JP2017017895A5 - - Google Patents

Download PDF

Info

Publication number
JP2017017895A5
JP2017017895A5 JP2015133550A JP2015133550A JP2017017895A5 JP 2017017895 A5 JP2017017895 A5 JP 2017017895A5 JP 2015133550 A JP2015133550 A JP 2015133550A JP 2015133550 A JP2015133550 A JP 2015133550A JP 2017017895 A5 JP2017017895 A5 JP 2017017895A5
Authority
JP
Japan
Prior art keywords
piezoelectric
drive device
fixed
piezoelectric drive
driven
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2015133550A
Other languages
English (en)
Japanese (ja)
Other versions
JP6617450B2 (ja
JP2017017895A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2015133550A priority Critical patent/JP6617450B2/ja
Priority claimed from JP2015133550A external-priority patent/JP6617450B2/ja
Priority to US15/194,943 priority patent/US10256749B2/en
Publication of JP2017017895A publication Critical patent/JP2017017895A/ja
Publication of JP2017017895A5 publication Critical patent/JP2017017895A5/ja
Application granted granted Critical
Publication of JP6617450B2 publication Critical patent/JP6617450B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JP2015133550A 2015-07-02 2015-07-02 圧電駆動装置、モーターおよびロボット Active JP6617450B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2015133550A JP6617450B2 (ja) 2015-07-02 2015-07-02 圧電駆動装置、モーターおよびロボット
US15/194,943 US10256749B2 (en) 2015-07-02 2016-06-28 Piezoelectric actuator, motor, robot, and method of driving piezoelectric actuator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2015133550A JP6617450B2 (ja) 2015-07-02 2015-07-02 圧電駆動装置、モーターおよびロボット

Publications (3)

Publication Number Publication Date
JP2017017895A JP2017017895A (ja) 2017-01-19
JP2017017895A5 true JP2017017895A5 (enrdf_load_stackoverflow) 2018-08-02
JP6617450B2 JP6617450B2 (ja) 2019-12-11

Family

ID=57831242

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2015133550A Active JP6617450B2 (ja) 2015-07-02 2015-07-02 圧電駆動装置、モーターおよびロボット

Country Status (1)

Country Link
JP (1) JP6617450B2 (enrdf_load_stackoverflow)

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60148384A (ja) * 1984-01-10 1985-08-05 Kanto Jidosha Kogyo Kk 振動波モ−タ
JP3334450B2 (ja) * 1995-10-12 2002-10-15 松下電器産業株式会社 圧電アクチュエータおよびそれを用いた焦電型赤外線センサ
JPH09135585A (ja) * 1995-11-08 1997-05-20 Nikon Corp 振動アクチュエータ
SE0002885D0 (sv) * 2000-08-11 2000-08-11 Piezomotor Uppsala Ab Fine walking actuator
US7355325B2 (en) * 2006-06-15 2008-04-08 Piezomotor Uppsala Ab Wide frequency range electromechanical actuator
DE112010006073T5 (de) * 2010-12-20 2013-10-10 Piezomotor Uppsala Ab Elektromechanischer Motor
DE102011087801B4 (de) * 2011-02-22 2013-04-25 Physik Instrumente (Pi) Gmbh & Co. Kg Ultraschallmotor
JP2013240172A (ja) * 2012-05-14 2013-11-28 Seiko Epson Corp 圧電モーター、ロボットハンド、ロボット、電子部品搬送装置、電子部品検査装置、送液ポンプ、印刷装置、電子時計、投影装置、搬送装置
DE102013107154B4 (de) * 2013-07-08 2020-09-10 Physik Instrumente (Pi) Gmbh & Co. Kg Antriebsvorrichtung

Similar Documents

Publication Publication Date Title
JP2017017916A5 (enrdf_load_stackoverflow)
WO2018039410A3 (en) Ultrasonic transducer to waveguide joining
JP2016226163A5 (enrdf_load_stackoverflow)
JP2012213271A5 (enrdf_load_stackoverflow)
JP2016040992A5 (enrdf_load_stackoverflow)
JP2018050435A5 (enrdf_load_stackoverflow)
JP2016140060A5 (enrdf_load_stackoverflow)
JP2016092879A5 (enrdf_load_stackoverflow)
JP2012210052A5 (enrdf_load_stackoverflow)
JP2015184124A5 (enrdf_load_stackoverflow)
EP2130505A3 (en) Ultrasonic vibration apparatus
JP2013038878A5 (enrdf_load_stackoverflow)
JP2016226175A5 (enrdf_load_stackoverflow)
JP2012023883A5 (enrdf_load_stackoverflow)
JP2017225291A5 (enrdf_load_stackoverflow)
JP2015043670A5 (enrdf_load_stackoverflow)
JP2016226129A5 (enrdf_load_stackoverflow)
JP2011199661A5 (enrdf_load_stackoverflow)
JP2019221073A5 (enrdf_load_stackoverflow)
JP2016201906A5 (enrdf_load_stackoverflow)
JP2016001156A5 (enrdf_load_stackoverflow)
JP2017022814A5 (enrdf_load_stackoverflow)
JP2017017895A5 (enrdf_load_stackoverflow)
JP2011254587A5 (enrdf_load_stackoverflow)
JP2018074723A5 (enrdf_load_stackoverflow)