JP6544946B2 - 位置検出装置、これを用いた装置及び位置検出方法 - Google Patents

位置検出装置、これを用いた装置及び位置検出方法 Download PDF

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Publication number
JP6544946B2
JP6544946B2 JP2015041004A JP2015041004A JP6544946B2 JP 6544946 B2 JP6544946 B2 JP 6544946B2 JP 2015041004 A JP2015041004 A JP 2015041004A JP 2015041004 A JP2015041004 A JP 2015041004A JP 6544946 B2 JP6544946 B2 JP 6544946B2
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signal
detection
movable member
scale
position signal
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Japanese (ja)
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JP2016161426A5 (enrdf_load_stackoverflow
JP2016161426A (ja
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本田　公文
公文 本田
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Canon Inc
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Canon Inc
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Priority to JP2015041004A priority Critical patent/JP6544946B2/ja
Priority to US15/056,740 priority patent/US10113888B2/en
Priority to CN201610122228.7A priority patent/CN105937917A/zh
Publication of JP2016161426A publication Critical patent/JP2016161426A/ja
Publication of JP2016161426A5 publication Critical patent/JP2016161426A5/ja
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  • Transmission And Conversion Of Sensor Element Output (AREA)
  • Optical Transform (AREA)
JP2015041004A 2015-03-03 2015-03-03 位置検出装置、これを用いた装置及び位置検出方法 Active JP6544946B2 (ja)

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Application Number Priority Date Filing Date Title
JP2015041004A JP6544946B2 (ja) 2015-03-03 2015-03-03 位置検出装置、これを用いた装置及び位置検出方法
US15/056,740 US10113888B2 (en) 2015-03-03 2016-02-29 Position detection apparatus, apparatus including the same and position detection method
CN201610122228.7A CN105937917A (zh) 2015-03-03 2016-03-03 位置检测设备、包括位置检测设备的设备和位置检测方法

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JP2015041004A JP6544946B2 (ja) 2015-03-03 2015-03-03 位置検出装置、これを用いた装置及び位置検出方法

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JP2016161426A JP2016161426A (ja) 2016-09-05
JP2016161426A5 JP2016161426A5 (enrdf_load_stackoverflow) 2018-04-12
JP6544946B2 true JP6544946B2 (ja) 2019-07-17

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Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4991125A (en) * 1989-04-19 1991-02-05 Mitutoyo Corporation Displacement detector
JPH0754260B2 (ja) * 1991-03-07 1995-06-07 株式会社ミツトヨ アブソリュートエンコーダ
JP2012013654A (ja) * 2010-07-05 2012-01-19 Canon Inc アブソリュートエンコーダ及び撮像装置
JP2013156120A (ja) * 2012-01-30 2013-08-15 Canon Inc 位置検出装置およびレンズ鏡筒
JP6032936B2 (ja) * 2012-05-07 2016-11-30 キヤノン株式会社 バーニア方式位置検出エンコーダ用スケール、バーニア方式位置検出エンコーダおよびこれを備えた装置

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