- 239000002346 layers by function Substances 0.000 claims description 11
- 238000005530 etching Methods 0.000 claims description 4
- 238000005192 partition Methods 0.000 claims description 3
- 238000009877 rendering Methods 0.000 description 13
- 238000000034 method Methods 0.000 description 10
- 230000004048 modification Effects 0.000 description 10
- 238000012986 modification Methods 0.000 description 10
- 229910052594 sapphire Inorganic materials 0.000 description 6
- 239000010980 sapphire Substances 0.000 description 6
- 239000013078 crystal Substances 0.000 description 5
- 238000001228 spectrum Methods 0.000 description 5
- 238000010586 diagram Methods 0.000 description 4
- 238000000295 emission spectrum Methods 0.000 description 4
- 239000000969 carrier Substances 0.000 description 3
- 239000002019 doping agent Substances 0.000 description 3
- 230000000052 comparative effect Effects 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 150000004767 nitrides Chemical class 0.000 description 2
- 230000006798 recombination Effects 0.000 description 2
- 238000005215 recombination Methods 0.000 description 2
- 230000003595 spectral effect Effects 0.000 description 2
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 239000003086 colorant Substances 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 230000017525 heat dissipation Effects 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- ORFSSYGWXNGVFB-UHFFFAOYSA-N sodium 4-amino-6-[[4-[4-[(8-amino-1-hydroxy-5,7-disulfonaphthalen-2-yl)diazenyl]-3-methoxyphenyl]-2-methoxyphenyl]diazenyl]-5-hydroxynaphthalene-1,3-disulfonic acid Chemical group COC1=C(C=CC(=C1)C2=CC(=C(C=C2)N=NC3=C(C4=C(C=C3)C(=CC(=C4N)S(=O)(=O)O)S(=O)(=O)O)O)OC)N=NC5=C(C6=C(C=C5)C(=CC(=C6N)S(=O)(=O)O)S(=O)(=O)O)O.[Na+] ORFSSYGWXNGVFB-UHFFFAOYSA-N 0.000 description 1
- 238000000638 solvent extraction Methods 0.000 description 1
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- H01L33/26—Materials of the light emitting region
- H01L33/30—Materials of the light emitting region containing only elements of group III and group V of the periodic system
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Description
図3(a)は、第1の副ベース層BL1を形成した状態のウェハの断面図である。まず、成長基板11上にn型半導体層12を形成する。本実施例においては、成長基板11としてサファイア基板を用い、サファイア基板上にバッファ層(図示せず)を形成した。次に、バッファ層上にn型半導体層12としてn−GaN層を形成した。
図3(b)は、第1の副ベース層BL1にトレンチTRを形成した状態のウェハの断面図である。次に、図3(b)に示すように、第1の副ベース層BL1に形成された溝GR0を除去するトレンチTRを形成する。本実施例においては、第1の副ベース層BL1にH2ガスを用いたエッチングを行ってトレンチTRを形成した。
図3(c)は、第2の副ベース層BL2を形成した状態のウェハの断面図である。図3(c)に示すように、第1の副ベース層BL1を埋め込むように第2の副ベース層BL2を形成する。具体的には、上記したように、第2の副ベース層BL2として、第1の副ベース層BL1よりも大きなAl組成(組成y)を有するAlGaN層を形成した。第2の副ベース層BL2は、平坦部FLと、トレンチTRの形状を引き継いだ溝GRとを有するように形成する。すなわち、第2の副ベース層BL2は、その上面が完全に平坦化されないように形成する。
続いて、図3(d)に示すように、第2の副ベース層BL2を埋め込むように少なくとも1つの量子井戸層WA及び障壁層BAからなる量子井戸構造層QWを形成する。本実施例においては、量子井戸層WA及び障壁層BAとして、それぞれInGaN層及びGaN層を1層ずつ形成した。次に、障壁層BA上に電子ブロック層14を形成する。本実施例においては、電子ブロック層14としてAlGaN層を形成した。続いて、電子ブロック層14上にp型半導体層15を形成する。本実施例においては、p型半導体層15としてp−GaN層を形成した。
12 n型半導体層(第1の半導体層)
13、33、33A、33A1、33A2 発光機能層(発光層)
14 電子ブロック層
15 p型半導体層(第2の半導体層)
BL、BLA、BLB ベース層
BL1、BLA1、BLB1 第1の副ベース層
BL2、BLA2、BLB2 第2の副ベース層
BL3、BLA3、BLB3 第3の副ベース層
BS、BSA、BSB ベースセグメント
GR、GR0、GRA、GRB 溝
Claims (9)
- 第1の導電型を有する第1の半導体層と、前記第1の半導体層上に形成された発光層を含む発光機能層と、前記発光機能層上に形成され、前記第1の半導体層とは反対の導電型を有する第2の半導体層とを有する半導体発光素子であって、
前記発光層は、前記第1の半導体層から応力歪を受ける組成を有してランダムな網目状に形成された複数のベースセグメントを有するベース層と、前記ベース層上に形成された少なくとも1つの量子井戸層及び少なくとも1つの障壁層からなる量子井戸構造層と、を有し、
前記ベース層は、AlxGa1-xN(0<x≦1)の組成を有する第1の副ベース層と、前記第1の副ベース層を前記複数のベースセグメント毎に区画するトレンチと、前記第1の副ベース層を埋め込んで形成され、AlyGa1-yN(0<x≦y≦1)の組成を有する第2の副ベース層とを有し、
前記第2の副ベース層の前記トレンチ上の領域における層厚は、他の領域における層厚よりも大きいことを特徴とする半導体発光素子。 - 前記第1の半導体層はGaNの組成を有し、
前記少なくとも1つの量子井戸層の各々はInGaNの組成を有し、
前記第1の副ベース層はAlGaNの組成を有し、前記第2の副ベース層はAlGaNの組成を有することを特徴とする請求項1に記載の半導体発光素子。 - 前記トレンチは、前記第1の副ベース層の表面から前記第1の半導体層内に至る深さで形成されていることを特徴とする請求項1又は2に記載の半導体発光素子。
- 前記ベース層は、前記第1の半導体層と前記第1の副ベース層との間に形成された第3の副ベース層を有し、
前記トレンチは、前記第1の副ベース層の表面から前記第3の副ベース層内に至る深さで形成されていることを特徴とする請求項1又は2に記載の半導体発光素子。 - 前記第2の副ベース層は、AlNの組成を有することを特徴とする請求項1乃至4のいずれか1つに記載の半導体発光素子。
- 前記発光機能層は、複数の前記発光層が積層された構造を有していることを特徴とする請求項4又は5に記載の半導体発光素子。
- 前記複数の前記発光層の各々における前記ベース層の各々は、互いに組成が異なることを特徴とする請求項6に記載の半導体発光素子。
- 基板上に第1の導電型を有する第1の半導体層を形成する工程と、
前記第1の半導体層上に、前記第1の半導体層から応力歪を受けるAlxGa1-xN(0<x≦1)の組成を有してランダムな網目状に形成された溝を有する第1の副ベース層を形成する工程と、
前記溝を除去するトレンチを形成する工程と、
前記第1の副ベース層を埋め込むように、かつ前記トレンチ上の領域の層厚が他の領域の層厚よりも大きくなるように、AlyGa1-yN(0<x≦y≦1)の組成を有する第2の副ベース層を形成する工程と、
前記第2の副ベース層上に、少なくとも1つの量子井戸構造層及び少なくとも1つの障壁層からなる量子井戸構造層を形成する工程と、
前記量子井戸構造層上に、前記第1の導電型とは反対の第2の導電型を有する第2の半導体層を形成する工程と、を含むことを特徴とする半導体発光素子の製造方法。 - 前記第1の半導体層はGaNの組成を有し、
前記少なくとも1つの量子井戸層の各々はInGaNの組成を有し、
前記第1の副ベース層はAlGaNの組成を有し、
前記トレンチを形成する工程は、前記第1の副ベース層にH2ガスを用いたエッチングを行う工程を含むことを特徴とする請求項8に記載の半導体発光素子の製造方法。
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JP2015059260A JP6651167B2 (ja) | 2015-03-23 | 2015-03-23 | 半導体発光素子及びその製造方法 |
PCT/JP2016/058676 WO2016152772A1 (ja) | 2015-03-23 | 2016-03-18 | 半導体発光素子及びその製造方法 |
EP16768675.7A EP3276676B1 (en) | 2015-03-23 | 2016-03-18 | Semiconductor light-emitting element and method of manufacturing the same |
US15/561,028 US10193021B2 (en) | 2015-03-23 | 2016-03-18 | Semiconductor light-emitting element, and manufacturing method for same |
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JP6433246B2 (ja) | 2014-11-07 | 2018-12-05 | スタンレー電気株式会社 | 半導体発光素子 |
EP3252873B1 (en) | 2016-06-02 | 2019-07-24 | TE Connectivity Germany GmbH | Lubricated contact element and method for production thereof |
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WO2023122589A2 (en) | 2021-12-22 | 2023-06-29 | Nautilus Subsidiary, Inc. | Systems and methods for carrying out highly multiplexed bioanalyses |
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KR20130106690A (ko) | 2012-03-20 | 2013-09-30 | 삼성전자주식회사 | 백색 발광 다이오드 |
US9401453B2 (en) | 2012-05-24 | 2016-07-26 | The University Of Hong Kong | White nanoLED without requiring color conversion |
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US9318600B2 (en) * | 2013-04-16 | 2016-04-19 | Panasonic Intellectual Property Management Co., Ltd. | Silicon carbide semiconductor device and method for manufacturing same |
US9577148B2 (en) * | 2013-05-09 | 2017-02-21 | The University Of Tokyo | Light emitting diode element and method of manufacturing the same |
CN103746052B (zh) | 2013-12-27 | 2016-08-17 | 太原理工大学 | 一种InGaN基多量子阱结构及其制备方法 |
KR102212561B1 (ko) * | 2014-08-11 | 2021-02-08 | 삼성전자주식회사 | 반도체 발광 소자 및 반도체 발광 소자 패키지 |
JP6457784B2 (ja) | 2014-11-07 | 2019-01-23 | スタンレー電気株式会社 | 半導体発光素子 |
CN105355741B (zh) | 2015-11-02 | 2017-09-29 | 厦门市三安光电科技有限公司 | 一种led外延结构及制作方法 |
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