JP6602729B2 - 弾性波デバイス - Google Patents

弾性波デバイス Download PDF

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Publication number
JP6602729B2
JP6602729B2 JP2016133682A JP2016133682A JP6602729B2 JP 6602729 B2 JP6602729 B2 JP 6602729B2 JP 2016133682 A JP2016133682 A JP 2016133682A JP 2016133682 A JP2016133682 A JP 2016133682A JP 6602729 B2 JP6602729 B2 JP 6602729B2
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Japan
Prior art keywords
dielectric film
film
reflectors
piezoelectric substrate
pair
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Application number
JP2016133682A
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English (en)
Japanese (ja)
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JP2018007117A5 (enExample
JP2018007117A (ja
Inventor
耕平 伊藤
治 川内
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Taiyo Yuden Co Ltd
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Taiyo Yuden Co Ltd
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Publication date
Application filed by Taiyo Yuden Co Ltd filed Critical Taiyo Yuden Co Ltd
Priority to JP2016133682A priority Critical patent/JP6602729B2/ja
Priority to US15/623,311 priority patent/US10826461B2/en
Publication of JP2018007117A publication Critical patent/JP2018007117A/ja
Publication of JP2018007117A5 publication Critical patent/JP2018007117A5/ja
Application granted granted Critical
Publication of JP6602729B2 publication Critical patent/JP6602729B2/ja
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    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/125—Driving means, e.g. electrodes, coils
    • H03H9/145—Driving means, e.g. electrodes, coils for networks using surface acoustic waves
    • H03H9/14502—Surface acoustic wave [SAW] transducers for a particular purpose
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02535—Details of surface acoustic wave devices
    • H03H9/02543—Characteristics of substrate, e.g. cutting angles
    • H03H9/02559—Characteristics of substrate, e.g. cutting angles of lithium niobate or lithium-tantalate substrates
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02535—Details of surface acoustic wave devices
    • H03H9/02637—Details concerning reflective or coupling arrays
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/25—Constructional features of resonators using surface acoustic waves
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/64—Filters using surface acoustic waves

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  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
JP2016133682A 2016-07-05 2016-07-05 弾性波デバイス Active JP6602729B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2016133682A JP6602729B2 (ja) 2016-07-05 2016-07-05 弾性波デバイス
US15/623,311 US10826461B2 (en) 2016-07-05 2017-06-14 Acoustic wave device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2016133682A JP6602729B2 (ja) 2016-07-05 2016-07-05 弾性波デバイス

Publications (3)

Publication Number Publication Date
JP2018007117A JP2018007117A (ja) 2018-01-11
JP2018007117A5 JP2018007117A5 (enExample) 2018-03-22
JP6602729B2 true JP6602729B2 (ja) 2019-11-06

Family

ID=60911344

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2016133682A Active JP6602729B2 (ja) 2016-07-05 2016-07-05 弾性波デバイス

Country Status (2)

Country Link
US (1) US10826461B2 (enExample)
JP (1) JP6602729B2 (enExample)

Families Citing this family (58)

* Cited by examiner, † Cited by third party
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US11996827B2 (en) 2018-06-15 2024-05-28 Murata Manufacturing Co., Ltd. Transversely-excited film bulk acoustic resonator with periodic etched holes
US11323090B2 (en) 2018-06-15 2022-05-03 Resonant Inc. Transversely-excited film bulk acoustic resonator using Y-X-cut lithium niobate for high power applications
US11936358B2 (en) 2020-11-11 2024-03-19 Murata Manufacturing Co., Ltd. Transversely-excited film bulk acoustic resonator with low thermal impedance
US12040779B2 (en) 2020-04-20 2024-07-16 Murata Manufacturing Co., Ltd. Small transversely-excited film bulk acoustic resonators with enhanced Q-factor
US10601392B2 (en) 2018-06-15 2020-03-24 Resonant Inc. Solidly-mounted transversely-excited film bulk acoustic resonator
US11509279B2 (en) 2020-07-18 2022-11-22 Resonant Inc. Acoustic resonators and filters with reduced temperature coefficient of frequency
US12237826B2 (en) 2018-06-15 2025-02-25 Murata Manufacturing Co., Ltd. Transversely-excited film bulk acoustic resonator with optimized electrode thickness, mark, and pitch
US12088281B2 (en) 2021-02-03 2024-09-10 Murata Manufacturing Co., Ltd. Transversely-excited film bulk acoustic resonator with multi-mark interdigital transducer
US10637438B2 (en) 2018-06-15 2020-04-28 Resonant Inc. Transversely-excited film bulk acoustic resonators for high power applications
US11206009B2 (en) 2019-08-28 2021-12-21 Resonant Inc. Transversely-excited film bulk acoustic resonator with interdigital transducer with varied mark and pitch
US11146232B2 (en) 2018-06-15 2021-10-12 Resonant Inc. Transversely-excited film bulk acoustic resonator with reduced spurious modes
US10911023B2 (en) 2018-06-15 2021-02-02 Resonant Inc. Transversely-excited film bulk acoustic resonator with etch-stop layer
US11929731B2 (en) 2018-02-18 2024-03-12 Murata Manufacturing Co., Ltd. Transversely-excited film bulk acoustic resonator with optimized electrode mark, and pitch
US10790802B2 (en) 2018-06-15 2020-09-29 Resonant Inc. Transversely excited film bulk acoustic resonator using rotated Y-X cut lithium niobate
US11323089B2 (en) 2018-06-15 2022-05-03 Resonant Inc. Filter using piezoelectric film bonded to high resistivity silicon substrate with trap-rich layer
US12119805B2 (en) 2018-06-15 2024-10-15 Murata Manufacturing Co., Ltd. Substrate processing and membrane release of transversely-excited film bulk acoustic resonator using a sacrificial tub
US11374549B2 (en) * 2018-06-15 2022-06-28 Resonant Inc. Filter using transversely-excited film bulk acoustic resonators with divided frequency-setting dielectric layers
US12119808B2 (en) 2018-06-15 2024-10-15 Murata Manufacturing Co., Ltd. Transversely-excited film bulk acoustic resonator package
US12095441B2 (en) 2018-06-15 2024-09-17 Murata Manufacturing Co., Ltd. Transversely excited film bulk acoustic resonator with recessed interdigital transducer fingers
US12040781B2 (en) 2018-06-15 2024-07-16 Murata Manufacturing Co., Ltd. Transversely-excited film bulk acoustic resonator package
US11264966B2 (en) 2018-06-15 2022-03-01 Resonant Inc. Solidly-mounted transversely-excited film bulk acoustic resonator with diamond layers in Bragg reflector stack
US10826462B2 (en) 2018-06-15 2020-11-03 Resonant Inc. Transversely-excited film bulk acoustic resonators with molybdenum conductors
US10992284B2 (en) 2018-06-15 2021-04-27 Resonant Inc. Filter using transversely-excited film bulk acoustic resonators with multiple frequency setting layers
US11323091B2 (en) 2018-06-15 2022-05-03 Resonant Inc. Transversely-excited film bulk acoustic resonator with diaphragm support pedestals
US11876498B2 (en) 2018-06-15 2024-01-16 Murata Manufacturing Co., Ltd. Transversely-excited film bulk acoustic resonator with multiple diaphragm thicknesses and fabrication method
US12237827B2 (en) 2018-06-15 2025-02-25 Murata Manufacturing Co., Ltd. Solidly-mounted transversely-excited film bulk acoustic filters with multiple piezoelectric plate thicknesses
US11967945B2 (en) 2018-06-15 2024-04-23 Murata Manufacturing Co., Ltd. Transversly-excited film bulk acoustic resonators and filters
US10985728B2 (en) 2018-06-15 2021-04-20 Resonant Inc. Transversely-excited film bulk acoustic resonator and filter with a uniform-thickness dielectric overlayer
US11146238B2 (en) 2018-06-15 2021-10-12 Resonant Inc. Film bulk acoustic resonator fabrication method
US10819309B1 (en) 2019-04-05 2020-10-27 Resonant Inc. Transversely-excited film bulk acoustic resonator package and method
US10998882B2 (en) 2018-06-15 2021-05-04 Resonant Inc. XBAR resonators with non-rectangular diaphragms
US11323095B2 (en) 2018-06-15 2022-05-03 Resonant Inc. Rotation in XY plane to suppress spurious modes in XBAR devices
US12184261B2 (en) 2018-06-15 2024-12-31 Murata Manufacturing Co., Ltd. Transversely-excited film bulk acoustic resonator with a cavity having round end zones
US12224732B2 (en) 2018-06-15 2025-02-11 Murata Manufacturing Co., Ltd. Solidly-mounted transversely-excited film bulk acoustic resonators and filters for 27 GHz communications bands
US11888463B2 (en) 2018-06-15 2024-01-30 Murata Manufacturing Co., Ltd. Multi-port filter using transversely-excited film bulk acoustic resonators
US11349450B2 (en) 2018-06-15 2022-05-31 Resonant Inc. Symmetric transversely-excited film bulk acoustic resonators with reduced spurious modes
US12009798B2 (en) 2018-06-15 2024-06-11 Murata Manufacturing Co., Ltd. Transversely-excited film bulk acoustic resonators with electrodes having irregular hexagon cross-sectional shapes
US12301212B2 (en) 2018-06-15 2025-05-13 Murata Manufacturing Co., Ltd. XBAR resonators with non-rectangular diaphragms
US12191837B2 (en) 2018-06-15 2025-01-07 Murata Manufacturing Co., Ltd. Solidly-mounted transversely-excited film bulk acoustic device
US11870423B2 (en) 2018-06-15 2024-01-09 Murata Manufacturing Co., Ltd. Wide bandwidth temperature-compensated transversely-excited film bulk acoustic resonator
US11901878B2 (en) 2018-06-15 2024-02-13 Murata Manufacturing Co., Ltd. Transversely-excited film bulk acoustic resonators with two-layer electrodes with a wider top layer
US11909381B2 (en) 2018-06-15 2024-02-20 Murata Manufacturing Co., Ltd. Transversely-excited film bulk acoustic resonators with two-layer electrodes having a narrower top layer
US12132464B2 (en) 2018-06-15 2024-10-29 Murata Manufacturing Co., Ltd. Filter using transversely-excited film bulk acoustic resonators with divided frequency-setting dielectric layers
US12081187B2 (en) 2018-06-15 2024-09-03 Murata Manufacturing Co., Ltd. Transversely-excited film bulk acoustic resonator
US12149227B2 (en) 2018-06-15 2024-11-19 Murata Manufacturing Co., Ltd. Transversely-excited film bulk acoustic resonator package
US11996822B2 (en) 2018-06-15 2024-05-28 Murata Manufacturing Co., Ltd. Wide bandwidth time division duplex transceiver
US10797675B2 (en) 2018-06-15 2020-10-06 Resonant Inc. Transversely excited film bulk acoustic resonator using rotated z-cut lithium niobate
US12212306B2 (en) 2018-06-15 2025-01-28 Murata Manufacturing Co., Ltd. Transversely-excited film bulk acoustic resonator with multiple diaphragm thicknesses and fabrication method
DE112020001227T5 (de) 2019-03-14 2022-02-10 Resonant Inc. Transversal angeregter akustischer Filmresonator mit Lambda-Halbe-Dielektrikumschicht
US11881837B2 (en) * 2019-11-21 2024-01-23 Skyworks Solutions, Inc. Acoustic wave device with acoustic velocity regions
US12278617B2 (en) 2020-04-20 2025-04-15 Murata Manufacturing Co., Ltd. High Q solidly-mounted transversely-excited film bulk acoustic resonators
US12341493B2 (en) 2020-04-20 2025-06-24 Murata Manufacturing Co., Ltd. Low loss transversely-excited film bulk acoustic resonators and filters
US12255617B2 (en) 2020-11-11 2025-03-18 Murata Manufacturing Co., Ltd. Solidly-mounted transversely-excited film bulk acoustic resonators with low thermal impedance
US12003226B2 (en) 2020-11-11 2024-06-04 Murata Manufacturing Co., Ltd Transversely-excited film bulk acoustic resonator with low thermal impedance
WO2024019142A1 (ja) * 2022-07-21 2024-01-25 京セラ株式会社 弾性波装置、通信装置、および製造方法
WO2024257837A1 (ja) * 2023-06-13 2024-12-19 株式会社村田製作所 弾性波装置及び弾性波フィルタ装置
WO2024257841A1 (ja) * 2023-06-13 2024-12-19 株式会社村田製作所 弾性波装置及び弾性波フィルタ装置
WO2025094971A1 (ja) * 2023-11-01 2025-05-08 株式会社村田製作所 弾性表面波共振子、弾性表面波フィルタ及びマルチプレクサ

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Publication number Priority date Publication date Assignee Title
JPH02295211A (ja) * 1989-05-09 1990-12-06 Fujitsu Ltd エネルギー閉じ込め型弾性表面波素子
JPH04239213A (ja) * 1991-01-11 1992-08-27 Murata Mfg Co Ltd 表面波装置
JPH0832397A (ja) * 1994-07-21 1996-02-02 Oki Electric Ind Co Ltd 弾性表面波装置
JP2001111382A (ja) * 1999-10-04 2001-04-20 Toshiba Corp 弾性表面波装置
JP3969311B2 (ja) 2003-01-20 2007-09-05 株式会社村田製作所 端面反射型弾性表面波装置
JP5422441B2 (ja) * 2010-02-26 2014-02-19 太陽誘電株式会社 弾性波デバイス
JP2012065304A (ja) * 2010-08-16 2012-03-29 Seiko Epson Corp 圧電振動デバイス及びその製造方法、共振周波数の調整方法
JP2012075026A (ja) * 2010-09-29 2012-04-12 Nippon Dempa Kogyo Co Ltd バンドパスフィルタ及び電子部品
JP2015167272A (ja) * 2014-03-03 2015-09-24 日本電波工業株式会社 弾性表面波デバイス

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US20180013400A1 (en) 2018-01-11
JP2018007117A (ja) 2018-01-11
US10826461B2 (en) 2020-11-03

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