JP6645562B1 - 分解性樹脂成形体および分解性樹脂成形体の製造方法 - Google Patents
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Abstract
Description
ポリビニルアルコールまたはポリビニルピロリドンを含む水溶性高分子層と、
前記水溶性高分子層の表面に備えられるバリア層と、を備え、
前記バリア層は、ケイ素酸化膜またはケイ素酸窒化膜であり、
前記バリア層は、前記水溶性高分子層を挟んで少なくとも1対備えられた、ことを特徴としている。
前記水溶性高分子層は、平均重合度が1000以下で、ケン化度が100モル%以下のポリビニルアルコールを含む、ことを特徴としている。
ポリビニルアルコールまたはポリビニルピロリドンを含む水溶性高分子層と、前記水溶性高分子層の表面に備えられるバリア層と、を備えた分解性樹脂成形体の製造方法であって、
前記水溶性高分子層を真空チャンバに備え、
前記真空チャンバに備えられた前記水溶性高分子層に、20体積%以上のオゾンガスと、前記バリア層であるケイ素酸化膜またはケイ素酸窒化膜を形成する物質の前駆体を含む原料ガスと、不飽和炭化水素ガスと、を供給し、前記水溶性高分子層に前記バリア層を形成する、ことを特徴としている。
前記前駆体は、シラン、オルトケイ酸テトラエチル、トリメトキシシラン、トリエトキシシランまたはトリス・ジメチルアミノシランから選択される化合物である、ことを特徴としている。
前記バリア層の厚みは、1nm以上、10μm以下である、ことを特徴としている。
前記真空チャンバに前記水溶性高分子層が予め巻回される第1ロールと、前記第1ロールに巻回された前記水溶性高分子層を巻き取る第2ロールと、前記水溶性高分子層に対して前記オゾンガス、前記原料ガスおよび前記不飽和炭化水素ガスを供給するシャワーヘッドと、を備え、
前記第1ロールから第2ロールに前記水溶性高分子層を巻き取り、
前記シャワーヘッドから、前記第1ロールと前記第2ロールの間を移動する前記水溶性高分子層に、前記オゾンガス、前記原料ガスおよび前記不飽和炭化水素ガスを供給して、前記水溶性高分子層に前記バリア層を形成する、ことを特徴としている。
前記シャワーヘッドを、当該シャワーヘッドのガス供給面が向かい合うように1対備え、
前記水溶性高分子層を、向かい合って備えられたシャワーヘッド間を通るように移動させ、
前記一対のシャワーヘッドから、前記第1ロールと前記第2ロールの間を移動する前記水溶性高分子層に、前記オゾンガス、前記原料ガスおよび前記不飽和炭化水素ガスを供給して、前記水溶性高分子層の両面に前記バリア層を形成する、ことを特徴としている。
1’…バリア層形成前の分解性フィルム
2…水溶性高分子層
3…バリア層
4、8、13…成膜装置
5…真空チャンバ
6…支持台
7…シャワーヘッド
9、10…ロール
11…真空ポンプ
12…送りロール
Claims (5)
- ポリビニルアルコールまたはポリビニルピロリドンを含む水溶性高分子層の表面にバリア層を具備する分解性樹脂成形体の製造方法であって、
前記水溶性高分子層を真空チャンバに配置し、
前記真空チャンバに配置した前記水溶性高分子層に、20体積%以上のオゾンガスと、前記バリア層であるケイ素酸化膜またはケイ素酸窒化膜を形成する物質の前駆体を含む原料ガスと、不飽和炭化水素ガスと、を供給し、前記水溶性高分子層に前記バリア層を形成する、ことを特徴とする分解性樹脂成形体の製造方法。 - 前記前駆体は、シラン、オルトケイ酸テトラエチル、トリメトキシシラン、トリエトキシシランまたはトリス・ジメチルアミノシランから選択される化合物である、ことを特徴とする請求項1に記載の分解性樹脂成形体の製造方法。
- 前記バリア層の厚みは、1nm以上、10μm以下である、ことを特徴とする請求項1または請求項2に記載の分解性樹脂成形体の製造方法。
- 前記真空チャンバ内に、前記水溶性高分子層が予め巻回される第1ロールと、前記第1ロールに巻回された前記水溶性高分子層を巻き取る第2ロールと、前記水溶性高分子層に対して前記オゾンガス、前記原料ガスおよび前記不飽和炭化水素ガスを供給するシャワーヘッドと、を配置し、
前記第1ロールから前記第2ロールに前記水溶性高分子層を巻き取り、
前記シャワーヘッドから、前記第1ロールと前記第2ロールの間を移動する前記水溶性高分子層に、前記オゾンガス、前記原料ガスおよび前記不飽和炭化水素ガスを供給して、前記水溶性高分子層に前記バリア層を形成する、ことを特徴とする請求項1から請求項3のいずれか1項に記載の分解性樹脂成形体の製造方法。 - 前記真空チャンバ内に、前記シャワーヘッドを、当該シャワーヘッドのガス供給面が向かい合うように1対配置し、
前記水溶性高分子層を、向かい合って備えられるシャワーヘッド間を通るように移動させ、
前記一対のシャワーヘッドから、前記第1ロールと前記第2ロールの間を移動する前記水溶性高分子層に、前記オゾンガス、前記原料ガスおよび前記不飽和炭化水素ガスを供給して、前記水溶性高分子層の両面に前記バリア層を形成する、ことを特徴とする請求項4に記載の分解性樹脂成形体の製造方法。
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US17/298,178 US11560622B2 (en) | 2018-11-30 | 2019-08-09 | Degradable resin molding and production method for degradable resin molding |
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US5230929A (en) * | 1992-07-20 | 1993-07-27 | Dow Corning Corporation | Plasma-activated chemical vapor deposition of fluoridated cyclic siloxanes |
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