JP6524809B2 - 半導体装置 - Google Patents
半導体装置 Download PDFInfo
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- JP6524809B2 JP6524809B2 JP2015117264A JP2015117264A JP6524809B2 JP 6524809 B2 JP6524809 B2 JP 6524809B2 JP 2015117264 A JP2015117264 A JP 2015117264A JP 2015117264 A JP2015117264 A JP 2015117264A JP 6524809 B2 JP6524809 B2 JP 6524809B2
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- 239000004065 semiconductor Substances 0.000 title claims description 157
- 239000000758 substrate Substances 0.000 claims description 51
- 238000001816 cooling Methods 0.000 claims description 32
- 239000000463 material Substances 0.000 claims description 28
- 229910052751 metal Inorganic materials 0.000 claims description 17
- 239000002184 metal Substances 0.000 claims description 17
- 230000002093 peripheral effect Effects 0.000 claims description 16
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 10
- 229910052710 silicon Inorganic materials 0.000 description 10
- 239000010703 silicon Substances 0.000 description 10
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 9
- 230000017525 heat dissipation Effects 0.000 description 8
- 229910010271 silicon carbide Inorganic materials 0.000 description 7
- 229910000679 solder Inorganic materials 0.000 description 5
- 230000007423 decrease Effects 0.000 description 4
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 3
- 229910052802 copper Inorganic materials 0.000 description 3
- 239000010949 copper Substances 0.000 description 3
- 238000010030 laminating Methods 0.000 description 3
- 230000008646 thermal stress Effects 0.000 description 3
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 1
- PIGFYZPCRLYGLF-UHFFFAOYSA-N Aluminum nitride Chemical compound [Al]#N PIGFYZPCRLYGLF-UHFFFAOYSA-N 0.000 description 1
- JMASRVWKEDWRBT-UHFFFAOYSA-N Gallium nitride Chemical compound [Ga]#N JMASRVWKEDWRBT-UHFFFAOYSA-N 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- 230000004888 barrier function Effects 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 238000005336 cracking Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000005669 field effect Effects 0.000 description 1
- 230000012447 hatching Effects 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 230000001172 regenerating effect Effects 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/562—Protection against mechanical damage
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
- H01L23/36—Selection of materials, or shaping, to facilitate cooling or heating, e.g. heatsinks
- H01L23/367—Cooling facilitated by shape of device
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
- H01L23/36—Selection of materials, or shaping, to facilitate cooling or heating, e.g. heatsinks
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
- H01L23/36—Selection of materials, or shaping, to facilitate cooling or heating, e.g. heatsinks
- H01L23/373—Cooling facilitated by selection of materials for the device or materials for thermal expansion adaptation, e.g. carbon
- H01L23/3735—Laminates or multilayers, e.g. direct bond copper ceramic substrates
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L25/00—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof
- H01L25/03—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes
- H01L25/04—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers
- H01L25/07—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers the devices being of a type provided for in group H01L29/00
- H01L25/072—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers the devices being of a type provided for in group H01L29/00 the devices being arranged next to each other
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/12—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
- H01L29/16—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed including, apart from doping materials or other impurities, only elements of Group IV of the Periodic Table
- H01L29/1608—Silicon carbide
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/86—Types of semiconductor device ; Multistep manufacturing processes therefor controllable only by variation of the electric current supplied, or only the electric potential applied, to one or more of the electrodes carrying the current to be rectified, amplified, oscillated or switched
- H01L29/861—Diodes
- H01L29/872—Schottky diodes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
- H01L2224/31—Structure, shape, material or disposition of the layer connectors after the connecting process
- H01L2224/32—Structure, shape, material or disposition of the layer connectors after the connecting process of an individual layer connector
- H01L2224/321—Disposition
- H01L2224/32151—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/32221—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/32225—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
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- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Chemical & Material Sciences (AREA)
- Materials Engineering (AREA)
- Ceramic Engineering (AREA)
- Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)
- Geometry (AREA)
Description
[第1の実施の形態]
図1は、第1の実施の形態の半導体装置を説明するための図である。
半導体装置1は、図1(A),(B)に示されるように、冷却板2と、積層基板6と、1以上(図1では4個)の第1半導体素子7とを有する。
ヒートサイクルが繰り返し行われた後の、半導体装置1の接合材3aに対する超音波探傷装置による観察結果を図1(C)に示す。超音波探傷装置は、被検査対象物に超音波を当て、当該被検査対象物から反射された超音波を検出して、被検査対象物内の空間の有無を調べることができるものである。なお、図1(C)では、積層基板6の金属板5aの配置位置を破線(矩形)で示しており、接合材3aにはハッチングを付して示している。
第2の実施の形態では、積層基板にワイドバンドギャップ半導体により構成される第1の半導体素子と共に、シリコン半導体により構成される第2半導体素子が配置される場合について図2を用いて説明する。
図2(A)は、半導体装置10の側面図、図2(B)は、半導体装置10の上面図をそれぞれ表している。
なお、第1半導体素子16の面積は、第2半導体素子17の面積よりも小さい。このため、第1半導体素子16は、第2半導体素子17よりも多く配置することができる。
第3の実施の形態では、第2の実施の形態の半導体装置10において、第1半導体素子16が冷却板11の外側に位置するように、積層基板15A,15Bを配置させた。この場合について、図3を用いて説明する。
半導体装置10は、第2の実施の形態と同様に、冷却板11と、2つの積層基板15A,15Bと、複数の第1半導体素子16と、複数の第2半導体素子17とを有する。
第4の実施の形態では、積層基板にワイドバンドギャップ半導体により構成される第1半導体素子と、さらに、ワイドバンドギャップ半導体により構成される第3半導体素子とが配置される場合について、図4を用いて説明する。
図4(A)は、半導体装置10aの側面図、図4(B)は、半導体装置10aの上面図をそれぞれ表している。
第1半導体素子16は、既述の通り、炭化シリコンにより構成された、SBD等のダイオード素子である。第1半導体素子16は、積層基板15A,15Bの回路板14b(図では第1回路板14b1及び第3回路板14b3)に配置され、導電性の接合材12bにより接合されている。
なお、第1半導体素子16と第3半導体素子18との面積は、ほぼ同一であり、回路板14bに対して同数の第1半導体素子16と第3半導体素子18とが配置されている。
2 冷却板
3a,3b 接合材
4 絶縁板
5a 金属板
5b 回路板
6 積層基板
7 第1半導体素子
Claims (4)
- 金属で構成された冷却板と、
回路板と、絶縁板と、金属板とが積層して構成され、前記金属板と前記冷却板とが接合材により接合された1以上の積層基板と、
ワイドバンドギャップ半導体により構成され、前記回路板の外周端部に設けられた1以上の第1半導体素子と、
前記ワイドバンドギャップ半導体よりもバンドギャップが小さい半導体により構成され、前記回路板の中央部に設けられた1以上の第2半導体素子と、
を有する半導体装置。 - 前記第1半導体素子は、前記回路板の角部に設けられている、
請求項1記載の半導体装置。 - 前記冷却板に複数の前記積層基板が接合され、
複数の前記積層基板のそれぞれの前記回路板の外周端部に、複数の前記第1半導体素子がそれぞれ設けられている、
請求項1または2に記載の半導体装置。 - 前記接合材が導電性接合材で構成されている、
請求項1乃至3のいずれか1項に記載の半導体装置。
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
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JP2015117264A JP6524809B2 (ja) | 2015-06-10 | 2015-06-10 | 半導体装置 |
US15/149,581 US9704814B2 (en) | 2015-06-10 | 2016-05-09 | Semiconductor device |
CN201610301483.8A CN106252307B (zh) | 2015-06-10 | 2016-05-09 | 半导体装置 |
DE102016208032.6A DE102016208032A1 (de) | 2015-06-10 | 2016-05-10 | Halbleitervorrichtung |
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JP2015117264A JP6524809B2 (ja) | 2015-06-10 | 2015-06-10 | 半導体装置 |
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JP2017005098A JP2017005098A (ja) | 2017-01-05 |
JP6524809B2 true JP6524809B2 (ja) | 2019-06-05 |
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US (1) | US9704814B2 (ja) |
JP (1) | JP6524809B2 (ja) |
CN (1) | CN106252307B (ja) |
DE (1) | DE102016208032A1 (ja) |
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CN113707643A (zh) * | 2021-08-30 | 2021-11-26 | 中国振华集团永光电子有限公司(国营第八七三厂) | 一种高集成高可靠igbt功率模块及其制造方法 |
US20230084411A1 (en) * | 2021-09-14 | 2023-03-16 | Analog Power Conversion LLC | Schottky diode integrated with a semiconductor device |
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JP2859013B2 (ja) | 1991-11-26 | 1999-02-17 | 信越化学工業株式会社 | セメントモルタル組成物 |
JPH07114982A (ja) * | 1993-10-15 | 1995-05-02 | Matsushita Electric Ind Co Ltd | パワーic及びインバータ |
US20090229864A1 (en) * | 2005-09-15 | 2009-09-17 | Mitsubishi Materials Corporation | Insulating circuit board and insulating circuit board having cooling sink |
JP2007081200A (ja) * | 2005-09-15 | 2007-03-29 | Mitsubishi Materials Corp | 冷却シンク部付き絶縁回路基板 |
JP2010010434A (ja) * | 2008-06-27 | 2010-01-14 | Sumitomo Electric Ind Ltd | 半導体装置および半導体モジュール |
CN202721890U (zh) * | 2009-02-13 | 2013-02-06 | 许廷格电子两合公司 | 用于等离子体供给装置的模块和等离子体供给装置 |
CN109166833B (zh) | 2010-01-15 | 2022-04-08 | 三菱电机株式会社 | 电力用半导体模块 |
US8759209B2 (en) * | 2010-03-25 | 2014-06-24 | Stats Chippac, Ltd. | Semiconductor device and method of forming a dual UBM structure for lead free bump connections |
US9299628B2 (en) | 2011-07-11 | 2016-03-29 | Mitsubishi Electric Corporation | Power semiconductor module |
JP5863602B2 (ja) * | 2011-08-31 | 2016-02-16 | 三菱電機株式会社 | 電力用半導体装置 |
JP2013069782A (ja) * | 2011-09-21 | 2013-04-18 | Toshiba Corp | 半導体装置 |
US9147637B2 (en) * | 2011-12-23 | 2015-09-29 | Infineon Technologies Ag | Module including a discrete device mounted on a DCB substrate |
DE112012006692B4 (de) * | 2012-07-11 | 2023-04-20 | Mitsubishi Electric Corporation | Verfahren zum Herstellen einer Halbleitervorrichtung |
EP2892074B1 (en) * | 2012-08-31 | 2018-01-03 | Mitsubishi Materials Corporation | Power module substrate and power module |
KR102208961B1 (ko) * | 2013-10-29 | 2021-01-28 | 삼성전자주식회사 | 반도체소자 패키지 및 그 제조방법 |
CN105531818B (zh) * | 2014-03-11 | 2019-07-05 | 富士电机株式会社 | 半导体装置的制造方法以及半导体装置 |
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2016
- 2016-05-09 US US15/149,581 patent/US9704814B2/en active Active
- 2016-05-09 CN CN201610301483.8A patent/CN106252307B/zh active Active
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US20160365320A1 (en) | 2016-12-15 |
JP2017005098A (ja) | 2017-01-05 |
CN106252307A (zh) | 2016-12-21 |
DE102016208032A1 (de) | 2016-12-29 |
US9704814B2 (en) | 2017-07-11 |
CN106252307B (zh) | 2021-10-22 |
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