JP2016031849A5 - - Google Patents

Download PDF

Info

Publication number
JP2016031849A5
JP2016031849A5 JP2014154005A JP2014154005A JP2016031849A5 JP 2016031849 A5 JP2016031849 A5 JP 2016031849A5 JP 2014154005 A JP2014154005 A JP 2014154005A JP 2014154005 A JP2014154005 A JP 2014154005A JP 2016031849 A5 JP2016031849 A5 JP 2016031849A5
Authority
JP
Japan
Prior art keywords
main substrate
substrate
chamber
charged particles
space
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2014154005A
Other languages
English (en)
Japanese (ja)
Other versions
JP2016031849A (ja
JP6624482B2 (ja
Filing date
Publication date
Application filed filed Critical
Priority claimed from JP2014154005A external-priority patent/JP6624482B2/ja
Priority to JP2014154005A priority Critical patent/JP6624482B2/ja
Priority to EP25164289.8A priority patent/EP4554336A2/en
Priority to PCT/JP2015/071538 priority patent/WO2016017712A1/ja
Priority to EP15827523.0A priority patent/EP3176809B1/en
Priority to US15/329,153 priority patent/US10249483B2/en
Priority to CN201580052565.7A priority patent/CN107078020B/zh
Publication of JP2016031849A publication Critical patent/JP2016031849A/ja
Publication of JP2016031849A5 publication Critical patent/JP2016031849A5/ja
Priority to US16/274,773 priority patent/US10804087B2/en
Publication of JP6624482B2 publication Critical patent/JP6624482B2/ja
Application granted granted Critical
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JP2014154005A 2014-07-29 2014-07-29 超小型加速器および超小型質量分析装置 Active JP6624482B2 (ja)

Priority Applications (7)

Application Number Priority Date Filing Date Title
JP2014154005A JP6624482B2 (ja) 2014-07-29 2014-07-29 超小型加速器および超小型質量分析装置
US15/329,153 US10249483B2 (en) 2014-07-29 2015-07-29 Ultra-compact mass analysis device and ultra-compact particle acceleration device
PCT/JP2015/071538 WO2016017712A1 (ja) 2014-07-29 2015-07-29 超小型質量分析装置および超小型粒子加速装置
EP15827523.0A EP3176809B1 (en) 2014-07-29 2015-07-29 Ultra-compact mass analysis device
EP25164289.8A EP4554336A2 (en) 2014-07-29 2015-07-29 Ultra-compact mass analysis device and ultra-compact particle acceleration device
CN201580052565.7A CN107078020B (zh) 2014-07-29 2015-07-29 超小型质谱分析装置和超小型粒子加速装置
US16/274,773 US10804087B2 (en) 2014-07-29 2019-02-13 Ultra-compact mass analysis device and ultra-compact particle acceleration device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2014154005A JP6624482B2 (ja) 2014-07-29 2014-07-29 超小型加速器および超小型質量分析装置

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2019182184A Division JP7101652B2 (ja) 2019-10-02 2019-10-02 超小型加速器および超小型質量分析装置

Publications (3)

Publication Number Publication Date
JP2016031849A JP2016031849A (ja) 2016-03-07
JP2016031849A5 true JP2016031849A5 (enExample) 2018-07-05
JP6624482B2 JP6624482B2 (ja) 2019-12-25

Family

ID=55217609

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2014154005A Active JP6624482B2 (ja) 2014-07-29 2014-07-29 超小型加速器および超小型質量分析装置

Country Status (5)

Country Link
US (2) US10249483B2 (enExample)
EP (2) EP4554336A2 (enExample)
JP (1) JP6624482B2 (enExample)
CN (1) CN107078020B (enExample)
WO (1) WO2016017712A1 (enExample)

Families Citing this family (36)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6624482B2 (ja) * 2014-07-29 2019-12-25 俊 保坂 超小型加速器および超小型質量分析装置
WO2016079615A1 (en) * 2014-11-19 2016-05-26 Dh Technologies Development Pte. Ltd. Ion sorter
JP6708422B2 (ja) * 2016-02-02 2020-06-10 俊 保坂 超小型加速器および超小型質量分析装置およびイオン注入装置
WO2017192834A1 (en) * 2016-05-04 2017-11-09 Cornell University Wafer-based charged particle accelerator, wafer components, methods, and applications
US10622114B2 (en) * 2017-03-27 2020-04-14 Varian Medical Systems, Inc. Systems and methods for energy modulated radiation therapy
KR102271660B1 (ko) 2017-04-11 2021-07-01 주식회사 아도반테스토 노광 장치
US10824077B2 (en) * 2017-04-11 2020-11-03 Advantest Corporation Exposure device
CN107179384B (zh) * 2017-05-15 2023-04-11 中国科学院近代物理研究所 一种多样靶材解吸率测试装置
US12237162B2 (en) 2017-07-18 2025-02-25 Duke University Small-volume UHV ion-trap package and method of forming
US10755913B2 (en) * 2017-07-18 2020-08-25 Duke University Package comprising an ion-trap and method of fabrication
EP3751275A4 (en) * 2018-02-09 2021-11-10 Hamamatsu Photonics K.K. SAMPLE CARRIERS, IONIZATION METHODS AND MASS SPECTROMETRY METHODS
US11087956B2 (en) * 2018-06-29 2021-08-10 Taiwan Semiconductor Manufacturing Co., Ltd. Detection systems in semiconductor metrology tools
US10889894B2 (en) * 2018-08-06 2021-01-12 Applied Materials, Inc. Faceplate with embedded heater
JP7362048B2 (ja) * 2019-07-31 2023-10-17 大学共同利用機関法人 高エネルギー加速器研究機構 真空排気方法及び装置
JP7352412B2 (ja) * 2019-08-28 2023-09-28 住友重機械工業株式会社 サイクロトロン
JP7322650B2 (ja) * 2019-10-11 2023-08-08 株式会社島津製作所 マルチターン型飛行時間型質量分析装置及びその製造方法
US12266500B2 (en) * 2019-12-13 2025-04-01 Hitachi High-Tech Corporation Charged particle gun and charged particle beam device
US12033843B2 (en) 2020-03-26 2024-07-09 Agilent Technologies, Inc. Mass spectrometry ION source
JP6734610B1 (ja) * 2020-03-31 2020-08-05 株式会社ビードットメディカル 超電導電磁石装置及び荷電粒子ビーム照射装置
CN111683451A (zh) * 2020-06-22 2020-09-18 北京卫星环境工程研究所 用于中高层大气原位探测载荷的微型带电粒子加速装置
US11189460B1 (en) * 2020-11-06 2021-11-30 Applied Materials, Inc. System, apparatus and method for variable length electrode in linear accelerator
CN112704818B (zh) * 2020-12-15 2022-02-11 中国科学院近代物理研究所 一种普惠型的轻离子肿瘤治疗装置
CN112557130B (zh) * 2021-02-28 2021-04-30 中国工程物理研究院核物理与化学研究所 一种气体探测器充入气体的方法
JP7623186B2 (ja) * 2021-03-30 2025-01-28 住友重機械工業株式会社 超伝導電磁石、粒子加速器、及び粒子線治療装置
EP4120289A1 (en) * 2021-07-12 2023-01-18 Infineon Technologies Austria AG Device for controlling trapped ions having a functional spacer and method of manufacturing the same
CN113751219B (zh) * 2021-08-31 2022-08-23 江苏大学 一种磁悬浮高速冲击雾化喷头
KR102611218B1 (ko) * 2021-11-22 2023-12-08 한국전자기술연구원 광이온화 가스 센서
WO2023177745A1 (en) * 2022-03-15 2023-09-21 ColdQuanta, Inc. Compact vacuum packaging technology usable with ion traps
CN115172136B (zh) * 2022-07-12 2024-05-14 广东省麦思科学仪器创新研究院 一种调节离子团初始状态的方法
US12267942B2 (en) * 2022-09-23 2025-04-01 Shine Technologies, Llc Cooling plate assembly for plasma windows positioned in a beam accelerator system
CN115623657B (zh) * 2022-12-13 2023-03-28 安徽戈瑞加速器技术有限公司 电子加速器用快速冷却装置
US20240203723A1 (en) * 2022-12-19 2024-06-20 Infineon Technologies Austria Ag Magnetic Field Coil Integrated into Ion Trap
EP4401090A1 (en) * 2023-01-12 2024-07-17 Infineon Technologies Austria AG Device for controlling trapped ions
EP4404215A1 (en) * 2023-01-23 2024-07-24 Infineon Technologies Austria AG Device for controlling trapped ions with an electrode layer of low surface roughness
JP2025075195A (ja) * 2023-10-31 2025-05-15 株式会社日立ハイテク 円形加速器及び粒子線治療システム
CN120761474B (zh) * 2025-09-09 2025-11-28 中国科学院地质与地球物理研究所 火星样品钻采过程逃逸挥发物质非接触式检测设备及方法

Family Cites Families (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04116351U (ja) * 1991-03-27 1992-10-16 横河電機株式会社 誘導プラズマ質量分析装置
US5386115A (en) 1993-09-22 1995-01-31 Westinghouse Electric Corporation Solid state micro-machined mass spectrograph universal gas detection sensor
US5536939A (en) * 1993-09-22 1996-07-16 Northrop Grumman Corporation Miniaturized mass filter
JP2803563B2 (ja) * 1994-03-30 1998-09-24 日本電気株式会社 微小真空紫外分光装置
GB9506972D0 (en) * 1995-04-04 1995-05-24 Univ Liverpool Improvements in and relating to quadrupole mass
AU2001262982A1 (en) * 2000-05-08 2001-11-20 Mass Sensors, Inc. Microscale mass spectrometric chemical-gas sensor
JP2002015699A (ja) * 2000-06-28 2002-01-18 Shimadzu Corp イオンガイドおよびこれを用いた質量分析装置
JP2003036996A (ja) 2001-07-23 2003-02-07 Kikuchi Jun 平行平板容量結合型微小プラズマ発生装置
US7057170B2 (en) * 2004-03-12 2006-06-06 Northrop Grumman Corporation Compact ion gauge using micromachining and MISOC devices
CN1326191C (zh) 2004-06-04 2007-07-11 复旦大学 用印刷电路板构建的离子阱质量分析仪
JP4635722B2 (ja) * 2005-05-30 2011-02-23 オムロン株式会社 四重極電極ユニット、電極構造物及びその製造方法
US7402799B2 (en) * 2005-10-28 2008-07-22 Northrop Grumman Corporation MEMS mass spectrometer
GB2446184B (en) * 2007-01-31 2011-07-27 Microsaic Systems Ltd High performance micro-fabricated quadrupole lens
EP1959476A1 (de) 2007-02-19 2008-08-20 Technische Universität Hamburg-Harburg Massenspektrometer
GB2454241B (en) * 2007-11-02 2009-12-23 Microsaic Systems Ltd A mounting arrangement
CN102014929A (zh) * 2008-03-13 2011-04-13 珀金埃尔默健康科学有限公司 用于多种检测体系的酶底物
GB0818342D0 (en) 2008-10-07 2008-11-12 Science And Technology Facilities Council Mass discriminator
US20120077260A1 (en) * 2009-03-30 2012-03-29 Fraunhofer Usa, Inc. Reservoir-buffered mixers and remote valve switching for microfluidic devices
JP5406621B2 (ja) * 2009-08-06 2014-02-05 勝 堀 レーザー脱離イオン化質量分析用試料基板、これを用いたレーザー脱離イオン化質量分析方法及び装置
GB2479191B (en) * 2010-04-01 2014-03-19 Microsaic Systems Plc Microengineered multipole ion guide
JP6051359B2 (ja) 2010-12-22 2016-12-27 俊 保坂 コア付きインダクタ素子およびその製造方法
CN102760635B (zh) * 2012-03-31 2015-01-07 清华大学 H型阵列离子阱及在其中进行离子-离子反应的方法
JP6624482B2 (ja) * 2014-07-29 2019-12-25 俊 保坂 超小型加速器および超小型質量分析装置

Similar Documents

Publication Publication Date Title
JP2016031849A5 (enExample)
TWI273625B (en) Ion beam mass separation filter and its mass separation method, and ion source using the same
CN102119584B (zh) 强流直流质子加速器
JP2005339812A (ja) 質量分析装置
WO2010138922A2 (en) Curved ion guide with varying ion deflecting field and related methods
Bollen et al. A study of gas-stopping of intense energetic rare isotope beams
CN107112196B (zh) 电子诱导解离装置及方法
US10192727B2 (en) Electrodynamic mass analysis
WO2017022125A1 (ja) 質量分析装置
CN101669027B (zh) 带电粒子分析装置
JP4371215B2 (ja) 荷電粒子ビーム輸送装置及びこれを備えた線形加速器システム
Wang et al. Mechanism of electron cloud clearing in the accumulator ring of the Spallation Neutron Source
Meissl et al. Electron emission from insulators irradiated by slow highly charged ions
US8168946B2 (en) Charged particle separation apparatus and charged particle bombardment apparatus
JP2008108745A (ja) 中性粒子ビーム処理装置
JP2012142139A (ja) イオンビーム生成方法及びイオンビーム生成装置
CN105103264B (zh) 离子照射装置、离子照射方法
JPWO2018042539A1 (ja) 円形加速器
JP2006286342A (ja) 電磁石及び加速器システム
RU2660146C1 (ru) Электростатический ускоритель сильноточного высокоэнергетического пучка тяжёлых частиц
Ziemann et al. Accelerator Physics and Technology
JPH04196032A (ja) 多量体イオン発生用マイクロ波イオン源、及びこのイオン源を用いたイオンビーム照射装置
WO2025205986A1 (ja) ビーム源
KR20140011416A (ko) 사이클로트론 장치
RU2014132341A (ru) Способ анализа примесей в газовых смесях при их напуске в виде внеосевого сверхзвукового газового потока через источник электронной ионизации и радиочастотных квадропуль с последующим выводом ионов в масс-анализатор