JP6594602B2 - ロータ、真空ポンプ、及び、真空ポンプの組立方法 - Google Patents

ロータ、真空ポンプ、及び、真空ポンプの組立方法 Download PDF

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Publication number
JP6594602B2
JP6594602B2 JP2012086499A JP2012086499A JP6594602B2 JP 6594602 B2 JP6594602 B2 JP 6594602B2 JP 2012086499 A JP2012086499 A JP 2012086499A JP 2012086499 A JP2012086499 A JP 2012086499A JP 6594602 B2 JP6594602 B2 JP 6594602B2
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Japan
Prior art keywords
rotor
cylindrical portion
reinforcing ring
ring member
inner diameter
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JP2012086499A
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English (en)
Japanese (ja)
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JP2013217226A (ja
JP2013217226A5 (enrdf_load_stackoverflow
Inventor
好伸 大立
靖 前島
勉 高阿田
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Edwards Japan Ltd
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Edwards Japan Ltd
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Priority to JP2012086499A priority Critical patent/JP6594602B2/ja
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Publication of JP2013217226A5 publication Critical patent/JP2013217226A5/ja
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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/044—Holweck-type pumps

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
JP2012086499A 2012-04-05 2012-04-05 ロータ、真空ポンプ、及び、真空ポンプの組立方法 Active JP6594602B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2012086499A JP6594602B2 (ja) 2012-04-05 2012-04-05 ロータ、真空ポンプ、及び、真空ポンプの組立方法

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Application Number Priority Date Filing Date Title
JP2012086499A JP6594602B2 (ja) 2012-04-05 2012-04-05 ロータ、真空ポンプ、及び、真空ポンプの組立方法

Related Child Applications (1)

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JP2019133928A Division JP6752945B2 (ja) 2019-07-19 2019-07-19 ロータ、真空ポンプ、及び、真空ポンプの組立方法

Publications (3)

Publication Number Publication Date
JP2013217226A JP2013217226A (ja) 2013-10-24
JP2013217226A5 JP2013217226A5 (enrdf_load_stackoverflow) 2015-05-21
JP6594602B2 true JP6594602B2 (ja) 2019-10-23

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JP2012086499A Active JP6594602B2 (ja) 2012-04-05 2012-04-05 ロータ、真空ポンプ、及び、真空ポンプの組立方法

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JP (1) JP6594602B2 (enrdf_load_stackoverflow)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6427963B2 (ja) * 2014-06-03 2018-11-28 株式会社島津製作所 真空ポンプ
JP7108377B2 (ja) * 2017-02-08 2022-07-28 エドワーズ株式会社 真空ポンプ、真空ポンプに備わる回転部、およびアンバランス修正方法
JP7590851B2 (ja) 2020-11-04 2024-11-27 エドワーズ株式会社 真空ポンプ

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0191096U (enrdf_load_stackoverflow) * 1987-12-07 1989-06-15
JP3160039B2 (ja) * 1991-08-22 2001-04-23 エヌティエヌ株式会社 ターボ分子ポンプと動翼の加工方法
DE19915307A1 (de) * 1999-04-03 2000-10-05 Leybold Vakuum Gmbh Reibungsvakuumpumpe mit aus Welle und Rotor bestehender Rotoreinheit
JP4133233B2 (ja) * 2002-11-06 2008-08-13 株式会社島津製作所 ターボ分子ポンプおよびそのロータ
JP5577798B2 (ja) * 2010-04-02 2014-08-27 株式会社島津製作所 ターボ分子ポンプ
KR101823705B1 (ko) * 2010-09-28 2018-01-30 에드워즈 가부시키가이샤 배기 펌프

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JP2013217226A (ja) 2013-10-24

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