JP2013217226A5 - - Google Patents
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- Publication number
- JP2013217226A5 JP2013217226A5 JP2012086499A JP2012086499A JP2013217226A5 JP 2013217226 A5 JP2013217226 A5 JP 2013217226A5 JP 2012086499 A JP2012086499 A JP 2012086499A JP 2012086499 A JP2012086499 A JP 2012086499A JP 2013217226 A5 JP2013217226 A5 JP 2013217226A5
- Authority
- JP
- Japan
- Prior art keywords
- rotor
- inner diameter
- ring member
- reinforcing ring
- vacuum pump
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000003014 reinforcing effect Effects 0.000 claims description 17
- 230000002093 peripheral effect Effects 0.000 claims description 4
- 238000000034 method Methods 0.000 claims description 3
- 239000000835 fiber Substances 0.000 claims description 2
- 230000003247 decreasing effect Effects 0.000 claims 1
- 230000007423 decrease Effects 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2012086499A JP6594602B2 (ja) | 2012-04-05 | 2012-04-05 | ロータ、真空ポンプ、及び、真空ポンプの組立方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2012086499A JP6594602B2 (ja) | 2012-04-05 | 2012-04-05 | ロータ、真空ポンプ、及び、真空ポンプの組立方法 |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2019133928A Division JP6752945B2 (ja) | 2019-07-19 | 2019-07-19 | ロータ、真空ポンプ、及び、真空ポンプの組立方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2013217226A JP2013217226A (ja) | 2013-10-24 |
| JP2013217226A5 true JP2013217226A5 (enrdf_load_stackoverflow) | 2015-05-21 |
| JP6594602B2 JP6594602B2 (ja) | 2019-10-23 |
Family
ID=49589627
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2012086499A Active JP6594602B2 (ja) | 2012-04-05 | 2012-04-05 | ロータ、真空ポンプ、及び、真空ポンプの組立方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP6594602B2 (enrdf_load_stackoverflow) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6427963B2 (ja) * | 2014-06-03 | 2018-11-28 | 株式会社島津製作所 | 真空ポンプ |
| JP7108377B2 (ja) * | 2017-02-08 | 2022-07-28 | エドワーズ株式会社 | 真空ポンプ、真空ポンプに備わる回転部、およびアンバランス修正方法 |
| JP7590851B2 (ja) | 2020-11-04 | 2024-11-27 | エドワーズ株式会社 | 真空ポンプ |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0191096U (enrdf_load_stackoverflow) * | 1987-12-07 | 1989-06-15 | ||
| JP3160039B2 (ja) * | 1991-08-22 | 2001-04-23 | エヌティエヌ株式会社 | ターボ分子ポンプと動翼の加工方法 |
| DE19915307A1 (de) * | 1999-04-03 | 2000-10-05 | Leybold Vakuum Gmbh | Reibungsvakuumpumpe mit aus Welle und Rotor bestehender Rotoreinheit |
| JP4133233B2 (ja) * | 2002-11-06 | 2008-08-13 | 株式会社島津製作所 | ターボ分子ポンプおよびそのロータ |
| JP5577798B2 (ja) * | 2010-04-02 | 2014-08-27 | 株式会社島津製作所 | ターボ分子ポンプ |
| KR101823705B1 (ko) * | 2010-09-28 | 2018-01-30 | 에드워즈 가부시키가이샤 | 배기 펌프 |
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2012
- 2012-04-05 JP JP2012086499A patent/JP6594602B2/ja active Active