JP6618779B2 - 半導体装置 - Google Patents
半導体装置 Download PDFInfo
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- JP6618779B2 JP6618779B2 JP2015222628A JP2015222628A JP6618779B2 JP 6618779 B2 JP6618779 B2 JP 6618779B2 JP 2015222628 A JP2015222628 A JP 2015222628A JP 2015222628 A JP2015222628 A JP 2015222628A JP 6618779 B2 JP6618779 B2 JP 6618779B2
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- transistor
- film
- oxide semiconductor
- pixel
- semiconductor film
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Description
本実施の形態では、開示する発明の一態様に係る半導体装置の構成および駆動方法について、図1乃至図23を用いて説明する。
本実施の形態で説明する表示装置は、m行n列(m、nともに2以上の整数)のマトリクス状に設けられた複数の画素を有する。また、当該画素は、発光素子および当該発光素子に電流を供給するトランジスタ(以下、駆動用トランジスタともいう)を有する。また、画素が設けられた画素部の外部に駆動用トランジスタの電流特性の情報を読み出すことができる機能を有する回路(以下、読み出し回路ともいう)を有する。電流特性の情報の例としては、所定の電圧が駆動用トランジスタに供給された場合の電流値、または、駆動用トランジスタのしきい値電圧、もしくは、しきい値電圧に応じた電圧、などがあげられる。なお、読み出し回路は、表示装置、表示装置と接続されたFPC(Flexible Printed Circuit)、または、表示モジュールに設けられている場合がある。
次に、開示する発明の一態様に係る半導体装置の具体的な構成の一例について、図3のブロック図および図4の回路図を用いて説明する。図3は、(m×n)個の画素20を有する画素部15と周辺回路のブロック図の一例である。
次に、図3および図4に示す半導体装置の駆動方法の一例について説明する。ここでは特に、i行j列の画素20_(i,j)を含む9つの画素の動作を、図8乃至図14を参照しながら説明する。なお、以下においては、図2のステップS1おいて選択される画素が、同一の配線GL_iおよび同一の配線SL_iと接続された、i行目の画素20である場合について説明する。また、i行目の画素20がすべて黒表示であり、i行j列の画素20_(i,j)から電流特性の情報を読み出す場合について説明する。また、配線IL_i、配線IL_i+1、配線IL_i+2と接続された読み出し回路16を、それぞれ読み出し回路16_i、読み出し回路16_i+1、読み出し回路16_i+2と表す。
次に、読み出し回路16の具体的な構成の一例について図16(A)乃至図16(D)に示す回路図を用いて説明する。
図8乃至図14においては、配線ILがそれぞれ別の読み出し回路16と接続された構成を示したが、複数の配線ILが1つの読み出し回路16と接続されていてもよい。このような構成を有する画素20、読み出し回路16の構成例を図17に示す。
図3等に示す表示装置の駆動方法において、1行目から順番に走査して1行すべてが黒表示の行を選択して電流特性の情報を読み出した。このような駆動方法を用いる場合、駆動回路11から出力された信号を制御する出力制御回路を設けるのが好ましい。出力制御回路の構成の一例について図18(A)および図18(B)を用いて説明する。図18(A)は表示装置の駆動回路11、出力制御回路14および画素部15を示しており、図18(B)は、図18(A)中に示されるラッチ回路43の構成の一例を示している。
〈半導体装置の変形例〉
本実施の形態では、実施の形態1とは異なる態様の半導体装置の構成および駆動方法について、図19および図20を用いて説明する。
〈画素の構成例〉
上記実施の形態で用いることができる画素のレイアウトの例を、図23に示す。なお、図23において、同一のハッチパターンで表す配線、導電層、半導体層などは、同一の材料を用いて同一の工程で形成することができる。また、ここでは画素20の構成例を示すが、画素70にも同様の構成を適用することができる。
〈表示装置の構成例〉
表示装置の構成の一例について説明する。図24に、表示装置80の構成を、ブロック図で示す。なお、ブロック図では、構成要素を機能ごとに分類し、互いに独立したブロックとして示しているが、実際の構成要素は機能ごとに切り分けることが難しく、一つの構成要素が複数の機能に係わることもあり得る。
図25、図30に、表示装置に含まれるトランジスタの一例として、トップゲート構造のトランジスタを示す。
次に、表示装置に含まれるトランジスタの別の構成について、図27を用いて説明する。ここでは、画素部15に設けられたトランジスタ100Aの変形例としてトランジスタ100Cを用いて説明するが、駆動回路部のトランジスタ100Bにトランジスタ100Cの絶縁膜111の構成、又は導電膜114、導電膜116及び導電膜118の構造を適宜適用することができる。
次に、表示装置に含まれるトランジスタの別の構成について図28及び図29を用いて説明する。ここでは、画素部15に設けられたトランジスタ100Aの変形例としてトランジスタ100D及びトランジスタ100Eを用いて説明するが、駆動回路部のトランジスタ100Bに、トランジスタ100Dに含まれる酸化物半導体膜112の構成、又はトランジスタ100Eに含まれる酸化物半導体膜112の構成を適宜適用することができる。
ここで、図28及び図29に示すトランジスタのバンド構造について説明する。なお、図34(A)は、図28に示すトランジスタ100Dのバンド構造であり、理解を容易にするため、絶縁膜111、酸化物半導体膜113a、酸化物半導体膜113b、酸化物半導体膜113c及び絶縁膜117の伝導帯下端のエネルギー(Ec)を示す。また、図34(B)は、図29に示すトランジスタ100Eのバンド構造であり、理解を容易にするため、絶縁膜111、酸化物半導体膜113b、酸化物半導体膜113c及び絶縁膜117の伝導帯下端のエネルギー(Ec)を示す。
次に、表示装置に含まれるトランジスタの別の構成について、図31を用いて説明する。
次に、表示装置に含まれるトランジスタの別の構成について、図32及び図33を用いて説明する。
以下に、酸化物半導体層520を構成する酸化物半導体膜の構造について説明する。なお、本明細書において、結晶が三方晶または菱面体晶である場合、六方晶系として表す。
CAAC−OS膜は、c軸配向した複数の結晶部を有する酸化物半導体膜の一つである。
微結晶酸化物半導体膜は、高分解能TEM像において、結晶部を確認することのできる領域と、明確な結晶部を確認することのできない領域と、を有する。微結晶酸化物半導体膜に含まれる結晶部は、1nm以上100nm以下、または1nm以上10nm以下の大きさであることが多い。特に、1nm以上10nm以下、または1nm以上3nm以下の微結晶であるナノ結晶(nc:nanocrystal)を有する酸化物半導体膜を、nc−OS(nanocrystalline Oxide Semiconductor)膜と呼ぶ。また、nc−OS膜は、例えば、高分解能TEM像では、結晶粒界を明確に確認できない場合がある。
非晶質酸化物半導体膜は、膜中における原子配列が不規則であり、結晶部を有さない酸化物半導体膜である。石英のような無定形状態を有する酸化物半導体膜が一例である。
本明細書等で開示された、金属膜、半導体膜、無機絶縁膜など様々な膜はスパッタ法やプラズマCVD法により形成することができるが、他の方法、例えば、熱CVD(Chemical Vapor Deposition)法により形成してもよい。熱CVD法の例としてMOCVD(Metal Organic Chemical Vapor Deposition)法やALD(Atomic Layer Deposition)法を使っても良い。
本明細書において、特に断りがない場合、オフ電流とは、トランジスタがオフ状態(非導通状態、遮断状態、ともいう)にあるときのドレイン電流をいう。オフ状態とは、特に断りがない場合、nチャネル型トランジスタでは、ゲートとソースの間の電圧Vgsがしきい値電圧Vthよりも低い状態、pチャネル型トランジスタでは、ゲートとソースの間の電圧Vgsがしきい値電圧Vthよりも高い状態をいう。例えば、nチャネル型のトランジスタのオフ電流とは、ゲートとソースの間の電圧Vgsがしきい値電圧Vthよりも低いときのドレイン電流を言う場合がある。
本実施の形態では、表示装置の表示画素の断面図の一例について説明する。図35では、画素20が有する、トランジスタ21、容量素子25、及び発光素子24の、断面構造を例示している。
本実施の形態においては、本発明の一態様の発光素子を有する表示装置、及び該表示装置に入力装置を取り付けた電子機器について、図36乃至図38を用いて説明を行う。
なお、本実施の形態において、電子機器の一例として、表示装置と、入力装置とを合わせたタッチパネル500について説明する。また、入力装置の一例として、タッチセンサを用いる場合について説明する。
次に、図37(A)を用いて、表示装置501の詳細について説明する。図37(A)は、図36(B)に示す一点鎖線X1−X2間の断面図に相当する。
次に、図37(C)を用いて、タッチセンサ595の詳細について説明する。図37(C)は、図36(B)に示す一点鎖線X3−X4間の断面図に相当する。
次に、図38(A)を用いて、タッチパネル500の詳細について説明する。図38(A)は、図36(A)に示す一点鎖線X5−X6間の断面図に相当する。
本実施の形態では、上記の実施の形態で例示した表示装置を用いることができる表示モジュール及び電子機器について説明する。
図39は、表示装置の外観の一例を示す、斜視図である。図39に示す表示装置は、パネル251と、コントローラ、電源回路、画像処理回路、画像メモリ、CPUなどが設けられた回路基板252と、接続部253とを有している。パネル251は、画素が複数設けられた画素部254と、複数の画素を行ごとに選択する駆動回路255と、選択された行内の画素への映像信号の入力を制御する駆動回路256とを有する。
上記の実施の形態で示した表示装置は、表示装置、ノート型パーソナルコンピュータ、記録媒体を備えた画像再生装置(代表的にはDVD:Digital Versatile Disc等の記録媒体を再生し、その画像を表示しうるディスプレイを有する装置)に用いることができる。その他に、上記の実施の形態で示した表示装置を用いることができる電子機器として、携帯電話、携帯型ゲーム機、携帯情報端末、電子書籍端末、ビデオカメラ、デジタルスチルカメラなどのカメラ、ゴーグル型ディスプレイ(ヘッドマウントディスプレイ)、ナビゲーションシステム、音響再生装置(カーオーディオ、デジタルオーディオプレイヤー等)、複写機、ファクシミリ、プリンター、プリンター複合機、現金自動預け入れ払い機(ATM)、自動販売機などが挙げられる。これら電子機器の具体例を図40に示す。
以上の実施の形態、及び実施の形態における各構成の説明について、以下に付記する。
各実施の形態に示す構成は、他の実施の形態に示す構成と適宜組み合わせて、本発明の一態様とすることができる。また、1つの実施の形態の中に、複数の構成例が示される場合は、互い構成例を適宜組み合わせることが可能である。
以下では、上記実施の形態中で言及しなかった語句の定義について説明する。
本明細書等において、スイッチとは、導通状態(オン状態)、または、非導通状態(オフ状態)になり、電流を流すか流さないかを制御する機能を有するものをいう。または、スイッチとは、電流を流す経路を選択して切り替える機能を有するものをいう。
本明細書等において、チャネル長とは、例えば、トランジスタの上面図において、半導体(またはトランジスタがオン状態のときに半導体の中で電流の流れる部分)とゲートとが重なる領域、またはチャネルが形成される領域における、ソースとドレインとの間の距離をいう。
本明細書等において、チャネル幅とは、例えば、半導体(またはトランジスタがオン状態のときに半導体の中で電流の流れる部分)とゲート電極とが重なる領域、またはチャネルが形成される領域における、ソースとドレインとが向かい合っている部分の長さをいう。
本明細書等において、画素とは、例えば、明るさを制御できる要素一つ分を示すものとする。よって、一例としては、一画素とは、一つの色要素を示すものとし、その色要素一つで明るさを表現する。従って、そのときは、R(赤)G(緑)B(青)の色要素からなるカラー表示装置の場合には、画像の最小単位は、Rの画素とGの画素とBの画素との三画素から構成されるものとする。
12 駆動回路
13 回路部
14 出力制御回路
15 画素部
16 回路
17 回路
19a スイッチ
19b スイッチ
20 画素
21 トランジスタ
22 トランジスタ
23 トランジスタ
24 発光素子
25 容量素子
26 スイッチ
30a オペアンプ
30b オペアンプ
30c オペアンプ
31 スイッチ
32 容量素子
33 抵抗素子
41 スイッチ
43 ラッチ回路
44 スイッチ
45 スイッチ
46 スイッチ
47 インバータ
48 インバータ
49 インバータ
70 画素
71 トランジスタ
72 トランジスタ
73 トランジスタ
74 発光素子
75 容量素子
76 スイッチ
80 表示装置
81 補正回路
82 画像処理回路
83 CPU
85 パネル
86 コントローラ
87 画像メモリ
88 メモリ
89 画像データ
100A トランジスタ
100B トランジスタ
100C トランジスタ
100D トランジスタ
100E トランジスタ
100F トランジスタ
100G トランジスタ
101 基板
102 導電膜
103 酸化物半導体膜
104 導電膜
105 導電膜
106 絶縁膜
107 導電膜
111 絶縁膜
111a 窒化物絶縁膜
111b 酸化物絶縁膜
112 酸化物半導体膜
112a 領域
112b 領域
112c 領域
112d 領域
112e オフセット領域
113a 酸化物半導体膜
113b 酸化物半導体膜
113c 酸化物半導体膜
114 導電膜
114a 導電膜
114b 導電膜
114c 導電膜
116 導電膜
116a 導電膜
116b 導電膜
116c 導電膜
117 絶縁膜
117a 絶縁膜
118 導電膜
118a 導電膜
118b 導電膜
120 絶縁膜
121 基板
122 絶縁膜
123 酸化物半導体膜
123a 領域
123b 領域
123c 領域
123d 領域
124 絶縁膜
125 導電膜
126 導電膜
127 導電膜
128 絶縁膜
129 絶縁膜
130a 開口部
130b 開口部
131 基板
132 絶縁膜
133 酸化物半導体膜
133b 領域
133c 領域
133d 領域
133e オフセット領域
134 絶縁膜
134a 絶縁膜
135 導電膜
136 導電膜
137 導電膜
137a 導電膜
138 絶縁膜
139 絶縁膜
140a 開口部
140b 開口部
200 基板
201 導電膜
203 導電膜
204 半導体膜
205 導電膜
206 導電膜
207 半導体膜
209 導電膜
210 導電膜
212 導電膜
213 導電膜
215 絶縁膜
216 絶縁膜
217 絶縁膜
218 絶縁膜
219 絶縁膜
220 絶縁膜
225 絶縁膜
226 絶縁膜
227 EL層
228 導電膜
230 基板
231 遮蔽膜
232 着色層
251 パネル
252 回路基板
253 接続部
254 画素部
255 駆動回路
256 駆動回路
301 筐体
302 表示部
303 支持台
311 筐体
312 表示部
313 操作キー
321 筐体
322 筐体
323 表示部
324 表示部
325 マイクロホン
326 スピーカー
327 操作キー
328 スタイラス
331 筐体
332 表示部
341 筐体
342 表示部
351 筐体
352 表示部
353 カメラ
354 スピーカー
355 ボタン
356 外部接続部
357 マイク
401 導電層
401a 導電層
401b 導電層
402 導電層
403a 導電層
403b 導電層
403c 導電層
404 導電層
405 導電層
406 導電層
407 導電層
411 半導体層
412 半導体層
413 半導体層
500 タッチパネル
501 表示装置
502R 画素
502t トランジスタ
503c 容量素子
503g ゲート線駆動回路
503t トランジスタ
509 FPC
510 基板
510a 絶縁層
510b 可撓性基板
510c 接着層
511 配線
519 端子
520 酸化物半導体層
521 絶縁層
528 隔壁
550R 発光素子
560 封止層
567BM 遮光層
567p 反射防止層
567R 着色層
570 基板
570a 絶縁層
570b 可撓性基板
570c 接着層
580R 発光モジュール
590 基板
591 電極
592 電極
593 絶縁層
594 配線
595 タッチセンサ
597 接着層
598 配線
599 接続層
600 タッチパネル
Claims (4)
- 第1の画素と、第2の画素と、第3の画素とを有し、
前記第1の画素は、第1のトランジスタと、第1の発光素子と、を有し、
前記第2の画素は、第2のトランジスタと、第2の発光素子と、を有し、
前記第3の画素は、第3のトランジスタと、第3の発光素子と、を有し、
前記第1の発光素子は、前記第1のトランジスタと電気的に接続され、
前記第2の発光素子は、前記第2のトランジスタと電気的に接続され、
前記第3の発光素子は、前記第3のトランジスタと電気的に接続され、
前記第1の画素と前記第3の画素は、同一の選択線と電気的に接続され、
前記第1の画素に前記第1のトランジスタの電流特性の情報を読み出すための信号を入力し、前記第3の画素に前記第3の画素を非表示とするための信号を入力する第1の動作を行う機能と、
前記第1の動作の後、前記第1のトランジスタの電流特性の情報の読み出しと、前記第2の画素へのデータ信号の入力と、を行う第2の動作を行う機能と、を有し、
前記第1のトランジスタと前記第3のトランジスタは、同一の配線と電気的に接続され、
前記第1のトランジスタの電流特性の情報の読み出しは、前記配線を介して行われる機能を有する半導体装置。 - 請求項1において、
前記第1のトランジスタの電流特性の情報の読み出しが行われている期間内に、前記第2の画素へのデータ信号の入力が行われる機能を有する半導体装置。 - 請求項1または2において、
前記第1のトランジスタの電流特性の情報の読み出しは、前記第2の動作を行う期間から、次のフレーム期間において前記第1の画素が選択されるまで行われる機能を有する半導体装置。 - 請求項1乃至3のいずれか一項において、
前記第1のトランジスタの電流特性の情報は、前記第1のトランジスタに流れる電流、又は前記第1のトランジスタのしきい値電圧である半導体装置。
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US10170055B2 (en) * | 2014-09-26 | 2019-01-01 | Semiconductor Energy Laboratory Co., Ltd. | Display device and driving method thereof |
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