JP6624482B2 - 超小型加速器および超小型質量分析装置 - Google Patents
超小型加速器および超小型質量分析装置 Download PDFInfo
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- JP6624482B2 JP6624482B2 JP2014154005A JP2014154005A JP6624482B2 JP 6624482 B2 JP6624482 B2 JP 6624482B2 JP 2014154005 A JP2014154005 A JP 2014154005A JP 2014154005 A JP2014154005 A JP 2014154005A JP 6624482 B2 JP6624482 B2 JP 6624482B2
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/02—Details
- H01J49/06—Electron- or ion-optical arrangements
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/62—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating the ionisation of gases, e.g. aerosols; by investigating electric discharges, e.g. emission of cathode
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/0013—Miniaturised spectrometers, e.g. having smaller than usual scale, integrated conventional components
- H01J49/0018—Microminiaturised spectrometers, e.g. chip-integrated devices, Micro-Electro-Mechanical Systems [MEMS]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/02—Details
- H01J49/20—Magnetic deflection
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/02—Details
- H01J49/22—Electrostatic deflection
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/26—Mass spectrometers or separator tubes
- H01J49/28—Static spectrometers
- H01J49/32—Static spectrometers using double focusing
- H01J49/326—Static spectrometers using double focusing with magnetic and electrostatic sectors of 90 degrees
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/26—Mass spectrometers or separator tubes
- H01J49/34—Dynamic spectrometers
- H01J49/36—Radio frequency spectrometers, e.g. Bennett-type spectrometers, Redhead-type spectrometers
- H01J49/38—Omegatrons ; using ion cyclotron resonance
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/26—Mass spectrometers or separator tubes
- H01J49/34—Dynamic spectrometers
- H01J49/42—Stability-of-path spectrometers, e.g. monopole, quadrupole, multipole, farvitrons
- H01J49/4205—Device types
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/26—Mass spectrometers or separator tubes
- H01J49/34—Dynamic spectrometers
- H01J49/42—Stability-of-path spectrometers, e.g. monopole, quadrupole, multipole, farvitrons
- H01J49/4205—Device types
- H01J49/421—Mass filters, i.e. deviating unwanted ions without trapping
- H01J49/4215—Quadrupole mass filters
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H13/00—Magnetic resonance accelerators; Cyclotrons
- H05H13/04—Synchrotrons
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H15/00—Methods or devices for acceleration of charged particles not otherwise provided for, e.g. wakefield accelerators
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H5/00—Direct voltage accelerators; Accelerators using single pulses
- H05H5/02—Details
- H05H5/03—Accelerating tubes
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H7/00—Details of devices of the types covered by groups H05H9/00, H05H11/00, H05H13/00
- H05H7/04—Magnet systems, e.g. undulators, wigglers; Energisation thereof
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H7/00—Details of devices of the types covered by groups H05H9/00, H05H11/00, H05H13/00
- H05H7/22—Details of linear accelerators, e.g. drift tubes
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H9/00—Linear accelerators
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H9/00—Linear accelerators
- H05H9/02—Travelling-wave linear accelerators
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Health & Medical Sciences (AREA)
- General Health & Medical Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- Optics & Photonics (AREA)
- Life Sciences & Earth Sciences (AREA)
- Biochemistry (AREA)
- High Energy & Nuclear Physics (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
- Electron Tubes For Measurement (AREA)
- Particle Accelerators (AREA)
Priority Applications (7)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2014154005A JP6624482B2 (ja) | 2014-07-29 | 2014-07-29 | 超小型加速器および超小型質量分析装置 |
| US15/329,153 US10249483B2 (en) | 2014-07-29 | 2015-07-29 | Ultra-compact mass analysis device and ultra-compact particle acceleration device |
| PCT/JP2015/071538 WO2016017712A1 (ja) | 2014-07-29 | 2015-07-29 | 超小型質量分析装置および超小型粒子加速装置 |
| EP15827523.0A EP3176809B1 (en) | 2014-07-29 | 2015-07-29 | Ultra-compact mass analysis device |
| EP25164289.8A EP4554336A2 (en) | 2014-07-29 | 2015-07-29 | Ultra-compact mass analysis device and ultra-compact particle acceleration device |
| CN201580052565.7A CN107078020B (zh) | 2014-07-29 | 2015-07-29 | 超小型质谱分析装置和超小型粒子加速装置 |
| US16/274,773 US10804087B2 (en) | 2014-07-29 | 2019-02-13 | Ultra-compact mass analysis device and ultra-compact particle acceleration device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2014154005A JP6624482B2 (ja) | 2014-07-29 | 2014-07-29 | 超小型加速器および超小型質量分析装置 |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2019182184A Division JP7101652B2 (ja) | 2019-10-02 | 2019-10-02 | 超小型加速器および超小型質量分析装置 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2016031849A JP2016031849A (ja) | 2016-03-07 |
| JP2016031849A5 JP2016031849A5 (enExample) | 2018-07-05 |
| JP6624482B2 true JP6624482B2 (ja) | 2019-12-25 |
Family
ID=55217609
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2014154005A Active JP6624482B2 (ja) | 2014-07-29 | 2014-07-29 | 超小型加速器および超小型質量分析装置 |
Country Status (5)
| Country | Link |
|---|---|
| US (2) | US10249483B2 (enExample) |
| EP (2) | EP4554336A2 (enExample) |
| JP (1) | JP6624482B2 (enExample) |
| CN (1) | CN107078020B (enExample) |
| WO (1) | WO2016017712A1 (enExample) |
Families Citing this family (36)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6624482B2 (ja) * | 2014-07-29 | 2019-12-25 | 俊 保坂 | 超小型加速器および超小型質量分析装置 |
| WO2016079615A1 (en) * | 2014-11-19 | 2016-05-26 | Dh Technologies Development Pte. Ltd. | Ion sorter |
| JP6708422B2 (ja) * | 2016-02-02 | 2020-06-10 | 俊 保坂 | 超小型加速器および超小型質量分析装置およびイオン注入装置 |
| WO2017192834A1 (en) * | 2016-05-04 | 2017-11-09 | Cornell University | Wafer-based charged particle accelerator, wafer components, methods, and applications |
| US10622114B2 (en) * | 2017-03-27 | 2020-04-14 | Varian Medical Systems, Inc. | Systems and methods for energy modulated radiation therapy |
| KR102271660B1 (ko) | 2017-04-11 | 2021-07-01 | 주식회사 아도반테스토 | 노광 장치 |
| US10824077B2 (en) * | 2017-04-11 | 2020-11-03 | Advantest Corporation | Exposure device |
| CN107179384B (zh) * | 2017-05-15 | 2023-04-11 | 中国科学院近代物理研究所 | 一种多样靶材解吸率测试装置 |
| US12237162B2 (en) | 2017-07-18 | 2025-02-25 | Duke University | Small-volume UHV ion-trap package and method of forming |
| US10755913B2 (en) * | 2017-07-18 | 2020-08-25 | Duke University | Package comprising an ion-trap and method of fabrication |
| EP3751275A4 (en) * | 2018-02-09 | 2021-11-10 | Hamamatsu Photonics K.K. | SAMPLE CARRIERS, IONIZATION METHODS AND MASS SPECTROMETRY METHODS |
| US11087956B2 (en) * | 2018-06-29 | 2021-08-10 | Taiwan Semiconductor Manufacturing Co., Ltd. | Detection systems in semiconductor metrology tools |
| US10889894B2 (en) * | 2018-08-06 | 2021-01-12 | Applied Materials, Inc. | Faceplate with embedded heater |
| JP7362048B2 (ja) * | 2019-07-31 | 2023-10-17 | 大学共同利用機関法人 高エネルギー加速器研究機構 | 真空排気方法及び装置 |
| JP7352412B2 (ja) * | 2019-08-28 | 2023-09-28 | 住友重機械工業株式会社 | サイクロトロン |
| JP7322650B2 (ja) * | 2019-10-11 | 2023-08-08 | 株式会社島津製作所 | マルチターン型飛行時間型質量分析装置及びその製造方法 |
| US12266500B2 (en) * | 2019-12-13 | 2025-04-01 | Hitachi High-Tech Corporation | Charged particle gun and charged particle beam device |
| US12033843B2 (en) | 2020-03-26 | 2024-07-09 | Agilent Technologies, Inc. | Mass spectrometry ION source |
| JP6734610B1 (ja) * | 2020-03-31 | 2020-08-05 | 株式会社ビードットメディカル | 超電導電磁石装置及び荷電粒子ビーム照射装置 |
| CN111683451A (zh) * | 2020-06-22 | 2020-09-18 | 北京卫星环境工程研究所 | 用于中高层大气原位探测载荷的微型带电粒子加速装置 |
| US11189460B1 (en) * | 2020-11-06 | 2021-11-30 | Applied Materials, Inc. | System, apparatus and method for variable length electrode in linear accelerator |
| CN112704818B (zh) * | 2020-12-15 | 2022-02-11 | 中国科学院近代物理研究所 | 一种普惠型的轻离子肿瘤治疗装置 |
| CN112557130B (zh) * | 2021-02-28 | 2021-04-30 | 中国工程物理研究院核物理与化学研究所 | 一种气体探测器充入气体的方法 |
| JP7623186B2 (ja) * | 2021-03-30 | 2025-01-28 | 住友重機械工業株式会社 | 超伝導電磁石、粒子加速器、及び粒子線治療装置 |
| EP4120289A1 (en) * | 2021-07-12 | 2023-01-18 | Infineon Technologies Austria AG | Device for controlling trapped ions having a functional spacer and method of manufacturing the same |
| CN113751219B (zh) * | 2021-08-31 | 2022-08-23 | 江苏大学 | 一种磁悬浮高速冲击雾化喷头 |
| KR102611218B1 (ko) * | 2021-11-22 | 2023-12-08 | 한국전자기술연구원 | 광이온화 가스 센서 |
| WO2023177745A1 (en) * | 2022-03-15 | 2023-09-21 | ColdQuanta, Inc. | Compact vacuum packaging technology usable with ion traps |
| CN115172136B (zh) * | 2022-07-12 | 2024-05-14 | 广东省麦思科学仪器创新研究院 | 一种调节离子团初始状态的方法 |
| US12267942B2 (en) * | 2022-09-23 | 2025-04-01 | Shine Technologies, Llc | Cooling plate assembly for plasma windows positioned in a beam accelerator system |
| CN115623657B (zh) * | 2022-12-13 | 2023-03-28 | 安徽戈瑞加速器技术有限公司 | 电子加速器用快速冷却装置 |
| US20240203723A1 (en) * | 2022-12-19 | 2024-06-20 | Infineon Technologies Austria Ag | Magnetic Field Coil Integrated into Ion Trap |
| EP4401090A1 (en) * | 2023-01-12 | 2024-07-17 | Infineon Technologies Austria AG | Device for controlling trapped ions |
| EP4404215A1 (en) * | 2023-01-23 | 2024-07-24 | Infineon Technologies Austria AG | Device for controlling trapped ions with an electrode layer of low surface roughness |
| JP2025075195A (ja) * | 2023-10-31 | 2025-05-15 | 株式会社日立ハイテク | 円形加速器及び粒子線治療システム |
| CN120761474B (zh) * | 2025-09-09 | 2025-11-28 | 中国科学院地质与地球物理研究所 | 火星样品钻采过程逃逸挥发物质非接触式检测设备及方法 |
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| JPH04116351U (ja) * | 1991-03-27 | 1992-10-16 | 横河電機株式会社 | 誘導プラズマ質量分析装置 |
| US5386115A (en) | 1993-09-22 | 1995-01-31 | Westinghouse Electric Corporation | Solid state micro-machined mass spectrograph universal gas detection sensor |
| US5536939A (en) * | 1993-09-22 | 1996-07-16 | Northrop Grumman Corporation | Miniaturized mass filter |
| JP2803563B2 (ja) * | 1994-03-30 | 1998-09-24 | 日本電気株式会社 | 微小真空紫外分光装置 |
| GB9506972D0 (en) * | 1995-04-04 | 1995-05-24 | Univ Liverpool | Improvements in and relating to quadrupole mass |
| AU2001262982A1 (en) * | 2000-05-08 | 2001-11-20 | Mass Sensors, Inc. | Microscale mass spectrometric chemical-gas sensor |
| JP2002015699A (ja) * | 2000-06-28 | 2002-01-18 | Shimadzu Corp | イオンガイドおよびこれを用いた質量分析装置 |
| JP2003036996A (ja) | 2001-07-23 | 2003-02-07 | Kikuchi Jun | 平行平板容量結合型微小プラズマ発生装置 |
| US7057170B2 (en) * | 2004-03-12 | 2006-06-06 | Northrop Grumman Corporation | Compact ion gauge using micromachining and MISOC devices |
| CN1326191C (zh) | 2004-06-04 | 2007-07-11 | 复旦大学 | 用印刷电路板构建的离子阱质量分析仪 |
| JP4635722B2 (ja) * | 2005-05-30 | 2011-02-23 | オムロン株式会社 | 四重極電極ユニット、電極構造物及びその製造方法 |
| US7402799B2 (en) * | 2005-10-28 | 2008-07-22 | Northrop Grumman Corporation | MEMS mass spectrometer |
| GB2446184B (en) * | 2007-01-31 | 2011-07-27 | Microsaic Systems Ltd | High performance micro-fabricated quadrupole lens |
| EP1959476A1 (de) | 2007-02-19 | 2008-08-20 | Technische Universität Hamburg-Harburg | Massenspektrometer |
| GB2454241B (en) * | 2007-11-02 | 2009-12-23 | Microsaic Systems Ltd | A mounting arrangement |
| CN102014929A (zh) * | 2008-03-13 | 2011-04-13 | 珀金埃尔默健康科学有限公司 | 用于多种检测体系的酶底物 |
| GB0818342D0 (en) | 2008-10-07 | 2008-11-12 | Science And Technology Facilities Council | Mass discriminator |
| US20120077260A1 (en) * | 2009-03-30 | 2012-03-29 | Fraunhofer Usa, Inc. | Reservoir-buffered mixers and remote valve switching for microfluidic devices |
| JP5406621B2 (ja) * | 2009-08-06 | 2014-02-05 | 勝 堀 | レーザー脱離イオン化質量分析用試料基板、これを用いたレーザー脱離イオン化質量分析方法及び装置 |
| GB2479191B (en) * | 2010-04-01 | 2014-03-19 | Microsaic Systems Plc | Microengineered multipole ion guide |
| JP6051359B2 (ja) | 2010-12-22 | 2016-12-27 | 俊 保坂 | コア付きインダクタ素子およびその製造方法 |
| CN102760635B (zh) * | 2012-03-31 | 2015-01-07 | 清华大学 | H型阵列离子阱及在其中进行离子-离子反应的方法 |
| JP6624482B2 (ja) * | 2014-07-29 | 2019-12-25 | 俊 保坂 | 超小型加速器および超小型質量分析装置 |
-
2014
- 2014-07-29 JP JP2014154005A patent/JP6624482B2/ja active Active
-
2015
- 2015-07-29 EP EP25164289.8A patent/EP4554336A2/en active Pending
- 2015-07-29 EP EP15827523.0A patent/EP3176809B1/en active Active
- 2015-07-29 WO PCT/JP2015/071538 patent/WO2016017712A1/ja not_active Ceased
- 2015-07-29 CN CN201580052565.7A patent/CN107078020B/zh active Active
- 2015-07-29 US US15/329,153 patent/US10249483B2/en active Active
-
2019
- 2019-02-13 US US16/274,773 patent/US10804087B2/en active Active
Also Published As
| Publication number | Publication date |
|---|---|
| WO2016017712A1 (ja) | 2016-02-04 |
| EP3176809A1 (en) | 2017-06-07 |
| CN107078020B (zh) | 2020-03-10 |
| JP2016031849A (ja) | 2016-03-07 |
| EP4554336A2 (en) | 2025-05-14 |
| EP3176809B1 (en) | 2025-03-19 |
| US20190198306A1 (en) | 2019-06-27 |
| US10804087B2 (en) | 2020-10-13 |
| US20170330739A1 (en) | 2017-11-16 |
| CN107078020A (zh) | 2017-08-18 |
| EP3176809A4 (en) | 2018-07-04 |
| US10249483B2 (en) | 2019-04-02 |
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