JP6617450B2 - 圧電駆動装置、モーターおよびロボット - Google Patents
圧電駆動装置、モーターおよびロボット Download PDFInfo
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- JP6617450B2 JP6617450B2 JP2015133550A JP2015133550A JP6617450B2 JP 6617450 B2 JP6617450 B2 JP 6617450B2 JP 2015133550 A JP2015133550 A JP 2015133550A JP 2015133550 A JP2015133550 A JP 2015133550A JP 6617450 B2 JP6617450 B2 JP 6617450B2
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- piezoelectric
- conductor layer
- electrode
- piezoelectric vibrator
- vibrator
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- 239000004065 semiconductor Substances 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- XMVONEAAOPAGAO-UHFFFAOYSA-N sodium tungstate Chemical compound [Na+].[Na+].[O-][W]([O-])(=O)=O XMVONEAAOPAGAO-UHFFFAOYSA-N 0.000 description 1
- 238000003980 solgel method Methods 0.000 description 1
- CZXRMHUWVGPWRM-UHFFFAOYSA-N strontium;barium(2+);oxygen(2-);titanium(4+) Chemical compound [O-2].[O-2].[O-2].[O-2].[Ti+4].[Sr+2].[Ba+2] CZXRMHUWVGPWRM-UHFFFAOYSA-N 0.000 description 1
- 238000011144 upstream manufacturing Methods 0.000 description 1
- 239000011787 zinc oxide Substances 0.000 description 1
Images
Landscapes
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2015133550A JP6617450B2 (ja) | 2015-07-02 | 2015-07-02 | 圧電駆動装置、モーターおよびロボット |
| US15/194,943 US10256749B2 (en) | 2015-07-02 | 2016-06-28 | Piezoelectric actuator, motor, robot, and method of driving piezoelectric actuator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2015133550A JP6617450B2 (ja) | 2015-07-02 | 2015-07-02 | 圧電駆動装置、モーターおよびロボット |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2017017895A JP2017017895A (ja) | 2017-01-19 |
| JP2017017895A5 JP2017017895A5 (enrdf_load_stackoverflow) | 2018-08-02 |
| JP6617450B2 true JP6617450B2 (ja) | 2019-12-11 |
Family
ID=57831242
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2015133550A Active JP6617450B2 (ja) | 2015-07-02 | 2015-07-02 | 圧電駆動装置、モーターおよびロボット |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP6617450B2 (enrdf_load_stackoverflow) |
Family Cites Families (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60148384A (ja) * | 1984-01-10 | 1985-08-05 | Kanto Jidosha Kogyo Kk | 振動波モ−タ |
| JP3334450B2 (ja) * | 1995-10-12 | 2002-10-15 | 松下電器産業株式会社 | 圧電アクチュエータおよびそれを用いた焦電型赤外線センサ |
| JPH09135585A (ja) * | 1995-11-08 | 1997-05-20 | Nikon Corp | 振動アクチュエータ |
| SE0002885D0 (sv) * | 2000-08-11 | 2000-08-11 | Piezomotor Uppsala Ab | Fine walking actuator |
| US7355325B2 (en) * | 2006-06-15 | 2008-04-08 | Piezomotor Uppsala Ab | Wide frequency range electromechanical actuator |
| DE112010006073T5 (de) * | 2010-12-20 | 2013-10-10 | Piezomotor Uppsala Ab | Elektromechanischer Motor |
| DE102011087801B4 (de) * | 2011-02-22 | 2013-04-25 | Physik Instrumente (Pi) Gmbh & Co. Kg | Ultraschallmotor |
| JP2013240172A (ja) * | 2012-05-14 | 2013-11-28 | Seiko Epson Corp | 圧電モーター、ロボットハンド、ロボット、電子部品搬送装置、電子部品検査装置、送液ポンプ、印刷装置、電子時計、投影装置、搬送装置 |
| DE102013107154B4 (de) * | 2013-07-08 | 2020-09-10 | Physik Instrumente (Pi) Gmbh & Co. Kg | Antriebsvorrichtung |
-
2015
- 2015-07-02 JP JP2015133550A patent/JP6617450B2/ja active Active
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| Publication number | Publication date |
|---|---|
| JP2017017895A (ja) | 2017-01-19 |
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