JP6542753B2 - Ｃｖｄ被膜を有する工具 - Google Patents

Ｃｖｄ被膜を有する工具 Download PDF

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Publication number
JP6542753B2
JP6542753B2 JP2016509387A JP2016509387A JP6542753B2 JP 6542753 B2 JP6542753 B2 JP 6542753B2 JP 2016509387 A JP2016509387 A JP 2016509387A JP 2016509387 A JP2016509387 A JP 2016509387A JP 6542753 B2 JP6542753 B2 JP 6542753B2
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layer
precursor gas
range
cvd
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Japanese (ja)
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JP2016522323A5 (enExample
JP2016522323A (ja
Inventor
シュティーンス ディルク
シュティーンス ディルク
ルッピ サカリ
ルッピ サカリ
マンズ トールステン
マンズ トールステン
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バルター アクチェンゲゼルシャフト
バルター アクチェンゲゼルシャフト
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    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/34—Nitrides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
    • C23C16/45502—Flow conditions in reaction chamber
    • C23C16/45508—Radial flow

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Chemical Vapour Deposition (AREA)
  • Cutting Tools, Boring Holders, And Turrets (AREA)
JP2016509387A 2013-04-26 2014-04-16 Ｃｖｄ被膜を有する工具 Active JP6542753B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE102013104254.6 2013-04-26
DE102013104254.6A DE102013104254A1 (de) 2013-04-26 2013-04-26 Werkzeug mit CVD-Beschichtung
PCT/EP2014/057720 WO2014173755A1 (de) 2013-04-26 2014-04-16 Werkzeug mit cvd-beschichtung

Publications (3)

Publication Number Publication Date
JP2016522323A JP2016522323A (ja) 2016-07-28
JP2016522323A5 JP2016522323A5 (enExample) 2018-12-20
JP6542753B2 true JP6542753B2 (ja) 2019-07-10

Family

ID=50543043

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2016509387A Active JP6542753B2 (ja) 2013-04-26 2014-04-16 Ｃｖｄ被膜を有する工具

Country Status (8)

Country Link
US (1) US9976213B2 (enExample)
EP (1) EP2989227B1 (enExample)
JP (1) JP6542753B2 (enExample)
KR (1) KR102257864B1 (enExample)
CN (1) CN105247099B (enExample)
DE (1) DE102013104254A1 (enExample)
ES (1) ES2684410T3 (enExample)
WO (1) WO2014173755A1 (enExample)

Families Citing this family (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102014103220A1 (de) 2014-03-11 2015-09-17 Walter Ag TiAIN-Schichten mit Lamellenstruktur
EP3329031A1 (en) * 2015-07-27 2018-06-06 Walter AG TOOL WITH TiAIN COATING
WO2017167980A1 (en) * 2016-03-31 2017-10-05 Walter Ag Coated cutting tool with h-aln and ti1-xalxcynz layers
JP6044861B1 (ja) * 2016-04-08 2016-12-14 住友電工ハードメタル株式会社 表面被覆切削工具およびその製造方法
JP6045010B1 (ja) * 2016-04-14 2016-12-14 住友電工ハードメタル株式会社 表面被覆切削工具およびその製造方法
JP6973699B2 (ja) * 2016-04-14 2021-12-01 住友電工ハードメタル株式会社 表面被覆切削工具およびその製造方法
ES2714791T3 (es) * 2016-07-01 2019-05-30 Walter Ag Herramienta de corte con capa de alúmina texturizada
KR102377388B1 (ko) * 2016-07-07 2022-03-21 가부시키가이샤 몰디노 하드 코팅, 하드 코팅된 공구 및 이들의 제조 방법들
KR102232128B1 (ko) * 2017-02-28 2021-03-24 스미또모 덴꼬오 하드메탈 가부시끼가이샤 표면 피복 절삭 공구 및 그 제조 방법
KR102064172B1 (ko) * 2017-09-01 2020-01-09 한국야금 주식회사 내마모성과 인성이 우수한 경질피막
CN109975339B (zh) * 2017-12-28 2023-08-15 厦门钨业股份有限公司 一种TiCN基金属陶瓷性能的评估方法
JP7520286B2 (ja) * 2018-12-27 2024-07-23 三菱マテリアル株式会社 表面被覆切削工具
US12162079B2 (en) 2018-12-27 2024-12-10 Mitsubishi Materials Corporation Surface-coated cutting tool
JP2021146478A (ja) * 2020-03-23 2021-09-27 三菱マテリアル株式会社 耐欠損性にすぐれた表面被覆切削工具
JP7525669B2 (ja) * 2021-02-12 2024-07-30 株式会社Moldino 被覆工具
CN114517283A (zh) * 2022-01-24 2022-05-20 赣州澳克泰工具技术有限公司 沉积在基体表面的多层涂层系统及其制备方法
US12109628B2 (en) 2022-08-10 2024-10-08 Iscar, Ltd. Cutting tool with a TiAlN coating having rake and relief surfaces with different residual stresses
EP4610393A1 (de) * 2024-02-28 2025-09-03 BOEHLERIT GmbH & Co.KG. Verfahren zum beschichten eines objektes und damit hergestelltes objekt
AT528040A1 (de) * 2024-02-28 2025-09-15 Boehlerit Gmbh & Co Kg Beschichtetes Objekt und Verfahren zu dessen Herstellung

Family Cites Families (28)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5879823A (en) * 1995-12-12 1999-03-09 Kennametal Inc. Coated cutting tool
FR2745299B1 (fr) * 1996-02-27 1998-06-19 Centre Nat Rech Scient Procede de formation de revetements de ti1-xalxn
CN1187469C (zh) * 1997-09-12 2005-02-02 巴尔策斯有限公司 带有保护层系的刀具及其制造方法
JP3031907B2 (ja) * 1998-03-16 2000-04-10 日立ツール株式会社 多層膜被覆部材
SE521284C2 (sv) * 1999-05-19 2003-10-21 Sandvik Ab Aluminiumoxidbelagt skärverktyg för metallbearbetning
US6572991B1 (en) 2000-02-04 2003-06-03 Seco Tools Ab Deposition of γ-Al2O3 by means of CVD
JP2001341008A (ja) * 2000-06-02 2001-12-11 Hitachi Tool Engineering Ltd 窒化チタンアルミニウム膜被覆工具及びその製造方法
EP1219723B1 (en) 2000-12-28 2006-10-25 Kabushiki Kaisha Kobe Seiko Sho Hard film for cutting tools
WO2004015170A1 (ja) * 2002-08-08 2004-02-19 Kabushiki Kaisha Kobe Seiko Sho α型結晶構造主体のアルミナ皮膜の製造方法、α型結晶構造主体のアルミナ皮膜と該アルミナ皮膜を含む積層皮膜、該アルミナ皮膜または該積層皮膜で被覆された部材とその製造方法、および物理的蒸着装置
SE526526C3 (sv) 2003-04-01 2005-10-26 Sandvik Intellectual Property Sätt att belägga skär med A1203 samt ett med A1203 belagt skärverktyg
SE529223C2 (sv) * 2005-05-06 2007-06-05 Seco Tools Ab Belagt skärverktyg innefattande hexagonal h-(Mel,Me2)Xfas
DE102005032860B4 (de) 2005-07-04 2007-08-09 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Hartstoffbeschichtete Körper und Verfahren zu deren Herstellung
US7837416B2 (en) * 2005-07-29 2010-11-23 Sumitomo Electric Hardmetal Corp. Indexable cutting insert and method for producing the same
JP2007168032A (ja) * 2005-12-22 2007-07-05 Mitsubishi Materials Corp 高速重切削条件で硬質被覆層がすぐれた耐摩耗性および耐チッピング性を発揮する表面被覆切削工具
US8080312B2 (en) * 2006-06-22 2011-12-20 Kennametal Inc. CVD coating scheme including alumina and/or titanium-containing materials and method of making the same
SE530756C2 (sv) 2006-09-15 2008-09-02 Sandvik Intellectual Property Sätt att tillverka ett belagt skärverktyg av hårdmetall, ett belagt skär och ett belagt roterande skärverktyg
SE531946C2 (sv) 2007-08-24 2009-09-15 Seco Tools Ab Skär för fräsning i gjutjärn
SE531971C2 (sv) 2007-08-24 2009-09-15 Seco Tools Ab Belagt skärverktyg för allmän svarvning i varmhållfast superlegeringar (HRSA)
DE102007000512B3 (de) 2007-10-16 2009-01-29 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Hartstoffbeschichtete Körper und Verfahren zu deren Herstellung
DE102008013966A1 (de) 2008-03-12 2009-09-17 Kennametal Inc. Hartstoffbeschichteter Körper
DE102008013964A1 (de) 2008-03-12 2009-09-17 Kennametal Inc. Hartstoffbeschichteter Körper
DE102008013965A1 (de) 2008-03-12 2009-09-17 Kennametal Inc. Hartstoffbeschichteter Körper
DE102008019202A1 (de) 2008-04-17 2009-10-22 Kennametal Inc. Beschichtungsverfahren , Werkstück oder Werkzeug und dessen Verwendung
DE102009046667B4 (de) * 2009-11-12 2016-01-28 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Beschichtete Körper aus Metall, Hartmetal, Cermet oder Keramik sowie Verfahren zur Beschichtung derartiger Körper
BR112013012688A2 (pt) 2010-11-23 2016-09-06 Seco Tools Ab pastilha de ferramenta de corte revestida
AT510963B1 (de) 2011-03-18 2012-08-15 Boehlerit Gmbh & Co Kg Beschichteter körper und verfahren zu dessen herstellung
US8440328B2 (en) * 2011-03-18 2013-05-14 Kennametal Inc. Coating for improved wear resistance
EP2570511B2 (en) * 2011-09-16 2025-08-06 Walter AG Grain boundary engineered alpha-alumina coated cutting tool

Also Published As

Publication number Publication date
WO2014173755A1 (de) 2014-10-30
US20160053372A1 (en) 2016-02-25
KR20160002867A (ko) 2016-01-08
KR102257864B1 (ko) 2021-05-28
CN105247099B (zh) 2019-01-11
EP2989227B1 (de) 2018-06-27
DE102013104254A1 (de) 2014-10-30
ES2684410T3 (es) 2018-10-02
CN105247099A (zh) 2016-01-13
JP2016522323A (ja) 2016-07-28
US9976213B2 (en) 2018-05-22
EP2989227A1 (de) 2016-03-02

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